Mankos; Marian

Patent Applications and Registrations

Patent applications and USPTO patent grants for Mankos; Marian.The latest application filed is for "aberration reduction in multipass electron microscopy".

Company Profile

1.48.14

Mankos; Marian - Palo Alto CA
Mankos; Marian - San Jose CA
Mankos; Marian - San Francisco CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Aberration reduction in multipass electron microscopy Grant 11,456,148 - Kasevich , et al. September 27, 2	2022-09-27
Methods for performing a non-contact electrical measurement on a cell, chip, wafer, die, or logic block Grant 11,340,293 - De , et al. May 24, 2	2022-05-24
Compact arrangement for aberration correction of electron lenses Grant 11,276,549 - Mankos March 15, 2	2022-03-15
Aberration reduction in multipass electron microscopy App 20210217578 - KASEVICH; Mark A. ; et al.	2021-07-15
Systems, Devices, And Methods For Performing A Non-contact Electrical Measurement On A Cell, Non-contact Electrical Measurement Cell Vehicle, Chip, Wafer, Die, Or Logic Block App 20210096179 - DE; Indranil ; et al.	2021-04-01
E-beam inspection apparatus and method of using the same on various integrated circuit chips Grant 9,496,119 - De , et al. November 15, 2	2016-11-15
Mirror pulse compressor for electron beam apparatus Grant 9,406,479 - Mankos August 2, 2	2016-08-02
Aberration-corrected and energy-filtered low energy electron microscope with monochromatic dual beam illumination Grant 8,729,466 - Mankos May 20, 2	2014-05-20
Electron beam column and methods of using same Grant 8,461,526 - Mankos , et al. June 11, 2	2013-06-11
Mirror energy filter for electron beam apparatus Grant 8,334,508 - Mankos December 18, 2	2012-12-18
High-sensitivity and high-throughput electron beam inspection column enabled by adjustable beam-limiting aperture Grant 8,294,125 - Han , et al. October 23, 2	2012-10-23
Compact arrangement for dual-beam low energy electron microscope Grant 8,258,474 - Mankos September 4, 2	2012-09-04
Electron Beam Column And Methods Of Using Same App 20120138791 - MANKOS; Marian ; et al.	2012-06-07
Mirror monochromator for charged particle beam apparatus Grant 8,183,526 - Mankos May 22, 2	2012-05-22
Shielding, particulate reducing high vacuum components Grant 8,092,927 - Tahmassebpur , et al. January 10, 2	2012-01-10
Shielding, Particulate Reducing High Vacuum Components App 20110142382 - Tahmassebpur; Mohammed ; et al.	2011-06-16
High-Sensitivity and High-Throughput Electron Beam Inspection Column Enabled by Adjustable Beam-Limiting Aperture App 20110114838 - HAN; Liqun ; et al.	2011-05-19
Shielding, particulate reducing high vacuum components Grant 7,919,193 - Tahmassebpur , et al. April 5, 2	2011-04-05
Electron beam apparatus and inspection method using dual illumination beams with dynamically controllable offsets Grant 7,838,832 - Mankos , et al. November 23, 2	2010-11-23
Immersion gun equipped electron beam column Grant 7,821,187 - Jiang , et al. October 26, 2	2010-10-26
Reflective electron patterning device and method of using same Grant 7,816,655 - Hess , et al. October 19, 2	2010-10-19
High-fidelity reflection electron beam lithography Grant 7,692,167 - Mankos April 6, 2	2010-04-06
High-resolution, low-distortion and high-efficiency optical coupling in detection system of electron beam apparatus Grant 7,566,873 - Walker , et al. July 28, 2	2009-07-28
Electrical process monitoring using mirror-mode electron microscopy Grant 7,514,681 - Marella , et al. April 7, 2	2009-04-07
Systems, control subsystems, and methods for projecting an electron beam onto a specimen Grant 7,342,238 - Zywno , et al. March 11, 2	2008-03-11
Holey mirror arrangement for dual-energy e-beam inspector Grant 7,217,924 - Mankos , et al. May 15, 2	2007-05-15
Scanning electron microscope with curved axes Grant 7,205,542 - Mankos , et al. April 17, 2	2007-04-17
