| Patent | Date |
|---|
Low temperature high-quality dielectric films
Grant 11,430,655 - Venkatasubramanian , et al. August 30, 2 | 2022-08-30 |
Hardmasks and processes for forming hardmasks by plasma-enhanced chemical vapor deposition
Grant 11,421,324 - Hsu , et al. August 23, 2 | 2022-08-23 |
Multicolor Approach To DRAM STI Active Cut Patterning
App 20220238531 - Singh; Tejinder ; et al. | 2022-07-28 |
Multicolor approach to DRAM STI active cut patterning
Grant 11,335,690 - Singh , et al. May 17, 2 | 2022-05-17 |
Diamond-like carbon film
Grant 11,332,376 - Venkatasubramanian , et al. May 17, 2 | 2022-05-17 |
Methods Of Forming Hardmasks
App 20220122835 - HSU; Jui-Yuan ; et al. | 2022-04-21 |
Hardmasks And Processes For Forming Hardmasks By Plasma Enhanced Chemical Vapor Deposition
App 20220119953 - HSU; Jui-Yuan ; et al. | 2022-04-21 |
Method Of Using Dual Frequency Rf Power In A Process Chamber
App 20220102141 - SINGH; Anup Kumar ; et al. | 2022-03-31 |
Modulating film properties by optimizing plasma coupling materials
Grant 11,270,905 - Venkatasubramanian , et al. March 8, 2 | 2022-03-08 |
In-situ High Power Implant To Relieve Stress Of A Thin Film
App 20220037154 - VENKATASUBRAMANIAN; Eswaranand ; et al. | 2022-02-03 |
Bottom-up growth of silicon oxide and silicon nitride using sequential deposition-etch-treat processing
Grant 11,236,418 - Cheng , et al. February 1, 2 | 2022-02-01 |
Film deposition using enhanced diffusion process
Grant 11,227,797 - Jiang , et al. January 18, 2 | 2022-01-18 |
Methods For Producing High-density, Nitrogen-doped Carbon Films For Hardmasks And Other Patterning Applications
App 20210407791 - HSU; Jui-Yuan ; et al. | 2021-12-30 |
Methods For Producing High-density Carbon Films For Hardmasks And Other Patterning Applications
App 20210407802 - HSU; Jui-Yuan ; et al. | 2021-12-30 |
High Pressure Oxidation of Metal Films
App 20210404046 - Mullick; Amrita B. ; et al. | 2021-12-30 |
Methods For Producing High-density Doped-carbon Films For Hardmask And Other Patterning Applications
App 20210407801 - VENKATASUBRAMANIAN; Eswaranand ; et al. | 2021-12-30 |
Apparatus and methods for manufacturing semiconductor structures using protective barrier layer
Grant 11,177,128 - Manna , et al. November 16, 2 | 2021-11-16 |
In-situ high power implant to relieve stress of a thin film
Grant 11,158,507 - Venkatasubramanian , et al. October 26, 2 | 2021-10-26 |
High Bias Deposition of High Quality Gapfill
App 20210327752 - Gottheim; Samuel E. ; et al. | 2021-10-21 |
High pressure oxidation of metal films
Grant 11,131,015 - Mullick , et al. September 28, 2 | 2021-09-28 |
High bias deposition of high quality gapfill
Grant 11,062,939 - Gottheim , et al. July 13, 2 | 2021-07-13 |
Conformal Hermetic Film Deposition By Cvd
App 20210210339 - MANNA; Pramit ; et al. | 2021-07-08 |
High-density low temperature carbon films for hardmask and other patterning applications
Grant 11,043,372 - Venkatasubramanian , et al. June 22, 2 | 2021-06-22 |
Conformal carbon film deposition
Grant 11,043,379 - Manna , et al. June 22, 2 | 2021-06-22 |
Bottom-up gap-fill by surface poisoning treatment
Grant 11,028,477 - Saly , et al. June 8, 2 | 2021-06-08 |
Gapfill using reactive anneal
Grant 11,011,384 - Mallick , et al. May 18, 2 | 2021-05-18 |
Multicolor Approach To DRAM STI Active Cut Patterning
App 20210134807 - Singh; Tejinder ; et al. | 2021-05-06 |
3D NAND Etch
App 20210118691 - Jiang; Shishi ; et al. | 2021-04-22 |
Diamond-like carbon as mandrel
Grant 10,954,129 - Koshizawa , et al. March 23, 2 | 2021-03-23 |
Selective and self-limiting tungsten etch process
