Mann; Hans-Juergen

Patent Applications and Registrations

Patent applications and USPTO patent grants for Mann; Hans-Juergen.The latest application filed is for "imaging optical system".

Company Profile

3.159.143

Mann; Hans-Juergen - Oberkochen DE
Mann; Hans-Juergen - Oberkocken N/A DE
Mann; Hans-Juergen - Okerkochen DE
Mann; Hans-Juergen - Veldhoven NL
Mann; Hans-Juergen - Oberkochem DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Imaging optical system and projection exposure installation for microlithography with an imaging optical system of this type Grant 10,481,500 - Mann , et al. Nov	2019-11-19
Magnifying imaging optical unit and EUV mask inspection system with such an imaging optical unit Grant 10,408,765 - Mann Sept	2019-09-10
Imaging Optical System App 20190025710 - Mann; Hans-Juergen	2019-01-24
Reflective Optical Element And Euv Lithography Appliance App 20180224585 - Trenkler; Johann ; et al.	2018-08-09
Imaging optical system Grant 10,007,187 - Mann June 26, 2	2018-06-26
Projection Objective For Microlithography App 20180164474 - Kraehmer; Daniel ; et al.	2018-06-14
Reflective optical element and EUV lithography appliance Grant 9,910,193 - Trenkler , et al. March 6, 2	2018-03-06
Catadioptric Projection Objective With Parallel, Offset Optical Axes App 20180031815 - Shafer; David ; et al.	2018-02-01
Catadioptric projection objective with parallel, offset optical axes Grant 9,772,478 - Shafer , et al. September 26, 2	2017-09-26
Projection objective of a microlithographic projection exposure apparatus Grant 9,720,329 - Enkisch , et al. August 1, 2	2017-08-01
Imaging Optical System App 20170146912 - Mann; Hans-Juergen	2017-05-25
Imaging optics and projection exposure installation for microlithography with an imaging optics Grant 9,639,004 - Mann May 2, 2	2017-05-02
Anamorphically imaging projection lens system and related optical systems, projection exposure systems and methods Grant 9,568,832 - Mann February 14, 2	2017-02-14
Mirror for use in a microlithography projection exposure apparatus Grant 9,568,845 - Rocktaeschel , et al. February 14, 2	2017-02-14
Imaging optical system and projection exposure installation for microlithography including same Grant 9,541,841 - Mann , et al. January 10, 2	2017-01-10
Imaging optics, microlithography projection exposure apparatus having same and related methods Grant 9,535,337 - Mann , et al. January 3, 2	2017-01-03
Microlithography projection exposure apparatus having at least two operating states Grant 9,529,276 - Mann , et al. December 27, 2	2016-12-27
Imaging optical system and projection exposure installation for microlithography with an imaging optical system of this type Grant 9,500,958 - Mann , et al. November 22, 2	2016-11-22
Microlithography projection optical system, tool and method of production Grant 9,482,961 - Mann , et al. November 1, 2	2016-11-01
Magnifying imaging optical unit and metrology system including same Grant 9,482,794 - Mann November 1, 2	2016-11-01
Catoptric objectives and systems using catoptric objectives Grant 9,465,300 - Mann , et al. October 11, 2	2016-10-11
Imaging optical unit for a projection exposure apparatus Grant 9,459,539 - Mann , et al. October 4, 2	2016-10-04
Catadioptric Projection Objective App 20160274343 - Shafer; David R. ; et al.	2016-09-22
Imaging optics Grant 9,442,386 - Mann September 13, 2	2016-09-13
Imaging Optical System App 20160259248 - Mann; Hans-Juergen	2016-09-08
Optical arrangement and microlithographic projection exposure apparatus including same Grant 9,436,101 - Schoeppach , et al. September 6, 2	2016-09-06
Projection Objective Of A Microlithographic Projection Exposure Apparatus App 20160195817 - Enkisch; Hartmut ; et al.	2016-07-07
Anamorphically imaging projection lens system and related optical systems, projection exposure systems and methods Grant 9,366,968 - Mann June 14, 2	2016-06-14
EUV collector Grant 9,316,918 - Mann , et al. April 19, 2	2016-04-19
