| Patent | Date |
|---|
Method And Apparatus For Aligning Substrates On A Substrate Support Unit
App 20190258173 - SCHIPPER; Bart | 2019-08-22 |
Method And System For Fabricating Unique Chips Using A Charged Particle Multi-beamlet Lithography System
App 20190205495 - van Kervinck; Marcel Nicolaas Jacobus ; et al. | 2019-07-04 |
Substrate processing apparatus
Grant 10,324,385 - Peijster , et al. | 2019-06-18 |
Charged particle lithography system
Grant 10,297,420 - Van De Peut , et al. | 2019-05-21 |
Lithography system, sensor, converter element and method of manufacture
Grant RE47,287 - Hanfoug | 2019-03-12 |
Enclosure for a target processing machine
Grant 10,144,134 - Vijverberg , et al. De | 2018-12-04 |
Method and apparatus for aligning substrates on a substrate support unit
Grant 10,133,186 - Schipper November 20, 2 | 2018-11-20 |
Method and encoding device for encoding a sequence of m-bit pattern words and outputting a frame comprising corresponding n-bit symbols
Grant 10,110,343 - Wieland October 23, 2 | 2018-10-23 |
Control system and method for lithography apparatus
Grant 10,096,450 - Steenstra October 9, 2 | 2018-10-09 |
Load lock system and method for transferring substrates in a lithography system
Grant 10,087,019 - Dansberg , et al. October 2, 2 | 2018-10-02 |
Aberration Correction In Charged Particle System
App 20180277334 - VAN VEEN; Alexander Hendrik Vincent ; et al. | 2018-09-27 |
Method and arrangement for handling and processing substrates
Grant 10,078,274 - De Jong , et al. September 18, 2 | 2018-09-18 |
Fabricating unique chips using a charged particle multi-beamlet lithography system
Grant 10,079,206 - van Kervinck , et al. September 18, 2 | 2018-09-18 |
Method And System For The Removal And/or Avoidance Of Contamination In Charged Particle Beam Systems
App 20180236505 - SMITS; Marc ; et al. | 2018-08-23 |
Method of determining a position of a substrate in a lithography system, substrate for use in such a method, and lithography system for carrying out such method
Grant 10,054,863 - De Boer , et al. August 21, 2 | 2018-08-21 |
Adjustment assembly and substrate exposure system comprising such an adjustment assembly
Grant 10,048,599 - Peijster August 14, 2 | 2018-08-14 |
High voltage shielding and cooling in a charged particle beam generator
Grant 10,037,864 - Van Veen , et al. July 31, 2 | 2018-07-31 |
Adjustment assembly and substrate exposure system comprising such an adjustment assembly
App 20180188659 - PEIJSTER; Jerry Johannes Martinus | 2018-07-05 |
Feedthrough Device And Signal Conductor Path Arrangement
App 20180182514 - Sprengers; Johannes Petrus | 2018-06-28 |
Optical Fiber Feedthrough Device And Fiber Path Arrangement
App 20180182594 - Sprengers; Johannes Petrus ; et al. | 2018-06-28 |
Optical fiber feedthrough device and fiber path arrangement
Grant 10,008,362 - Sprengers , et al. June 26, 2 | 2018-06-26 |
Method and system for the removal and/or avoidance of contamination in charged particle beam systems
Grant 9,981,293 - Smits , et al. May 29, 2 | 2018-05-29 |
Method for exposing a wafer
Grant 9,978,562 - Van De Peut , et al. May 22, 2 | 2018-05-22 |
Fabricating Unique Chips Using A Charged Particle Multi-beamlet Lithography System
App 20180122737 - van Kervinck; Marcel Nicolaas Jacobus ; et al. | 2018-05-03 |
Fabricating Unique Chips Using A Charged Particle Multi-beamlet Lithography System
App 20180120704 - van Kervinck; Marcel Nicolaas Jacobus ; et al. | 2018-05-03 |
Method And Apparatus For Aligning Substrates On A Substrate Support Unit
App 20180113386 - SCHIPPER; Bart | 2018-04-26 |
Target processing unit
Grant 9,941,093 - Koning , et al. April 10, 2 | 2018-04-10 |
Vacuum chamber with a thick aluminum base plate
Grant 9,939,728 - Peijster April 10, 2 | 2018-04-10 |
Beam grid layout
Grant 9,934,943 - Kuiper , et al. April 3, 2 | 2018-04-03 |
Drying apparatus for use in a lithography system
