Patent | Date |
---|
Formation of a masking layer on a dielectric region to facilitate formation of a capping layer on electrically conductive regions separated by the dielectric region Grant 9,368,400 - Boussie , et al. June 14, 2 | 2016-06-14 |
DRAM MIM capacitor using non-noble electrodes Grant 9,281,357 - Chen , et al. March 8, 2 | 2016-03-08 |
High work function, manufacturable top electrode Grant 9,224,878 - Malhotra , et al. December 29, 2 | 2015-12-29 |
Methods for reproducible flash layer deposition Grant 9,105,646 - Malhotra , et al. August 11, 2 | 2015-08-11 |
Formation of a Masking Layer on a Dielectric Region to Facilitate Formation of a Capping Layer on Electrically Conductive Regions Separated by the Dielectric Region App 20150179500 - Boussie; Thomas R. ;   et al. | 2015-06-25 |
DRAM MIM Capacitor Using Non-Noble Electrodes App 20150137315 - Chen; Hanhong ;   et al. | 2015-05-21 |
Resistive-switching nonvolatile memory elements Grant 9,030,862 - Kumar , et al. May 12, 2 | 2015-05-12 |
Nonvolatile memory elements Grant 9,029,232 - Malhotra , et al. May 12, 2 | 2015-05-12 |
Methods for reproducible flash layer deposition Grant 9,012,298 - Malhotra , et al. April 21, 2 | 2015-04-21 |
DRAM MIM Capacitor Using Non-Noble Electrodes App 20150087130 - Chen; Hanhong ;   et al. | 2015-03-26 |
Enhanced work function layer supporting growth of rutile phase titanium oxide Grant 8,975,147 - Rui , et al. March 10, 2 | 2015-03-10 |
Formation of a masking layer on a dielectric region to facilitate formation of a capping layer on electrically conductive regions separated by the dielectric region Grant 8,975,180 - Boussie , et al. March 10, 2 | 2015-03-10 |
DRAM MIM capacitor using non-noble electrodes Grant 8,969,169 - Chen , et al. March 3, 2 | 2015-03-03 |
Processing Substrates Using Site-Isolated Processing App 20150056723 - Lazovsky; David E. ;   et al. | 2015-02-26 |
Resistive-Switching Nonvolatile Memory Elements App 20150034896 - Kumar; Pragati ;   et al. | 2015-02-05 |
Processing substrates using site-isolated processing Grant 8,882,914 - Chiang , et al. November 11, 2 | 2014-11-11 |
Band gap improvement in DRAM capacitors Grant 8,878,269 - Chen , et al. November 4, 2 | 2014-11-04 |
Resistive-switching nonvolatile memory elements Grant 8,873,276 - Kumar , et al. October 28, 2 | 2014-10-28 |
High work function, manufacturable top electrode Grant 8,847,397 - Malhotra , et al. September 30, 2 | 2014-09-30 |
High temperature ALD process of metal oxide for DRAM applications Grant 8,835,273 - Chen , et al. September 16, 2 | 2014-09-16 |
Nonvolatile Memory Elements App 20140256111 - Malhotra; Sandra G. ;   et al. | 2014-09-11 |
Methods for forming high-K crystalline films and related devices Grant 8,809,160 - Chen , et al. August 19, 2 | 2014-08-19 |
Formation of a Masking Layer on a Dielectric Region to Facilitate Formation of a Capping Layer on Electrically Conductive Regions Separated by the Dielectric Region App 20140227871 - Boussie; Thomas R. ;   et al. | 2014-08-14 |
Band gap improvement in DRAM capacitors Grant 8,772,123 - Chen , et al. July 8, 2 | 2014-07-08 |
High Work Function, Manufacturable Top Electrode App 20140183697 - Malhotra; Sandra G. ;   et al. | 2014-07-03 |
Methods for Reproducible Flash Layer Deposition App 20140183695 - Malhotra; Sandra G. ;   et al. | 2014-07-03 |
Methods for Reproducible Flash Layer Deposition App 20140187018 - Malhotra; Sandra G. ;   et al. | 2014-07-03 |
High Work Function, Manufacturable Top Electrode App 20140187016 - Malhotra; Sandra G. ;   et al. | 2014-07-03 |