Catoptric objectives and systems using catoptric objectives Grant 9,304,407 - Mann , et al. April 5, 2	2016-04-05
Projection objective for microlithography Grant 9,304,408 - Zellner , et al. April 5, 2	2016-04-05
Imaging optical system Grant 9,298,100 - Mann March 29, 2	2016-03-29
Imaging optical system and projection exposure system including the same Grant 9,285,515 - Mann , et al. March 15, 2	2016-03-15
Imaging optical system Grant 9,244,361 - Mueller , et al. January 26, 2	2016-01-26
Projection optics for microlithography Grant 9,239,521 - Mann January 19, 2	2016-01-19
Imaging Optical System And Projection Exposure System For Microlithography App 20160004165 - Mann; Hans-Juergen	2016-01-07
Magnifying Imaging Optical Unit And Euv Mask Inspection System With Such An Imaging Optical Unit App 20150362438 - Mann; Hans-Juergen	2015-12-17
Imaging optics Grant 9,201,226 - Loering , et al. December 1, 2	2015-12-01
Microlithographic imaging optical system including multiple mirrors Grant 9,195,145 - Mann , et al. November 24, 2	2015-11-24
Reflective optical imaging system Grant 9,188,771 - Dodoc , et al. November 17, 2	2015-11-17
Imaging optical system and illumination optical system Grant 9,182,578 - Mann , et al. November 10, 2	2015-11-10
Imaging optical system and projection exposure system for microlithography Grant 9,152,056 - Mann October 6, 2	2015-10-06
Microlithography projection system with an accessible diaphragm or aperture stop Grant 9,146,472 - Mann September 29, 2	2015-09-29
Microscope and microscopy method for space-resolved measurement of a predetermined structure, in particular a structure of a lithographic mask Grant 9,134,626 - Mann , et al. September 15, 2	2015-09-15
Catadioptric Projection Objective With Parallel, Offset Optical Axes App 20150226948 - Shafer; David ; et al.	2015-08-13
Imaging Optics, Microlithography Projection Exposure Apparatus Having Same And Related Methods App 20150219999 - Mann; Hans-Juergen ; et al.	2015-08-06
Imaging optics and projection exposure installation for microlithography with an imaging optics Grant 9,057,964 - Mann , et al. June 16, 2	2015-06-16
Imaging optics, microlithography projection exposure apparatus having same and related methods Grant 9,013,677 - Mann , et al. April 21, 2	2015-04-21
Projection objective having mirror elements with reflective coatings Grant 9,013,678 - Chan , et al. April 21, 2	2015-04-21
Microlithographic projection exposure apparatus Grant 8,982,325 - Totzeck , et al. March 17, 2	2015-03-17
Microlithography projection optical system, tool and method of production Grant 8,970,819 - Mann , et al. March 3, 2	2015-03-03
Imaging optical system with at most 11.6% of the illuminated surfaces of the pupil plane being obscured Grant 8,967,817 - Mann March 3, 2	2015-03-03
Catadioptric Projection Objective App 20150055214 - Shafer; David R. ; et al.	2015-02-26
Reflective Optical Element And Euv Lithography Appliance App 20150055111 - Trenkler; Johann ; et al.	2015-02-26
Microlithography Projection Optical System, Tool And Method Of Production App 20150049319 - Mann; Hans-Juergen ; et al.	2015-02-19
Apparatus for microlithographic projection exposure and apparatus for inspecting a surface of a substrate Grant 8,953,173 - Mann , et al. February 10, 2	2015-02-10
Projection objective and method for its manufacture Grant 8,944,615 - Mann , et al. February 3, 2	2015-02-03
Microlithographic Imaging Optical System Including Multiple Mirrors App 20150022799 - Mann; Hans-Juergen ; et al.	2015-01-22
Catadioptric Projection Objective With Two Intermediate Images And No More Than Four Lenses Between The Aperture Stop And Image Plane App 20140376086 - Shafer; David ; et al.	2014-12-25
Magnifying Imaging Optical Unit And Metrology System Including Same App 20140362584 - Mann; Hans-Juergen	2014-12-11
Immersion catadioptric projection objective having two intermediate images Grant 8,908,269 - Shafer , et al. December 9, 2	2014-12-09
