Patent | Date |
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Fluid Supply Package App 20190078696 - Tom; Glenn M. ;   et al. | 2019-03-14 |
Ventilation Gas Management Systems And Processes App 20160305682 - Olander; W. Karl ;   et al. | 2016-10-20 |
Ventilation gas management systems and processes Grant 9,383,064 - Olander , et al. July 5, 2 | 2016-07-05 |
Component for solar adsorption refrigeration system and method of making such component Grant 9,132,412 - Carruthers , et al. September 15, 2 | 2015-09-15 |
Component For Solar Adsorption Refrigeration System And Method Of Making Such Component App 20140020419 - Carruthers; J. Donald ;   et al. | 2014-01-23 |
Cleaning of semiconductor processing systems Grant 8,603,252 - Dimeo , et al. December 10, 2 | 2013-12-10 |
Component for solar adsorption refrigeration system and method of making such component Grant 8,539,781 - Carruthers , et al. September 24, 2 | 2013-09-24 |
Ventilation Gas Management Systems And Processes App 20120315837 - Olander; W. Karl ;   et al. | 2012-12-13 |
Fluid storage and dispensing vessels having colorimetrically verifiable leak-tightness and method of making same Grant 8,153,434 - Marganski , et al. April 10, 2 | 2012-04-10 |
Fluid Storage And Dispensing Vessels Having Colorimetrically Verifiable Leak-tightness And Method Of Making Same App 20110284576 - Marganski; Paul J. ;   et al. | 2011-11-24 |
Fluid storage and dispensing vessels having colorimetrically verifiable leak-tightness, and method of making same Grant 8,003,391 - Marganski , et al. August 23, 2 | 2011-08-23 |
Component For Solar Adsorption Refrigeration System And Method Of Making Such Component App 20110048063 - Carruthers; J. Donald ;   et al. | 2011-03-03 |
Cleaning Of Semiconductor Processing Systems App 20100154835 - Dimeo; Frank ;   et al. | 2010-06-24 |
System For Delivery Of Reagents From Solid Sources Thereof App 20080191153 - Marganski; Paul J. ;   et al. | 2008-08-14 |
Method and apparatus for the abatement of toxic gas components from a semiconductor manufacturing process effluent stream Grant 7,364,603 - Sweeney , et al. April 29, 2 | 2008-04-29 |
Infrared Gas Detection Systems And Methods App 20080006775 - Arno; Jose I. ;   et al. | 2008-01-10 |
Fluid Storage And Dispensing Vessels Having Colorimetrically Verifiable Leak-tightness, And Method Of Making Same App 20070284379 - Marganski; Paul J. ;   et al. | 2007-12-13 |
Fluid storage and dispensing vessels having colorimetrically verifiable leak-tightness, and method of making same Grant 7,253,002 - Marganski , et al. August 7, 2 | 2007-08-07 |
Fluid storage and dispensing vessels having colorimetrically veriflable leak-tightness, and method of making same App 20050092761 - Marganski, Paul J. ;   et al. | 2005-05-05 |
Gas-using facility including portable dry scrubber system and/or over-pressure control arrangement App 20050089455 - Marganski, Paul J. ;   et al. | 2005-04-28 |
Chemisorbent system for abatement of effluent species App 20050061147 - Marganski, Paul J. ;   et al. | 2005-03-24 |
Method and apparatus for the abatement of toxic gas components from a semiconductor manufacturing process effluent stream App 20050056148 - Sweeney, Joseph D. ;   et al. | 2005-03-17 |
Colorimetric gas detector and windowed process chamber App 20050042136 - Marganski, Paul J. ;   et al. | 2005-02-24 |
Method and apparatus for the abatement of toxic gas components from a semiconductor manufacturing process effluent stream Grant 6,805,728 - Sweeney , et al. October 19, 2 | 2004-10-19 |
Low pressure drop canister for fixed bed scrubber applications and method of using same App 20040159235 - Marganski, Paul J. ;   et al. | 2004-08-19 |
Method and apparatus for the abatement of toxic gas components from a semiconductor manufacturing process effluent stream App 20040107833 - Sweeney, Joseph D. ;   et al. | 2004-06-10 |