Nonvolatile memory elements Grant 8,765,567 - Malhotra , et al. July 1, 2 | 2014-07-01 |
Leakage reduction in DRAM MIM capacitors Grant 8,741,712 - Chiang , et al. June 3, 2 | 2014-06-03 |
Titanium based high-K dielectric films Grant 8,737,036 - Chen , et al. May 27, 2 | 2014-05-27 |
Formation of a masking layer on a dielectric region to facilitate formation of a capping layer on electrically conductive regions separated by the dielectric region Grant 8,709,943 - Boussie , et al. April 29, 2 | 2014-04-29 |
Methods of Combinatorial Processing for Screening Multiple Samples on a Semiconductor Substrate App 20140090596 - Verma; Gaurav ;   et al. | 2014-04-03 |
High Temperature ALD Process of Metal Oxide for DRAM Applications App 20140080284 - Chen; Hanhong ;   et al. | 2014-03-20 |
Leakage reduction in DRAM MIM capacitors App 20140080282 - Chiang; Tony P. ;   et al. | 2014-03-20 |
Leakage reduction in DRAM MIM capacitors App 20140077336 - Chiang; Tony P. ;   et al. | 2014-03-20 |
Nonvolatile Memory Elements App 20140051210 - Malhotra; Sandra G ;   et al. | 2014-02-20 |
Resistive-Switching Nonvolatile Memory Elements App 20140042384 - Kumar; Pragati ;   et al. | 2014-02-13 |
Enhanced non-noble electrode layers for DRAM capacitor cell Grant 8,647,943 - Chen , et al. February 11, 2 | 2014-02-11 |
Methods of combinatorial processing for screening multiple samples on a semiconductor substrate Grant 8,633,039 - Verma , et al. January 21, 2 | 2014-01-21 |
Manufacturable High-k dram mim capacitor structure App 20130328168 - Malhotra; Sandra G. ;   et al. | 2013-12-12 |
Enhanced Non-noble Electrode Layers For Dram Capacitor Cell App 20130330902 - Chen; Hanhong ;   et al. | 2013-12-12 |
Integration of Non-Noble DRAM Electrode App 20130320495 - Malhotra; Sandra G. ;   et al. | 2013-12-05 |
Resistive-switching nonvolatile memory elements Grant 8,599,603 - Kumar , et al. December 3, 2 | 2013-12-03 |
Nonvolatile memory elements Grant 8,592,282 - Malhotra , et al. November 26, 2 | 2013-11-26 |
Semiconductor stacks including catalytic layers Grant 8,581,319 - Chen , et al. November 12, 2 | 2013-11-12 |
Enhanced non-noble electrode layers for DRAM capacitor cell Grant 8,581,318 - Chen , et al. November 12, 2 | 2013-11-12 |
Formation of a masking layer on a dielectric region to facilitate formation of a capping layer on electrically conductive regions separated by the dielectric region Grant 8,575,036 - Lazovsky , et al. November 5, 2 | 2013-11-05 |
Blocking layers for leakage current reduction in DRAM devices Grant 8,574,999 - Malhotra , et al. November 5, 2 | 2013-11-05 |
Substrate processing including a masking layer Grant 8,575,021 - Boussie , et al. November 5, 2 | 2013-11-05 |
Methods of Combinatorial Processing for Screening Multiple Samples on a Semiconductor Substrate App 20130285695 - Verma; Gaurav ;   et al. | 2013-10-31 |
Blocking layers for leakage current reduction in DRAM devices Grant 8,569,818 - Malhotra , et al. October 29, 2 | 2013-10-29 |
High performance dielectric stack for DRAM capacitor Grant 8,546,236 - Malhotra , et al. October 1, 2 | 2013-10-01 |
Methods for depositing high-K dielectrics Grant 8,541,828 - Hashim , et al. September 24, 2 | 2013-09-24 |
High performance dielectric stack for DRAM capacitor Grant 8,541,283 - Malhotra , et al. September 24, 2 | 2013-09-24 |
Top electrode templating for DRAM capacitor Grant 8,541,868 - Malhotra , et al. September 24, 2 | 2013-09-24 |
