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Martens; Arjan Hubrecht Josef Anna Patent Filings

Martens; Arjan Hubrecht Josef Anna

Patent Applications and Registrations

Patent applications and USPTO patent grants for Martens; Arjan Hubrecht Josef Anna.The latest application filed is for "pump system, a carbon dioxide supply system, an extraction system, a lithographic apparatus and a device manufacturing method".

Company Profile
1.11.10
  • Martens; Arjan Hubrecht Josef Anna - Valkenburg N/A NL
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Pump system, a carbon dioxide supply system, an extraction system, a lithographic apparatus and a device manufacturing method
Grant 9,575,406 - Van Der Gaag , et al. February 21, 2
2017-02-21
Lithographic apparatus and device manufacturing method
Grant 8,988,657 - Van Boxtel , et al. March 24, 2
2015-03-24
Lithographic apparatus and a method of operating the apparatus
Grant 8,564,757 - Jansen , et al. October 22, 2
2013-10-22
Lithographic apparatus and device manufacturing method
Grant 8,508,711 - Martens , et al. August 13, 2
2013-08-13
Pump System, A Carbon Dioxide Supply System, An Extraction System, A Lithographic Apparatus And A Device Manufacturing Method
App 20130155380 - Van Der Gaag; Marc Leon ;   et al.
2013-06-20
Lithographic apparatus and a method of operating the apparatus
Grant 8,432,531 - Hoekerd , et al. April 30, 2
2013-04-30
Cleaning Substrate For A Lithography Apparatus, A Cleaning Method For A Lithography Apparatus And A Lithography Apparatus
App 20130077065 - LAFARRE; Raymond Wilhelmus Louis ;   et al.
2013-03-28
Lithographic Apparatus And Device Manufacturing Method
App 20130010270 - VAN BOXTEL; Frank Johannes Jacobus ;   et al.
2013-01-10
Lithographic apparatus and device manufacturing method
Grant 8,319,157 - Martens , et al. November 27, 2
2012-11-27
Lithographic Apparatus And A Method Of Operating The Apparatus
App 20110080567 - HOEKERD; Kornelis Tijmen ;   et al.
2011-04-07
Lithographic Apparatus And Device Manufacturing Method
App 20110017724 - Martens; Arjan Hubrecht Josef Anna ;   et al.
2011-01-27
Lithographic Apparatus And A Method Of Operating The Apparatus
App 20100328634 - Jansen; Bauke ;   et al.
2010-12-30
Fluid Supply System, A Lithographic Apparatus, A Method Of Varying Fluid Flow Rate And A Device Manufacturing Method
App 20100208221 - Kramer; Pieter Jacob ;   et al.
2010-08-19
Lithographic Apparatus And Device Manufacturing Method
App 20100045951 - MARTENS; Arjan Hubrecht Josef Anna ;   et al.
2010-02-25

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