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Micro-electro-mechanical system (MEMS) structures and design structures Grant 11,167,980 - Brigham , et al. November 9, 2 | 2021-11-09 |
Planar cavity MEMS and related structures, methods of manufacture and design structures Grant 11,021,364 - Herrin , et al. June 1, 2 | 2021-06-01 |
Dual bond pad structure for photonics Grant 10,978,416 - Gambino , et al. April 13, 2 | 2021-04-13 |
Planar cavity MEMS and related structures, methods of manufacture and design structures Grant 10,906,803 - Herrin , et al. February 2, 2 | 2021-02-02 |
Semiconductor structures provided within a cavity and related design structures Grant 10,882,736 - Maling , et al. January 5, 2 | 2021-01-05 |
Dual bond pad structure for photonics Grant 10,833,038 - Gambino , et al. November 10, 2 | 2020-11-10 |
Lamb acoustic wave resonator and filter with self-aligned cavity via Grant 10,784,833 - Campanella Pineda , et al. Sept | 2020-09-22 |
Micro-electro-mechanical system (MEMS) structures and design structures Grant 10,589,992 - Brigham , et al. | 2020-03-17 |
Micro-electro-mechanical system (MEMS) structures and design structures Grant 10,589,991 - Brigham , et al. | 2020-03-17 |
Micro-electro-mechanical system (MEMS) structures and design structures Grant 10,549,987 - Brigham , et al. Fe | 2020-02-04 |
Dual Bond Pad Structure For Photonics App 20200014171 - GAMBINO; Jeffrey P. ;   et al. | 2020-01-09 |
Dual bond pad structure for photonics Grant 10,476,227 - Gambino , et al. Nov | 2019-11-12 |
Planar Cavity Mems And Related Structures, Methods Of Manufacture And Design Structures App 20190315619 - HERRIN; Russell T. ;   et al. | 2019-10-17 |
Planar cavity MEMS and related structures, methods of manufacture and design structures Grant 10,414,646 - Herrin , et al. Sept | 2019-09-17 |
Semiconductor Structures Provided Within A Cavity And Related Design Structures App 20190152768 - Maling; Jeffrey C. ;   et al. | 2019-05-23 |
Semiconductor structures provided within a cavity and related design structures Grant 10,227,230 - Maling , et al. | 2019-03-12 |
Monolithic integration of MEMS and IC devices Grant 10,189,705 - Campanella Pineda , et al. Ja | 2019-01-29 |
Planar Cavity Mems And Related Structures, Methods Of Manufacture And Design Structures App 20180319652 - HERRIN; Russell T. ;   et al. | 2018-11-08 |
Semiconductor Structures Provided Within A Cavity And Related Design Structures App 20180319653 - Maling; Jeffrey C. ;   et al. | 2018-11-08 |
Planar cavity MEMS and related structures, methods of manufacture and design structures Grant 10,093,537 - Herrin , et al. October 9, 2 | 2018-10-09 |
Lamb Acoustic Wave Resonator And Filter With Self-aligned Cavity Via App 20180287587 - CAMPANELLA PINEDA; Humberto ;   et al. | 2018-10-04 |
Semiconductor structures provided within a cavity and related design structures Grant 10,081,534 - Maling , et al. September 25, 2 | 2018-09-25 |
Micro-electro-mechanical System (mems) Structures And Design Structures App 20180201503 - Brigham; Michael T. ;   et al. | 2018-07-19 |
Micro-electro-mechanical System (mems) Structures And Design Structures App 20180201502 - Brigham; Michael T. ;   et al. | 2018-07-19 |
Micro-electro-mechanical System (mems) Structures And Design Structures App 20180179052 - Brigham; Michael T. ;   et al. | 2018-06-28 |
Micro-Electro-Mechanical System (MEMS) structures and design structures Grant 9,981,842 - Brigham , et al. May 29, 2 | 2018-05-29 |
Method for forming micro-electro-mechanical system (MEMS) beam structure Grant 9,969,613 - Brigham , et al. May 15, 2 | 2018-05-15 |
