loadpatents
Patent applications and USPTO patent grants for Marohl; Dan.The latest application filed is for "components and processes for managing plasma process byproduct materials".
Patent | Date |
---|---|
Components and Processes for Managing Plasma Process Byproduct Materials App 20210225616 - Peng; Gordon Wen-Yin ;   et al. | 2021-07-22 |
Articulated direct-mount inductor and associated systems and methods Grant 10,923,322 - Lopez , et al. February 16, 2 | 2021-02-16 |
Substrate Processing System Including Coil With Rf Powered Faraday Shield App 20200411297 - PENG; Shen ;   et al. | 2020-12-31 |
Coil And Window For Plasma Processing System App 20200234920 - PENG; Shen ;   et al. | 2020-07-23 |
Tunable Esc For Rapid Alternating Process Applications App 20190214236 - MAROHL; Dan ;   et al. | 2019-07-11 |
Articulated Direct-Mount Inductor and Associated Systems and Methods App 20180366301 - Lopez; Oscar ;   et al. | 2018-12-20 |
Universal non-invasive chamber impedance measurement system and associated methods Grant 10,109,460 - Liu , et al. October 23, 2 | 2018-10-23 |
Universal Non-Invasive Chamber Impedance Measurement System and Associated Methods App 20180151331 - Liu; Chin-Yi ;   et al. | 2018-05-31 |
Systems And Methods For Rf Power Ratio Switching For Iterative Transitioning Between Etch And Deposition Processes App 20180047543 - Setton; David ;   et al. | 2018-02-15 |
Substrate Processing System Including Coil With Rf Powered Faraday Shield App 20170278680 - Peng; Shen ;   et al. | 2017-09-28 |
Method of depositing materials on a non-planar surface Grant 8,318,609 - Marohl , et al. November 27, 2 | 2012-11-27 |
Method Of Depositing Materials On A Non-planar Surface App 20100081289 - Marohl; Dan ;   et al. | 2010-04-01 |
Electro-chemical deposition system Grant 7,497,932 - Dordi , et al. March 3, 2 | 2009-03-03 |
Carrier used for deposition of materials on a non-planar surface App 20090011573 - Marohl; Dan ;   et al. | 2009-01-08 |
Electro-chemical deposition system App 20060246690 - Dordi; Yezdi ;   et al. | 2006-11-02 |
Electro-chemical deposition system App 20040084301 - Dordi, Yezdi ;   et al. | 2004-05-06 |
Electro-chemical deposition system Grant 6,635,157 - Dordi , et al. October 21, 2 | 2003-10-21 |
Electro-chemical deposition system App 20020029961 - Dordi, Yezdi ;   et al. | 2002-03-14 |
Degassing method using simultaneous dry gas flux pressure and vacuum Grant 6,263,587 - Raaijmakers , et al. July 24, 2 | 2001-07-24 |
Electro-chemical deposition system Grant 6,258,220 - Dordi , et al. July 10, 2 | 2001-07-10 |
Degassing method and apparatus Grant 6,182,376 - Shin , et al. February 6, 2 | 2001-02-06 |
Degassing method and apparatus Grant 6,113,698 - Raaijmakers , et al. September 5, 2 | 2000-09-05 |
Lid and door for a vacuum chamber and pretreatment therefor Grant 5,762,748 - Banholzer , et al. June 9, 1 | 1998-06-09 |
Clamp ring for domed heated pedestal in wafer processing chamber Grant 5,725,718 - Banholzer , et al. March 10, 1 | 1998-03-10 |
Apparatus and method for cooling a substrate Grant 5,697,427 - Ngan , et al. December 16, 1 | 1997-12-16 |
Lid and door for a vacuum chamber and pretreatment therefor Grant 5,565,058 - Banholzer , et al. October 15, 1 | 1996-10-15 |
Lid and door for a vacuum chamber and pretreatment therefor Grant 5,401,319 - Banholzer , et al. March 28, 1 | 1995-03-28 |
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