Reflective optical element and EUV lithography appliance Grant 8,891,163 - Trenkler , et al. November 18, 2	2014-11-18
Microlithography Projection Optical System And Method For Manufacturing A Device App 20140327898 - Mann; Hans-Juergen ; et al.	2014-11-06
Imaging Optical System App 20140320838 - Mann; Hans-Juergen	2014-10-30
Microlithographic imaging optical system including multiple mirrors Grant 8,873,122 - Mann , et al. October 28, 2	2014-10-28
Magnifying imaging optical unit and metrology system including same Grant 8,842,284 - Mann September 23, 2	2014-09-23
Magnifying imaging optical system and metrology system with an imaging optical system of this type Grant 8,837,041 - Mann , et al. September 16, 2	2014-09-16
Magnifying imaging optical unit and metrology system including same Grant 8,827,467 - Mann September 9, 2	2014-09-09
Illumination optical system for projection lithography Grant 8,817,233 - Mann August 26, 2	2014-08-26
Imaging optical system Grant 8,810,903 - Mann August 19, 2	2014-08-19
Projection objective and projection exposure apparatus with negative back focus of the entry pupil Grant 8,810,927 - Mann , et al. August 19, 2	2014-08-19
Catadioptric projection objective including an aspherized plate Grant 8,804,234 - Shafer , et al. August 12, 2	2014-08-12
Catadioptric projection objective Grant 8,730,572 - Shafer , et al. May 20, 2	2014-05-20
Imaging Optical System And Projection Exposure System Including The Same App 20140132941 - Mann; Hans-Juergen ; et al.	2014-05-15
Catoptric imaging optical system with an arc-shaped object field Grant 8,717,538 - Mann May 6, 2	2014-05-06
Projection Optics For Microlithography App 20140118714 - Mann; Hans-Juergen	2014-05-01
Optical imaging device and imaging method for microscopy Grant 8,711,472 - Mann , et al. April 29, 2	2014-04-29
Catadioptric Projection Objective App 20140111787 - Shafer; David R. ; et al.	2014-04-24
Projection Objective For Microlithography App 20140104588 - Zellner; Johannes ; et al.	2014-04-17
Catoptric Objectives And Systems Using Catoptric Objectives App 20140098355 - Mann; Hans-Juergen ; et al.	2014-04-10
Projection objective for a microlithographic EUV projection exposure apparatus Grant 8,693,098 - Rennon , et al. April 8, 2	2014-04-08
Imaging Optical System And Projection Exposure Installation For Microlithography With An Imaging Optical System Of This Type App 20140078484 - Mann; Hans-Juergen ; et al.	2014-03-20
Microlithography Projection System With An Accessible Diaphragm Or Aperture Stop App 20140071414 - Mann; Hans-Juergen	2014-03-13
Imaging Optical System And Projection Exposure System For Microlithography App 20140036246 - Mann; Hans-Juergen	2014-02-06
Imaging Optical Unit For A Projection Exposure Apparatus App 20140038110 - Mann; Hans-Juergen ; et al.	2014-02-06
Projection optics for microlithography Grant 8,643,824 - Mann February 4, 2	2014-02-04
Projection objective for microlithography Grant 8,629,972 - Zellner , et al. January 14, 2	2014-01-14
Imaging Optical System App 20130342821 - Mann; Hans-Juergen	2013-12-26
Microlithography projection system with an accessible diaphragm or aperture stop Grant 8,614,785 - Mann December 24, 2	2013-12-24
Imaging optical system and projection exposure installation for microlithography with an imaging optical system of this type Grant 8,610,877 - Mann , et al. December 17, 2	2013-12-17
Reflective optical element, projection system, and projection exposure apparatus Grant 8,610,876 - Mann December 17, 2	2013-12-17
Imaging optical system and projection exposure system including the same Grant 8,605,255 - Mann , et al. December 10, 2	2013-12-10
Reflective Optical Element And Euv Lithography Appliance App 20130301023 - Trenkler; Johann ; et al.	2013-11-14
Imaging optical system and projection exposure system for microlithography Grant 8,576,376 - Mann November 5, 2	2013-11-05
