| Patent | Date |
|---|
Devices And Methods For Synthesis
App 20220064206 - FERNANDEZ; Andres ; et al. | 2022-03-03 |
Functionalized Surfaces And Preparation Thereof
App 20210170356 - PECK; Bill James ; et al. | 2021-06-10 |
Heated Nanowells For Polynucleotide Synthesis
App 20210129108 - Marsh; Eugene P. ; et al. | 2021-05-06 |
Functionalized surfaces and preparation thereof
Grant 10,987,648 - Peck , et al. April 27, 2 | 2021-04-27 |
Heated nanowells for polynucleotide synthesis
Grant 10,894,242 - Marsh , et al. January 19, 2 | 2021-01-19 |
Devices And Methods For Oligonucleic Acid Library Synthesis
App 20200330953 - BANYAI; William ; et al. | 2020-10-22 |
Methods And Devices For De Novo Oligonucleic Acid Assembly
App 20200299322 - Indermuhle; Pierre F. ; et al. | 2020-09-24 |
Devices and methods for oligonucleic acid library synthesis
Grant 10,744,477 - Banyai , et al. A | 2020-08-18 |
Methods of forming and using materials containing silicon and nitrogen
Grant 10,700,271 - Marsh | 2020-06-30 |
Methods and devices for de novo oligonucleic acid assembly
Grant 10,669,304 - Indermuhle , et al. | 2020-06-02 |
Memory cells, semiconductor devices including the memory cells, and methods of operation
Grant 10,651,375 - Quick , et al. | 2020-05-12 |
Methods Of Forming A Memory Cell Comprising A Metal Chalcogenide Material
App 20190319187 - Marsh; Eugene P. ; et al. | 2019-10-17 |
Functionalized surfaces and preparation thereof
Grant 10,384,189 - Peck , et al. A | 2019-08-20 |
Functionalized Surfaces And Preparation Thereof
App 20190240636 - PECK; Bill James ; et al. | 2019-08-08 |
Memory cells including a metal chalcogenide material and related methods
Grant 10,374,156 - Marsh , et al. | 2019-08-06 |
Memory cells, semiconductor devices including the memory cells, and methods of operation
Grant 10,283,705 - Quick , et al. | 2019-05-07 |
Heated Nanowells For Polynucleotide Synthesis
App 20190118154 - MARSH; Eugene P. ; et al. | 2019-04-25 |
Memory Cells, Semiconductor Devices Including The Memory Cells, And Methods Of Operation
App 20190051823 - Quick; Timothy A. ; et al. | 2019-02-14 |
Resistive memory having confined filament formation
Grant 10,153,431 - Marsh , et al. Dec | 2018-12-11 |
Methods of Forming and Using Materials Containing Silicon and Nitrogen
App 20180254413 - Marsh; Eugene P. | 2018-09-06 |
Devices And Methods For Oligonucleic Acid Library Synthesis
App 20180236425 - BANYAI; William ; et al. | 2018-08-23 |
Memory Cells, Semiconductor Devices Including The Memory Cells, And Methods Of Operation
App 20180198063 - Quick; Timothy A. ; et al. | 2018-07-12 |
Devices and methods for oligonucleic acid library synthesis
Grant 9,981,239 - Banyai , et al. May 29, 2 | 2018-05-29 |
Methods of forming and using materials containing silicon and nitrogen
Grant 9,978,937 - Marsh May 22, 2 | 2018-05-22 |
Functionalized Surfaces And Preparation Thereof
App 20180126355 - PECK; Bill James ; et al. | 2018-05-10 |
Textured Surfaces For Polynucleotide Synthesis
App 20180104664 - FERNANDEZ; Andres ; et al. | 2018-04-19 |
Memory cells and methods of fabrication
Grant 9,935,264 - Quick , et al. April 3, 2 | 2018-04-03 |
Functionalized surfaces and preparation thereof
Grant 9,895,673 - Peck , et al. February 20, 2 | 2018-02-20 |
Resistive Memory Having Confined Filament Formation
App 20170324034 - Marsh; Eugene P. ; et al. | 2017-11-09 |
Resistive memory having confined filament formation
Grant 9,722,178 - Marsh , et al. August 1, 2 | 2017-08-01 |
Functionalized Surfaces And Preparation Thereof
App 20170151546 - PECK; Bill James ; et al. | 2017-06-01 |
Horizontally oriented and vertically stacked memory cells
Grant 9,627,442 - Quick , et al. April 18, 2 | 2017-04-18 |
Memory Cells Including A Metal Chalcogenide Material And Related Methods
App 20170040533 - Marsh; Eugene P. ; et al. | 2017-02-09 |
Conductive nanoparticles
Grant 9,496,355 - Kraus , et al. November 15, 2 | 2016-11-15 |
Methods of forming a metal chalcogenide material and related methods of forming a memory cell
Grant 9,496,491 - Marsh , et al. November 15, 2 | 2016-11-15 |
Resistive Memory Having Confined Filament Formation
App 20160322564 - Marsh; Eugene P. ; et al. | 2016-11-03 |
Devices And Methods For Oligonucleic Acid Library Synthesis
App 20160310927 - BANYAI; William ; et al. | 2016-10-27 |
Methods of Forming and Using Materials Containing Silicon and Nitrogen
App 20160254447 - Marsh; Eugene P. | 2016-09-01 |
Horizontally Oriented And Vertically Stacked Memory Cells
App 20160240587 - Quick; Timothy A. ; et al. | 2016-08-18 |
Methods And Devices For De Novo Oligonucleic Acid Assembly
App 20160229884 - Indermuhle; Pierre F. ; et al. | 2016-08-11 |
Resistive memory having confined filament formation
Grant 9,406,880 - Marsh , et al. August 2, 2 | 2016-08-02 |
Methods of forming and using materials containing silicon and nitrogen
Grant 9,355,837 - Marsh May 31, 2 | 2016-05-31 |
Horizontally oriented and vertically stacked memory cells
Grant 9,349,949 - Quick , et al. May 24, 2 | 2016-05-24 |
Methods of Forming and Using Materials Containing Silicon and Nitrogen
App 20160093484 - Marsh; Eugene P. | 2016-03-31 |
Resistance variable memory cell structures and methods
Grant 9,287,502 - Marsh , et al. March 15, 2 | 2016-03-15 |
Methods of depositing phase change materials and methods of forming memory
Grant 9,269,900 - Marsh , et al. February 23, 2 | 2016-02-23 |
Porous organosilicate layers, and vapor deposition systems and methods for preparing same
Grant 9,234,279 - Marsh January 12, 2 | 2016-01-12 |
Conductive Nanoparticles
App 20150318369 - Kraus; Brenda D. ; et al. | 2015-11-05 |
Multilevel mixed valence oxide (MVO) memory
Grant 9,105,843 - Sandhu , et al. August 11, 2 | 2015-08-11 |
Horizontally Oriented And Vertically Stacked Memory Cells
App 20150221866 - Quick; Timothy A. ; et al. | 2015-08-06 |
