Markunas; Robert J.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Markunas; Robert J..The latest application filed is for "plasama processing system and method".
- Markunas; Robert J. - Chapel Hill NC
| Patent | Date |
|---|---|
| Plasma processing system and method Grant 7,112,536 - Markunas , et al. September 26, 2 | 2006-09-26 |
| Plasama processing system and method App 20030106641 - Markunas, Robert J. ; et al. | 2003-06-12 |
| Plasma processing system and method Grant 6,558,504 - Markunas , et al. May 6, 2 | 2003-05-06 |
| Plasma furnace disposal of hazardous wastes App 20020040889 - Markunas, Robert J. ; et al. | 2002-04-11 |
| Apparatus and method for microwave processing of materials Grant 5,521,360 - Johnson , et al. May 28, 1 | 1996-05-28 |
| Remote plasma enhanced CVD method and apparatus for growing an epitaxial semiconductor layer Grant 5,180,435 - Markunas , et al. January 19, 1 | 1993-01-19 |
| Remote plasma enhanced CVD method and apparatus for growing an epitaxial semconductor layer Grant 5,018,479 - Markunas , et al. May 28, 1 | 1991-05-28 |
| Remote plasma enhanced CVD method for growing an epitaxial semiconductor layer Grant 4,870,030 - Markunas , et al. September 26, 1 | 1989-09-26 |
| Patterned tunnel junction Grant H667 - Bedair , et al. September 5, 1 | 1989-09-05 |
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