Mangat; Pawitter

Patent Applications and Registrations

Patent applications and USPTO patent grants for Mangat; Pawitter.The latest application filed is for "euv patterning using photomask substrate topography".

Company Profile

0.15.13

Mangat; Pawitter - Mesa AZ
Mangat; Pawitter - Clifton Park NY
Mangat; Pawitter - Gilbert AZ US

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Euv Patterning Using Photomask Substrate Topography App 20190056651 - Verduijn; Erik ; et al.	2019-02-21
Methods for fabricating EUV masks and methods for fabricating integrated circuits using such EUV masks Grant 8,911,920 - Raghunathan , et al. December 16, 2	2014-12-16
Methods For Fabricating Euv Masks And Methods For Fabricating Integrated Circuits Using Such Euv Masks App 20140272677 - Raghunathan; Sudharshanan ; et al.	2014-09-18
EUV mask defect reconstruction and compensation repair Grant 8,739,098 - Clifford , et al. May 27, 2	2014-05-27
Task management in a workforce environment using an acoustic map constructed from aggregated audio Grant 8,706,540 - Mangat , et al. April 22, 2	2014-04-22
Extreme ultraviolet masks having annealed light-absorptive borders and associated fabrication methods Grant 8,592,103 - Mangat , et al. November 26, 2	2013-11-26
Extreme Ultraviolet Masks Having Annealed Light-absorptive Borders And Associated Fabrication Methods App 20130029253 - Mangat; Pawitter ; et al.	2013-01-31
Task Management In A Workforce Environment Using An Acoustic Map Constructed From Aggregated Audio App 20120150578 - Mangat; Pawitter ; et al.	2012-06-14
Method of patterning photoresist on a wafer using a reflective mask with a multi-layer ARC Grant 7,378,197 - Wasson , et al. May 27, 2	2008-05-27
Method of patterning photoresist on a wafer using a reflective mask with a multi-layer ARC Grant 7,026,076 - Wasson , et al. April 11, 2	2006-04-11
Method of patterning photoresist on a wafer using a reflective mask with a multi-layer ARC App 20060057476 - Wasson; James R. ; et al.	2006-03-16
Attenuated phase shift mask for extreme ultraviolet lithography and method therefore Grant 6,986,974 - Han , et al. January 17, 2	2006-01-17
Method of patterning photoresist on a wafer using a transmission mask with a carbon layer Grant 6,939,650 - Wasson , et al. September 6, 2	2005-09-06
Attenuated phase shift mask for extreme ultraviolet lithography and method therefore App 20050084768 - Han, Sang-In ; et al.	2005-04-21
Method of patterning photoresist on a wafer using an attenuated phase shift mask Grant 6,875,546 - Wasson , et al. April 5, 2	2005-04-05
Method of patterning photoresist on a wafer using a reflective mask with a multi-layer ARC App 20040175630 - Wasson, James R. ; et al.	2004-09-09
Method of patterning photoresist on a wafer using an attenuated phase shift mask App 20040175629 - Wasson, James R. ; et al.	2004-09-09
Method of patterning photoresist on a wafer using a transmission mask with a carbon layer App 20040142249 - Wasson, James R. ; et al.	2004-07-22
Method for fabricating a thin-membrane stencil mask and method for making a semiconductor device using the same Grant 6,749,968 - Mangat , et al. June 15, 2	2004-06-15
Method of making an integrated circuit using a reflective mask Grant 6,673,520 - Han , et al. January 6, 2	2004-01-06
Method of forming a pattern on a semiconductor wafer using an attenuated phase shifting reflective mask Grant 6,653,053 - Mangat , et al. November 25, 2	2003-11-25
Method of forming a pattern on a semiconductor wafer using an attenuated phase shifting reflective mask App 20030039923 - Mangat, Pawitter ; et al.	2003-02-27
Method of making an integrated circuit using a reflective mask App 20030039922 - Han, Sang-In ; et al.	2003-02-27
Method for fabricating a thin-membrane stencil mask and method for making a semiconductor device using the same App 20030031936 - Mangat, Pawitter ; et al.	2003-02-13
Membrane mask stress measurement apparatus and method therefor Grant 6,477,898 - Han , et al. November 12, 2	2002-11-12

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