Grant 10,950,498 - Roy , et al. March 16, 2 | 2021-03-16 |
Tuneable Uniformity Control Utilizing Rotational Magnetic Housing
App 20210050189 - GOTTHEIM; Samuel E. ; et al. | 2021-02-18 |
Carbon Hard Masks For Patterning Applications And Methods Related Thereto
App 20210043449 - VENKATASUBRAMANIAN; Eswaranand ; et al. | 2021-02-11 |
Pulsed Plasma (dc/rf) Deposition Of High Quality C Films For Patterning
App 20210040618 - VENKATASUBRAMANIAN; Eswaranand ; et al. | 2021-02-11 |
Low Temperature High-Quality Dielectric Films
App 20210043450 - Venkatasubramanian; Eswaranand ; et al. | 2021-02-11 |
Multicolor approach to DRAM STI active cut patterning
Grant 10,910,381 - Singh , et al. February 2, 2 | 2021-02-02 |
Flowable Film Curing Using H2 Plasma
App 20210025058 - JIANG; Shishi ; et al. | 2021-01-28 |
Methods For Gapfill In High Aspect Ratio Structures
App 20210028055 - Manna; Pramit ; et al. | 2021-01-28 |
Methods of Forming Tungsten Pillars
App 20210013038 - Mallick; Abhijit Basu ; et al. | 2021-01-14 |
Modulating Film Properties By Optimizing Plasma Coupling Materials
App 20210005500 - VENKATASUBRAMANIAN; Eswaranand ; et al. | 2021-01-07 |
3D NAND etch
Grant 10,886,140 - Jiang , et al. January 5, 2 | 2021-01-05 |
Apparatus And Methods For Manufacturing Semiconductor Structures Using Protective Barrier Layer
App 20200388486 - MANNA; Pramit ; et al. | 2020-12-10 |
Low Deposition Rates For Flowable Pecvd
App 20200385865 - Jiang; Shishi ; et al. | 2020-12-10 |
Substrate Processing Chamber
App 20200370177 - FRANKLIN; Timothy Joseph ; et al. | 2020-11-26 |
Low temperature high-quality dielectric films
Grant 10,840,088 - Venkatasubramanian , et al. November 17, 2 | 2020-11-17 |
Controlled growth of thin silicon oxide film at low temperature
Grant 10,818,490 - Jiang , et al. October 27, 2 | 2020-10-27 |
Diamond-Like Carbon Film
App 20200331762 - Venkatasubramanian; Eswaranand ; et al. | 2020-10-22 |
Methods for gapfill in high aspect ratio structures
Grant 10,811,303 - Manna , et al. October 20, 2 | 2020-10-20 |
Methods of forming tungsten pillars
Grant 10,784,107 - Mallick , et al. Sept | 2020-09-22 |
Diamond-like carbon film
Grant 10,745,282 - Venkatasubramanian , et al. A | 2020-08-18 |
Oxidative volumetric expansion of metals and metal containing compounds
Grant 10,741,435 - Roy , et al. A | 2020-08-11 |
Bottom-Up Growth of Silicon Oxide and Silicon Nitride Using Sequential Deposition-Etch-Treat Processing
App 20200248303 - Kind Code | 2020-08-06 |
Selectively deposited parylene masks and methods related thereto
Grant 10,714,339 - Wang , et al. | 2020-07-14 |
Two-step process for gapfilling high aspect ratio trenches with amorphous silicon film
Grant 10,699,903 - Manna , et al. | 2020-06-30 |
Film Deposition Using Enhanced Diffusion Process
App 20200161178 - JIANG; Shishi ; et al. | 2020-05-21 |
Magnetic Housing Systems
App 20200144029 - GANDIKOTA; Srinivas ; et al. | 2020-05-07 |
Surface modification to improve amorphous silicon gapfill
Grant 10,643,841 - Manna , et al. | 2020-05-05 |
High Density Carbon Films For Patterning Applications
App 20200135466 - VENKATASUBRAMANIAN; Eswaranand ; et al. | 2020-04-30 |
Seam healing using high pressure anneal
Grant 10,636,669 - Chen , et al. | 2020-04-28 |
Bottom-up growth of silicon oxide and silicon nitride using sequential deposition-etch-treat processing
Grant 10,626,495 - Cheng , et al. | 2020-04-21 |
Conditioning Of A Processing Chamber
App 20200115795 - Manna; Pramit ; et al. | 2020-04-16 |
Methods for gapfill in high aspect ratio structures
Grant 10,615,050 - Cheng , et al. | 2020-04-07 |
PECVD Tungsten Containing Hardmask Films And Methods Of Making
