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Patent applications and USPTO patent grants for Marie Dierichs; Marcel Mathijs Theodore.The latest application filed is for "lithographic apparatus and device manufacturing method".
Patent | Date |
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Lithographic Apparatus And Device Manufacturing Method App 20140071420 - Loopstra; Erik Roelof ;   et al. | 2014-03-13 |
Lithographic Apparatus And Device Manufacturing Method App 20120008117 - DE SMIT; Joannes Theodoor ;   et al. | 2012-01-12 |
Lithographic Apparatus And Device Manufacturing Method App 20110317138 - LIPSON; Matthew ;   et al. | 2011-12-29 |
Lithographic Apparatus And Device Manufacturing Method App 20100141918 - Marie Dierichs; Marcel Mathijs Theodore ;   et al. | 2010-06-10 |
Contamination barrier with expandable lamellas App 20070222956 - Bakker; Levinus Pieter ;   et al. | 2007-09-27 |
Device manufacturing method, top coat material and substrate App 20060138602 - Mulkens; Johannes Catharinus Hubertus ;   et al. | 2006-06-29 |
Lithographic apparatus and device manufacturing method App 20060139599 - Kruijswijk; Stefan Geerte ;   et al. | 2006-06-29 |
Uniformity correction for lithographic apparatus App 20060126036 - Kremer; Alexander ;   et al. | 2006-06-15 |
Optical component, optical system including such an optical component, lithographic apparatus, method of correcting apodization in an optical system, device manufacturing method, and device manufactured thereby App 20060091324 - Marie Dierichs; Marcel Mathijs Theodore | 2006-05-04 |
Lithographic apparatus and device manufacturing method App 20050134818 - Van Dijsseldonk, Antonius Johannes Josephus ;   et al. | 2005-06-23 |
Method for coating a substrate for euv lithography and substrate with photoresist layer App 20050008864 - Ingen Schenau, Koen Van ;   et al. | 2005-01-13 |
Contamination barrier with expandable lamellas App 20040184014 - Bakker, Levinus Pieter ;   et al. | 2004-09-23 |
Device manufacturing method and computer program App 20040137677 - Lowisch, Martin ;   et al. | 2004-07-15 |
Lithographic apparatus and device manufacturing method App 20040013226 - Bakker, Levinus Pieter ;   et al. | 2004-01-22 |
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