Systems, control subsystems, and methods for projecting an electron beam onto a specimen App 20070029506 - Zywno; Marek ; et al.	2007-02-08
Electron beam lithography system having improved electron gun Grant 7,095,037 - Fernadez , et al. August 22, 2	2006-08-22
Apparatus and method for tilted particle-beam illumination Grant 7,009,177 - Mankos , et al. March 7, 2	2006-03-07
Twisted-compensated low-energy electron microscope Grant 6,943,360 - Mankos September 13, 2	2005-09-13
High contrast inspection and review of magnetic media and heads Grant 6,936,816 - Mankos , et al. August 30, 2	2005-08-30
Dual-energy electron flooding for neutralization of charged substrate Grant 6,930,309 - Mankos , et al. August 16, 2	2005-08-16
Method and apparatus for reducing substrate edge effects in electron lenses Grant 6,903,338 - Mankos , et al. June 7, 2	2005-06-07
Prism array for electron beam inspection and defect review Grant 6,878,937 - Mankos April 12, 2	2005-04-12
Maskless reflection electron beam projection lithography Grant 6,870,172 - Mankos , et al. March 22, 2	2005-03-22
Immersion objective lens for e-beam inspection Grant 6,858,843 - Mankos , et al. February 22, 2	2005-02-22
Electron beam lithography system having improved electron gun App 20040232357 - Fernadez, Andres ; et al.	2004-11-25
Photocathode source for e-beam inspection or review Grant 6,812,461 - Adler , et al. November 2, 2	2004-11-02
High contrast inspection and review of magnetic media and heads App 20040200960 - Mankos, Marian ; et al.	2004-10-14
Method and apparatus for dual-energy e-beam inspector Grant 6,803,571 - Mankos , et al. October 12, 2	2004-10-12
Method and apparatus for reducing substrate edge effects in electron lenses App 20040149906 - Mankos, Marian ; et al.	2004-08-05
High Contrast Inspection And Review Of Magnetic Media And Heads App 20040129877 - Mankos, Marian ; et al.	2004-07-08
High contrast inspection and review of magnetic media and heads Grant 6,759,654 - Mankos , et al. July 6, 2	2004-07-06
Diamond supported photocathodes for electron sources Grant 6,759,800 - Fernandez , et al. July 6, 2	2004-07-06
Multiple electron beam lithography system with multiple beam modulated laser illumination Grant 6,724,002 - Mankos , et al. April 20, 2	2004-04-20
Suppression of emission noise for microcolumn applications in electron beam inspection Grant 6,555,830 - Mankos , et al. April 29, 2	2003-04-29
Electron beam lithography system using a photocathode with a pattern of apertures for creating a transmission resonance Grant 6,538,256 - Mankos , et al. March 25, 2	2003-03-25
Electron beam lithography system having improved electron gun App 20030048427 - Fernandez, Andres ; et al.	2003-03-13
Multiple electron beam lithography system with multiple beam modulated laser illumination App 20030042434 - Mankos, Marian ; et al.	2003-03-06
Moving photocathode with continuous regeneration for image conversion in electron beam lithography Grant 6,476,401 - Veneklasen , et al. November 5, 2	2002-11-05
Optical signal transmission for electron beam imaging apparatus App 20020145113 - Sullivan, Jeffrey ; et al.	2002-10-10
Multiple beam electron beam lithography system Grant 6,429,443 - Mankos , et al. August 6, 2	2002-08-06
Gated photocathode for controlled single and multiple electron beam emission Grant 6,376,985 - Lee , et al. April 23, 2	2002-04-23
Gate Photocathode For Controlled Single And Multiple Electron Beam Emission App 20010038263 - LEE, KIM Y. ; et al.	2001-11-08
Electrostatic alignment of a charged particle beam Grant 6,288,401 - Chang , et al. September 11, 2	2001-09-11
Method of forming gated photocathode for controlled single and multiple electron beam emission Grant 6,220,914 - Lee , et al. April 24, 2	2001-04-24
Charged particle beam illumination of blanking aperture array Grant 6,157,039 - Mankos December 5, 2	2000-12-05

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