Imaging optical system and related installation and method Grant 8,558,991 - Mann October 15, 2	2013-10-15
Magnifying Imaging Optical Unit And Metrology System Comprising Such An Imaging Optical Unit App 20130250428 - Mann; Hans-Juergen	2013-09-26
Projection objective of a microlithographic projection exposure apparatus designed forEUV and a method of optically adjusting a projection objective App 20130242278 - Enkisch; Hartmut ; et al.	2013-09-19
Imaging Optical System App 20130128251 - Mann; Hans-Juergen	2013-05-23
Catadioptric Projection Objective With Mirror Group App 20130120728 - Epple; Alexander ; et al.	2013-05-16
Combination stop for catoptric projection arrangement Grant 8,436,985 - Mann , et al. May 7, 2	2013-05-07
Imaging Optical System And Projection Exposure Installation For Microlithography Including Same App 20130088701 - Mann; Hans-Juergen ; et al.	2013-04-11
Catadioptric projection objective Grant 8,416,490 - Shafer , et al. April 9, 2	2013-04-09
Imaging Optical System App 20130070227 - Mueller; Ralf ; et al.	2013-03-21
Catoptric Objectives And Systems Using Catoptric Objectives App 20130063710 - Mann; Hans-Juergen ; et al.	2013-03-14
Apparatus For Microlithographic Projection Exposure And Apparatus For Inspecting A Surface Of A Substrate App 20130050672 - MANN; Hans-Juergen ; et al.	2013-02-28
Imaging Opticsiimaging Optics, Microlithography Projection Exposure Apparatus Having Same And Related Methods App 20130050671 - Mann; Hans-Juergen ; et al.	2013-02-28
Euv Collector App 20130027681 - Mann; Hans-Juergen ; et al.	2013-01-31
Catadioptric projection objective with mirror group Grant 8,363,315 - Epple , et al. January 29, 2	2013-01-29
Catadioptric projection objective Grant 8,355,201 - Shafer , et al. January 15, 2	2013-01-15
Projection Objective Having Mirror Elements With Reflective Coatings App 20130010352 - Chan; Danny ; et al.	2013-01-10
Apparatus for microlithographic projection exposure and apparatus for inspecting a surface of a substrate Grant 8,345,267 - Mann , et al. January 1, 2	2013-01-01
Catadioptric projection objective Grant 8,339,701 - Shafer , et al. December 25, 2	2012-12-25
Catoptric objectives and systems using catoptric objectives Grant 8,317,345 - Mann , et al. November 27, 2	2012-11-27
Reflective Optical Element And Euv Lithography Appliance App 20120293779 - Trenkler; Johann ; et al.	2012-11-22
Imaging Optics App 20120274917 - Mann; Hans-Juergen ; et al.	2012-11-01
Catadioptric Projection Objective App 20120274919 - Shafer; David ; et al.	2012-11-01
Catadioptric Projection Objective App 20120274918 - Shafer; David ; et al.	2012-11-01
Catadioptric projection objective Grant 8,289,619 - Shafer , et al. October 16, 2	2012-10-16
Catadioptric Projection Objective App 20120250147 - Shafer; David ; et al.	2012-10-04
Projection objective having mirror elements with reflective coatings Grant 8,279,404 - Chan , et al. October 2, 2	2012-10-02
Combination Stop For Catoptric Projection Arrangement App 20120236272 - Mann; Hans-Juergen ; et al.	2012-09-20
Imaging Optical System App 20120236282 - Mann; Hans-Juergen	2012-09-20
Method and lithography device with a mask reflecting light Grant 8,268,518 - Mann , et al. September 18, 2	2012-09-18
Mirror For Use In A Microlithography Projection Exposure Apparatus App 20120229784 - ROCKTAESCHEL; Martin ; et al.	2012-09-13
Reflective Optical Imaging System App 20120224160 - Dodoc; Aurelian ; et al.	2012-09-06
Imaging Optics App 20120208115 - Loering; Ulrich ; et al.	2012-08-16
Reflective optical element and EUV lithography appliance Grant 8,243,364 - Trenkler , et al. August 14, 2	2012-08-14
Catoptric Objectives And Systems Using Catoptric Objectives App 20120188525 - Mann; Hans-Juergen ; et al.	2012-07-26
Optical Arrangement And Microlithographic Projection Exposure Apparatus Including Same App 20120182533 - Schoeppach; Armin ; et al.	2012-07-19