Grant 9,922,801 - de Jong March 20, 2 | 2018-03-20 |
Secure Chips With Serial Numbers
App 20180069710 - De Langen; Johannes Cornelis Jacobus ; et al. | 2018-03-08 |
Secure Chips With Serial Numbers
App 20180068955 - De Langen; Johannes Cornelis Jacobus ; et al. | 2018-03-08 |
Method And System For Fabricating Unique Chips Using A Charged Particle Multi-beamlet Lithography System
App 20180068047 - van Kervinck; Marcel Nicolaas Jacobus ; et al. | 2018-03-08 |
Multi-electrode electron optics
Grant 9,905,322 - Wieland , et al. February 27, 2 | 2018-02-27 |
Method and device for generating a decoded and synchronized output
Grant 9,887,707 - Wieland February 6, 2 | 2018-02-06 |
Apparatus And Method For Processing Or Imaging A Sample
App 20180033586 - SCHEFFERS; Paul IJmert ; et al. | 2018-02-01 |
Method And Device For Generating A Decoded And Synchronized Output
App 20180006668 - WIELAND; Marco Jan-Jaco | 2018-01-04 |
Method and Encoding Device for Encoding a Sequence of M-Bit Pattern Words and Outputting a Frame Comprising Corresponding N-Bit Symbols
App 20180006765 - WIELAND; Marco Jan-Jaco | 2018-01-04 |
Substrate holding device, method for manufacturing such a device, and use of such a device in a lithography system
Grant 9,829,804 - Scheffers , et al. November 28, 2 | 2017-11-28 |
Electrostatic Lens Structure
App 20170309438 - STEENBRINK; Stijn Willem Herman Karel ; et al. | 2017-10-26 |
Substrate Processing Apparatus
App 20170307987 - PEIJSTER; Jerry Johannes Martinus ; et al. | 2017-10-26 |
Method And System For The Removal And/or Avoidance Of Contamination In Charged Particle Beam Systems
App 20170304878 - Smits; Marc ; et al. | 2017-10-26 |
Lithography System With Differential Interferometer Module
App 20170277043 - de Boer; Guido ; et al. | 2017-09-28 |
Lithography system and method for processing a target, such as a wafer
Grant 9,760,028 - Vergeer September 12, 2 | 2017-09-12 |
High voltage shielding and cooling in a charged particle beam generator
App 20170250053 - VAN VEEN; Alexander Hendrik Vincent ; et al. | 2017-08-31 |
Vacuum Chamber Arrangement For Charged Particle Beam Generator
App 20170221674 - VAN VEEN; Alexander Hendrik Vincent ; et al. | 2017-08-03 |
Substrate processing apparatus
Grant 9,703,213 - Peijster , et al. July 11, 2 | 2017-07-11 |
Control System And Method For Lithography Apparatus
App 20170186582 - STEENSTRA; HERRE TJERK | 2017-06-29 |
Electrostatic lens structure
Grant RE46,452 - Steenbrink , et al. June 27, 2 | 2017-06-27 |
Dual pass scanning
Grant 9,691,589 - Van De Peut , et al. June 27, 2 | 2017-06-27 |
Interferometer module
Grant 9,690,215 - de Boer , et al. June 27, 2 | 2017-06-27 |
Lithography system with differential interferometer module
Grant 9,678,443 - de Boer , et al. June 13, 2 | 2017-06-13 |
Charged particle lithography system with alignment sensor and beam measurement sensor
Grant 9,665,014 - Scheffers , et al. May 30, 2 | 2017-05-30 |
Lithography system, method of clamping and wafer table
Grant 9,665,013 - De Boer , et al. May 30, 2 | 2017-05-30 |
Method for determining a beamlet position and method for determining a distance between two beamlets in a multi-beamlet exposure apparatus
Grant 9,653,259 - Scheffers May 16, 2 | 2017-05-16 |
Charged particle lithography system and beam generator
Grant 9,653,261 - Van Veen , et al. May 16, 2 | 2017-05-16 |
Current measurement system
Grant 9,644,995 - Verburg , et al. May 9, 2 | 2017-05-09 |
Lithography system, method of clamping and wafer table
Grant 9,645,511 - De Boer , et al. May 9, 2 | 2017-05-09 |
Charged particle multi-beam apparatus including a manipulator device for manipulation of one or more charged particle beams
Grant 9,607,806 - Zonnevylle , et al. March 28, 2 | 2017-03-28 |
Apparatus for transferring a substrate in a lithography system
Grant 9,575,418 - Kuiper , et al. February 21, 2 | 2017-02-21 |
