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Composition And Methods Using Same For Carbon Doped Silicon Containing Films App 20220037151 - CHANDRA; HARIPIN ;   et al. | 2022-02-03 |
Compositions and methods using same for carbon doped silicon containing films Grant 11,152,206 - Chandra , et al. October 19, 2 | 2021-10-19 |
Compositions And Methods Using Same For Carbon Doped Silicon Containing Films App 20200203155 - Chandra; Haripin ;   et al. | 2020-06-25 |
Silicon-based films and methods of forming the same Grant 10,422,034 - Lei , et al. Sept | 2019-09-24 |
Barrier materials for display devices Grant 10,319,862 - Ridgeway , et al. | 2019-06-11 |
Methods for depositing films with organoaminodisilane precursors Grant 10,283,350 - Xiao , et al. | 2019-05-07 |
High temperature atomic layer deposition of silicon-containing films Grant 10,283,348 - Wang , et al. | 2019-05-07 |
Compositions and methods using same for carbon doped silicon containing films Grant 10,145,008 - Chandra , et al. De | 2018-12-04 |
Methods for Depositing Films with Organoaminodisilane Precursors App 20180294152 - Xiao; Manchao ;   et al. | 2018-10-11 |
Methods For Depositing A Conformal Metal Or Metalloid Silicon Nitride Film App 20180274097 - LEI; Xinjian ;   et al. | 2018-09-27 |
Organoaminodisilane precursors and methods for depositing films comprising same Grant 10,077,364 - Mayorga , et al. September 18, 2 | 2018-09-18 |
Methods for depositing films with organoaminodisilane precursors Grant 9,997,350 - Xiao , et al. June 12, 2 | 2018-06-12 |
Silicon-Based Films and Methods of Forming the Same App 20180119276 - Lei; Xinjian ;   et al. | 2018-05-03 |
Methods for depositing silicon nitride films Grant 9,905,415 - Chandra , et al. February 27, 2 | 2018-02-27 |
Compositions and Methods Using Same for Carbon Doped Silicon Containing Films App 20180033614 - Chandra; Haripin ;   et al. | 2018-02-01 |
Silicon-based films and methods of forming the same Grant 9,879,340 - Lei , et al. January 30, 2 | 2018-01-30 |
Compositions And Methods Using Same For Carbon Doped Silicon Containing Films App 20180023192 - Chandra; Haripin ;   et al. | 2018-01-25 |
High Temperature Atomic Layer Deposition of Silicon-Containing Films App 20170207082 - Wang; Meiliang ;   et al. | 2017-07-20 |
Organoaminodisilane Precursors and Methods for Depositing Films Comprising Same App 20170183502 - Mayorga; Steven Gerard ;   et al. | 2017-06-29 |
Methods for Depositing Films with Organoaminodisilane Precursors App 20170186605 - Xiao; Manchao ;   et al. | 2017-06-29 |
Organoaminodisilane precursors and methods for depositing films comprising same Grant 9,627,193 - Mayorga , et al. April 18, 2 | 2017-04-18 |
Methods for depositing films with organoaminodisilane precursors Grant 9,613,799 - Xiao , et al. April 4, 2 | 2017-04-04 |
Methods For Depositing Films With Organoaminodisilane Precursors App 20160203975 - Xiao; Manchao ;   et al. | 2016-07-14 |
Methods for depositing films with organoaminodisilane precursors Grant 9,337,018 - Xiao , et al. May 10, 2 | 2016-05-10 |
Silicon-based Films And Methods Of Forming The Same App 20160122869 - Lei; Xinjian ;   et al. | 2016-05-05 |
Compositions And Methods For The Deposition Of Silicon Oxide Films App 20150275355 - Mallikarjunan; Anupama ;   et al. | 2015-10-01 |
Methods for Depositing Silicon Nitride Films App 20150099375 - Haripin; Chandra ;   et al. | 2015-04-09 |
Organoaminodisilane Precursors and Methods for Depositing Films Comprising Same App 20150024608 - Mayorga; Steven Gerard ;   et al. | 2015-01-22 |
Barrier Materials For Display Devices App 20150021599 - Ridgeway; Robert Gordon ;   et al. | 2015-01-22 |
Compositions And Methods For Making Silicon Containing Films App 20150014823 - Mallikarjunan; Anupama ;   et al. | 2015-01-15 |
Dielectric barrier deposition using nitrogen containing precursor Grant 8,889,235 - Mallikarjunan , et al. November 18, 2 | 2014-11-18 |
Organoaminodisilane Precursors And Methods For Depositing Films Comprising Same App 20130323435 - Xiao; Manchao ;   et al. | 2013-12-05 |
Oxygen Containing Precursors for Photovoltaic Passivation App 20130247971 - Haas; Mary Kathryn ;   et al. | 2013-09-26 |
Precursors for Photovoltaic Passivation App 20130220410 - Haas; Mary Kathryn ;   et al. | 2013-08-29 |
Selective etching and formation of xenon difluoride Grant 8,278,222 - Wu , et al. October 2, 2 | 2012-10-02 |
Dielectric Barrier Deposition Using Nitrogen Containing Precursor App 20100291321 - Mallikarjunan; Anupama ;   et al. | 2010-11-18 |
Selective Etching and Formation of Xenon Difluoride App 20100022095 - Wu; Dingjun ;   et al. | 2010-01-28 |
Method of producing highly strained PECVD silicon nitride thin films at low temperature Grant 7,585,704 - Belyansky , et al. September 8, 2 | 2009-09-08 |
Method Of Producing Highly Strained Pecvd Silicon Nitride Thin Films At Low Temperature App 20060223290 - Belyansky; Michael P. ;   et al. | 2006-10-05 |
Surface modification for barrier to ionic penetration App 20030087534 - Mallikarjunan, Anupama ;   et al. | 2003-05-08 |