Patent | Date |
---|
Optical system and methods for the determination of stress in a substrate Grant 10,113,861 - Maris October 30, 2 | 2018-10-30 |
Optical System And Methods For The Determination Of Stress In A Substrate App 20170199027 - MARIS; Humphrey J. | 2017-07-13 |
Optical testing of a multi quantum well semiconductor device Grant 9,329,224 - Maris May 3, 2 | 2016-05-03 |
Substrate analysis using surface acoustic wave metrology Grant 9,041,931 - Colgan , et al. May 26, 2 | 2015-05-26 |
Optical Testing Of A Multi Quantum Well Semiconductor Device App 20140111241 - Maris; Humphrey J. | 2014-04-24 |
Opto-acoustic methods and apparatus for performing high resolution acoustic imaging and other sample probing and modification operations Grant 8,567,253 - Maris , et al. October 29, 2 | 2013-10-29 |
Picosecond ultrasonic system incorporating an optical cavity Grant 8,537,363 - Maris September 17, 2 | 2013-09-17 |
Substrate Analysis Using Surface Acoustic Wave Metrology App 20120309116 - Colgan; Michael ;   et al. | 2012-12-06 |
Enhanced ultra-high resolution acoustic microscope Grant 8,302,480 - Maris , et al. November 6, 2 | 2012-11-06 |
Optical method and system for the characterization of laterally-patterned samples in integrated circuits Grant 7,894,070 - Maris February 22, 2 | 2011-02-22 |
Enhanced Ultra-high Resolution Acoustic Microscope App 20110036171 - Maris; Humphrey J. ;   et al. | 2011-02-17 |
Optical Method For the Characterization of Laterally-Patterned Samples in Integrated Circuits App 20100332203 - Maris; Humphrey J. | 2010-12-30 |
Optical method for the characterization of laterally-patterned samples in integrated circuits Grant 7,782,471 - Maris August 24, 2 | 2010-08-24 |
Picosecond Ultrasonic System Incorporating An Optical Cavity App 20100157316 - Maris; Humphrey J. | 2010-06-24 |
Opto-acoustic methods and apparatus for performing high resolution acoustic imaging and other sample probing and modification operations Grant 7,624,640 - Maris , et al. December 1, 2 | 2009-12-01 |
Optical method for the characterization of laterally patterned samples in integrated circuits Grant 7,505,154 - Maris March 17, 2 | 2009-03-17 |
Optical method for the characterization of laterally patterned samples in integrated circuits App 20080151219 - Maris; Humphrey J. | 2008-06-26 |
Optical method and system for the characterization of laterally-patterned samples in integrated circuits Grant 7,339,676 - Maris March 4, 2 | 2008-03-04 |
Opto-acoustic methods and apparatus for performing high resolution acoustic imaging and other sample probing and modification operations App 20060272419 - Maris; Humphrey J. ;   et al. | 2006-12-07 |
Opto-acoustic methods and apparatus for perfoming high resolution acoustic imaging and other sample probing and modification operations App 20060272418 - Maris; Humphrey J. ;   et al. | 2006-12-07 |
Ultrasonic generator and detector using an optical mask having a grating for launching a plurality of spatially distributed, time varying strain pulses in a sample Grant 6,512,586 - Maris January 28, 2 | 2003-01-28 |
Ultrasonic generator and detector using an optical mask having a grating for launching a plurality of spatially distributed, time varying strain pulses in a sample App 20020080355 - Maris, Humphrey J. | 2002-06-27 |
Electronic and optoelectronic devices using fractional carriers App 20020066936 - Maris, Humphrey J. | 2002-06-06 |
Optical stress generator and detector Grant 6,400,449 - Maris , et al. June 4, 2 | 2002-06-04 |
Optical method for the determination of grain orientation in films App 20020054295 - Maris, Humphrey J. | 2002-05-09 |
Ultrasonic generator and detector using an optical mask having a grating for launching a plurality of spatially distributed, time varying strain pulses in a sample Grant 6,381,019 - Maris April 30, 2 | 2002-04-30 |
Optical method for the characterization of laterally-patterned samples in integrated circuits App 20020018210 - Maris, Humphrey J. | 2002-02-14 |
Optical method for the characterization of laterally-patterned samples in integrated circuits Grant 6,321,601 - Maris November 27, 2 | 2001-11-27 |
Optical method for the determination of grain orientation in films Grant 6,317,216 - Maris November 13, 2 | 2001-11-13 |
Optical stress generator and detector App 20010028460 - Maris, Humphrey J. ;   et al. | 2001-10-11 |
Optical stress generator and detector Grant 6,271,921 - Maris , et al. August 7, 2 | 2001-08-07 |
Optical method for the characterization of the electrical properties of semiconductors and insulating films Grant 6,211,961 - Maris April 3, 2 | 2001-04-03 |
Apparatus and method for the determination of grain size in thin films Grant 6,191,855 - Maris February 20, 2 | 2001-02-20 |
Optical stress generator and detector Grant 6,175,416 - Maris , et al. January 16, 2 | 2001-01-16 |
Apparatus and method for the determination of grain size in thin films Grant 6,038,026 - Maris March 14, 2 | 2000-03-14 |
Apparatus and method for measurement of the mechanical properties and electromigration of thin films Grant 6,025,918 - Maris February 15, 2 | 2000-02-15 |
Optical method for the characterization of the electrical properties of semiconductors and insulating films Grant 6,008,906 - Maris December 28, 1 | 1999-12-28 |
Optical stress generator and detector Grant 5,959,735 - Maris , et al. September 28, 1 | 1999-09-28 |
Optical method for the determination of stress in thin films Grant 5,864,393 - Maris January 26, 1 | 1999-01-26 |
Optical method for determining the mechanical properties of a material Grant 5,844,684 - Maris , et al. December 1, 1 | 1998-12-01 |
Optical stress generator and detector Grant 5,748,318 - Maris , et al. May 5, 1 | 1998-05-05 |
Apparatus and method for characterizing thin film and interfaces using an optical heat generator and detector Grant 5,748,317 - Maris , et al. May 5, 1 | 1998-05-05 |
Ultrafast optical technique for the characterization of altered materials Grant 5,706,094 - Maris January 6, 1 | 1998-01-06 |
Optical generator and detector of stress pulses Grant 4,710,030 - Tauc , et al. December 1, 1 | 1987-12-01 |