Multi-axis differential interferometer
Grant 9,551,563 - Couweleers , et al. January 24, 2 | 2017-01-24 |
Method And Arrangement For Handling And Processing Substrates
App 20160370704 - DE JONG; Hendrik Jan ; et al. | 2016-12-22 |
Network architecture and protocol for cluster of lithography machines
Grant 9,507,629 - Van Kervinck , et al. November 29, 2 | 2016-11-29 |
Method and apparatus for predicting a growth rate of deposited contaminants
Grant 9,506,881 - Smits November 29, 2 | 2016-11-29 |
Arrangement for transporting radicals
Grant 9,484,187 - Kruit , et al. November 1, 2 | 2016-11-01 |
Individual beam pattern placement verification in multiple beam lithography
Grant 9,484,188 - Vergeer November 1, 2 | 2016-11-01 |
Focusing electrode for cathode arrangement, electron gun, and lithography system comprising such electron gun
App 20160314935 - DINU-GURTLER; Laura ; et al. | 2016-10-27 |
Cathode arrangement, electron gun, and lithography system comprising such electron gun
Grant 9,466,453 - Dinu-Gurtler , et al. October 11, 2 | 2016-10-11 |
Method for forming an optical fiber array
Grant 9,457,549 - De Boer , et al. October 4, 2 | 2016-10-04 |
Method of clamping a substrate and clamp preparation unit using capillary clamping force
Grant 9,460,954 - De Jong , et al. October 4, 2 | 2016-10-04 |
Enhanced stitching by overlap dose and feature reduction
Grant 9,460,260 - Wieland October 4, 2 | 2016-10-04 |
Modulation device and power supply arrangement
Grant 9,455,122 - Van De Peut , et al. September 27, 2 | 2016-09-27 |
Cathode arrangement, electron gun, and lithography system comprising such electron gun
Grant 9,455,112 - Dinu-Gurtler , et al. September 27, 2 | 2016-09-27 |
Support module for lithography system
Grant 9,447,839 - Dunning September 20, 2 | 2016-09-20 |
Individual beam pattern placement verification in multiple beam lithography
App 20160268099 - VERGEER; Niels | 2016-09-15 |
Active shield for capacitive measurement system
Grant 9,400,195 - Verburg , et al. July 26, 2 | 2016-07-26 |
Lithography system for processing a target, such as a wafer, and a method for operating a lithography system for processing a target, such as a wafer
Grant 9,395,636 - De Boer , et al. July 19, 2 | 2016-07-19 |
Position determination in a lithography system using a substrate having a partially reflective position mark
Grant 9,395,635 - De Boer , et al. July 19, 2 | 2016-07-19 |
Lithography system for processing at least a part of a target
Grant 9,383,662 - Vergeer , et al. July 5, 2 | 2016-07-05 |
Electro-optical element for multiple beam alignment
Grant 9,362,084 - van den Brom , et al. June 7, 2 | 2016-06-07 |
Multi-electrode stack arrangement
Grant 9,355,751 - Urbanus , et al. May 31, 2 | 2016-05-31 |
Load Lock System And Method For Transferring Substrates In A Lithography System
App 20160137427 - Dansberg; Michel Pieter ; et al. | 2016-05-19 |
Target Processing Unit
App 20160126055 - Koning; Johan Joost ; et al. | 2016-05-05 |
Data path for lithography apparatus
Grant 9,305,747 - Wieland , et al. April 5, 2 | 2016-04-05 |
Lithography system, modulation device and method of manufacturing a fiber fixation substrate
Grant 9,287,081 - Van Melle , et al. March 15, 2 | 2016-03-15 |
Beam Grid Layout
App 20160071696 - KUIPER; Vincent Sylvester ; et al. | 2016-03-10 |
Cabinet for Electronic Equipment
App 20160066478 - VAN DEN BERGEN; David Johannes | 2016-03-03 |
Projection system with flexible coupling
Grant 9,268,216 - Peijster , et al. February 23, 2 | 2016-02-23 |
Target processing unit
Grant 9,263,234 - Koning , et al. February 16, 2 | 2016-02-16 |
Alignment of an interferometer module for use in an exposure tool
Grant 9,261,800 - de Boer , et al. February 16, 2 | 2016-02-16 |
Network architecture for lithography machine cluster
Grant 9,244,726 - Slot , et al. January 26, 2 | 2016-01-26 |