Memory Cells And Methods Of Fabrication
App 20150214477 - Quick; Timothy A. ; et al. | 2015-07-30 |
Methods of forming germanium-antimony-tellurium materials and chalcogenide materials
Grant 9,065,048 - Marsh June 23, 2 | 2015-06-23 |
Methods Of Selectively Forming A Material Using A Parylene Coating And Related Semiconductor Structures
App 20150137333 - Marsh; Eugene P. | 2015-05-21 |
Methods of forming a metal telluride material, related methods of forming a semiconductor device structure, and related semiconductor device structures
Grant 9,029,856 - Quick , et al. May 12, 2 | 2015-05-12 |
Methods for forming a conductive material and methods for forming a conductive structure
Grant 9,023,711 - Marsh May 5, 2 | 2015-05-05 |
Horizontally oriented and vertically stacked memory cells
Grant 9,024,283 - Quick , et al. May 5, 2 | 2015-05-05 |
Memory cells, semiconductor devices including such cells, and methods of fabrication
Grant 9,006,075 - Quick , et al. April 14, 2 | 2015-04-14 |
Porous Organosilicate Layers, and Vapor Deposition Systems and Methods for Preparing Same
App 20150075427 - Marsh; Eugene P. | 2015-03-19 |
Methods of selectively forming a material using parylene coating
Grant 8,945,305 - Marsh February 3, 2 | 2015-02-03 |
Resistive Memory Having Confined Filament Formation
App 20150021541 - Marsh; Eugene P. ; et al. | 2015-01-22 |
Methods of Forming Phase Change Materials and Methods of Forming Phase Change Memory Circuitry
App 20140308776 - Marsh; Eugene P. ; et al. | 2014-10-16 |
Resistive memory having confined filament formation
Grant 8,853,713 - Marsh , et al. October 7, 2 | 2014-10-07 |
Porous organosilicate layers, and vapor deposition systems and methods for preparing same
Grant 8,840,990 - Marsh September 23, 2 | 2014-09-23 |
Methods For Forming A Conductive Material And Methods For Forming A Conductive Structure
App 20140248771 - Marsh; Eugene P. | 2014-09-04 |
Methods Of Forming Germanium-antimony-tellurium Materials And Chalcogenide Materials
App 20140242748 - Marsh; Eugene P. | 2014-08-28 |
Methods Of Forming A Metal Telluride Material, Related Methods Of Forming A Semiconductor Device Structure, And Related Semiconductor Device Structures
App 20140227863 - Quick; Timothy A. ; et al. | 2014-08-14 |
Methods of depositing antimony-comprising phase change material onto a substrate and methods of forming phase change memory circuitry
Grant 8,785,239 - Quick , et al. July 22, 2 | 2014-07-22 |
Methods of forming phase change materials and methods of forming phase change memory circuitry
Grant 8,765,519 - Marsh , et al. July 1, 2 | 2014-07-01 |
Methods of forming germanium-antimony-tellurium materials and methods of forming a semiconductor device structure including the same
Grant 8,759,146 - Marsh June 24, 2 | 2014-06-24 |
Methods for forming a conductive material, methods for selectively forming a conductive material, methods for forming platinum, and methods for forming conductive structures
Grant 8,753,933 - Marsh June 17, 2 | 2014-06-17 |
Registered structure formation via the application of directed thermal energy to diblock copolymer films
Grant 8,753,738 - Millward , et al. June 17, 2 | 2014-06-17 |
Methods of forming structures having nanotubes extending between opposing electrodes and structures including same
Grant 8,748,870 - Marsh , et al. June 10, 2 | 2014-06-10 |
Methods of forming a metal chalcogenide material
Grant 8,741,688 - Quick , et al. June 3, 2 | 2014-06-03 |
Metal plating using seed film
Grant 8,734,957 - Marsh May 27, 2 | 2014-05-27 |
Confined resistance variable memory cell structures and methods
Grant 8,716,060 - Kraus , et al. May 6, 2 | 2014-05-06 |
Methods of forming phase change materials and methods of forming phase change memory circuitry
Grant 8,697,486 - Marsh , et al. April 15, 2 | 2014-04-15 |
Methods Of Forming Structures Having Nanotubes Extending Between Opposing Electrodes And Structures Including Same
App 20140084248 - Marsh; Eugene P. ; et al. | 2014-03-27 |
Multilevel Mixed Valence Oxide (mvo) Memory
App 20140080279 - Sandhu; Gurtej S. ; et al. | 2014-03-20 |
Methods of Forming Phase Change Materials and Methods of Forming Phase Change Memory Circuitry
App 20140073084 - Marsh; Eugene P. ; et al. | 2014-03-13 |
Methods Of Forming A Metal Chalcogenide Material, Related Methods Of Forming A Semiconductor Device Structure, And A Related Semiconductor Device Structure
App 20140027775 - Quick; Timothy A. ; et al. | 2014-01-30 |
Chemical Vaporizer For Material Deposition Systems And Associated Methods
App 20140026925 - Marsh; Eugene P. ; et al. | 2014-01-30 |
Resistance Variable Memory Cell Structures And Methods
App 20140021437 - Marsh; Eugene P ; et al. | 2014-01-23 |
Titanium nitride films
Grant 8,633,110 - Kraus , et al. January 21, 2 | 2014-01-21 |
Methods of forming structures having nanotubes extending between opposing electrodes and structures including same
Grant 8,624,225 - Marsh , et al. January 7, 2 | 2014-01-07 |
Thin film structure that may be used with an adhesion layer
Grant 8,593,784 - Marsh November 26, 2 | 2013-11-26 |
Multilevel mixed valence oxide (MVO) memory
Grant 8,592,795 - Sandhu , et al. November 26, 2 | 2013-11-26 |
Atomic Layer Deposition Of A Metal Chalcogenide Material And Related Memory Cells And Methods Of Forming Memory Cells
App 20130306927 - Marsh; Eugene P. ; et al. | 2013-11-21 |
Methods Of Depositing Antimony-Comprising Phase Change Material Onto A Substrate And Methods Of Forming Phase Change Memory Circuitry
App 20130295717 - Quick; Timothy A. ; et al. | 2013-11-07 |
Resistive Memory Having Confined Filament Formation
App 20130292626 - Marsh; Eugene P. ; et al. | 2013-11-07 |
Chemical vaporizer for material deposition systems and associated methods
Grant 8,551,564 - Marsh , et al. October 8, 2 | 2013-10-08 |
Methods of patterning a substrate including multilayer antireflection coatings