Micro-electro-mechanical system (MEMS) structures and design structures Grant 9,938,137 - Brigham , et al. April 10, 2 | 2018-04-10 |
Micro-electro-mechanical system (MEMS) structures and design structures Grant 9,932,222 - Brigham , et al. April 3, 2 | 2018-04-03 |
Planar Cavity Mems And Related Structures, Methods Of Manufacture And Design Structures App 20180057357 - HERRIN; Russell T. ;   et al. | 2018-03-01 |
Planar Cavity Mems And Related Structures, Methods Of Manufacture And Design Structures App 20180050903 - HERRIN; Russell T. ;   et al. | 2018-02-22 |
Planar cavity MEMS and related structures, methods of manufacture and design structures Grant 9,890,039 - Herrin , et al. February 13, 2 | 2018-02-13 |
Planar cavity MEMS and related structures, methods of manufacture and design structures Grant 9,862,598 - Herrin , et al. January 9, 2 | 2018-01-09 |
Planar cavity MEMS and related structures, methods of manufacture and design structures Grant 9,815,690 - Herrin , et al. November 14, 2 | 2017-11-14 |
Planar cavity MEMS and related structures, methods of manufacture and design structures Grant 9,764,944 - Herrin , et al. September 19, 2 | 2017-09-19 |
Multi-chip modules with vertically aligned grating couplers for transmission of light signals between optical waveguides Grant 9,715,064 - Gambino , et al. July 25, 2 | 2017-07-25 |
Dual Bond Pad Structure For Photonics App 20170125973 - GAMBINO; Jeffrey P. ;   et al. | 2017-05-04 |
Dual Bond Pad Structure For Photonics App 20170125974 - GAMBINO; Jeffrey P. ;   et al. | 2017-05-04 |
Dual bond pad structure for photonics Grant 9,608,403 - Gambino , et al. March 28, 2 | 2017-03-28 |
Planar cavity MEMS and related structures, methods of manufacture and design structures Grant 9,493,343 - Herrin , et al. November 15, 2 | 2016-11-15 |
Planar Cavity Mems And Related Structures, Methods Of Manufacture And Design Structures App 20160325982 - HERRIN; Russell T. ;   et al. | 2016-11-10 |
Planar Cavity Mems And Related Structures, Methods Of Manufacture And Design Structures App 20160325983 - HERRIN; Russell T. ;   et al. | 2016-11-10 |
Wafer frontside-backside through silicon via Grant 9,455,214 - Maling , et al. September 27, 2 | 2016-09-27 |
Micro-electro-mechanical System (mems) Structures And Design Structures App 20160264406 - Brigham; Michael T. ;   et al. | 2016-09-15 |
Micro-electro-mechanical System (mems) Structures And Design Structures App 20160264405 - Brigham; Michael T. ;   et al. | 2016-09-15 |
Micro-electro-mechanical System (mems) Structures And Design Structures App 20160264410 - Brigham; Michael T. ;   et al. | 2016-09-15 |
Method of eliminating poor reveal of through silicon vias Grant 9,443,764 - Maling , et al. September 13, 2 | 2016-09-13 |
Planar cavity MEMS and related structures, methods of manufacture and design structures Grant 9,406,472 - Dang , et al. August 2, 2 | 2016-08-02 |
Dual Bond Pad Structure For Photonics App 20160126695 - GAMBINO; Jeffrey P. ;   et al. | 2016-05-05 |
Methods of manufacture for micro-electro-mechanical system (MEMS) Grant 9,330,856 - Herrin , et al. May 3, 2 | 2016-05-03 |
Planar Cavity Mems And Related Structures, Methods Of Manufacture And Design Structures App 20160060099 - HERRIN; Russell T. ;   et al. | 2016-03-03 |
Planar Cavity Mems And Related Structures, Methods Of Manufacture And Design Structures App 20160060107 - HERRIN; Russell T. ;   et al. | 2016-03-03 |
Planar Cavity Mems And Related Structures, Methods Of Manufacture And Design Structures App 20160055282 - HERRIN; Russell T. ;   et al. | 2016-02-25 |
Micro-electro-mechanical System (mems) Structures And Design Structures App 20150368090 - Brigham; Michael T. ;   et al. | 2015-12-24 |