App 20200075333 - Roy; Susmit Singha ; et al. | 2020-03-05 |
Surface Modification To Improve Amorphous Silicon Gapfill
App 20200075329 - MANNA; Pramit ; et al. | 2020-03-05 |
Two-step process for silicon gapfill
Grant 10,580,642 - Mallick , et al. | 2020-03-03 |
Two-step Process For Gapfilling High Aspect Ratio Trenches With Amorphous Silicon Film
App 20200051815 - MANNA; Pramit ; et al. | 2020-02-13 |
Multicolor Approach To DRAM STI Active Cut Patterning
App 20200043932 - Singh; Tejinder ; et al. | 2020-02-06 |
3D NAND Etch
App 20200035505 - Jiang; Shishi ; et al. | 2020-01-30 |
Selective and Self-Limiting Tungsten Etch Process
App 20200027785 - Roy; Susmit Singha ; et al. | 2020-01-23 |
Low Temperature High-Quality Dielectric Films
App 20200027726 - Venkatasubramanian; Eswaranand ; et al. | 2020-01-23 |
PECVD tungsten containing hardmask films and methods of making
Grant 10,529,568 - Roy , et al. J | 2020-01-07 |
Dry stripping of boron carbide hardmask
Grant 10,529,585 - Manna , et al. J | 2020-01-07 |
In-situ High Power Implant To Relieve Stress Of A Thin Film
App 20190393034 - VENKATASUBRAMANIAN; Eswaranand ; et al. | 2019-12-26 |
Carbon Gapfill Films
App 20190393030 - Jiang; Shishi ; et al. | 2019-12-26 |
Conformal Carbon Film Deposition
App 20190385845 - Manna; Pramit ; et al. | 2019-12-19 |
High Bias Deposition of High Quality Gapfill
App 20190385907 - Gottheim; Samuel E. ; et al. | 2019-12-19 |
Surface modification to improve amorphous silicon gapfill
Grant 10,483,102 - Manna , et al. Nov | 2019-11-19 |
Low Temperature Atomic Layer Deposition Of Silicon Nitride
App 20190330736 - Wang; Huiyuan ; et al. | 2019-10-31 |
Two-step process for gapfilling high aspect ratio trenches with amorphous silicon film
Grant 10,460,933 - Manna , et al. Oc | 2019-10-29 |
Oxidative Volumetric Expansion Of Metals And Metal Containing Compounds
App 20190259652 - Roy; Susmit Singha ; et al. | 2019-08-22 |
Deployment of light energy within specific spectral bands in specific sequences for deposition, treatment and removal of materials
Grant 10,373,823 - Srinivasan , et al. | 2019-08-06 |
Carbon Film Gapfill For Patterning Application
App 20190237325 - WANG; Fei ; et al. | 2019-08-01 |
Seam Healing Using High Pressure Anneal
App 20190228982 - Chen; Yihong ; et al. | 2019-07-25 |
Selectively Deposited Parylene Masks And Methods Related Thereto
App 20190221422 - WANG; Fei ; et al. | 2019-07-18 |
Titanium compound based hard mask films
Grant 10,347,488 - Cheng , et al. July 9, 2 | 2019-07-09 |
High Pressure Oxidation Of Metal Films
App 20190185983 - Mullick; Amrita B. ; et al. | 2019-06-20 |
Controlled Growth Of Thin Silicon Oxide Film At Low Temperature
App 20190189435 - JIANG; Shishi ; et al. | 2019-06-20 |
Oxidative volumetric expansion of metals and metal containing compounds
Grant 10,319,624 - Roy , et al. | 2019-06-11 |
Methods For Gapfill In High Aspect Ratio Structures
App 20190172723 - Cheng; Rui ; et al. | 2019-06-06 |
Hardmask layer for 3D NAND staircase structure in semiconductor applications
Grant 10,312,137 - Venkatasubramanian , et al. | 2019-06-04 |
Methods For Gapfill In High Aspect Ratio Structures
App 20190157134 - Manna; Pramit ; et al. | 2019-05-23 |
Flowable gapfill using solvents
Grant 10,280,507 - Arnepalli , et al. | 2019-05-07 |
Process Of Filling The High Aspect Ratio Trenches By Co-flowing Ligands During Thermal Cvd
App 20190074218 - MANNA; Pramit ; et al. | 2019-03-07 |
Methods for gapfill in high aspect ratio structures
Grant 10,192,775 - Manna , et al. Ja | 2019-01-29 |
Selective deposition of silicon oxide films