Formation of a Masking Layer on a Dielectric Region to Facilitate Formation of a Capping Layer on Electrically Conductive Regions Separated by the Dielectric Region App 20130244425 - Boussie; Thomas R. ;   et al. | 2013-09-19 |
Integration of non-noble DRAM electrode Grant 8,530,348 - Malhotra , et al. September 10, 2 | 2013-09-10 |
Substrate Processing Including A Masking Layer App 20130217238 - Boussie; Thomas R. ;   et al. | 2013-08-22 |
High Performance Dielectric Stack For Dram Capacitor App 20130217202 - Malhotra; Sandra G. ;   et al. | 2013-08-22 |
Resistive-Switching Nonvolatile Memory Elements App 20130217200 - KUMAR; Pragati ;   et al. | 2013-08-22 |
Methods of combinatorial processing for screening multiple samples on a semiconductor substrate Grant 8,501,505 - Verma , et al. August 6, 2 | 2013-08-06 |
Formation of a masking layer on a dielectric region to facilitate formation of a capping layer on electrically conductive regions separated by the dielectric region Grant 8,461,044 - Lazovsky , et al. June 11, 2 | 2013-06-11 |
Methods of Combinatorial Processing for Screening Multiple Samples on a Semiconductor Substrate App 20130138380 - Verma; Guarav ;   et al. | 2013-05-30 |
Blocking Layers For Leakage Current Reduction In Dram Devices App 20130122683 - Malhotra; Sandra G. ;   et al. | 2013-05-16 |
Top Electrode Templating for DRAM Capacitor App 20130119512 - Malhotra; Sandra G. ;   et al. | 2013-05-16 |
Resistive-switching nonvolatile memory elements Grant 8,441,838 - Kumar , et al. May 14, 2 | 2013-05-14 |
Blocking Layers for Leakage Current Reduction in DRAM Devices App 20130113079 - Malhotra; Sandra G. ;   et al. | 2013-05-09 |
Methods for Forming Resistive-Switching Metal Oxides for Nonvolatile Memory Elements App 20130109149 - Barstow; Sean ;   et al. | 2013-05-02 |
Substrate processing including a masking layer Grant 8,426,970 - Fresco , et al. April 23, 2 | 2013-04-23 |
Enhanced Work Function Layer Supporting Growth of Rutile Phase Titanium Oxide App 20130095632 - Rui; Xiangxin ;   et al. | 2013-04-18 |
Formation of a Masking Layer on a Dielectric Region to Facilitate Formation of a Capping Layer on Electrically Conductive Regions Separated by the Dielectric Region App 20130072026 - Lazovsky; David E. ;   et al. | 2013-03-21 |
Electrode Treatments for Enhanced DRAM Performance App 20130071991 - Rui; Xiangxin ;   et al. | 2013-03-21 |
Electrode Treatments for Enhanced DRAM Performance App 20130069202 - Rui; Xiangxin ;   et al. | 2013-03-21 |
Nonvolatile Memory Elements App 20130059427 - Malhotra; Sandra G. ;   et al. | 2013-03-07 |
Methods For Depositing High-K Dielectrics App 20130056852 - Hashim; Imran ;   et al. | 2013-03-07 |
Methods of combinatorial processing for screening multiple samples on a semiconductor substrate Grant 8,383,430 - Verma , et al. February 26, 2 | 2013-02-26 |
Titanium-Based High-K Dielectric Films App 20130044404 - Chen; Hanhong ;   et al. | 2013-02-21 |
Methods for forming resistive-switching metal oxides for nonvolatile memory elements Grant 8,367,463 - Kumar , et al. February 5, 2 | 2013-02-05 |
Formation of a masking layer on a dielectric region to facilitate formation of a capping layer on electrically conductive regions separated by the dielectric region Grant 8,343,866 - Lazovsky , et al. January 1, 2 | 2013-01-01 |
Resistive-switching Nonvolatile Memory Elements App 20120319070 - Kumar; Pragati ;   et al. | 2012-12-20 |
Nonvolatile memory elements Grant 8,318,573 - Malhotra , et al. November 27, 2 | 2012-11-27 |