Grant 8,551,808 - Marsh , et al. October 8, 2 | 2013-10-08 |
Confined Resistance Variable Memory Cell Structures And Methods
App 20130252396 - Kraus; Brenda D. ; et al. | 2013-09-26 |
Resistance variable memory cell structures and methods
Grant 8,541,765 - Marsh , et al. September 24, 2 | 2013-09-24 |
SEMICONDUCTOR STRUCTURES COMPRISING CRYSTALLINE PrCaMnO (PCMO) FORMED BY ATOMIC LAYER DEPOSITION
App 20130221312 - Marsh; Eugene P. | 2013-08-29 |
Registered Structure Formation Via The Application Of Directed Thermal Energy To Diblock Copolymer Films
App 20130189492 - Millward; Dan B. ; et al. | 2013-07-25 |
Methods of depositing antimony-comprising phase change material onto a substrate and methods of forming phase change memory circuitry
Grant 8,481,361 - Quick , et al. July 9, 2 | 2013-07-09 |
Etchant gas
Grant 8,475,677 - Marsh July 2, 2 | 2013-07-02 |
Horizontally Oriented And Vertically Stacked Memory Cells
App 20130153853 - Quick; Timothy A. ; et al. | 2013-06-20 |
Ruthenium silicide diffusion barrier layers and methods of forming same
Grant 8,461,682 - Vaartstra , et al. June 11, 2 | 2013-06-11 |
Semiconductor processing
Grant 8,455,296 - Marsh , et al. June 4, 2 | 2013-06-04 |
Memory Cells, Semiconductor Devices Including Such Cells, And Methods Of Fabrication
App 20130128649 - Quick; Timothy A. ; et al. | 2013-05-23 |
Metal Plating Using Seed Film
App 20130130053 - Marsh; Eugene P. | 2013-05-23 |
Metal plating using seed film
Grant 8,431,240 - Marsh April 30, 2 | 2013-04-30 |
Atomic layer deposition of crystalline PrCaMnO (PCMO) and related methods
Grant 8,420,534 - Marsh April 16, 2 | 2013-04-16 |
Registered structure formation via the application of directed thermal energy to diblock copolymer films
Grant 8,409,449 - Millward , et al. April 2, 2 | 2013-04-02 |
Horizontally oriented and vertically stacked memory cells
Grant 8,367,460 - Quick , et al. February 5, 2 | 2013-02-05 |
Multilayer Antireflection Coatings, Structures And Devices Including The Same And Methods Of Making The Same
App 20130011561 - Marsh; Eugene P. ; et al. | 2013-01-10 |
Multilevel Mixed Valence Oxide (mvo) Memory
App 20130001495 - Sandhu; Gurtej S. ; et al. | 2013-01-03 |
Articles Having Semiconductive Carbon Nanotubes
App 20120321876 - Marsh; Eugene P. ; et al. | 2012-12-20 |
Methods of forming metal-containing structures, and methods of forming germanium-containing structures
Grant 8,323,736 - Quick , et al. December 4, 2 | 2012-12-04 |
Apparatus including rhodium-based charge traps
Grant 8,314,456 - Marsh , et al. November 20, 2 | 2012-11-20 |
Chemical Vaporizer For Material Deposition Systems And Associated Methods
App 20120289059 - Marsh; Eugene P. ; et al. | 2012-11-15 |
Phase change memory cell structures and methods
Grant 8,298,938 - Quick , et al. October 30, 2 | 2012-10-30 |
Multilayer antireflection coatings, structures and devices including the same and methods of making the same
Grant 8,294,139 - Marsh , et al. October 23, 2 | 2012-10-23 |
Methods Of Forming Structures Having Nanotubes Extending Between Opposing Electrodes And Structures Including Same
App 20120261647 - Marsh; Eugene P. ; et al. | 2012-10-18 |
Methods Of Depositing Antimony-Comprising Phase Change Material Onto A Substrate And Methods Of Forming Phase Change Memory Circuitry
App 20120231579 - Quick; Timothy A. ; et al. | 2012-09-13 |
Method for purification of semiconducting single wall nanotubes
Grant 8,256,695 - Marsh , et al. September 4, 2 | 2012-09-04 |
Zwitterionic block copolymers and methods
Grant 8,236,899 - Millward , et al. August 7, 2 | 2012-08-07 |
Chemical vaporizer for material deposition systems and associated methods
Grant 8,225,745 - Marsh , et al. July 24, 2 | 2012-07-24 |
Methods of forming structures having nanotubes extending between opposing electrodes and structures including same
Grant 8,222,127 - Marsh , et al. July 17, 2 | 2012-07-17 |
Methods Of Forming Metal-Containing Structures, And Methods Of Forming Germanium-Containing Structures
App 20120178209 - Quick; Timothy A. ; et al. | 2012-07-12 |
Methods Of Forming Germanium-antimony-tellurium Materials And Methods Of Forming A Semiconductor Device Structure Including The Same
App 20120171812 - Marsh; Eugene P. | 2012-07-05 |
Methods of etching nanodots, methods of fabricating integrated circuit devices and device structures, methods of etching a layer comprising a late transition metal, and methods of forming a plurality of transistor gate constructions
Grant 8,206,603 - Marsh June 26, 2 | 2012-06-26 |
Confined Resistance Variable Memory Cell Structures And Methods
App 20120149146 - Kraus; Brenda D. ; et al. | 2012-06-14 |
Methods of depositing antimony-comprising phase change material onto a substrate and methods of forming phase change memory circuitry
Grant 8,198,129 - Quick , et al. June 12, 2 | 2012-06-12 |
Etchant Gas
App 20120138850 - Marsh; Eugene P. | 2012-06-07 |
Phase Change Memory Cell Structures And Methods
App 20120097911 - Quick; Timothy A. ; et al. | 2012-04-26 |
Methods of forming metal-containing structures, and methods of forming germanium-containing structures
Grant 8,163,341 - Quick , et al. April 24, 2 | 2012-04-24 |
Registered Structure Formation via the Application of Directed Thermal Energy to Diblock Copolymer Films
App 20120094087 - Millward; Dan B. ; et al. | 2012-04-19 |
ATOMIC LAYER DEPOSITION OF CRYSTALLINE PrCaMnO (PCMO) AND RELATED STRUCTURES AND METHODS
App 20120086104 - Marsh; Eugene P. | 2012-04-12 |
Methods of forming germanium-antimony-tellurium materials and a method of forming a semiconductor device structure including the same
Grant 8,148,197 - Marsh April 3, 2 | 2012-04-03 |
Titanium Nitride Films
App 20120056326 - Kraus; Brenda D. ; et al. | 2012-03-08 |
Methods Of Selectively Forming A Material
App 20120052681 - Marsh; Eugene P. | 2012-03-01 |