Catadioptric projection objective Grant 8,208,199 - Shafer , et al. June 26, 2	2012-06-26
Combination stop for catoptric projection arrangement Grant 8,208,127 - Mann , et al. June 26, 2	2012-06-26
Imaging optical system Grant 8,208,200 - Mann June 26, 2	2012-06-26
Catadioptric projection objective Grant 8,208,198 - Shafer , et al. June 26, 2	2012-06-26
Imaging Optical System And Illumination Optical System App 20120147347 - Mann; Hans-Juergen ; et al.	2012-06-14
Catadioptric projection objective Grant 8,199,400 - Shafer , et al. June 12, 2	2012-06-12
Magnifying Imaging Optical Unit And Metrology System Including Same App 20120140351 - Mann; Hans-Juergen	2012-06-07
Magnifying Imaging Optical Unit And Metrology System Including Same App 20120140454 - Mann; Hans-Juergen	2012-06-07
Projection objectives having mirror elements with reflective coatings Grant 8,194,230 - Chan , et al. June 5, 2	2012-06-05
Magnifying Imaging Optical System And Metrology System With An Imaging Optical System Of This Type App 20120127566 - Mann; Hans-Juergen ; et al.	2012-05-24
Catoptric objectives and systems using catoptric objectives Grant 8,169,694 - Mann , et al. May 1, 2	2012-05-01
Microlithographic Projection Exposure Apparatus App 20120092637 - Totzeck; Michael ; et al.	2012-04-19
Projection Objective And Projection Exposure Apparatus With Negative Back Focus Of The Entry Pupil App 20120075608 - Mann; Hans-Juergen ; et al.	2012-03-29
Imaging Optical System And Projection Exposure Installation For Microlithography With An Imaging Optical System Of This Type App 20120069312 - Mann; Hans-Juergen ; et al.	2012-03-22
Imaging Optics And Projection Exposure Installation For Microlithography With An Imaging Optics Of This Type App 20120069314 - Zellner; Johannes ; et al.	2012-03-22
Imaging Optics And Projection Exposure Installation For Microlithography With An Imaging Optics App 20120069315 - Mann; Hans-Juergen ; et al.	2012-03-22
Microlithographic projection exposure apparatus Grant 8,107,054 - Totzeck , et al. January 31, 2	2012-01-31
Imaging Optics And Projection Exposure Installation For Microlithography With An Imaging Optics App 20120008125 - Mann; Hans-Juergen	2012-01-12
Imaging Optical System And Projection Exposure Installation For Microlithography With An Imaging Optical System Of This Type App 20120008124 - Mann; Hans-Juergen ; et al.	2012-01-12
Projection objective and projection exposure apparatus with negative back focus of the entry pupil Grant 8,094,380 - Mann , et al. January 10, 2	2012-01-10
Imaging Optical System App 20110292367 - Mann; Hans-Juergen	2011-12-01
Catadioptric Projection Objective With Mirror Group App 20110261444 - Epple; Alexander ; et al.	2011-10-27
Microlithography Projection System With An Accessible Diaphragm Or Aperture Stop App 20110261338 - Mann; Hans-Juergen	2011-10-27
Catadioptric Projection Objective App 20110235167 - Shafer; David ; et al.	2011-09-29
Projection objective Grant 8,027,022 - Zellner , et al. September 27, 2	2011-09-27
Reflective Optical Element, Projection System, And Projection Exposure Apparatus App 20110228245 - Mann; Hans-Juergen	2011-09-22
Reflective Optical Element And Euv Lithography Appliance App 20110228237 - TRENKLER; Johann ; et al.	2011-09-22
Illumination Optical System For Projection Lithography App 20110228244 - Mann; Hans-Juergen	2011-09-22
Imaging optical system Grant 8,018,650 - Mann September 13, 2	2011-09-13
Catadioptric Projection Objective App 20110211252 - Shafer; David ; et al.	2011-09-01
Catoptric objectives and systems using catoptric objectives Grant 8,004,755 - Mann , et al. August 23, 2	2011-08-23
Microlithography Projection Exposure Apparatus Having At Least Two Operating States App 20110200946 - Mann; Hans-Juergen ; et al.	2011-08-18
Six-mirror Euv Projection System With Low Incidence Angles App 20110199599 - Mann; Hans-Juergen	2011-08-18
Illumination system and microlithographic projection exposure apparatus including same Grant 7,999,917 - Zellner , et al. August 16, 2	2011-08-16