Nonvolatile memory element including resistive switching metal oxide layers Grant 8,294,219 - Malhotra , et al. October 23, 2 | 2012-10-23 |
Formation of a Masking Layer on a Dielectric Region to Facilitate Formation of a Capping Layer on Electrically Conductive Regions Separated by the Dielectric Region App 20120258595 - Lazovsky; David E. ;   et al. | 2012-10-11 |
Formation Of A Masking Layer On A Dielectric Region To Facilitate Formation Of A Capping Layer On Electrically Conductive Regions Separated By The Dielectric Region App 20120225553 - Lazovsky; David E. ;   et al. | 2012-09-06 |
Methods For Forming Resistive-switching Metal Oxides For Nonvolatile Memory Elements App 20120149164 - Kumar; Pragati ;   et al. | 2012-06-14 |
Formation of a masking layer on a dielectric region to facilitate formation of a capping layer on electrically conductive regions separated by the dielectric region Grant 8,193,090 - Lazovsky , et al. June 5, 2 | 2012-06-05 |
Nonvolatile Memory Elements App 20120122291 - Malhotra; Sandra G. ;   et al. | 2012-05-17 |
Resistive-switching nonvolatile memory elements Grant 8,144,498 - Kumar , et al. March 27, 2 | 2012-03-27 |
Substrate Processing Including A Masking Layer App 20120001320 - Fresco; Zachary ;   et al. | 2012-01-05 |
Contact metallurgy structure Grant 8,089,157 - Cabral, Jr. , et al. January 3, 2 | 2012-01-03 |
Formation Of A Masking Layer On A Dielectric Region To Facilitate Formation Of A Capping Layer On Electrically Conductive Regions Separated By The Dielectric Region App 20110281402 - Lazovsky; David E. ;   et al. | 2011-11-17 |
Formation of a masking layer on a dielectric region to facilitate formation of a capping layer on electrically conductive regions separated by the dielectric regions Grant 8,039,383 - Lazovsky , et al. October 18, 2 | 2011-10-18 |
Formation of a masking layer on a dielectric region to facilitate formation of a capping layer on electrically conductive regions separated by the dielectric region Grant 8,030,772 - Lazovsky , et al. October 4, 2 | 2011-10-04 |
Methods for forming resistive-switching metal oxides for nonvolatile memory elements Grant 7,977,153 - Kumar , et al. July 12, 2 | 2011-07-12 |
Method Of Forming Electrodeposited Contacts App 20110084393 - Cabral, JR.; Cyril ;   et al. | 2011-04-14 |
Methods For Forming Resistive-switching Metal Oxides For Nonvolatile Memory Elements App 20110081748 - Kumar; Pragati ;   et al. | 2011-04-07 |
Substrate processing including a masking layer Grant 7,879,710 - Fresco , et al. February 1, 2 | 2011-02-01 |
Formation of a Masking Layer on a Dielectric Region to Facilitate Formation of a Capping Layer on Electrically Conductive Regions Separated by the Dielectric Regions App 20110021015 - Lazovsky; David E. ;   et al. | 2011-01-27 |
Methods for forming resistive-switching metal oxides for nonvolatile memory elements Grant 7,863,087 - Kumar , et al. January 4, 2 | 2011-01-04 |
Method of forming electrodeposited contacts Grant 7,851,357 - Cabral, Jr. , et al. December 14, 2 | 2010-12-14 |
Formation of a masking layer on a dielectric region to facilitate formation of a capping layer on electrically conductive regions separated by the dielectric region Grant 7,749,881 - Lazovsky , et al. July 6, 2 | 2010-07-06 |
Method for increasing deposition rates of metal layers from metal-carbonyl precursors Grant 7,678,421 - Suzuki , et al. March 16, 2 | 2010-03-16 |
Method for preparing solid precursor tray for use in solid precursor evaporation system Grant 7,488,512 - Suzuki , et al. February 10, 2 | 2009-02-10 |
