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Lithographic apparatus and method Grant 10,908,518 - Delpuerto , et al. February 2, 2 | 2021-02-02 |
Lithographic apparatus, a dryer and a method of removing liquid from a surface Grant 10,649,349 - Leenders , et al. | 2020-05-12 |
Lithographic Apparatus, A Dryer And A Method Of Removing Liquid From A Surface App 20190121247 - LEENDERS; Martinus Hendrikus Antonius ;   et al. | 2019-04-25 |
Lithographic apparatus, a dryer and a method of removing liquid from a surface Grant 10,185,231 - Leenders , et al. Ja | 2019-01-22 |
Lithographic Apparatus And Method App 20180267414 - DELPUERTO; Santiago E. ;   et al. | 2018-09-20 |
Lithographic apparatus and method Grant 10,001,713 - Del Puerto , et al. June 19, 2 | 2018-06-19 |
Lithographic Apparatus, A Dryer And A Method Of Removing Liquid From A Surface App 20170227856 - LEENDERS; Martinus Hendrikus Antonius ;   et al. | 2017-08-10 |
Lithographic apparatus, a dryer and a method of removing liquid from a surface Grant 9,632,425 - Leenders , et al. April 25, 2 | 2017-04-25 |
Lithographic apparatus, fluid combining unit and device manufacturing method Grant 9,330,912 - Mulkens , et al. May 3, 2 | 2016-05-03 |
Lithographic Apparatus and Method App 20150370180 - DEL PUERTO; Santiago E. ;   et al. | 2015-12-24 |
Systems and methods for insitu lens cleaning using ozone in immersion lithography Grant 8,817,226 - Sewell , et al. August 26, 2 | 2014-08-26 |
Systems and methods for thermally-induced aberration correction in immersion lithography Grant 8,736,807 - Sewell , et al. May 27, 2 | 2014-05-27 |
Systems and methods for insitu lens cleaning in immersion lithography Grant 8,654,305 - Sewell , et al. February 18, 2 | 2014-02-18 |
Immersion lithographic apparatus with immersion fluid re-circulating system Grant 8,629,970 - Sewell , et al. January 14, 2 | 2014-01-14 |
Re-flow and buffer system for immersion lithography Grant 8,451,422 - Sewell , et al. May 28, 2 | 2013-05-28 |
Liquid immersion lithography system comprising a tilted showerhead relative to a substrate Grant 8,203,693 - Khmelichek , et al. June 19, 2 | 2012-06-19 |
Lithographic Apparatus, Fluid Combining Unit And Device Manufacturing Method App 20120013866 - MULKENS; Johannes Catharinus Hubertus ;   et al. | 2012-01-19 |
Systems And Methods For Thermally-induced Aberration Correction In Immersion Lithography App 20110261335 - Sewell; Harry ;   et al. | 2011-10-27 |
Lithographic apparatus with a fluid combining unit and related device manufacturing method Grant 8,045,135 - Mulkens , et al. October 25, 2 | 2011-10-25 |
Systems and methods for thermally-induced aberration correction in immersion lithography Grant 7,995,185 - Sewell , et al. August 9, 2 | 2011-08-09 |
Fluid Handling Device, An Immersion Lithographic Apparatus And A Device Manufacturing Method App 20100214544 - Sewell; Harry ;   et al. | 2010-08-26 |
Lithographic apparatus and device manufacturing method Grant 7,684,014 - Sewell , et al. March 23, 2 | 2010-03-23 |
Liquid Immersion Lithography System Comprising a Tilted Showerhead Relative to a Substrate App 20100053574 - Khmelichek; Aleksandr ;   et al. | 2010-03-04 |
Re-flow And Buffer System For Immersion Lithography App 20090213343 - Sewell; Harry ;   et al. | 2009-08-27 |
Immersion Lithography Apparatus App 20090190106 - SEWELL; Harry ;   et al. | 2009-07-30 |
Immersion Lithographic Apparatus With Immersion Fluid Re-circulating System App 20090185149 - SEWELL; Harry ;   et al. | 2009-07-23 |
Systems and Methods for Insitu Lens Cleaning Using Ozone in Immersion Lithography App 20090109411 - Sewell; Harry ;   et al. | 2009-04-30 |
Systems and methods for insitu lens cleaning in immersion lithography App 20080198343 - Sewell; Harry ;   et al. | 2008-08-21 |
Lithographic apparatus, a dryer and a method of removing liquid from a surface App 20080192214 - Leenders; Martinus Hendrikus Antonius ;   et al. | 2008-08-14 |
Lithographic apparatus and device manufacturing method App 20080129973 - McCafferty; Diane ;   et al. | 2008-06-05 |
Lithographic apparatus and device manufacturing method App 20080117392 - Mulkens; Johannes Catharinus Hubertus ;   et al. | 2008-05-22 |
Liquid immersion lithography system having a tilted showerhead relative to a substrate App 20060238721 - Kate; Nicolaas Ten ;   et al. | 2006-10-26 |