Method For Purification Of Semiconducting Single Wall Nanotubes
App 20120052662 - Marsh; Eugene P. ; et al. | 2012-03-01 |
Etchant gas and a method for removing material from a late transition metal structure
Grant 8,124,541 - Marsh February 28, 2 | 2012-02-28 |
Confined resistance variable memory cell structures and methods
Grant 8,124,445 - Kraus , et al. February 28, 2 | 2012-02-28 |
Methods Of Forming Germanium-antimony-tellurium Materials And A Method Of Forming A Semiconductor Device Structure Including The Same
App 20120028410 - Marsh; Eugene P. | 2012-02-02 |
Confined Resistance Variable Memory Cell Structures And Methods
App 20120018693 - Kraus; Brenda D. ; et al. | 2012-01-26 |
Phase change memory cell structures and methods
Grant 8,097,537 - Quick , et al. January 17, 2 | 2012-01-17 |
Registered structure formation via the application of directed thermal energy to diblock copolymer films
Grant 8,083,953 - Millward , et al. December 27, 2 | 2011-12-27 |
Horizontally Oriented And Vertically Stacked Memory Cells
App 20110309319 - Quick; Timothy A. ; et al. | 2011-12-22 |
Resistance Variable Memory Cell Structures And Methods
App 20110291064 - Marsh; Eugene P. ; et al. | 2011-12-01 |
Zwitterionic Block Copolymers and Methods
App 20110293833 - Millward; Dan B. ; et al. | 2011-12-01 |
Phase Change Memory Cell Structures And Methods
App 20110291065 - Quick; Timothy A. ; et al. | 2011-12-01 |
Semiconductor Processing
App 20110281414 - Marsh; Eugene P. ; et al. | 2011-11-17 |
Apparatus Including Rhodium-based Charge Traps
App 20110278661 - Marsh; Eugene P. ; et al. | 2011-11-17 |
Titanium nitride films
Grant 8,058,729 - Kraus , et al. November 15, 2 | 2011-11-15 |
Methods of Etching Nanodots, Methods of Removing Nanodots From Substrates, Methods of Fabricating Integrated Circuit Devices, Methods of Etching a Layer Comprising a Late Transition Metal, and Methods of Removing a Layer Comprising a Late Transition Metal From a Substrate
App 20110275211 - Marsh; Eugene P. | 2011-11-10 |
Method for purification of semiconducting single wall nanotubes
Grant 8,052,075 - Marsh , et al. November 8, 2 | 2011-11-08 |
Zwitterionic block copolymers and methods
Grant 8,022,147 - Millward , et al. September 20, 2 | 2011-09-20 |
Porous Organosilicate Layers, and Vapor Deposition Systems and Methods for Preparing Same
App 20110206921 - Marsh; Eugene P. | 2011-08-25 |
Semiconductor processing
Grant 8,003,521 - Marsh , et al. August 23, 2 | 2011-08-23 |
Methods of etching nanodots, methods of removing nanodots from substrates, methods of fabricating integrated circuit devices, methods of etching a layer comprising a late transition metal, and methods of removing a layer comprising a late transition metal from a substrate
Grant 7,993,539 - Marsh August 9, 2 | 2011-08-09 |
Methods for forming rhodium-based charge traps and apparatus including rhodium-based charge traps
Grant 7,989,290 - Marsh , et al. August 2, 2 | 2011-08-02 |
Zwitterionic Block Copolymers and Methods
App 20110144275 - Millward; Dan B. ; et al. | 2011-06-16 |
Porous organosilicate layers, and vapor deposition systems and methods for preparing same
Grant 7,960,291 - Marsh June 14, 2 | 2011-06-14 |
Chemical Vaporizer For Material Deposition Systems And Associated Methods
App 20110124201 - Marsh; Eugene P. ; et al. | 2011-05-26 |
Atomic layer deposition method of forming conductive metal nitride-comprising layers
Grant 7,923,070 - Kraus , et al. April 12, 2 | 2011-04-12 |
Zwitterionic block copolymers and methods
Grant 7,910,660 - Millward , et al. March 22, 2 | 2011-03-22 |
Methods of Etching Nanodots, Methods of Removing Nanodots From Substrates, Methods of Fabricating Integrated Circuit Devices, Methods of Etching a Layer Comprising a Late Transition Metal, and Methods of Removing a Layer Comprising a Late Transition Metal From a Substrate
App 20110039406 - Marsh; Eugene P. | 2011-02-17 |
Chemical vaporizer for material deposition systems and associated methods
Grant 7,883,745 - Marsh , et al. February 8, 2 | 2011-02-08 |
Methods of etching nanodots, methods of removing nanodots from substrates, methods of fabricating integrated circuit devices, methods of etching a layer comprising a late transition metal, and methods of removing a layer comprising a late transition metal from a substrate
Grant 7,837,889 - Marsh November 23, 2 | 2010-11-23 |
Methods Of Depositing Antimony-Comprising Phase Change Material Onto A Substrate And Methods Of Forming Phase Change Memory Circuitry
App 20100267220 - Quick; Timothy A. ; et al. | 2010-10-21 |
Methods Of Forming Phase Change Materials And Methods Of Forming Phase Change Memory Circuitry
App 20100267195 - Marsh; Eugene P. ; et al. | 2010-10-21 |
Metal Plating Using Seed Film
App 20100255342 - Marsh; Eugene P. | 2010-10-07 |
Semiconductor Processing
App 20100255653 - Marsh; Eugene P. ; et al. | 2010-10-07 |
System and method for recirculating fluid supply for an injector for a semiconductor fabrication chamber
Grant 7,789,319 - Marsh , et al. September 7, 2 | 2010-09-07 |
Zwitterionic Block Copolymers And Methods
App 20100204402 - Millward; Dan B. ; et al. | 2010-08-12 |
Metal plating using seed film
Grant 7,759,187 - Marsh July 20, 2 | 2010-07-20 |
Zwitterionic block copolymers and methods
Grant 7,732,533 - Millward , et al. June 8, 2 | 2010-06-08 |
Methods For Forming A Conductive Material, Methods For Selectively Forming A Conductive Material, Methods For Forming Platinum, And Methods For Forming Conductive Structures
App 20100124821 - Marsh; Eugene P. | 2010-05-20 |
Methods Of Forming Metal-Containing Structures, And Methods Of Forming Germanium-Containing Structures
App 20100124609 - Quick; Timothy A. ; et al. | 2010-05-20 |
Platinum-containing integrated circuits and capacitor constructions
Grant 7,719,044 - Marsh May 18, 2 | 2010-05-18 |
