loadpatents
name:-0.013309001922607
name:-0.014204978942871
name:-0.0039279460906982
Marohl; Dan Patent Filings

Marohl; Dan

Patent Applications and Registrations

Patent applications and USPTO patent grants for Marohl; Dan.The latest application filed is for "components and processes for managing plasma process byproduct materials".

Company Profile
3.14.13
  • Marohl; Dan - San Jose CA
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Components and Processes for Managing Plasma Process Byproduct Materials
App 20210225616 - Peng; Gordon Wen-Yin ;   et al.
2021-07-22
Articulated direct-mount inductor and associated systems and methods
Grant 10,923,322 - Lopez , et al. February 16, 2
2021-02-16
Substrate Processing System Including Coil With Rf Powered Faraday Shield
App 20200411297 - PENG; Shen ;   et al.
2020-12-31
Coil And Window For Plasma Processing System
App 20200234920 - PENG; Shen ;   et al.
2020-07-23
Tunable Esc For Rapid Alternating Process Applications
App 20190214236 - MAROHL; Dan ;   et al.
2019-07-11
Articulated Direct-Mount Inductor and Associated Systems and Methods
App 20180366301 - Lopez; Oscar ;   et al.
2018-12-20
Universal non-invasive chamber impedance measurement system and associated methods
Grant 10,109,460 - Liu , et al. October 23, 2
2018-10-23
Universal Non-Invasive Chamber Impedance Measurement System and Associated Methods
App 20180151331 - Liu; Chin-Yi ;   et al.
2018-05-31
Systems And Methods For Rf Power Ratio Switching For Iterative Transitioning Between Etch And Deposition Processes
App 20180047543 - Setton; David ;   et al.
2018-02-15
Substrate Processing System Including Coil With Rf Powered Faraday Shield
App 20170278680 - Peng; Shen ;   et al.
2017-09-28
Method of depositing materials on a non-planar surface
Grant 8,318,609 - Marohl , et al. November 27, 2
2012-11-27
Method Of Depositing Materials On A Non-planar Surface
App 20100081289 - Marohl; Dan ;   et al.
2010-04-01
Electro-chemical deposition system
Grant 7,497,932 - Dordi , et al. March 3, 2
2009-03-03
Carrier used for deposition of materials on a non-planar surface
App 20090011573 - Marohl; Dan ;   et al.
2009-01-08
Electro-chemical deposition system
App 20060246690 - Dordi; Yezdi ;   et al.
2006-11-02
Electro-chemical deposition system
App 20040084301 - Dordi, Yezdi ;   et al.
2004-05-06
Electro-chemical deposition system
Grant 6,635,157 - Dordi , et al. October 21, 2
2003-10-21
Electro-chemical deposition system
App 20020029961 - Dordi, Yezdi ;   et al.
2002-03-14
Degassing method using simultaneous dry gas flux pressure and vacuum
Grant 6,263,587 - Raaijmakers , et al. July 24, 2
2001-07-24
Electro-chemical deposition system
Grant 6,258,220 - Dordi , et al. July 10, 2
2001-07-10
Degassing method and apparatus
Grant 6,182,376 - Shin , et al. February 6, 2
2001-02-06
Degassing method and apparatus
Grant 6,113,698 - Raaijmakers , et al. September 5, 2
2000-09-05
Lid and door for a vacuum chamber and pretreatment therefor
Grant 5,762,748 - Banholzer , et al. June 9, 1
1998-06-09
Clamp ring for domed heated pedestal in wafer processing chamber
Grant 5,725,718 - Banholzer , et al. March 10, 1
1998-03-10
Apparatus and method for cooling a substrate
Grant 5,697,427 - Ngan , et al. December 16, 1
1997-12-16
Lid and door for a vacuum chamber and pretreatment therefor
Grant 5,565,058 - Banholzer , et al. October 15, 1
1996-10-15
Lid and door for a vacuum chamber and pretreatment therefor
Grant 5,401,319 - Banholzer , et al. March 28, 1
1995-03-28

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