Device for spot size measurement at wafer level using a knife edge and a method for manufacturing such a device
Grant 9,240,306 - Meijer , et al. January 19, 2 | 2016-01-19 |
Apparatus for transferring a substrate in a lithography system
App 20160004173 - KUIPER; Vincent Sylvester ; et al. | 2016-01-07 |
Plasma generator
Grant 9,224,580 - Smits , et al. December 29, 2 | 2015-12-29 |
Lithography system and method of refracting
Grant 9,208,989 - Van Veen , et al. December 8, 2 | 2015-12-08 |
Assembly and a method for lifting a module of a lithography system in a vertical direction and a lithography system comprising such assembly
Grant 9,199,829 - Peijster December 1, 2 | 2015-12-01 |
Lithography system for processing a target, such as a wafer, a method for operating a lithography system for processing a target, such as a wafer and a substrate for use in such a lithography system
Grant 9,201,315 - De Boer , et al. December 1, 2 | 2015-12-01 |
Arrangement for transporting radicals
App 20150332899 - KRUIT; Pieter ; et al. | 2015-11-19 |
Enclosure For A Target Processing Machine
App 20150321356 - Vijverberg; Joep Gerard ; et al. | 2015-11-12 |
Proximity effect correction in a charged particle lithography system
Grant 9,184,026 - Wieland November 10, 2 | 2015-11-10 |
Apparatus for transferring a substrate in a lithography system
Grant 9,176,397 - Kuiper , et al. November 3, 2 | 2015-11-03 |
Network architecture and protocol for cluster of lithography machines
App 20150309424 - VAN KERVINCK; Marcel Nicolaas Jacobus ; et al. | 2015-10-29 |
Multi-electrode cooling arrangement
Grant 9,165,693 - Urbanus , et al. October 20, 2 | 2015-10-20 |
Guidance for target processing tool
Grant 9,163,664 - Peijster October 20, 2 | 2015-10-20 |
Charged particle lithography system with sensor assembly
Grant 9,153,415 - Scheffers October 6, 2 | 2015-10-06 |
Support structure for wafer table
Grant 9,146,480 - Kappelhof , et al. September 29, 2 | 2015-09-29 |
Interferometer Module
App 20150268032 - de Boer; Guido ; et al. | 2015-09-24 |
Arrangement and method for transporting radicals
Grant 9,123,507 - Kruit , et al. September 1, 2 | 2015-09-01 |
Proximity Effect Correction In A Charged Particle Lithography System
App 20150243481 - Wieland; Marco Jan-Jaco | 2015-08-27 |
Multi-axis Differential Interferometer
App 20150241200 - Couweleers; Godefridus Cornelius Antonius ; et al. | 2015-08-27 |
Enhanced Stitching By Overlap Dose And Feature Reduction
App 20150242563 - WIELAND; Marco Jan-Jaco | 2015-08-27 |
Method of handling a substrate support structure in a lithography system
Grant 9,117,631 - De Jong August 25, 2 | 2015-08-25 |
Charged particle optical device
Grant 9,111,657 - Chatoor , et al. August 18, 2 | 2015-08-18 |
Projection lens arrangement
Grant 9,105,439 - Wieland , et al. August 11, 2 | 2015-08-11 |
Electrical Charge Regulation For A Semiconductor Substrate During Charged Particle Beam Processing
App 20150206740 - BRANDT; Pieter Lucas | 2015-07-23 |
Charged particle beam lithography system and target positioning device
Grant 9,082,584 - Peijster , et al. July 14, 2 | 2015-07-14 |
Method for forming an optical fiber array
App 20150190994 - DE BOER; Guido ; et al. | 2015-07-09 |
Cathode arrangement, electron gun, and lithography system comprising such electron gun
App 20150187541 - DINU-GURTLER; Laura ; et al. | 2015-07-02 |
Cathode arrangement, electron gun, and lithography system comprising such electron gun
App 20150187533 - DINU-GURTLER; Laura ; et al. | 2015-07-02 |
Interferometer module
Grant 9,069,265 - de Boer , et al. June 30, 2 | 2015-06-30 |
Charged Particle Lithography System With Sensor Assembly
App 20150179398 - Scheffers; Paul IJmert ; et al. | 2015-06-25 |
Method of determining a position of a substrate in a lithography system, substrate for use in such a method, and lithography system for carrying out such method.
