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Patent applications and USPTO patent grants for Marinaro; Vincent L..The latest application filed is for "semiconductor wafer manufacturing method and apparatus for an improved heat exchanger for a photoresist developer".
Patent | Date |
---|---|
Apparatus for automatically cleaning resist nozzle Grant 6,418,946 - Marinaro , et al. July 16, 2 | 2002-07-16 |
Semiconductor wafer manufacturing method and apparatus for an improved heat exchanger for a photoresist developer App 20010012457 - Wakamiya, Ted ;   et al. | 2001-08-09 |
Method for automatically cleaning resist nozzle Grant 6,170,494 - Marinaro , et al. January 9, 2 | 2001-01-09 |
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