Nucleation method for atomic layer deposition of cobalt on bare silicon during the formation of a semiconductor device
Grant 7,696,624 - Marsh April 13, 2 | 2010-04-13 |
Deposition Systems, ALD Systems, CVD Systems, Deposition Methods, ALD Methods and CVD Methods
App 20100075037 - Marsh; Eugene P. ; et al. | 2010-03-25 |
Methods Of Forming Structures Including Nanotubes And Structures Including Same
App 20100012922 - Marsh; Eugene P. ; et al. | 2010-01-21 |
Conductive Nanoparticles
App 20090302371 - Kraus; Brenda D. ; et al. | 2009-12-10 |
Selective provision of a diblock copolymer material
Grant 7,625,694 - Marsh , et al. December 1, 2 | 2009-12-01 |
Ruthenium Silicide Diffusion Barrier Layers And Methods Of Forming Same
App 20090278232 - Vaartstra; Brian A. ; et al. | 2009-11-12 |
Method For Purification Of Semiconducting Single Wall Nanotubes
App 20090252946 - Marsh; Eugene P. ; et al. | 2009-10-08 |
Method for making conductive nanoparticle charge storage element
Grant 7,575,978 - Kraus , et al. August 18, 2 | 2009-08-18 |
Device structures including ruthenium silicide diffusion barrier layers
Grant 7,560,815 - Vaartstra , et al. July 14, 2 | 2009-07-14 |
Methods For Forming Rhodium-based Charge Traps And Apparatus Including Rhodium-based Charge Traps
App 20090173991 - Marsh; Eugene P. ; et al. | 2009-07-09 |
Method of forming mirrors by surface transformation of empty spaces in solid state materials
Grant 7,512,170 - Geusic , et al. March 31, 2 | 2009-03-31 |
Zwitterionic block copolymers and methods
App 20090062470 - Millward; Dan B. ; et al. | 2009-03-05 |
Chemical Vaporizer For Material Deposition Systems And Associated Methods
App 20090035465 - Marsh; Eugene P. ; et al. | 2009-02-05 |
Methods of Etching Nanodots, Methods of Removing Nanodots From Substrates, Methods of Fabricating Integrated Circuit Devices, Methods of Etching a Layer Comprising a Late Transition Metal, and Methods of Removing a Layer Comprising a Late Transition Metal From a Substrate
App 20090011585 - Marsh; Eugene P. | 2009-01-08 |
ALD formed titanium nitride films
Grant 7,473,637 - Kraus , et al. January 6, 2 | 2009-01-06 |
Porous Organosilicate Layers, And Vapor Deposition Systems And Methods For Preparing Same
App 20080318440 - Marsh; Eugene P. | 2008-12-25 |
Multilayer Antireflection Coatings, Structures And Devices Including The Same And Methods Of Making The Same
App 20080315270 - Marsh; Eugene P. ; et al. | 2008-12-25 |
Metal layer forming methods and capacitor electrode forming methods
Grant 7,468,108 - Marsh December 23, 2 | 2008-12-23 |
Etchant gas and a method for removing material from a late transition metal structure
App 20080248653 - Marsh; Eugene P. | 2008-10-09 |
Porous organosilicate layers, and vapor deposition systems and methods for preparing same
Grant 7,427,570 - Marsh September 23, 2 | 2008-09-23 |
Registered structure formation via the application of directed thermal energy to diblock copolymer films
App 20080217292 - Millward; Dan B. ; et al. | 2008-09-11 |
Methods and apparatus for forming rhodium-containing layers
Grant 7,393,785 - Uhlenbrock , et al. July 1, 2 | 2008-07-01 |
Atomic layer deposition methods of forming conductive metal nitride comprising layers
Grant 7,378,129 - Kraus , et al. May 27, 2 | 2008-05-27 |
Methods of forming metal oxide and semimetal oxide
Grant 7,365,028 - Marsh April 29, 2 | 2008-04-29 |
System And Method For Recirculating Fluid Supply For An Injector For A Semiconductor Fabrication Chamber
App 20070266941 - Marsh; Eugene P. ; et al. | 2007-11-22 |
Thin film structure that may be used with an adhesion layer
App 20070263340 - Marsh; Eugene P. | 2007-11-15 |
Semiconductor structures
Grant 7,291,920 - Marsh November 6, 2 | 2007-11-06 |
Surface treatment of an oxide layer to enhance adhesion of a ruthenium metal layer
Grant 7,282,408 - Marsh , et al. October 16, 2 | 2007-10-16 |
Method of forming a catalytic surface comprising at least one of Pt, Pd, Co and Au in at least one of elemental and alloy forms
Grant 7,271,071 - Marsh September 18, 2 | 2007-09-18 |
Ald Formed Titanium Nitride Films
App 20070200243 - Kraus; Brenda D. ; et al. | 2007-08-30 |
Metal plating using seed film
Grant 7,262,132 - Marsh August 28, 2 | 2007-08-28 |
Methods for forming rhodium-containing layers such as platinum-rhodium barrier layers
App 20070197031 - Uhlenbrock; Stefan ; et al. | 2007-08-23 |
Method of forming mirrors by surface transformation of empty spaces in solid state materials
Grant 7,260,125 - Geusic , et al. August 21, 2 | 2007-08-21 |
Deposition methods using heteroleptic precursors
Grant 7,250,367 - Vaartstra , et al. July 31, 2 | 2007-07-31 |
Methods and apparatus for forming rhodium-containing layers
Grant 7,226,861 - Uhlenbrock , et al. June 5, 2 | 2007-06-05 |
Devices containing platinum-iridium films and methods of preparing such films and devices
Grant 7,217,970 - Marsh May 15, 2 | 2007-05-15 |
Method of forming a conductive structure
Grant 7,214,602 - Marsh May 8, 2 | 2007-05-08 |
Dielectric material forming methods and enhanced dielectric materials
App 20070093018 - Marsh; Eugene P. | 2007-04-26 |
Conductive nanoparticles
App 20070092989 - Kraus; Brenda D. ; et al. | 2007-04-26 |
Method of forming metal oxide and semimetal oxide
Grant 7,208,412 - Marsh April 24, 2 | 2007-04-24 |
Metal plating using seed film
App 20070077441 - Marsh; Eugene P. | 2007-04-05 |
Platinum stuffed with silicon oxide as a diffusion oxygen barrier for semiconductor devices
App 20070075345 - Marsh; Eugene P. | 2007-04-05 |
Metal plating using seed film
App 20070063245 - Marsh; Eugene P. | 2007-03-22 |
Metal plating using seed film
Grant 7,189,611 - Marsh March 13, 2 | 2007-03-13 |
Porous organosilicate layers, and vapor deposition systems and methods for preparing same
App 20070049044 - Marsh; Eugene P. | 2007-03-01 |
Method of forming mirrors by surface transformation of empty spaces in solid state materials