App 20150177625 - DE BOER; Guido ; et al. | 2015-06-25 |
Charged Particle Beam Lithography System And Target Positioning Device
App 20150162165 - PEIJSTER; Jerry ; et al. | 2015-06-11 |
Lithography system and projection method
Grant RE45,552 - Kruit , et al. June 9, 2 | 2015-06-09 |
Method For Determining A Beamlet Position And Method For Determining A Distance Between Two Beamlets In A Multi-beamlet Exposure Apparatus
App 20150155136 - Scheffers; Paul IJmert | 2015-06-04 |
Vacuum Chamber With Base Plate
App 20150144789 - Peijster; Jerry Johannes Martinus | 2015-05-28 |
Modulation Device And Power Supply Arrangement
App 20150136994 - Van De Peut; Teunis ; et al. | 2015-05-21 |
Multi-electrode Electron Optics
App 20150136995 - WIELAND; Marco Jan-Jaco ; et al. | 2015-05-21 |
Multi-electrode Cooling Arrangement
App 20150137009 - URBANUS; Willem Henk ; et al. | 2015-05-21 |
Multi-electrode Stack Arrangement
App 20150137010 - URBANUS; Willem Henk ; et al. | 2015-05-21 |
Arrangement of optical fibers, and a method of forming such arrangement
Grant 9,036,962 - De Boer , et al. May 19, 2 | 2015-05-19 |
Target positioning device, method for driving a target positioning device, and a lithography system comprising such a target positioning device
Grant 9,030,649 - Peijster May 12, 2 | 2015-05-12 |
Method for determining a distance between two beamlets in a multi-beamlet exposure apparatus
Grant 9,030,675 - Meijer May 12, 2 | 2015-05-12 |
Charged particle lithography system and beam generator
App 20150124229 - Van Veen; Alexander Hendrik Vincent ; et al. | 2015-05-07 |
Charged Particle Lithography System With Alignment Sensor And Beam Measurement Sensor
App 20150109601 - Scheffers; Paul IJmert ; et al. | 2015-04-23 |
Lithography System And Method For Processing A Target, Such As A Wafer
App 20150109598 - Vergeer; Niels | 2015-04-23 |
Target Processing Unit
App 20150090895 - Koning; Johan Joost ; et al. | 2015-04-02 |
Substrate support structure, clamp preparation unit, and lithography system
Grant 8,991,330 - De Jong March 31, 2 | 2015-03-31 |
Enhanced integrity projection lens assembly
Grant 8,987,679 - Koning , et al. March 24, 2 | 2015-03-24 |
Charged particle multi-beamlet lithography system, modulation device, and method of manufacturing thereof
Grant 8,987,677 - Wieland , et al. March 24, 2 | 2015-03-24 |
Charged Particle Optical Device
App 20150069259 - Chatoor; Sohail ; et al. | 2015-03-12 |
Method and Apparatus for Predicting a Growth Rate of Deposited Contaminants
App 20150060701 - Smits; Marc | 2015-03-05 |
Drying apparatus for use in a lithography system
App 20150052776 - de Jong; Hendrik Jan | 2015-02-26 |
Charged particle beam lithography system and target positioning device
Grant 8,957,395 - Peijster , et al. February 17, 2 | 2015-02-17 |
Support and positioning structure, semiconductor equipment system and method for positioning
Grant 8,952,342 - Peijster , et al. February 10, 2 | 2015-02-10 |
Arrangement and method for transporting radicals
App 20150028223 - Kruit; Pieter ; et al. | 2015-01-29 |
Method of processing a substrate in a lithography system
Grant 8,936,994 - Kuiper , et al. January 20, 2 | 2015-01-20 |
Support Module For Lithography System
App 20150014510 - Dunning; Alje Geert | 2015-01-15 |
Device For Spot Size Measurement At Wafer Level Using A Knife Edge And A Method For Manufacturing Such A Device
App 20150001423 - Meijer; Jan Andries ; et al. | 2015-01-01 |
Modulation device and charged particle multi-beamlet lithography system using the same
Grant 08921758 - | 2014-12-30 |
Modulation device and charged particle multi-beamlet lithography system using the same
Grant 8,921,758 - Wieland , et al. December 30, 2 | 2014-12-30 |
Charged particle lithography system with intermediate chamber
Grant 8,916,837 - Dinu-Gurtler , et al. December 23, 2 | 2014-12-23 |
Vibration isolation module and substrate processing system
Grant 8,905,369 - Peijster , et al. December 9, 2 | 2014-12-09 |
Lithography system and method of processing substrates in such a lithography system
Grant 8,895,943 - De Boer , et al. November 25, 2 | 2014-11-25 |
Reliability in a maskless lithography system
Grant 8,890,095 - Steenbrink , et al. November 18, 2 | 2014-11-18 |
Projection lens arrangement
