Mangat; Pawitter J. S.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Mangat; Pawitter J. S..The latest application filed is for "method, apparatus and system for using free-electron laser compatible euv beam for semiconductor wafer metrology".

Company Profile

0.7.5

Mangat; Pawitter J. S. - Malta NY
Mangat; Pawitter J. S. - Clifton Park NY
Mangat; Pawitter J.S. - Gilbert AZ
Mangat; Pawitter J. S. - Chandler AZ

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method, apparatus and system for using free-electron laser compatible EUV beam for semiconductor wafer metrology Grant 9,844,124 - Hosler , et al. December 12, 2	2017-12-12
Method, Apparatus and System for Using Free-Electron Laser Compatible EUV Beam for Semiconductor Wafer Metrology App 20160270200 - Hosler; Erik Robert ; et al.	2016-09-15
Mask structures and methods of manufacturing Grant 9,195,132 - Patil , et al. November 24, 2	2015-11-24
Mask Structures And Methods Of Manufacturing App 20150212402 - PATIL; Suraj K. ; et al.	2015-07-30
Method And Apparatus For Manipulating A Displayed Image App 20090046110 - Sadler; Daniel J. ; et al.	2009-02-19
Reflective mask useful for transferring a pattern using extreme ultraviolet (EUV) radiation and method of making the same Grant 6,986,971 - Han , et al. January 17, 2	2006-01-17
Method of forming a rim phase shifting mask and using the rim phase shifting mask to form a semiconductor device Grant 6,797,440 - Garza , et al. September 28, 2	2004-09-28
Reflective mask useful for transferring a pattern using extreme ultraviolet (EUV) radiation and method of making the same App 20040091789 - Han, Sang-In ; et al.	2004-05-13
Method of forming a rim phase shifting mask and using the rim phase shifting mask to form a semiconductor device App 20040029021 - Garza, Cesar M. ; et al.	2004-02-12
Coatings on reflective mask substrates Grant 6,352,803 - Tong , et al. March 5, 2	2002-03-05
Method for forming a semiconductor device using a mask having a self-assembled monolayer Grant 6,297,169 - Mangat , et al. October 2, 2	2001-10-02
Method of forming a lithographic mask Grant 5,899,728 - Mangat , et al. May 4, 1	1999-05-04

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