App 20070036196 - Geusic; Joseph E. ; et al. | 2007-02-15 |
ALD formed titanium nitride films
App 20070020923 - Kraus; Brenda D. ; et al. | 2007-01-25 |
Dielectric material forming methods
Grant 7,160,817 - Marsh January 9, 2 | 2007-01-09 |
Platinum stuffed with silicon oxide as a diffusion oxygen barrier for semiconductor devices
Grant 7,157,783 - Marsh January 2, 2 | 2007-01-02 |
Method of forming mirrors by surface transformation of empty spaces in solid state materials and structures thereon
Grant 7,142,577 - Geusic , et al. November 28, 2 | 2006-11-28 |
Nucleation method for atomic layer deposition of cobalt on bare silicon during the formation of a semiconductor device
App 20060261479 - Marsh; Eugene P. | 2006-11-23 |
Atomic layer deposition methods of forming conductive metal nitride-comprising layers
App 20060263523 - Kraus; Brenda D. ; et al. | 2006-11-23 |
Process for forming a low carbon, low resistance metal film during the manufacture of a semiconductor device and systems including same
App 20060261441 - Marsh; Eugene P. ; et al. | 2006-11-23 |
Metal layer forming methods and capacitor electrode forming methods
App 20060249229 - Marsh; Eugene P. | 2006-11-09 |
Metal layer forming methods and capacitor electrode forming methods
App 20060207691 - Marsh; Eugene P. | 2006-09-21 |
Metal layer forming methods and capacitor electrode forming methods
Grant 7,105,065 - Marsh September 12, 2 | 2006-09-12 |
Circuitry and capacitors comprising roughened platinum layers
Grant 7,098,503 - Marsh August 29, 2 | 2006-08-29 |
Rhodium film and method of formation
App 20060160344 - Marsh; Eugene P. ; et al. | 2006-07-20 |
Nucleation Method For Atomic Layer Deposition Of Cobalt On Bare Silicon During The Formation Of A Semiconductor Device
App 20060157863 - Marsh; Eugene P. | 2006-07-20 |
Nucleation method for atomic layer deposition of cobalt on bare silicon during the formation of a semiconductor device
Grant 7,078,326 - Marsh July 18, 2 | 2006-07-18 |
Methods of forming roughened layers of platinum
Grant 7,060,615 - Marsh June 13, 2 | 2006-06-13 |
Dielectric material forming methods and enhanced dielectric materials
Grant 7,052,953 - Marsh May 30, 2 | 2006-05-30 |
Semiconductor structures
App 20060063363 - Marsh; Eugene P. | 2006-03-23 |
Devices containing zirconium-platinum-containing materials and methods for preparing such materials and devices
App 20060051963 - Marsh; Eugene P. | 2006-03-09 |
Deposition methods using heteroleptic precursors
App 20060046521 - Vaartstra; Brian A. ; et al. | 2006-03-02 |
Method of forming metal oxide and semimetal oxide
App 20060024441 - Marsh; Eugene P. | 2006-02-02 |
Methods of forming metal oxide and semimetal oxide
App 20060024881 - Marsh; Eugene P. | 2006-02-02 |
Nucleation and deposition of platinum group metal films using ultraviolet irradiation
App 20060014367 - Marsh; Eugene P. | 2006-01-19 |
Methods and apparatus for forming rhodium-containing layers
App 20050260823 - Uhlenbrock, Stefan ; et al. | 2005-11-24 |
Selective provision of a diblock copolymer material
App 20050250053 - Marsh, Eugene P. ; et al. | 2005-11-10 |
Devices containing zirconium-platinum-containing materials and methods for preparing such materials and devices
Grant 6,946,395 - Marsh September 20, 2 | 2005-09-20 |
Process for low temperature atomic layer deposition of RH
Grant 6,943,073 - Marsh , et al. September 13, 2 | 2005-09-13 |
Method of forming a catalytic surface comprising at least one of Pt, Pd, Co and Au in at least one of elemental and alloy forms
App 20050191437 - Marsh, Eugene P. | 2005-09-01 |
Metal plating using seed film
App 20050170645 - Marsh, Eugene P. | 2005-08-04 |
Metal plating using seed film
App 20050158991 - Marsh, Eugene P. | 2005-07-21 |
Method for the formation of RuSixOy-containing barrier layers for high-k dielectrics
Grant 6,903,005 - Marsh June 7, 2 | 2005-06-07 |
Devices containing platinum-iridium films and methods of preparing such films and devices
Grant 6,900,107 - Marsh May 31, 2 | 2005-05-31 |
Devices containing zirconium-platinum-containing materials and methods for preparing such materials and devices
App 20050101131 - Marsh, Eugene P. | 2005-05-12 |
Method of forming a substrate having a surface comprising at least one of Pt, Pd, Co and Au in at least one of elemental and alloy forms
Grant 6,884,691 - Marsh April 26, 2 | 2005-04-26 |
Platinum stuffed with silicon oxide as a diffusion oxygen barrier for semiconductor devices
App 20050082587 - Marsh, Eugene P. | 2005-04-21 |
Process for direct deposition of ALD RhO2
Grant 6,881,260 - Marsh , et al. April 19, 2 | 2005-04-19 |
Method of forming mirrors by surface transformation of empty spaces in solid state materials
App 20050070036 - Geusic, Joseph E. ; et al. | 2005-03-31 |
Process for fabricating RuSixOy-containing adhesion layers
Grant 6,867,093 - Marsh , et al. March 15, 2 | 2005-03-15 |
Capacitor having RuSixOy-containing adhesion layers
Grant 6,867,449 - Marsh , et al. March 15, 2 | 2005-03-15 |
Metal plating using seed film
Grant 6,861,355 - Marsh March 1, 2 | 2005-03-01 |
Atomic layer deposition methods of forming conductive metal nitride comprising layers
App 20050042373 - Kraus, Brenda D. ; et al. | 2005-02-24 |
Methods for patterning metal layers for use with forming semiconductor devices
Grant 6,858,535 - Marsh February 22, 2 | 2005-02-22 |
Analysis of semiconductor surfaces by secondary ion mass spectrometry and methods
Grant 6,855,928 - Marsh February 15, 2 | 2005-02-15 |
Atomic layer deposition of metal during the formation of a semiconductor device
App 20050032365 - Marsh, Eugene P. | 2005-02-10 |
Systems and methods for the electrolytic removal of metals from substrates
App 20050016869 - Marsh, Eugene P. ; et al. | 2005-01-27 |
Method of forming ruthenium and ruthenium oxide films on a semiconductor structure
