Mantz; Ulrich
Patent Applications and Registrations
Patent applications and USPTO patent grants for Mantz; Ulrich.The latest application filed is for "inspection system and inspection method to qualify semiconductor structures".
Company Profile
1.23.19
- Mantz; Ulrich - Schelklingen DE
- Mantz; Ulrich - Schelkingen DE
- Mantz; Ulrich - Saxony DE
- Mantz; Ulrich - Dresden DE
- Mantz; Ulrich - Poughkeepsie NY
Patent Activity
| Patent | Date |
|---|---|
| Inspection system and inspection method to qualify semiconductor structures Grant 11,378,532 - Lewis , et al. July 5, 2 | 2022-07-05 |
| Inspection System And Inspection Method To Qualify Semiconductor Structures App 20210109046 - Lewis; Brett ; et al. | 2021-04-15 |
| Method and device for characterizing a wafer patterned using at least one lithography step Grant 10,509,330 - Stiepan , et al. Dec | 2019-12-17 |
| Method And Device For Characterizing A Wafer Patterned Using At Least One Lithography Step App 20180203369 - Stiepan; Hans-Michael ; et al. | 2018-07-19 |
| Ion sources, systems and methods Grant 9,236,225 - Ward , et al. January 12, 2 | 2016-01-12 |
| Ion Sources, Systems And Methods App 20150213997 - Ward; Billy W. ; et al. | 2015-07-30 |
| Ion sources, systems and methods Grant 9,012,867 - Ward , et al. April 21, 2 | 2015-04-21 |
| Ion Sources, Systems And Methods App 20140306121 - Ward; Billy W. ; et al. | 2014-10-16 |
| Ion sources, systems and methods Grant 8,748,845 - Ward , et al. June 10, 2 | 2014-06-10 |
| Electron beam source and method of manufacturing the same Grant 8,723,138 - Drexel , et al. May 13, 2 | 2014-05-13 |
| Cross-section systems and methods Grant 8,384,029 - Knippelmeyer , et al. February 26, 2 | 2013-02-26 |
| Ion Sources, Systems And Methods App 20120141693 - Ward; Billy W. ; et al. | 2012-06-07 |
| Electron Beam Source And Method Of Manufacturing The Same App 20120131785 - Drexel; Volker ; et al. | 2012-05-31 |
| Electron beam source and method of manufacturing the same Grant 8,164,071 - Drexel , et al. April 24, 2 | 2012-04-24 |
| Cross-section Systems And Methods App 20120085906 - Knippelmeyer; Rainer ; et al. | 2012-04-12 |
| Ion sources, systems and methods Grant 8,110,814 - Ward , et al. February 7, 2 | 2012-02-07 |
| Electron Beam Source And Method Of Manufacturing The Same App 20100078557 - Drexel; Volker ; et al. | 2010-04-01 |
| Ion Sources, Systems And Methods App 20090179161 - WARD; BILLY W. ; et al. | 2009-07-16 |
| Ion sources, systems and methods Grant 7,518,122 - Ward , et al. April 14, 2 | 2009-04-14 |
| Ion sources, systems and methods Grant 7,485,873 - Ward , et al. February 3, 2 | 2009-02-03 |
| Targets for measurements in semiconductor devices Grant 7,427,774 - Mantz , et al. September 23, 2 | 2008-09-23 |
| Method and apparatus for measuring a surface profile of a sample Grant 7,405,089 - Bloess , et al. July 29, 2 | 2008-07-29 |
| Method for the characterization of a film Grant 7,362,453 - Mantz April 22, 2 | 2008-04-22 |
| Method and apparatus for the depth-resolved characterization of a layer of a carrier Grant 7,358,491 - Bloe.beta. , et al. April 15, 2 | 2008-04-15 |
| Method for determining the depth of a buried structure Grant 7,307,735 - Hecht , et al. December 11, 2 | 2007-12-11 |
| Noninvasive method for characterizing and identifying embedded micropatterns Grant 7,262,837 - Guittet , et al. August 28, 2 | 2007-08-28 |
| Ion sources, systems and methods App 20070194251 - Ward; Billy W. ; et al. | 2007-08-23 |
| Ion sources, systems and methods App 20070187621 - Ward; Billy W. ; et al. | 2007-08-16 |
| Optical measurement system and method Grant 7,046,363 - Michaelis , et al. May 16, 2 | 2006-05-16 |
| Method and apparatus for the depth-resolved characterization of layer of a carrier App 20060076494 - Bloess; Harald ; et al. | 2006-04-13 |
| Method and apparatus for measuring a surface profile of a sample App 20050258365 - Bloess, Harald ; et al. | 2005-11-24 |
| Method and device for monitoring the etching operation for a regular depth structure in a semiconductor substrate App 20050239223 - Mantz, Ulrich ; et al. | 2005-10-27 |
| Method for determining or inspecting a property of a patterned layer App 20050118735 - Mantz, Ulrich ; et al. | 2005-06-02 |
| Method for the characterization of a film App 20050095731 - Mantz, Ulrich | 2005-05-05 |
| Noninvasive method for characterizing and identifying embedded micropatterns App 20050018171 - Guittet, Pierre-Yves ; et al. | 2005-01-27 |
| Method for determining the depth of a buried structure App 20050003642 - Hecht, Thomas ; et al. | 2005-01-06 |
| Optical measurement system and method App 20040046958 - Michaelis, Alexander ; et al. | 2004-03-11 |
| In-situ method for measuring the endpoint of a resist recess etch process Grant 6,486,675 - Jaiprakash , et al. November 26, 2 | 2002-11-26 |
| Measurement system and method for measuring critical dimensions using ellipsometry Grant 6,031,614 - Michaelis , et al. February 29, 2 | 2000-02-29 |
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