Grant 10,176,980 - Manna , et al. J | 2019-01-08 |
Method and Apparatus for Void Free SiN Gapfill
App 20180363133 - Arnepalli; Ranga Rao ; et al. | 2018-12-20 |
Diamond-Like Carbon As Mandrel
App 20180358229 - Koshizawa; Takehito ; et al. | 2018-12-13 |
High-density Low Temperature Carbon Films For Hardmask And Other Patterning Applications
App 20180358222 - VENKATASUBRAMANIAN; Eswaranand ; et al. | 2018-12-13 |
Diamond-Like Carbon Film
App 20180354804 - Venkatasubramanian; Eswaranand ; et al. | 2018-12-13 |
Quality Improvement Of Films Deposited On A Substrate
App 20180350563 - MANNA; Pramit ; et al. | 2018-12-06 |
Bottom-Up Growth Of Silicon Oxide And Silicon Nitride Using Sequential Deposition-Etch-Treat Processing
App 20180350668 - Cheng; Rui ; et al. | 2018-12-06 |
Dry Stripping Of Boron Carbide Hardmask
App 20180350621 - MANNA; Pramit ; et al. | 2018-12-06 |
Deployment Of Light Energy Within Specific Spectral Bands In Specific Sequences For Deposition, Treatment And Removal Of Materials
App 20180350595 - SRINIVASAN; Swaminathan T. ; et al. | 2018-12-06 |
Process of filling the high aspect ratio trenches by co-flowing ligands during thermal CVD
Grant 10,128,150 - Manna , et al. November 13, 2 | 2018-11-13 |
Methods of Forming Tungsten Pillars
App 20180323068 - Mallick; Abhijit Basu ; et al. | 2018-11-08 |
Flowable Gapfill Using Solvents
App 20180298492 - Arnepalli; Ranga Rao ; et al. | 2018-10-18 |
Gapfill Using Reactive Anneal
App 20180294166 - Mallick; Abhijit Basu ; et al. | 2018-10-11 |
Surface Modification To Improve Amorphous Silicon Gapfill
App 20180294154 - MANNA; Pramit ; et al. | 2018-10-11 |
Two-Step Process for Silicon Gapfill
App 20180286669 - Mallick; Abhijit Basu ; et al. | 2018-10-04 |
Two-step Process For Gapfilling High Aspect Ratio Trenches With Amorphous Silicon Film
App 20180286674 - MANNA; Pramit ; et al. | 2018-10-04 |
Ultra-conformal carbon film deposition
Grant 10,074,534 - Behera , et al. September 11, 2 | 2018-09-11 |
Flowable gapfill using solvents
Grant 10,017,856 - Arnepalli , et al. July 10, 2 | 2018-07-10 |
Conformal strippable carbon film for line-edge-roughness reduction for advanced patterning
Grant 10,014,174 - Mebarki , et al. July 3, 2 | 2018-07-03 |
Methods For Depositing Flowable Silicon Containing Films Using Hot Wire Chemical Vapor Deposition
App 20180148833 - CHATTERJEE; Sukti ; et al. | 2018-05-31 |
Methods For Depositing Flowable Carbon Films Using Hot Wire Chemical Vapor Deposition
App 20180148832 - CHATTERJEE; Sukti ; et al. | 2018-05-31 |
Deposition Of Flowable Silicon-Containing Films
App 20180025907 - Kalutarage; Lakmal C. ; et al. | 2018-01-25 |
Plasma treatment to improve adhesion between hardmask film and silicon oxide film
Grant 9,865,459 - Cheng , et al. January 9, 2 | 2018-01-09 |
Flowable Amorphous Silicon Films For Gapfill Applications
App 20170372919 - Manna; Pramit ; et al. | 2017-12-28 |
Hardmask Layer For 3d Nand Staircase Structure In Semiconductor Applications
App 20170352586 - VENKATASUBRAMANIAN; Eswaranand ; et al. | 2017-12-07 |
Ultra-conformal Carbon Film Deposition
App 20170301537 - BEHERA; Swayambhu P. ; et al. | 2017-10-19 |
Conformal Strippable Carbon Film For Line-edge-roughness Reduction For Advanced Patterning
App 20170278709 - MEBARKI; Bencherki ; et al. | 2017-09-28 |
Methods For Gapfill In High Aspect Ratio Structures
App 20170271196 - Manna; Pramit ; et al. | 2017-09-21 |
Ultra-conformal carbon film deposition
Grant 9,721,784 - Behera , et al. August 1, 2 | 2017-08-01 |
PECVD Tungsten Containing Hardmask Films And Methods Of Making
App 20170207087 - Roy; Susmit Singha ; et al. | 2017-07-20 |