Grant 6,844,261 - Marsh , et al. January 18, 2 | 2005-01-18 |
Devices containing platinum-iridium films and methods of preparing such films and devices
App 20050006689 - Marsh, Eugene P. | 2005-01-13 |
Dielectric material forming methods and enhanced dielectric materials
App 20050009372 - Marsh, Eugene P. | 2005-01-13 |
Solvated ruthenium precursors for direct liquid injection of ruthenium and ruthenium oxide
Grant 6,840,988 - Marsh , et al. January 11, 2 | 2005-01-11 |
Method of making an oxygen diffusion barrier for semiconductor devices using platinum, rhodium, or iridium stuffed with silicon oxide
Grant 6,830,983 - Marsh December 14, 2 | 2004-12-14 |
Memory structure with an annealed film
Grant 6,813,136 - Marsh November 2, 2 | 2004-11-02 |
Surface treatment of an oxide layer to enhance adhesion of a ruthenium metal layer
App 20040214354 - Marsh, Eugene P. ; et al. | 2004-10-28 |
Method of forming a conductive structure
App 20040212090 - Marsh, Eugene P. | 2004-10-28 |
Process for the formation of RuSixOy-containing barrier layers for high-k dielectrics
Grant 6,800,521 - Marsh October 5, 2 | 2004-10-05 |
RuSixOy-containing adhesion layers and process for fabricating the same
Grant 6,800,937 - Marsh , et al. October 5, 2 | 2004-10-05 |
Methods of cleaning vaporization surfaces
Grant 6,796,313 - Marsh September 28, 2 | 2004-09-28 |
Method of forming a substrste having a surface comprising at least one of Pt, Pd, Co and Au in at least one of element and alloy forms
App 20040185636 - Marsh, Eugene P. | 2004-09-23 |
Method for the formation of RuSixOy-containing barrier layers for high-k dielectrics
Grant 6,787,449 - Marsh September 7, 2 | 2004-09-07 |
Systems and methods for the electrolytic removal of metals from substrates
Grant 6,783,657 - Marsh , et al. August 31, 2 | 2004-08-31 |
Methods and apparatus for forming rhodium-containing layers
App 20040147086 - Uhlenbrock, Stefan ; et al. | 2004-07-29 |
Process for fabricating RuSixOy-containing adhesion layers
Grant 6,764,895 - Marsh , et al. July 20, 2 | 2004-07-20 |
Methods of forming roughened layers of platinum
App 20040131763 - Marsh, Eugene P. | 2004-07-08 |
Thin film structure that may be used with an adhesion layer
Grant 6,757,153 - Marsh June 29, 2 | 2004-06-29 |
RuSixOy-containing barrier layers for high-k dielectrics
Grant 6,744,138 - Marsh June 1, 2 | 2004-06-01 |
Method of manufacturing a capacitor having RuSixOy-containing adhesion layers
Grant 6,737,317 - Marsh , et al. May 18, 2 | 2004-05-18 |
Surface treatment of an oxide layer to enhance adhesion of a ruthenium metal layer
Grant 6,737,313 - Marsh , et al. May 18, 2 | 2004-05-18 |
Devices containing zirconium-platinum-containing materials and methods for preparing such materials and devices
App 20040067642 - Marsh, Eugene P. | 2004-04-08 |
Analysis of semiconductor surfaces by secondary ion mass spectrometry and methods
Grant 6,713,760 - Marsh March 30, 2 | 2004-03-30 |
Platinum-containing integrated circuits and capacitor constructions
App 20040051179 - Marsh, Eugene P. | 2004-03-18 |
Rhodium film and method of formation
App 20040048451 - Marsh, Eugene P. ; et al. | 2004-03-11 |
Devices containing platinum-iridium films and methods of preparing such films and devices
App 20040048467 - Marsh, Eugene P. | 2004-03-11 |
Systems and methods for the electrolytic removal of metals from substrates
App 20040040853 - Marsh, Eugene P. ; et al. | 2004-03-04 |
Platinum stuffed with silicon oxide as a diffusion oxygen barrier for semiconductor devices
App 20040043578 - Marsh, Eugene P. | 2004-03-04 |
Metal plating using seed film
App 20040041194 - Marsh, Eugene P. | 2004-03-04 |
Systems for electrolytic removal of metals from substrates
App 20040040863 - Lee, Whonchee ; et al. | 2004-03-04 |
Devices containing platinum-rhodium layers and methods
Grant 6,690,055 - Uhlenbrock , et al. February 10, 2 | 2004-02-10 |
Methods for planarization of non-planar surfaces in device fabrication
Grant 6,677,252 - Marsh January 13, 2 | 2004-01-13 |
Process for direct deposition of ALD RhO2
App 20030233976 - Marsh, Eugene P. ; et al. | 2003-12-25 |
Devices containing platinum-iridium films and methods of preparing such films and devices
Grant 6,660,631 - Marsh December 9, 2 | 2003-12-09 |
Process for low temperature atomic layer deposition of Rh
Grant 6,656,835 - Marsh , et al. December 2, 2 | 2003-12-02 |
Devices containing zirconium-platinum-containing materials and methods for preparing such materials and devices
Grant 6,642,567 - Marsh November 4, 2 | 2003-11-04 |
Metal layer forming methods and capacitor electrode forming methods
App 20030201034 - Marsh, Eugene P. | 2003-10-30 |
Capacitor having RuSixOy-containing adhesion layers
App 20030197205 - Marsh, Eugene P. ; et al. | 2003-10-23 |
Process for fabricating RuSixOy-containing adhesion layers
App 20030199134 - Marsh, Eugene P. ; et al. | 2003-10-23 |
Analysis Of Semiconductor Surfaces By Secondary Ion Mass Spectrometry And Methods
App 20030193023 - Marsh, Eugene P. | 2003-10-16 |
Vapor forming devices
Grant 6,626,999 - Marsh September 30, 2 | 2003-09-30 |
Thin film structure that may be used with an adhesion layer
App 20030174458 - Marsh, Eugene P. | 2003-09-18 |
RuSixOy-containing adhesion layers and process for fabricating the same
Grant 6,617,634 - Marsh , et al. September 9, 2 | 2003-09-09 |
Process for fabricating RuSixOy-containing adhesion layers
Grant 6,610,568 - Marsh , et al. August 26, 2 | 2003-08-26 |
Solvated ruthenium precursors for direct liquid injection of ruthenium and ruthenium oxide
App 20030154880 - Marsh, Eugene P. ; et al. | 2003-08-21 |
Analysis of semiconductor surfaces by secondary ion mass spectrometry and methods
App 20030136906 - Marsh, Eugene P. | 2003-07-24 |
Methods of forming roughened layers of platinum and methods of forming capacitors
Grant 6,583,022 - Marsh June 24, 2 | 2003-06-24 |
