| Patent | Date |
|---|
Overlay alignment mark and alignment method for the fabrication of trench-capacitor dram devices
Grant 7,723,181 - Liu , et al. May 25, 2 | 2010-05-25 |
Fabrication method for a damascene bit line contact plug
Grant 7,678,692 - Chen , et al. March 16, 2 | 2010-03-16 |
Alignment mark and alignment method for the fabrication of trench-capacitor dram devices
Grant 7,419,882 - Wu , et al. September 2, 2 | 2008-09-02 |
Fabrication method for a damascene bit line contact plug
Grant 7,285,377 - Chen , et al. October 23, 2 | 2007-10-23 |
Overlay Alignment Mark And Alignment Method For The Fabrication Of Trench-capacitor Dram Devices
App 20070190736 - Liu; An-Hsiung ; et al. | 2007-08-16 |
Fabrication Method for a Damascene Bit Line Contact Plug
App 20070099125 - Chen; Yi-Nan ; et al. | 2007-05-03 |
Memory device with vertical transistors and deep trench capacitors and method of fabricating the same
Grant 7,211,483 - Chen , et al. May 1, 2 | 2007-05-01 |
Method of forming bit line contact via
Grant 7,195,975 - Tsai , et al. March 27, 2 | 2007-03-27 |
Contact etching utilizing partially recessed hard mask
App 20070018341 - Hsieh; Wen-Kuei ; et al. | 2007-01-25 |
Contact etching utilizing partially recessed hard mask
Grant 7,135,783 - Hsieh , et al. November 14, 2 | 2006-11-14 |
Alignment Mark And Alignment Method For The Fabrication Of Trench-capacitor Dram Devices
App 20060234440 - WU; Yuan-Hsun ; et al. | 2006-10-19 |
Method for forming contact holes
Grant 7,105,453 - Chen , et al. September 12, 2 | 2006-09-12 |
Contact etching utilizing multi-layer hard mask
Grant 7,064,044 - Chen , et al. June 20, 2 | 2006-06-20 |
Method of forming bit line contact via
App 20060118886 - Tsai; Tzu-Ching ; et al. | 2006-06-08 |
Memory device with vertical transistors and deep trench capacitors and method of fabricating the same
Grant 7,009,236 - Chen , et al. March 7, 2 | 2006-03-07 |
Method of evaluating reticle pattern overlay registration
Grant 6,987,053 - Wu , et al. January 17, 2 | 2006-01-17 |
Contact etching utilizing multi-layer hard mask
Grant 6,987,322 - Chen , et al. January 17, 2 | 2006-01-17 |
Manufacturing method of a MOSFET gate
Grant 6,977,134 - Hao , et al. December 20, 2 | 2005-12-20 |
Contact etching utilizing multi-layer hard mask
App 20050277287 - Chen, Yi-Nan ; et al. | 2005-12-15 |
Contact Etching Utilizing Multi-layer Hard Mask
App 20050275107 - Chen, Yi-Nan ; et al. | 2005-12-15 |
Contact etching utilizing partially recessed hard mask
App 20050275111 - Hsieh, Wen-Kuei ; et al. | 2005-12-15 |
Method of forming metal plug
Grant 6,960,525 - Chen , et al. November 1, 2 | 2005-11-01 |
Memory device with vertical transistors and deep trench capacitors and method of fabricating the same
App 20050167719 - Chen, Yi-Nan ; et al. | 2005-08-04 |
Method of evaluating reticle pattern overlay registration
App 20050168740 - Wu, Wen-Bin ; et al. | 2005-08-04 |
Bit line contact hole and method for forming the same
App 20050164491 - Mao, Hui-Min ; et al. | 2005-07-28 |
Trench-capacitor DRAM cell having a folded gate conductor
Grant 6,909,136 - Chen , et al. June 21, 2 | 2005-06-21 |
Method for formimg contact holes
App 20050106887 - Chen, Yi-Nan ; et al. | 2005-05-19 |
Method of evaluating reticle pattern overlay registration
App 20050048654 - Wu, Wen-Bin ; et al. | 2005-03-03 |
Trench-capacitor Dram Cell Having A Folded Gate Conductor
App 20050012131 - Chen, Yinan ; et al. | 2005-01-20 |
Memory device with vertical transistors and deep trench capacitors and method of fabricating the same
App 20050001256 - Chen, Yi-Nan ; et al. | 2005-01-06 |
Process for measuring depth of source and drain
Grant 6,838,866 - Tsai , et al. January 4, 2 | 2005-01-04 |
Method of metal etching post cleaning
Grant 6,833,081 - Chen , et al. December 21, 2 | 2004-12-21 |
Fabrication method for a damascene bit line contact plug
App 20040219462 - Chen, Yi-Nan ; et al. | 2004-11-04 |
Bit line contact hole and method for forming the same
App 20040201043 - Mao, Hui-Min ; et al. | 2004-10-14 |
Method of forming bit line contact via
App 20040198008 - Tsai, Tzu-Ching ; et al. | 2004-10-07 |
Method of forming metal plug
App 20040192026 - Chen, Yi-Nan ; et al. | 2004-09-30 |
Method for forming contact
Grant 6,790,765 - Huang , et al. September 14, 2 | 2004-09-14 |
Method of forming source/drain regions in semiconductor devices
Grant 6,790,735 - Mao , et al. September 14, 2 | 2004-09-14 |
Bit line contact structure and method for forming the same
Grant 6,780,739 - Mao , et al. August 24, 2 | 2004-08-24 |
Method of fabricating shallow trench isolation
Grant 6,774,007 - Liu , et al. August 10, 2 | 2004-08-10 |
Method of forming source/drain regions in semiconductor devices
App 20040092074 - Mao, Hui-Min ; et al. | 2004-05-13 |
Method For Forming Buried Plates
App 20040063279 - Tsai, Tzu-Ching ; et al. | 2004-04-01 |
Method of forming inter-metal dielectric
Grant 6,709,975 - Mao , et al. March 23, 2 | 2004-03-23 |
Method for forming buried plates
Grant 6,706,587 - Tsai , et al. March 16, 2 | 2004-03-16 |
Method for estimating capacitance of deep trench capacitors
Grant 6,703,311 - Tsai , et al. March 9, 2 | 2004-03-09 |
Process for measuring depth of source and drain
App 20040021473 - Tsai, Tzu-Ching ; et al. | 2004-02-05 |
Manufacturing method of a MOSFET gate
App 20030232285 - Hao, Chung-Peng ; et al. | 2003-12-18 |
Method of fabricating shallow trench isolation
App 20030201473 - Liu, Hsien-Wen ; et al. | 2003-10-30 |
Method of forming inter-metal dielectric
App 20030199138 - Mao, Hui Min ; et al. | 2003-10-23 |
Method of metal etching post cleaning
App 20030116534 - Chen, Yi-Nan ; et al. | 2003-06-26 |
Method for estimating capacitance of deep trench capacitors
App 20030087527 - Tsai, Tzu-Ching ; et al. | 2003-05-08 |
Method of improving planarity of a photoresist
App 20020048895 - Tsai, Tzu Ching ; et al. | 2002-04-25 |
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