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Maskless digital lithography systems and methods with image motion compensation App 20160085156 - Markle; David A. | 2016-03-24 |
Apparatus and method of direct writing with photons beyond the diffraction limit using two-color resist Grant 9,195,139 - Markle , et al. November 24, 2 | 2015-11-24 |
Apparatus and method of direct writing with photons beyond the diffraction limit App 20150331330 - Markle; David A. ;   et al. | 2015-11-19 |
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Apparatus and method of direct writing with photons beyond the diffraction limit using two-color resist App 20150185617 - Markle; David A. ;   et al. | 2015-07-02 |
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Method of direct writing with photons beyond the diffraction limit Grant 8,642,232 - Markle , et al. February 4, 2 | 2014-02-04 |
Apparatus and methods for microscopy having resolution beyond the Abbe limit App 20130286179 - Markle; David A. ;   et al. | 2013-10-31 |
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Apparatus and method of direct writing with photons beyond the diffraction limit App 20130130182 - Markle; David A. ;   et al. | 2013-05-23 |
Apparatuses and methods for irradiating a substrate to avoid substrate edge damage Grant 8,314,360 - Grek , et al. November 20, 2 | 2012-11-20 |
Apparatus and methods for improving the intensity profile of a beam image used to process a substrate Grant 8,153,930 - Hawryluk , et al. April 10, 2 | 2012-04-10 |
Apparatuses and methods for irradiating a substrate to avoid substrate edge damage App 20110249071 - Grek; Boris ;   et al. | 2011-10-13 |
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High-resolution, common-path interferometric imaging systems and methods App 20110075928 - Jeong; Hwan J. ;   et al. | 2011-03-31 |
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Methods and apparatus for remote temperature measurement of a specular surface Grant 7,767,927 - Markle August 3, 2 | 2010-08-03 |
Laser thermal processing with laser diode radiation Grant 7,763,828 - Talwar , et al. July 27, 2 | 2010-07-27 |
Methods and apparatus for temperature measurement and control on a remote substrate surface Grant 7,744,274 - Grek , et al. June 29, 2 | 2010-06-29 |
Heated chuck for laser thermal processing Grant 7,731,798 - Shareef , et al. June 8, 2 | 2010-06-08 |
Computer architecture for and method of high-resolution imaging using a low-resolution image transducer Grant 7,671,966 - Markle March 2, 2 | 2010-03-02 |
Laser thermal processing with laser diode radiation App 20090095724 - Talwar; Somit ;   et al. | 2009-04-16 |
Apparatus and methods for improving the intensity profile of a beam image used to process a substrate Grant 7,514,305 - Hawryluk , et al. April 7, 2 | 2009-04-07 |
Laser thermal annealing of lightly doped silicon substrates Grant 7,494,942 - Talwar , et al. February 24, 2 | 2009-02-24 |
Apparatuses and methods for irradiating a substrate to avoid substrate edge damage App 20080173620 - Grek; Boris ;   et al. | 2008-07-24 |
Method of thermal processing a substrate with direct and redirected reflected radiation Grant 7,399,945 - Talwar , et al. July 15, 2 | 2008-07-15 |
Laser thermal processing chuck with a thermal compensating heater module Grant 7,326,877 - Shareef , et al. February 5, 2 | 2008-02-05 |
Methods and apparatus for truncating an image formed with coherent radiation Grant 7,253,376 - Zhang , et al. August 7, 2 | 2007-08-07 |
Methods and apparatus for irradiating a substrate to avoid substrate edge damage Grant 7,238,915 - Grek , et al. July 3, 2 | 2007-07-03 |
Methods and apparatus for irradiating a substrate to avoid substrate edge damage App 20070068908 - Grek; Boris ;   et al. | 2007-03-29 |
Laser scanning apparatus and methods for thermal processing App 20070051708 - Talwar; Somit ;   et al. | 2007-03-08 |
Laser thermal processing chuck with a thermal compensating heater module App 20070004232 - Shareef; Iqbal A. ;   et al. | 2007-01-04 |
Laser scanning apparatus and methods for thermal processing Grant 7,157,660 - Talwar , et al. January 2, 2 | 2007-01-02 |
Laser scanning apparatus and methods for thermal processing Grant 7,154,066 - Talwar , et al. December 26, 2 | 2006-12-26 |
Laser thermal annealing of lightly doped silicon substrates Grant 7,148,159 - Talwar , et al. December 12, 2 | 2006-12-12 |
Methods and apparatus for remote temperature measurement of a specular surface App 20060255017 - Markle; David A. | 2006-11-16 |
Laser thermal annealing of lightly doped silicon substrates App 20060252282 - Talwar; Somit ;   et al. | 2006-11-09 |
Laser thermal annealing of lightly doped silicon substrates App 20060246694 - Talwar; Somit ;   et al. | 2006-11-02 |
Laser thermal annealing of lightly doped silicon substrates Grant 7,098,155 - Talwar , et al. August 29, 2 | 2006-08-29 |
Methods and apparatus for truncating an image formed with coherent radiation App 20060163223 - Zhang; Shiyu ;   et al. | 2006-07-27 |