Grant 8,890,094 - Wieland , et al. November 18, 2 | 2014-11-18 |
System for magnetic shielding
Grant 8,884,253 - Rosenthal November 11, 2 | 2014-11-11 |
Data path for lithography apparatus
Grant 8,884,255 - Derks , et al. November 11, 2 | 2014-11-11 |
Lithography system, sensor and measuring method
Grant RE45,206 - Kruit , et al. October 28, 2 | 2014-10-28 |
Method and system for realizing a vacuum in a vacuum chamber
Grant 8,857,465 - Baltussen October 14, 2 | 2014-10-14 |
Method of and system for exposing a target
Grant 8,859,983 - Wieland October 14, 2 | 2014-10-14 |
Capacitive sensing system
Grant 8,841,920 - De Boer , et al. September 23, 2 | 2014-09-23 |
Modulation device and charged particle multi-beamlet lithography system using the same
Grant 8,841,636 - Wieland , et al. September 23, 2 | 2014-09-23 |
Method For Exposing A Wafer
App 20140264085 - VAN DE PEUT; Teunis ; et al. | 2014-09-18 |
Charged Particle Lithography System
App 20140264086 - VAN DE PEUT; Teunis ; et al. | 2014-09-18 |
Deflection Scan Speed Adjustment During Charged Particle Exposure
App 20140264066 - VAN DE PEUT; Teunis ; et al. | 2014-09-18 |
Plasma Generator
App 20140252953 - Smits; Marc ; et al. | 2014-09-11 |
Plasma Generator
App 20140231667 - Smits; Marc ; et al. | 2014-08-21 |
Charged particle beam lithography system and target positioning device
Grant 8,796,644 - Peijster , et al. August 5, 2 | 2014-08-05 |
Electron beam exposure system
Grant RE45,049 - Wieland , et al. July 29, 2 | 2014-07-29 |
Vibration Isolation Module And Substrate Processing System
App 20140197330 - Peijster; Jerry Johannes Martinus ; et al. | 2014-07-17 |
Charged particle beam lithography system and target positioning device
Grant 8,779,392 - Peijster , et al. July 15, 2 | 2014-07-15 |
Lithography System, Method Of Clamping And Wafer Table
App 20140185028 - DE BOER; Guido ; et al. | 2014-07-03 |
Lithography System, Method Of Clamping And Wafer Table
App 20140176920 - DE BOER; Guido ; et al. | 2014-06-26 |
Charged particle multi-beamlet lithography system with modulation device
Grant 8,759,787 - Wieland , et al. June 24, 2 | 2014-06-24 |
Electron beam exposure system
Grant RE44,908 - Wieland , et al. May 27, 2 | 2014-05-27 |
Pattern data conversion for lithography system
Grant 8,710,465 - Van De Peut , et al. April 29, 2 | 2014-04-29 |
Assembly for providing an aligned stack of two or more modules and a lithography system or a microscopy system comprising such an assembly
Grant 8,710,461 - Kappelhof April 29, 2 | 2014-04-29 |
Lithography system, method of clamping and wafer table
Grant 8,705,010 - De Boer , et al. April 22, 2 | 2014-04-22 |
Charged particle lithography apparatus and method of generating vacuum in a vacuum chamber
Grant 8,690,005 - Baltussen , et al. April 8, 2 | 2014-04-08 |
Charged Particle Lithography System With Intermediate Chamber
App 20140061497 - DINU-GURTLER; Laura ; et al. | 2014-03-06 |
Capacitive Sensing System
App 20140049276 - DE BOER; Guido ; et al. | 2014-02-20 |
Projection lens arrangement
Grant 8,653,485 - Wieland , et al. February 18, 2 | 2014-02-18 |
Method Of And System For Exposing A Target
App 20140042334 - WIELAND; Marco Jan-Jaco | 2014-02-13 |
Multiple beam charged particle optical system
Grant 8,648,318 - Kruit , et al. February 11, 2 | 2014-02-11 |
Capacitive sensing system with differential pairs
Grant 8,638,109 - De Boer , et al. January 28, 2 | 2014-01-28 |
Charged particle multi-beamlet lithography system with modulation device
App 20140014850 - WIELAND; Marco Jan-Jaco ; et al. | 2014-01-16 |
Projection Lens Arrangement
App 20140014852 - WIELAND; Marco Jan Jaco ; et al. | 2014-01-16 |
High voltage shielding arrangement of a charged particle lithography system
Grant 8,624,478 - Koning , et al. January 7, 2 | 2014-01-07 |
Charged particle system comprising a manipulator device for manipulation of one or more charged particle beams
Grant 08618496 - | 2013-12-31 |
Charged particle system comprising a manipulator device for manipulation of one or more charged particle beams
Grant 8,618,496 - Wieland , et al. December 31, 2 | 2013-12-31 |
Direct write lithography system
Grant 8,610,093 - Kruit December 17, 2 | 2013-12-17 |
Charged particle beam modulator
Grant 8,604,411 - Wieland , et al. December 10, 2 | 2013-12-10 |
Multiple beam charged particle optical system