Wafer Frontside-backside Through Silicon Via App 20150332966 - MALING; Jeffrey C. ;   et al. | 2015-11-19 |
Semiconductor Structures Provided Within A Cavity And Related Design Structures App 20150266718 - Maling; Jeffrey C. ;   et al. | 2015-09-24 |
Semiconductor structures provided within a cavity and related design structures Grant 9,102,517 - Maling , et al. August 11, 2 | 2015-08-11 |
Automated residual material detection Grant 9,043,743 - Maling , et al. May 26, 2 | 2015-05-26 |
Planar cavity MEMS and related structures, methods of manufacture and design structures Grant 9,041,128 - Dunbar, III , et al. May 26, 2 | 2015-05-26 |
Automated Residual Material Detection App 20150113494 - MALING; Jeffrey C. ;   et al. | 2015-04-23 |
Eliminating Poor Reveal Of Through Silicon Vias App 20150101856 - Maling; Jeffrey C. ;   et al. | 2015-04-16 |
Carrier for Ultra-Thin Substrates and Method of Use App 20150044619 - Hall; John C. ;   et al. | 2015-02-12 |
Planar cavity MEMS and related structures, methods of manufacture and design structures Grant 8,921,144 - Dunbar, III , et al. December 30, 2 | 2014-12-30 |
Planar cavity MEMS and related structures, methods of manufacture and design structures Grant 8,865,497 - Dunbar, III , et al. October 21, 2 | 2014-10-21 |
Micro-electro-mechanical System (mems) Structures And Design Structures App 20140308771 - Brigham; Michael T. ;   et al. | 2014-10-16 |
Test structure and calibration method Grant 8,829,518 - Maling , et al. September 9, 2 | 2014-09-09 |
Planar cavity MEMS and related structures, methods of manufacture and design structures Grant 8,722,445 - Dang , et al. May 13, 2 | 2014-05-13 |
Semiconductor Structures Provided Within A Cavity And Related Design Structures App 20140054728 - Maling; Jeffrey C. ;   et al. | 2014-02-27 |
Planar Cavity Mems And Related Structures, Methods Of Manufacture And Design Structures App 20130221454 - DUNBAR, III; George A. ;   et al. | 2013-08-29 |
Test Structure And Calibration Method App 20130062603 - Maling; Jeffrey C. ;   et al. | 2013-03-14 |
Planar Cavity Mems And Related Structures, Methods Of Manufacture And Design Structures App 20110316101 - DANG; Dinh ;   et al. | 2011-12-29 |
Planar Cavity Mems And Related Structures, Methods Of Manufacture And Design Structures App 20110316098 - DUNBAR, III; George A. ;   et al. | 2011-12-29 |
Planar Cavity Mems And Related Structures, Methods Of Manufacture And Design Structures App 20110316099 - DUNBAR, III; George A. ;   et al. | 2011-12-29 |
Planar Cavity Mems And Related Structures, Methods Of Manufacture And Design Structures App 20110315527 - DANG; Dinh ;   et al. | 2011-12-29 |
Planar Cavity Mems And Related Structures, Methods Of Manufacture And Design Structures App 20110315528 - HERRIN; Russell T. ;   et al. | 2011-12-29 |
Deep trench in a semiconductor structure Grant 7,893,479 - Cline , et al. February 22, 2 | 2011-02-22 |
Deep Trench In A Semiconductor Structure App 20090294926 - Cline; June ;   et al. | 2009-12-03 |
Deep trench formation in semiconductor device fabrication Grant 7,573,085 - Cline , et al. August 11, 2 | 2009-08-11 |
Deep Trench Formation In Semiconductor Device Fabrication App 20060275978 - Cline; June ;   et al. | 2006-12-07 |
Deep trench formation in semiconductor device fabrication Grant 7,101,806 - Cline , et al. September 5, 2 | 2006-09-05 |
Masked sidewall implant for image sensor Grant 7,098,067 - Adkisson , et al. August 29, 2 | 2006-08-29 |
Masked Sidewall Implant For Image Sensor App 20060128126 - Adkisson; James W. ;   et al. | 2006-06-15 |
Deep Trench Formation In Semiconductor Device Fabrication App 20060081556 - Cline; June ;   et al. | 2006-04-20 |