Manger; Matthias

Patent Applications and Registrations

Patent applications and USPTO patent grants for Manger; Matthias.The latest application filed is for "device and method for measuring the beam angle of a light beam guided by a beam guiding optical unit".

Company Profile

8.25.24

Manger; Matthias - Aalen DE
Manger; Matthias - Aalen-Unterkochen DE
Manger; Matthias - Furth DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method for producing a reflecting optical element of a projection exposure apparatus and reflecting optical element for a projection exposure apparatus, projection lens and projection exposure apparatus Grant 11,415,892 - Kaes , et al. August 16, 2	2022-08-16
Measuring assembly for the frequency-based determination of the position of a component Grant 11,274,914 - Manger , et al. March 15, 2	2022-03-15
Beam propagation camera and method for light beam analysis Grant 11,099,400 - Manger August 24, 2	2021-08-24
Device And Method For Measuring The Beam Angle Of A Light Beam Guided By A Beam Guiding Optical Unit App 20210219409 - Baumer; Florian ; et al.	2021-07-15
Method and device for beam analysis Grant 11,054,305 - Manger , et al. July 6, 2	2021-07-06
Method for producing an illumination system for an EUV projection exposure system, and illumination system Grant 11,048,172 - Baier , et al. June 29, 2	2021-06-29
Metrology System And Method For Measuring An Excitation Laser Beam In An Euv Plasma Source App 20210190583 - Manger; Matthias ; et al.	2021-06-24
Method For Producing A Reflecting Optical Element Of A Projection Exposure Apparatus And Reflecting Optical Element For A Projection Exposure Apparatus, Projection Lens And Projection Exposure Apparatus App 20210157244 - KAES; Matthias ; et al.	2021-05-27
Electrical junction box for motor diagnosis Grant D914,612 - Andersson , et al. March 30, 2	2021-03-30
Measuring Assembly For The Frequency-based Determination Of The Position Of A Component App 20210080244 - MANGER; Matthias ; et al.	2021-03-18
Method For Producing An Illumination System For An Euv Projection Exposure System, And Illumination System App 20200110340 - Baier; Juergen ; et al.	2020-04-09
Method and device for beam analysis Grant 10,605,654 - Manger , et al.	2020-03-31
Method And Device For Beam Analysis App 20200088571 - Manger; Matthias ; et al.	2020-03-19
Method for producing an illumination system for an EUV projection exposure system, and illumination system Grant 10,514,608 - Baier , et al. Dec	2019-12-24
Electrical junction box for motor diagnosis Grant D863,226 - Andersson , et al. Oc	2019-10-15
Method For Producing An Illumination System For An Euv Projection Exposure System, And Illumination System App 20180373158 - Baier; Juergen ; et al.	2018-12-27
Method And Device For Beam Analysis App 20180202860 - Manger; Matthias ; et al.	2018-07-19
Projection Exposure System For Microlithography And Method Of Monitoring A Lateral Imaging Stability App 20180039184 - MANGER; Matthias ; et al.	2018-02-08
System and method for analyzing a light beam guided by a beam guiding optical unit Grant 9,823,119 - Manger , et al. November 21, 2	2017-11-21
Projection exposure system for microlithography and method of monitoring a lateral imaging stability Grant 9,720,328 - Manger , et al. August 1, 2	2017-08-01
System And Method For Analyzing A Light Beam Guided By A Beam Guiding Optical Unit App 20170122803 - MANGER; Matthias ; et al.	2017-05-04
Measuring Arrangement For Use When Determining Trajectories Of Flying Objects App 20160350935 - MANGER; Matthias	2016-12-01
Beam Propagation Camera And Method For Light Beam Analysis App 20160341969 - MANGER; Matthias	2016-11-24
Projection Exposure System For Microlithography And Method Of Monitoring A Lateral Imaging Stability App 20160266501 - MANGER; Matthias ; et al.	2016-09-15
Projection exposure system for microlithography and method of monitoring a lateral imaging stability Grant 9,235,142 - Manger , et al. January 12, 2	2016-01-12
Method for measuring an optical system Grant 8,786,849 - Korb , et al. July 22, 2	2014-07-22
Method Of Measuring A Shape Of An Optical Surface Based On Computationally Combined Surface Region Measurements And Interferometric Measuring Device App 20140078513 - FREIMANN; Rolf ; et al.	2014-03-20
Method of measuring a shape of an optical surface based on computationally combined surface region measurements and interferometric measuring device Grant 8,593,642 - Freimann , et al. November 26, 2	2013-11-26
Method For Measuring An Optical System App 20130271749 - KORB; Thomas ; et al.	2013-10-17
Method for calibrating a specimen stage of a metrology system and metrology system comprising a specimen stage Grant 8,473,237 - Huebel , et al. June 25, 2	2013-06-25
Optical system for microlithography Grant 8,456,616 - Kraehmer , et al. June 4, 2	2013-06-04
Method for determination of residual errors Grant 8,416,412 - Schellhorn , et al. April 9, 2	2013-04-09
Method Of Measuring A Shape Of An Optical Surface And Interferometric Measuring Device App 20120229814 - FREIMANN; Rolf ; et al.	2012-09-13
Projection Exposure System For Microlithography And Method Of Monitoring A Lateral Imaging Stability App 20110157571 - Manger; Matthias ; et al.	2011-06-30
Optical System For Microlithography App 20110069295 - Kraehmer; Daniel ; et al.	2011-03-24
Method For Calibrating A Specimen Stage Of A Metrology System And Metrology System Comprising A Specimen Stage App 20100241384 - Huebel; Alexander ; et al.	2010-09-23
Method and apparatus for determining at least one optical property of an imaging optical system Grant 7,760,345 - Manger , et al. July 20, 2	2010-07-20
Device and method for range-resolved determination of scattered light, and an illumination mask Grant 7,755,748 - Arnz , et al. July 13, 2	2010-07-13
Apparatus And Method For Measuring The Positions Of Marks On A Mask App 20100153059 - Klose; Gerd ; et al.	2010-06-17
Method For Determination Of Residual Errors App 20100097608 - Schellhorn; Uwe ; et al.	2010-04-22
Device And Method For Range-resolved Determination Of Scattered Light, And An Illumination Mask App 20080285018 - Arnz; Michael ; et al.	2008-11-20
Method And Apparatus For Determining At Least One Optical Property Of An Imaging Optical System App 20080204729 - Manger; Matthias ; et al.	2008-08-28
Device for the range-resolved determination of scattered light, operating method, illumination mask and image-field mask Grant 7,408,631 - Arnz , et al. August 5, 2	2008-08-05
Device for the range-resolved determination of scattered light, operating method, illumination mask and image-field mask App 20050264819 - Arnz, Michael ; et al.	2005-12-01

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