Grant 8,598,545 - Kruit , et al. December 3, 2 | 2013-12-03 |
Method of generating a two-level pattern for lithographic processing and pattern generator using the same
Grant 8,598,544 - Van De Peut , et al. December 3, 2 | 2013-12-03 |
Charged particle lithography system with intermediate chamber
Grant 8,586,949 - Dinu-Gurtler , et al. November 19, 2 | 2013-11-19 |
Capacitive sensing system
Grant 8,570,055 - De Boer , et al. October 29, 2 | 2013-10-29 |
Charged particle lithography system with aperture array cooling
Grant 8,558,196 - Wieland , et al. October 15, 2 | 2013-10-15 |
Method of handling a substrate support structure in a lithography system
App 20130234040 - DE JONG; Hendrik Jan | 2013-09-12 |
Lithography system
Grant 8,525,134 - Wieland , et al. September 3, 2 | 2013-09-03 |
Substrate support structure, clamp preparation unit, and lithography system
Grant 8,514,370 - De Jong August 20, 2 | 2013-08-20 |
Integrated sensor system
Grant 8,513,959 - De Boer , et al. August 20, 2 | 2013-08-20 |
Method of and system for exposing a target
Grant 8,502,174 - Wieland August 6, 2 | 2013-08-06 |
Imaging system
Grant 8,502,176 - Wieland , et al. August 6, 2 | 2013-08-06 |
Charged particle multi-beamlet lithography system with modulation device
Grant 8,492,731 - Wieland , et al. July 23, 2 | 2013-07-23 |
Method and System for Realizing a Vacuum in a Vacuum Chamber
App 20130133752 - BALTUSSEN; Sander | 2013-05-30 |
Electron beam exposure system
Grant RE44,240 - Wieland , et al. May 28, 2 | 2013-05-28 |
Projection lens arrangement
Grant 8,445,869 - Wieland , et al. May 21, 2 | 2013-05-21 |
Method for splitting a pattern for use in a multi-beamlet lithography apparatus
App 20130120724 - WIELAND; Marco Jan-Jaco ; et al. | 2013-05-16 |
Preparation unit for lithography machine
Grant 8,436,324 - De Jong May 7, 2 | 2013-05-07 |
Network architecture and protocol for cluster of lithography machines
App 20130111485 - VAN KERVINCK; Marcel Nicolaas Jacobus ; et al. | 2013-05-02 |
Simultaneous measurement of beams in lithography system
Grant 8,431,912 - Looije April 30, 2 | 2013-04-30 |
Arrangement of optical fibers, and a method of forming such arrangement
App 20130043413 - DE BOER; Guido ; et al. | 2013-02-21 |
System For Magnetic Shielding
App 20130043414 - ROSENTHAL; Alon | 2013-02-21 |
Apparatus for transferring a substrate in a lithography system
App 20130044305 - KUIPER; Vincent Sylvester ; et al. | 2013-02-21 |
Network architecture for lithography machine cluster
App 20130037730 - SLOT; Erwin ; et al. | 2013-02-14 |
Method of processing a substrate in a lithography system
App 20130034421 - KUIPER; Vincent Sylvester ; et al. | 2013-02-07 |
Method and arrangement for realizing a vacuum in a vacuum chamber
Grant 8,366,423 - Baltussen February 5, 2 | 2013-02-05 |
Enhanced integrity projection lens assembly
Grant 8,362,441 - Koning , et al. January 29, 2 | 2013-01-29 |
Current Measurement System
App 20130009626 - VERBURG; Cor ; et al. | 2013-01-10 |
Active Shield for Capacitive Measurement System
App 20130003034 - VERBURG; COR ; et al. | 2013-01-03 |
Lithography system, method of heat dissipation and frame
Grant 8,325,321 - Kruit , et al. December 4, 2 | 2012-12-04 |
Charged Particle Lithography System With Intermediate Chamber
App 20120293780 - DINU-GURTLER; Laura ; et al. | 2012-11-22 |
Charged Particle Beam Modulator
App 20120292491 - Wieland; Marco Jan-Jaco ; et al. | 2012-11-22 |
Charged Particle Lithography System With Aperture Array Cooling
App 20120292524 - WIELAND; Marco Jan-Jaco ; et al. | 2012-11-22 |
Method For Determining A Distance Between Two Beamlets In A Multi-beamlet Exposure Apparatus
App 20120293810 - MEIJER; Jan Andries | 2012-11-22 |
Data Path For Lithography Apparatus
App 20120287410 - Wieland; Marco Jan-Jaco ; et al. | 2012-11-15 |
Method Of Generating A Two-level Pattern For Lithographic Processing And Pattern Generator Using The Same
App 20120286169 - VAN DE PEUT; Teunis ; et al. | 2012-11-15 |
Pattern Data Conversion For Lithography System
App 20120286173 - VAN DE PEUT; Teunis ; et al. | 2012-11-15 |
Data Path For Lithography Apparatus
App 20120286168 - Derks; Henk ; et al. | 2012-11-15 |
Dual Pass Scanning
App 20120286170 - VAN DE PEUT; Teunis ; et al. | 2012-11-15 |