Microlithography projection system with an accessible diaphragm or aperture stop Grant 7,999,913 - Mann August 16, 2	2011-08-16
Projection exposure system, method for manufacturing a micro-structured structural member by the aid of such a projection exposure system and polarization-optical element adapted for use in such a system Grant 7,982,854 - Mann , et al. July 19, 2	2011-07-19
Illumination system particularly for microlithography Grant 7,977,651 - Mann , et al. July 12, 2	2011-07-12
Imaging Optical System App 20110165522 - Mann; Hans-Juergen ; et al.	2011-07-07
Six-mirror EUV projection system with low incidence angles Grant 7,973,908 - Mann July 5, 2	2011-07-05
Projection Optics For Microlithography App 20110157572 - Mann; Hans-Juergen	2011-06-30
Imaging Optics App 20110122384 - Mann; Hans-Juergen	2011-05-26
Projection Objective For A Microlithographic Euv Projection Exposure Apparatus App 20110090559 - Rennon; Siegfried ; et al.	2011-04-21
Projection optics for microlithography Grant 7,929,114 - Mann April 19, 2	2011-04-19
Apparatus For Microlithographic Projection Exposure And Apparatus For Inspecting A Surface Of A Substrate App 20110085179 - Mann; Hans-Juergen ; et al.	2011-04-14
Masks, lithography device and semiconductor component Grant 7,914,955 - Mann , et al. March 29, 2	2011-03-29
Projection Objective And Projection Exposure Apparatus With Negative Back Focus Of The Entry Pupil App 20110063596 - Mann; Hans-Juergen ; et al.	2011-03-17
Projection Objective For Microlithography App 20110026003 - Zellner; Johannes ; et al.	2011-02-03
Catadioptric projection objective Grant 7,869,122 - Shafer , et al. January 11, 2	2011-01-11
Projection objective and projection exposure apparatus with negative back focus of the entry pupil Grant 7,869,138 - Mann , et al. January 11, 2	2011-01-11
Imaging Optical System And Projection Exposure Installation App 20100265481 - Mann; Hans-Juergen ; et al.	2010-10-21
Catadioptric Projection Objective App 20100265572 - Shafer; David ; et al.	2010-10-21
Catadioptric Projection Objective App 20100253999 - Shafer; David ; et al.	2010-10-07
Imaging Optical System And Related Installation And Method App 20100231884 - Mann; Hans-Juergen	2010-09-16
Imaging Optical System And Projection Exposure System For Microlithography App 20100231885 - Mann; Hans-Juergen	2010-09-16
Imaging Optical System And Projection Exposure Apparatus For Microlithography Including An Imaging Optical System App 20100231886 - Mann; Hans-Juergen	2010-09-16
Projection Objective For Micrlolithography Having An Obscurated Pupil App 20100208225 - Kraehmer; Daniel ; et al.	2010-08-19
Projection Objective Having Mirror Elements With Reflective Coatings App 20100195075 - Chan; Danny ; et al.	2010-08-05
Optical system for radiation in the EUV-wavelength range and method for measuring a contamination status of EUV-reflective elements Grant 7,763,870 - Ehm , et al. July 27, 2	2010-07-27
Optical imaging device and imaging method for microscopy App 20100149632 - Mann; Hans-Juergen ; et al.	2010-06-17
Projection Objective And Method For Its Manufacture App 20100149517 - Mann; Hans-Juergen ; et al.	2010-06-17
Microscope And Microscopy Method For Space-resolved Measurement Of A Predetermined Structure, In Particular A Structure Of A Lithographic Mask App 20100142042 - Mann; Hans-Juergen ; et al.	2010-06-10
Microlithography Projection Optical System And Method For Manufacturing A Device App 20100134907 - Mann; Hans-Juergen ; et al.	2010-06-03
Projection Objective App 20100134880 - Mann; Hans-Juergen	2010-06-03
Imaging system with mirror group Grant 7,712,905 - Shafer , et al. May 11, 2	2010-05-11
Catadioptric projection objective Grant 7,679,821 - Shafer , et al. March 16, 2	2010-03-16
Catadioptric projection objective Grant 7,672,047 - Shafer , et al. March 2, 2	2010-03-02