Nonvolatile Memory Elements App 20090026434 - Malhotra; Sandra G. ;   et al. | 2009-01-29 |
Structure And Method Of Forming Electrodeposited Contacts App 20090014878 - Cabral, JR.; Cyril ;   et al. | 2009-01-15 |
Resistive-switching Nonvolatile Memory Elements App 20080278990 - Kumar; Pragati ;   et al. | 2008-11-13 |
Formation Of A Masking Layer On A Dielectric Region To Facilitate Formation Of A Capping Layer On Electrically Conductive Regions Separated By The Dielectric Region App 20080246150 - Lazovsky; David E. ;   et al. | 2008-10-09 |
Structure Comprising A Barrier Layer Of A Tungsten Alloy Comprising Cobalt And/or Nickel App 20080237053 - Andricacos; Panayotis ;   et al. | 2008-10-02 |
Method for processing a substrate Grant 7,419,702 - Nakamura , et al. September 2, 2 | 2008-09-02 |
Method for direct electroplating of copper onto a non-copper plateable layer Grant 7,405,153 - Malhotra , et al. July 29, 2 | 2008-07-29 |
Structure and method of forming electrodeposited contacts Grant 7,405,154 - Cabral, Jr. , et al. July 29, 2 | 2008-07-29 |
Formation of a masking layer on a dielectric region to facilitate formation of a capping layer on electrically conductive regions separated by the dielectric region Grant 7,390,739 - Lazovsky , et al. June 24, 2 | 2008-06-24 |
Method For Increasing Deposition Rates Of Metal Layers From Metal-carbonyl Precursors App 20080003360 - Suzuki; Kenji ;   et al. | 2008-01-03 |
Structure And Method Of Forming Electrodeposited Contacts App 20070222066 - Cabral; Cyril JR. ;   et al. | 2007-09-27 |
Method for increasing deposition rates of metal layers from metal-carbonyl precursors Grant 7,270,848 - Suzuki , et al. September 18, 2 | 2007-09-18 |
Substrate processing including a masking layer App 20070166989 - Fresco; Zachary ;   et al. | 2007-07-19 |
Method For Direct Electroplating Of Copper Onto A Non-copper Plateable Layer App 20070166995 - Malhotra; Sandra G. ;   et al. | 2007-07-19 |
Processing substrates using site-isolated processing App 20060292845 - Chiang; Tony P. ;   et al. | 2006-12-28 |
Formation of a masking layer on a dielectric region to facilitate formation of a capping layer on electrically conductive regions separated by the dielectric region App 20060261434 - Lazovsky; David E. ;   et al. | 2006-11-23 |
Formation of a masking layer on a dielectric region to facilitate formation of a capping layer on electrically conductive regions separated by the dielectric region App 20060264020 - Lazovsky; David E. ;   et al. | 2006-11-23 |
Multi-functional structure for enhanced chip manufacturibility and reliability for low k dielectrics semiconductors and a crackstop integrity screen and monitor Grant 7,098,676 - Landers , et al. August 29, 2 | 2006-08-29 |
Method of depositing metal layers from metal-carbonyl precursors Grant 7,078,341 - Yamasaki , et al. July 18, 2 | 2006-07-18 |
Copper recess process with application to selective capping and electroless plating Grant 7,064,064 - Chen , et al. June 20, 2 | 2006-06-20 |
Method and system for performing in-situ cleaning of a deposition system App 20060115590 - Suzuki; Kenji ;   et al. | 2006-06-01 |
Method for preparing solid precursor tray for use in solid precursor evaporation system App 20060115593 - Suzuki; Kenji ;   et al. | 2006-06-01 |
Method for increasing deposition rates of metal layers from metal-carbonyl precursors App 20060110530 - Suzuki; Kenji ;   et al. | 2006-05-25 |
Low-pressure deposition of ruthenium and rhenium metal layers from metal carbonyl precursors App 20060068588 - Yamasaki; Hideaki ;   et al. | 2006-03-30 |