Solvated ruthenium precursors for direct liquid injection of ruthenium and ruthenium oxide
App 20030092262 - Marsh, Eugene P. ; et al. | 2003-05-15 |
Method of fabricating an SrRuO3, film
App 20030073294 - Marsh, Eugene P. | 2003-04-17 |
Solvated ruthenium precursors for direct liquid injection of ruthenium and ruthenium oxide and method of using same
Grant 6,541,067 - Marsh , et al. April 1, 2 | 2003-04-01 |
Rhodium film and method of formation
App 20030054606 - Marsh, Eugene P. ; et al. | 2003-03-20 |
Dielectric material forming methods and enhanced dielectric materials
App 20030045048 - Marsh, Eugene P. | 2003-03-06 |
Solvated ruthenium precursors for direct liquid injection of ruthenium and ruthenium oxide
Grant 6,517,616 - Marsh , et al. February 11, 2 | 2003-02-11 |
Method of fabricating an SrRuO3 film
Grant 6,506,666 - Marsh January 14, 2 | 2003-01-14 |
Process for low temperature atomic layer deposition of Rh
App 20020197814 - Marsh, Eugene P. ; et al. | 2002-12-26 |
Process for the formation of RuSixOy-containing barrier layers for high-k dielectrics
App 20020190276 - Marsh, Eugene P. | 2002-12-19 |
Method for producing low carbon/oxygen conductive layers
Grant 6,495,458 - Marsh December 17, 2 | 2002-12-17 |
Process for the formation of RuSixOy-containing barrier layers for high-k dielectrics
App 20020187632 - Marsh, Eugene P. | 2002-12-12 |
Planarization of non-planar surfaces in device fabrication
App 20020155732 - Marsh, Eugene P. | 2002-10-24 |
Method of forming a capacitor
App 20020154468 - Marsh, Eugene P. | 2002-10-24 |
RuSixOy-containing adhesion layers
Grant 6,462,367 - Marsh , et al. October 8, 2 | 2002-10-08 |
Process for fabricating RuSixOy-containing adhesion layers
App 20020142538 - Marsh, Eugene P. ; et al. | 2002-10-03 |
Direct writing of low carbon conductive material
Grant 6,455,423 - Marsh September 24, 2 | 2002-09-24 |
RuSixOy-containing adhesion layers and process for fabricating the same
App 20020125516 - Marsh, Eugene P. ; et al. | 2002-09-12 |
Process for the formation of RuSixOy-containing barrier layers for high-k dielectrics
App 20020121697 - Marsh, Eugene P. | 2002-09-05 |
Methods of chemical vapor deposition
Grant 6,419,994 - Marsh July 16, 2 | 2002-07-16 |
RuSixOy-containing adhesion layers and process for fabricating the same
App 20020074577 - Marsh, Eugene P. ; et al. | 2002-06-20 |
RuSixOy-containing adhesion layers and process for fabricating the same
App 20020076881 - Marsh, Eugene P. ; et al. | 2002-06-20 |
Method for producing low carbon/oxygen conductive layers
Grant 6,403,414 - Marsh June 11, 2 | 2002-06-11 |
Method of fabricating an SrRuO3 film
App 20020061633 - Marsh, Eugene P. | 2002-05-23 |
Solvated ruthenium precursors for direct liquid injection of ruthenium and ruthenium oxide
App 20020053299 - Marsh, Eugene P. ; et al. | 2002-05-09 |
RuSixOy-containing adhesion layers and process for fabricating the same
App 20020028556 - Marsh, Eugene P. ; et al. | 2002-03-07 |
RuSixOy-containing adhesion layers and process for fabricating the same
App 20020025627 - Marsh, Eugene P. ; et al. | 2002-02-28 |
Method for fabricating an SrRuO3 film
Grant 6,342,445 - Marsh January 29, 2 | 2002-01-29 |
Diffusion barrier layers and methods of forming same
App 20020008270 - Marsh, Eugene P. | 2002-01-24 |
Methods of cleaning vaporization surfaces
App 20020002981 - Marsh, Eugene P. | 2002-01-10 |
Method for producing low carbon/oxygen conductive layers
App 20010055869 - Marsh, Eugene P. | 2001-12-27 |
Method for producing low carbon/oxygen conductive layers
App 20010053558 - Marsh, Eugene P. | 2001-12-20 |
Structures including low carbon/oxygen conductive layers
Grant 6,323,511 - Marsh November 27, 2 | 2001-11-27 |
Diffusion barrier layers and methods of forming same
Grant 6,323,081 - Marsh November 27, 2 | 2001-11-27 |
Direct writing of low carbon conductive material
App 20010044207 - Marsh, Eugene P. | 2001-11-22 |
Methods Of Cleaning Vaporization Surfaces
App 20010040144 - MARSH, EUGENE P. | 2001-11-15 |
Organic field ionization source
App 20010035499 - Marsh, Eugene P. | 2001-11-01 |
Analysis of semiconductor surfaces by secondary ion mass spectrometry
App 20010019108 - Marsh, Eugene P. | 2001-09-06 |
Methods for patterning metal layers for use with forming semiconductor devices
App 20010019885 - Marsh, Eugene P. | 2001-09-06 |
Method for producing low carbon/oxygen conductive layers
Grant 6,284,655 - Marsh September 4, 2 | 2001-09-04 |
Methods for preparing ruthenium oxide films
Grant 6,281,125 - Vaartstra , et al. August 28, 2 | 2001-08-28 |
Methods for forming rhodium-containing layers such as platinum-rhodium barrier layers
Grant 6,271,131 - Uhlenbrock , et al. August 7, 2 | 2001-08-07 |
Organic field ionization source
Grant 6,265,722 - Marsh July 24, 2 | 2001-07-24 |
Direct writing of low carbon conductive material
Grant 6,261,850 - Marsh July 17, 2 | 2001-07-17 |
Planarization of non-planar surfaces in device fabrication
App 20010007798 - Marsh, Eugene P. | 2001-07-12 |
Thin Film Structure That May Be Used With An Adhesion Layer
App 20010001589 - MARSH, EUGENE P. | 2001-05-24 |
Patterning conductive metal layers and methods using same
Grant 6,218,297 - Marsh April 17, 2 | 2001-04-17 |
Planarization of non-planar surfaces in device fabrication
Grant 6,218,316 - Marsh April 17, 2 | 2001-04-17 |
Low temperature deposition of barrier layers
Grant 6,204,172 - Marsh March 20, 2 | 2001-03-20 |
Nucleation and deposition of PT films using ultraviolet irradiation
Grant 6,204,178 - Marsh March 20, 2 | 2001-03-20 |
Ruthenium silicide diffusion barrier layers and methods of forming same
Grant 6,197,628 - Vaartstra , et al. March 6, 2 | 2001-03-06 |
Method and apparatus for using photoemission to determine the endpoint of an etch process
Grant 6,143,667 - Marsh November 7, 2 | 2000-11-07 |
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