Method And Apparatus For Clamping And Declamping Substrates Using Electrostatic Chucks
App 20170162417 - YE; Zheng John ; et al. | 2017-06-08 |
Conformal strippable carbon film for line-edge-roughness reduction for advanced patterning
Grant 9,659,771 - Mebarki , et al. May 23, 2 | 2017-05-23 |
Conformal doping in 3D si structure using conformal dopant deposition
Grant 9,640,400 - Cheng , et al. May 2, 2 | 2017-05-02 |
Deposition Of Conformal And Gap-Fill Amorphous Silicon Thin-Films
App 20170114453 - Chen; Yihong ; et al. | 2017-04-27 |
Bottom-Up Gap-Fill by Surface Poisoning Treatment
App 20170114459 - Saly; Mark ; et al. | 2017-04-27 |
Conformal Doping In 3d Si Structure Using Conformal Dopant Deposition
App 20170110321 - CHENG; Rui ; et al. | 2017-04-20 |
Deposition of metal doped amorphous carbon film
Grant 9,624,577 - Manna , et al. April 18, 2 | 2017-04-18 |
Titanium-Compound Based Hard Mask Films
App 20170084459 - Cheng; Rui ; et al. | 2017-03-23 |
Low temperature cure modulus enhancement
Grant 9,583,332 - Manna , et al. February 28, 2 | 2017-02-28 |
Selective Deposition Of Silicon Oxide Films
App 20170004974 - MANNA; Pramit ; et al. | 2017-01-05 |
Conformal Strippable Carbon Film For Line-edge-roughness Reduction For Advanced Patterning
App 20160365248 - MEBARKI; Bencherki ; et al. | 2016-12-15 |
Plasma Treatment To Improve Adhesion Between Hardmask Film And Silicon Oxide Film
App 20160314960 - CHENG; Rui ; et al. | 2016-10-27 |
Process Of Filling The High Aspect Ratio Trenches By Co-flowing Ligands During Thermal Cvd
App 20160293483 - MANNA; Pramit ; et al. | 2016-10-06 |
Development of high etch selective hardmask material by ion implantation into amorphous carbon films
Grant 9,412,613 - Manna , et al. August 9, 2 | 2016-08-09 |
Deposition of heteroatom-doped carbon films
Grant 9,406,509 - Manna , et al. August 2, 2 | 2016-08-02 |
Method for critical dimension reduction using conformal carbon films
Grant 9,337,051 - Mebarki , et al. May 10, 2 | 2016-05-10 |
Method For Critical Dimension Reduction Using Conformal Carbon Films
App 20160049305 - MEBARKI; Bencherki ; et al. | 2016-02-18 |
Ultra-thin structure to protect copper and method of preparation
Grant 9,257,330 - Chatterjee , et al. February 9, 2 | 2016-02-09 |
Deposition Of Metal Doped Amorphous Carbon Film
App 20160027614 - MANNA; Pramit ; et al. | 2016-01-28 |
Ultra-conformal Carbon Film Deposition Layer-by-layer Deposition Of Carbon-doped Oxide Films
App 20160005596 - BEHERA; Swayambhu P. ; et al. | 2016-01-07 |
Cleaning Process For Cleaning Amorphous Carbon Deposition Residuals Using Low Rf Bias Frequency Applications
App 20150228463 - MANNA; Pramit ; et al. | 2015-08-13 |
Low Temperature Cure Modulus Enhancement
App 20150214039 - MANNA; Pramit ; et al. | 2015-07-30 |
Deposition Of Heteroatom-doped Carbon Films
App 20150206739 - MANNA; Pramit ; et al. | 2015-07-23 |
Carbon Dioxide And Carbon Monoxide Mediated Curing Of Low K Films To Increase Hardness And Modulus
App 20150196933 - MANNA; Pramit ; et al. | 2015-07-16 |
Development Of High Etch Selective Hardmask Material By Ion Implantation Into Amorphous Carbon Films
App 20150194317 - MANNA; PRAMIT ; et al. | 2015-07-09 |
Enabling Radical-based Deposition Of Dielectric Films
App 20150167160 - CHEN; Yihong ; et al. | 2015-06-18 |
Ultra-thin Structure To Protect Copper And Method Of Preparation
App 20150147879 - Chatterjee; Amit ; et al. | 2015-05-28 |
Conformal Sacrificial Film By Low Temperature Chemical Vapor Deposition Technique
App 20140162194 - XU; Jingjing ; et al. | 2014-06-12 |
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