Heated chuck for laser thermal processing App 20060113290 - Shareef; Iqbal A. ;   et al. | 2006-06-01 |
Recycling optical systems and methods for thermal processing App 20060091120 - Markle; David A. | 2006-05-04 |
Laser thermal processing with laser diode radiation App 20050189329 - Talwar, Somit ;   et al. | 2005-09-01 |
Laser thermal annealing of lightly doped silicon substrates App 20050103998 - Talwar, Somit ;   et al. | 2005-05-19 |
Computer architecture for and method of high-resolution imaging using a low-resolution image transducer App 20050083511 - Markle, David A. | 2005-04-21 |
Laser thermal annealing of lightly doped silicon substrates App 20050067384 - Talwar, Somit ;   et al. | 2005-03-31 |
Laser thermal processing with laser diode radiation App 20050045604 - Talwar, Somit ;   et al. | 2005-03-03 |
Computer architecture for and method of high-resolution imaging using a low-resolution image transducer Grant 6,833,908 - Markle December 21, 2 | 2004-12-21 |
Methods for annealing a substrate and article produced by such methods Grant 6,825,101 - Hawryluk , et al. November 30, 2 | 2004-11-30 |
Apparatus and methods for thermal reduction of optical distortion Grant 6,809,888 - Markle October 26, 2 | 2004-10-26 |
Apparatus And Methods For Thermal Reduction Of Optical Distortion App 20040207925 - Markle, David A. | 2004-10-21 |
Laser scanning apparatus and methods for thermal processing App 20040188396 - Talwar, Somit ;   et al. | 2004-09-30 |
Laser scanning apparatus and methods for thermal processing App 20040173585 - Talwar, Somit ;   et al. | 2004-09-09 |
Lithography system and method for device manufacture Grant 6,753,947 - Meisburger , et al. June 22, 2 | 2004-06-22 |
Laser scanning apparatus and methods for thermal processing Grant 6,747,245 - Talwar , et al. June 8, 2 | 2004-06-08 |
Laser Scanning Apparatus And Methods For Thermal Processing App 20040084427 - Talwar, Somit ;   et al. | 2004-05-06 |
System and method for reducing colinearity effects in manufacturing microdevices Grant 6,731,376 - Markle May 4, 2 | 2004-05-04 |
Method of and apparatus for defining disk tracks in magnetic recording media Grant 6,671,235 - Hawryluk , et al. December 30, 2 | 2003-12-30 |
Motion compensation system and method for lithography Grant 6,556,279 - Meisburger , et al. April 29, 2 | 2003-04-29 |
Apparatus having line source of radiant energy for exposing a substrate Grant 6,531,681 - Markle , et al. March 11, 2 | 2003-03-11 |
Lithography system and method for device manufacture App 20020186359 - Meisburger, Dan ;   et al. | 2002-12-12 |
Computer architecture for and method of high-resolution imaging using a low-resolution image transducer App 20020171816 - Markle, David A. | 2002-11-21 |
Thermally induced phase switch for laser thermal processing Grant 6,479,821 - Hawryluk , et al. November 12, 2 | 2002-11-12 |
Methods For Determining Wavelength And Pulse Length Of Radiant Energy Used For Annealing App 20010039063 - MARKLE, DAVID A. ;   et al. | 2001-11-08 |
Magnetically positioned X-Y stage having six degrees of freedom Grant 6,072,251 - Markle June 6, 2 | 2000-06-06 |
Magnetically-positioned X-Y stage having six-degrees of freedom Grant 5,886,432 - Markle March 23, 1 | 1999-03-23 |
Point diffraction interferometer and pin mirror for use therewith Grant 5,822,066 - Jeong , et al. October 13, 1 | 1998-10-13 |
Maskless, reticle-free, lithography Grant 5,691,541 - Ceglio , et al. November 25, 1 | 1997-11-25 |
Pattern recognition alignment system Grant 5,621,813 - Brown , et al. April 15, 1 | 1997-04-15 |
Beamsplitter in single fold optical system and optical variable magnification method and system Grant 5,557,469 - Markle , et al. September 17, 1 | 1996-09-17 |
Alignment system for a Half-Field Dyson projection system Grant 5,402,205 - Markle , et al. March 28, 1 | 1995-03-28 |
Focusing technique suitable for use with an unpatterned specular substrate Grant 5,266,790 - Markle , et al. November 30, 1 | 1993-11-30 |
Optical lithographic system Grant 4,650,315 - Markle March 17, 1 | 1987-03-17 |
Alignment and focusing system for a scanning mask aligner Grant 4,549,084 - Markle October 22, 1 | 1985-10-22 |
Optical transformer using curved strip waveguides to achieve a nearly unchanged F/number Grant 4,530,565 - Markle July 23, 1 | 1985-07-23 |
Method and apparatus for measuring intensity variation in a light source Grant 4,516,852 - Liu , et al. May 14, 1 | 1985-05-14 |
Automatic mask alignment Grant 4,353,087 - Berry , et al. October 5, 1 | 1982-10-05 |
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Three-fold mirror assembly for a scanning projection system Grant 3,951,546 - Markle April 20, 1 | 1976-04-20 |
Method And Apparatus For Sensing Fluorescence Radiation Grant 3,769,516 - Markle , et al. October 30, 1 | 1973-10-30 |
Solar-stimulated Fluorescent Radiation Detection Method And Apparatus Grant 3,641,344 - Markle February 8, 1 | 1972-02-08 |
Method And Apparatus For Sensing Fluorescent Substances Grant 3,598,994 - Markle August 10, 1 | 1971-08-10 |