Method And Apparatus For Producing An Element Having At Least One Freeform Surface Having A High Accuracy Of Form And A Low Surface Roughness App 20100033696 - BOEHM; Thure ; et al.	2010-02-11
Catadioptric Projection Objective App 20100014153 - Shafer; David ; et al.	2010-01-21
Illumination System Particularly For Microlithography App 20090316128 - Mann; Hans-Juergen ; et al.	2009-12-24
Masks, Lithography Device And Semiconductor Component App 20090268189 - MANN; Hans-Juergen ; et al.	2009-10-29
Catoptric Objectives And Systems Using Catoptric Objectives App 20090262443 - Mann; Hans-Juergen ; et al.	2009-10-22
Illumination system particularly for microlithography Grant 7,592,598 - Mann , et al. September 22, 2	2009-09-22
Microlithography exposure apparatus using polarized light and microlithography projection system having concave primary and secondary mirrors App 20090213345 - Mann; Hans-Juergen	2009-08-27
Catadioptric Projection Objective App 20090190208 - Shafer; David ; et al.	2009-07-30
Method for correcting astigmatism in a microlithography projection exposure apparatus, a projection objective of such a projection exposure apparatus, and a fabrication method for micropatterned components Grant 7,522,260 - Kirchner , et al. April 21, 2	2009-04-21
Six-mirror Euv Projection System With Low Incidence Angles App 20090079952 - Mann; Hans-Juergen	2009-03-26
8-mirror microlithography projection objective Grant 7,508,580 - Mann , et al. March 24, 2	2009-03-24
Illumination System Particularly For Microlithography App 20090073410 - Mann; Hans-Juergen ; et al.	2009-03-19
Illumination System Including Grazing Incidence Mirror For Microlithography Exposure System App 20090073392 - Mann; Hans-Juergen ; et al.	2009-03-19
Microlithographic Projection Exposure Apparatus App 20090073398 - Totzeck; Michael ; et al.	2009-03-19
Microlithography Projection Optical System And Method For Manufacturing A Device App 20090052073 - Mann; Hans-Juergen ; et al.	2009-02-26
Microlithography Projection Optical System, Tool And Method Of Production App 20090051890 - Mann; Hans-Juergen ; et al.	2009-02-26
Catoptric Objectives And Systems Using Catoptric Objectives App 20090046357 - Mann; Hans-Juergen ; et al.	2009-02-19
Projection Objective App 20090027644 - Zellner; Johannes ; et al.	2009-01-29
Combination Stop For Catoptric Projection Arrangement App 20090021714 - Mann; Hans-Juergen ; et al.	2009-01-22
Illumination System And Microlithographic Projection Exposure Apparatus Including Same App 20090021713 - Zellner; Johannes ; et al.	2009-01-22
Projection Objective And Method For Its Manufacture App 20090015951 - Mann; Hans-Juergen ; et al.	2009-01-15
Projection exposure apparatus and projection optical system Grant 7,477,355 - Fehr , et al. January 13, 2	2009-01-13
Optical System For Radiation In The Euv-wavelength Range And Method For Measuring A Contamination Status Of Euv-reflective Elements App 20080315134 - EHM; Dirk Heinrich ; et al.	2008-12-25
Catadioptric Projection Objective App 20080310014 - Shafer; David ; et al.	2008-12-18
Projection exposure apparatus Grant 7,463,422 - Kamenow , et al. December 9, 2	2008-12-09
Catadioptric Projection Objective App 20080297889 - Shafer; David ; et al.	2008-12-04
Illumination system particularly for microlithography Grant 7,456,408 - Mann , et al. November 25, 2	2008-11-25
Catadioptric Projection Objective App 20080285121 - Shafer; David ; et al.	2008-11-20
Method For Distortion Correction In A Microlithographic Projection Exposure Apparatus App 20080278699 - Kirchner; Andreas ; et al.	2008-11-13
Reflective projection lens for EUV-photolithography Grant 7,450,301 - Mann , et al. November 11, 2	2008-11-11
Projection objective and method for its manufacture Grant 7,429,116 - Mann , et al. September 30, 2	2008-09-30
Catadioptric Projection Objective App 20080212170 - Shafer; David ; et al.	2008-09-04
Catoptric objectives and systems using catoptric objectives Grant 7,414,781 - Mann , et al. August 19, 2	2008-08-19