Modulation Device And Charged Particle Multi-beamlet Lithography System Using The Same
App 20120273658 - Wieland; Marco Jan-Jaco ; et al. | 2012-11-01 |
Multiple beam charged particle optical system
Grant 8,294,117 - Kruit , et al. October 23, 2 | 2012-10-23 |
System, method and apparatus for multi-beam lithography including a dispenser cathode for homogeneous electron emission
Grant 8,263,942 - Steenbrink , et al. September 11, 2 | 2012-09-11 |
Direct Write Lithography System
App 20120224155 - KRUIT; Pieter | 2012-09-06 |
Beamlet blanker arrangement
Grant 8,258,484 - Wieland , et al. September 4, 2 | 2012-09-04 |
System, method and apparatus for multi-beam lithography including a dispenser cathode for homogeneous electron emission
Grant 8,247,958 - Steenbrink , et al. August 21, 2 | 2012-08-21 |
Optical switching in a lithography system
Grant 8,242,470 - Wieland , et al. August 14, 2 | 2012-08-14 |
Lithography System And Method Of Processing Substrates In Such A Lithography System
App 20120175527 - DE BOER; Guido ; et al. | 2012-07-12 |
Lithography system and method of refracting
App 20120145915 - VAN VEEN; Alexander Hendrik Vincent ; et al. | 2012-06-14 |
Projection Lens Arrangement
App 20120145916 - WIELAND; Marco Jan Jaco ; et al. | 2012-06-14 |
Lithography System, Modulation Device And Method Of Manufacturing A Fiber Fixation Substrate
App 20120145931 - VAN MELLE; Ralph ; et al. | 2012-06-14 |
Beamlet Blanker Arrangement
App 20120091318 - WIELAND; Marco Jan Jaco ; et al. | 2012-04-19 |
Projection Lens Arrangement
App 20120091358 - WIELAND; Marco Jan Jaco ; et al. | 2012-04-19 |
Projection Lens Arrangement
App 20120061583 - WIELAND; Marco Jan Jaco ; et al. | 2012-03-15 |
Substrate Support Structure, Clamp Preparation Unit, And Lithography System
App 20120043438 - DE JONG, JR.; Hendrik Jan | 2012-02-23 |
Charged particle multi-beamlet lithography system, modulation device , and method of manufacturing thereof
App 20110266418 - Wieland; Marco Jan-Jaco ; et al. | 2011-11-03 |
Charged particle multi-beamlet lithography system with modulation device
App 20110260040 - Wieland; Marco Jan-Jaco ; et al. | 2011-10-27 |
Exposure Method
App 20110261344 - DE BOER; Guido ; et al. | 2011-10-27 |
Modulation device and charged particle multi-beamlet lithography system using the same
App 20110261340 - Wieland; Marco Jan-Jaco ; et al. | 2011-10-27 |
Lithography System, Sensor, Converter Element And Method Of Manufacture
App 20110253900 - HANFOUG; Rabah | 2011-10-20 |
Capacitive Sensing System With Differential Pairs
App 20110254565 - De Boer; Guido ; et al. | 2011-10-20 |
Electrostatic Lens Structure
App 20110216299 - STEENBRINK; Stijn Willem ; et al. | 2011-09-08 |
Capacitive Sensing System
App 20110193574 - DE BOER; Guido ; et al. | 2011-08-11 |
Integrated Sensor System
App 20110193573 - DE BOER; Guido ; et al. | 2011-08-11 |
Imaging System
App 20110079730 - WIELAND; Marco Jan-Jaco | 2011-04-07 |
Method Of And System For Exposing A Target
App 20110073782 - WIELAND; Marco Jan-Jaco | 2011-03-31 |
Lithography Machine and Substrate Handling Arrangement
App 20110049393 - DE BOER; Guido ; et al. | 2011-03-03 |
Charged Particle Lithography Apparatus And Method Of Generating Vacuum In A Vacuum Chamber
App 20110042579 - DE BOER; Guido ; et al. | 2011-02-24 |
Charged particle optical system comprising an electrostatic deflector
App 20100276606 - BAARS; Norman Hendrikus Rudolf ; et al. | 2010-11-04 |
Charged Particle Lithography Apparatus And Method Of Generating Vacuum In A Vacuum Chamber
App 20100270299 - BALTUSSEN; Sander ; et al. | 2010-10-28 |
Method and Arrangement for Realizing a Vacuum in a Vacuum Chamber
App 20100269911 - BALTUSSEN; Sander | 2010-10-28 |
Method Of Clamping A Substrate And Clamp Preparation Unit
App 20100265486 - DE JONG; Hendrik Jan ; et al. | 2010-10-21 |
Substrate Support Structure, Clamp Preparation Unit, and Lithography System
App 20100236476 - DE JONG; Hendrik Jan | 2010-09-23 |
Preparation Unit for Lithography Machine
App 20100238421 - DE JONG; Hendrik Jan | 2010-09-23 |
Projection Lens Arrangement
App 20090261267 - WIELAND; Marco Jan Jaco ; et al. | 2009-10-22 |
Projection Lens Arrangement
App 20090212229 - WIELAND; Marco Jan Jaco ; et al. | 2009-08-27 |
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