Maraschin; Robert A.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Maraschin; Robert A..The latest application filed is for "low contamination high density plasma etch chambers and methods for making the same".

Company Profile

0.10.1

Maraschin; Robert A. - Cupertino CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Low contamination high density plasma etch chambers and methods for making the same Grant 6,583,064 - Wicker , et al. June 24, 2	2003-06-24
Contamination controlling method and apparatus for a plasma processing chamber Grant 6,464,843 - Wicker , et al. October 15, 2	2002-10-15
Low contamination high density plasma etch chambers and methods for making the same App 20020102858 - Wicker, Thomas E. ; et al.	2002-08-01
Low contamination high density plasma etch chambers and methods for making the same Grant 6,394,026 - Wicker , et al. May 28, 2	2002-05-28
Semiconductor processing equipment having radiant heated ceramic liner Grant 6,227,140 - Kennedy , et al. May 8, 2	2001-05-08
Load controlled rapid assembly clamp ring Grant 6,200,415 - Maraschin March 13, 2	2001-03-13
Apparatus for control of deposit build-up on an inner surface of a plasma processing chamber Grant 6,155,203 - Kennedy , et al. December 5, 2	2000-12-05
Low contamination high density plasma etch chambers and methods for making the same Grant 6,129,808 - Wicker , et al. October 10, 2	2000-10-10
Particle controlling method and apparatus for a plasma processing chamber Grant 5,993,594 - Wicker , et al. November 30, 1	1999-11-30
Temperature controlling method and apparatus for a plasma processing chamber Grant 5,863,376 - Wicker , et al. January 26, 1	1999-01-26
Method and system for delivering liquid reagents to processing vessels Grant 5,098,741 - Nolet , et al. March 24, 1	1992-03-24

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