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Method and system for fabricating strained layers for the manufacture of integrated circuits Grant 7,595,499 - Henley , et al. September 29, 2 | 2009-09-29 |
Method and system for lattice space engineering Grant 7,390,724 - Henley , et al. June 24, 2 | 2008-06-24 |
System for forming a strained layer of semiconductor material Grant 7,391,047 - Henley , et al. June 24, 2 | 2008-06-24 |
Method and system for fabricating strained layers for the manufacture of integrated circuits App 20080141510 - Henley; Francois J. ;   et al. | 2008-06-19 |
Surface finishing of SOI substrates using an EPI process App 20070259526 - Kang; Sien G. ;   et al. | 2007-11-08 |
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Method and system for fabricating strained layers for the manufacture of integrated circuits Grant 7,094,666 - Henley , et al. August 22, 2 | 2006-08-22 |
Method and system for fabricating strained layers for the manufacture of integrated circuits App 20060160329 - Henley; Francois J. ;   et al. | 2006-07-20 |
Method and system for fabricating strained layers for the manufacture of integrated circuits App 20060024917 - Henley; Francois J. ;   et al. | 2006-02-02 |
Treatment method of film quality for the manufacture of substrates Grant 6,969,668 - Kang , et al. November 29, 2 | 2005-11-29 |
Method for smoothing a film of material using a ring structure App 20050247668 - Malik, Igor J. ;   et al. | 2005-11-10 |
Method and system for lattice space engineering App 20050233545 - Henley, Francois J. ;   et al. | 2005-10-20 |
Smoothing method for cleaved films made using a release layer Grant 6,881,644 - Malik , et al. April 19, 2 | 2005-04-19 |
Non-contact etch annealing of strained layers App 20040067644 - Malik, Igor J. ;   et al. | 2004-04-08 |
Smoothing method for cleaved films made using a release layer App 20030008477 - Kang, Sien G. ;   et al. | 2003-01-09 |
Computer memory product for substrate surface treatment applications App 20020173872 - Malik, Igor J. | 2002-11-21 |
Smoothing method for cleaved films made using thermal treatment Grant 6,455,399 - Malik , et al. September 24, 2 | 2002-09-24 |
Method and system for generating a plurality of donor wafers and handle wafers prior to an order being placed by a customer Grant 6,448,152 - Henley , et al. September 10, 2 | 2002-09-10 |
Surface finishing of SOI substrates using an EPI process App 20020022344 - Kang, Sien G. ;   et al. | 2002-02-21 |
Surface finishing of SOI substrates using an EPI process Grant 6,287,941 - Kang , et al. September 11, 2 | 2001-09-11 |
Smoothing method for cleaved films made using thermal treatment App 20010016402 - Malik, Igor J. ;   et al. | 2001-08-23 |
Method to remove metals in a scrubber Grant 6,274,059 - Krusell , et al. August 14, 2 | 2001-08-14 |
Wafer edge engineering method and device Grant 6,265,328 - Henley , et al. July 24, 2 | 2001-07-24 |
Method for surface treatment of substrates Grant 6,221,774 - Malik April 24, 2 | 2001-04-24 |
Smoothing method for cleaved films made using thermal treatment Grant 6,204,151 - Malik , et al. March 20, 2 | 2001-03-20 |
Treatment method of cleaved film for the manufacture of substrates Grant 6,171,965 - Kang , et al. January 9, 2 | 2001-01-09 |