Catadioptric Projection Objective App 20080186567 - Shafer; David ; et al.	2008-08-07
Projection Optics For Microlithography App 20080170216 - Mann; Hans-Juergen	2008-07-17
Imaging Optical System App 20080170310 - Mann; Hans-Juergen	2008-07-17
Projection Objectives Having Mirror Elements With Reflective Coatings App 20080165415 - Chan; Danny ; et al.	2008-07-10
Catadioptric Projection Objective App 20080151364 - Shafer; David ; et al.	2008-06-26
Catadioptric Projection Objective App 20080151365 - Shafer; David ; et al.	2008-06-26
Catadioptric projection objective Grant 7,385,756 - Shafer , et al. June 10, 2	2008-06-10
Illumination system particularly for microlithography App 20080130076 - Mann; Hans-Juergen ; et al.	2008-06-05
8-mirror microlithography projection objective Grant 7,372,624 - Mann , et al. May 13, 2	2008-05-13
Lithographic system, method for adapting transmission characteristics of an optical pathway within a lithographic system, semiconductor device, method of manufacturing a reflective element for use in a lithographic system, and reflective element manufactured thereby Grant 7,369,216 - Moors , et al. May 6, 2	2008-05-06
Illumination system particularly for microlithography Grant 7,348,565 - Mann , et al. March 25, 2	2008-03-25
Microlithography Projection System With An Accessible Diaphragm Or Aperture Stop App 20080024746 - Mann; Hans-Juergen	2008-01-31
Catadioptric projection objective App 20070236674 - Shafer; David ; et al.	2007-10-11
Projection Objective And Projection Exposure Apparatus With Negative Back Focus Of The Entry Pupil App 20070223112 - Mann; Hans-Juergen ; et al.	2007-09-27
Method of determining lens materials for a projection exposure apparatus App 20070195423 - Kamenov; Vladimir ; et al.	2007-08-23
Reflective projection lens for EUV-photolithography App 20070171558 - Mann; Hans-Juergen ; et al.	2007-07-26
Illumination system particularly for microlithography App 20070120072 - Mann; Hans-Juergen ; et al.	2007-05-31
Reflective projection lens for EUV-photolithography Grant 7,199,922 - Mann , et al. April 3, 2	2007-04-03
Catoptric objectives and systems using catoptric objectives App 20070058269 - Mann; Hans-Juergen ; et al.	2007-03-15
Illumination system particularly for microlithography Grant 7,186,983 - Mann , et al. March 6, 2	2007-03-06
Projection objectives including a plurality of mirrors with lenses ahead of mirror M3 App 20060171040 - Mann; Hans-Juergen ; et al.	2006-08-03
Projection objectives including a plurality of mirrors with lenses ahead of mirror M3 Grant 7,085,075 - Mann , et al. August 1, 2	2006-08-01
Projection exposure apparatus and projection optical system App 20060119822 - Fehr; Jean-Noel ; et al.	2006-06-08
Lithographic system, method for adapting transmission characteristics of an optical pathway within a lithographic system, semiconductor device, method of manufacturing a reflective element for use in a lithographic system, and reflective element manufactured thereby App 20060082751 - Moors; Johannes Hubertus Josephina ; et al.	2006-04-20
Reflective projection lens for EUV-photolithography App 20050248835 - Mann, Hans-Juergen ; et al.	2005-11-10
Catadioptric projection objective App 20050190435 - Shafer, David ; et al.	2005-09-01
Reflective projection lens for EUV-photolithography Grant 6,927,901 - Mann , et al. August 9, 2	2005-08-09
Projection objective and method for its manufacture App 20050134980 - Mann, Hans-Juergen ; et al.	2005-06-23
Illumination system particularly for microlithography App 20050088760 - Mann, Hans-Juergen ; et al.	2005-04-28
Illumination system particularly for microlithography Grant 6,859,328 - Schultz , et al. February 22, 2	2005-02-22
Reflective projection lens for EUV-photolithography App 20030099034 - Mann, Hans-Juergen ; et al.	2003-05-29
Illumination system particularly for microlithography App 20030095622 - Schultz, Jorg ; et al.	2003-05-22