loadpatents
Patent applications and USPTO patent grants for MALINEN; Timo.The latest application filed is for "substrate processing methods and apparatus".
Patent | Date |
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Substrate Processing Methods And Apparatus App 20220235465 - KOSTAMO; Juhana ;   et al. | 2022-07-28 |
Substrate Processing Apparatus And Method App 20210189560 - MALINEN; Timo ;   et al. | 2021-06-24 |
Uniform Deposition App 20210087687 - MALINEN; Timo ;   et al. | 2021-03-25 |
ALD method and apparatus Grant 10,619,241 - Malinen , et al. | 2020-04-14 |
ALD method and apparatus including a photon source Grant 10,597,778 - Malinen | 2020-03-24 |
Deposition Or Cleaning Apparatus With Movable Structure And Method Of Operation App 20190390339 - MALINEN; Timo | 2019-12-26 |
Deposition reactor with plasma source Grant 10,494,718 - Kilpi , et al. De | 2019-12-03 |
Apparatus And Methods For Atomic Layer Deposition App 20190194809 - HOLM; Niklas ;   et al. | 2019-06-27 |
Protecting an interior of a hollow body with an ALD coating Grant 10,329,662 - Kostamo , et al. | 2019-06-25 |
Atomic Layer Deposition with Plasma Source App 20180099304 - Kilpi; Vaino ;   et al. | 2018-04-12 |
Atomic layer deposition with plasma source Grant 9,868,131 - Kilpi , et al. January 16, 2 | 2018-01-16 |
Protecting a target pump interior with an ALD coating Grant 9,869,020 - Malinen , et al. January 16, 2 | 2018-01-16 |
Ald Method And Apparatus App 20170342560 - MALINEN; Timo ;   et al. | 2017-11-30 |
Ald Method And Apparatus Including A Photon Source App 20170342563 - MALINEN; Timo | 2017-11-30 |
Method and apparatus for forming a substrate web track in an atomic layer deposition reactor Grant 9,745,661 - Malinen , et al. August 29, 2 | 2017-08-29 |
Protecting An Interior Of A Hollow Body With An Ald Coating App 20170073807 - KOSTAMO; Juhana ;   et al. | 2017-03-16 |
Forming A Substrate Web Track In An Atomic Layer Deposition Reactor App 20160138163 - Malinen; Timo ;   et al. | 2016-05-19 |
Protecting a target pump interior with an ALD coating App 20160076148 - MALINEN; Timo ;   et al. | 2016-03-17 |
Atomic Layer Deposition with Plasma Source App 20150322569 - Kilpi; Vaino ;   et al. | 2015-11-12 |
Atomic layer deposition with plasma source Grant 9,095,869 - Kilpi , et al. August 4, 2 | 2015-08-04 |
Deposition Reactor With Plasma Source App 20140087093 - Kilpi; Vaino ;   et al. | 2014-03-27 |
Atomic Layer Deposition with Plasma Source App 20140024223 - Kilpi; Vaino ;   et al. | 2014-01-23 |
Central vacuum cleaner and its central unit Grant 7,464,436 - Malinen December 16, 2 | 2008-12-16 |
Central vacuum cleaner and its central unit App 20050241099 - Malinen, Timo | 2005-11-03 |
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