Substrate processing using molecular self-assembly App 20060060301 - Lazovsky; David E. ;   et al. | 2006-03-23 |
Low-pressure deposition of metal layers from metal-carbonyl precursors Grant 6,989,321 - Yamasaki , et al. January 24, 2 | 2006-01-24 |
Method for electroplating on resistive substrates Grant 6,974,531 - Andricacos , et al. December 13, 2 | 2005-12-13 |
Copper recess process with application to selective capping and electroless plating Grant 6,975,032 - Chen , et al. December 13, 2 | 2005-12-13 |
Method for processing a substrate App 20050221002 - Nakamura, Kazuhito ;   et al. | 2005-10-06 |
Method of forming a metal layer App 20050221000 - Ikeda, Taro ;   et al. | 2005-10-06 |
Method for depositing a metal layer on a semiconductor interconnect structure Grant 6,949,461 - Malhotra , et al. September 27, 2 | 2005-09-27 |
Method for electroplating on resistive substrates App 20050199502 - Andricacos, Panayotis ;   et al. | 2005-09-15 |
Method of forming a metal layer using an intermittent precursor gas flow process Grant 6,924,223 - Yamasaki , et al. August 2, 2 | 2005-08-02 |
Copper recess process with application to selective capping and electroless plating App 20050158985 - Chen, Shyng-Tsong ;   et al. | 2005-07-21 |
Method and apparatus for thin film thickness mapping Grant 6,909,772 - Kozaczek , et al. June 21, 2 | 2005-06-21 |
Diffusion barriers formed by low temperature deposition App 20050110142 - Lane, Michael Wayne ;   et al. | 2005-05-26 |
Method of depositing metal layers from metal-carbonyl precursors App 20050079708 - Yamasaki, Hideaki ;   et al. | 2005-04-14 |
Method of forming a metal layer using an intermittent precursor gas flow process App 20050069632 - Yamasaki, Hideaki ;   et al. | 2005-03-31 |
Low-pressure deposition of metal layers from metal-carbonyl precursors App 20050070100 - Yamasaki, Hideaki ;   et al. | 2005-03-31 |
Method for depositing metal layers using sequential flow deposition App 20050069641 - Matsuda, Tsukasa ;   et al. | 2005-03-31 |
Method and apparatus for thin film thickness mapping Grant 6,792,075 - Kozaczek , et al. September 14, 2 | 2004-09-14 |
Method and apparatus for thin film thickness mapping App 20040170249 - Kozaczek, Krzysztof J. ;   et al. | 2004-09-02 |
Multi-functional structure for enhanced chip manufacturibility & reliability for low k dielectrics semiconductors and a crackstop integrity screen and monitor App 20040129938 - Landers, William F. ;   et al. | 2004-07-08 |
Copper recess process with application to selective capping and electroless plating App 20040113279 - Chen, Shyng-Tsong ;   et al. | 2004-06-17 |
Method for depositing a metal layer on a semiconductor interconnect structure App 20040115928 - Malhotra, Sandra G. ;   et al. | 2004-06-17 |
Structure comprising a barrier layer of a tungsten alloy comprising cobalt and/or nickel App 20040108136 - Andricacos, Panayotis ;   et al. | 2004-06-10 |
Method for electroplating on resistive substrates App 20040069648 - Andricacos, Panayotis ;   et al. | 2004-04-15 |
Method And Apparatus For Thin Film Thickness Mapping App 20040047447 - Kozaczek, Krzysztof J. ;   et al. | 2004-03-11 |
Copper seed layer repair technique using electroless touch-up Grant 6,395,164 - Andricacos , et al. May 28, 2 | 2002-05-28 |
Method of forming barrier layers for damascene interconnects Grant 6,358,832 - Edelstein , et al. March 19, 2 | 2002-03-19 |
Dual etch stop/diffusion barrier for damascene interconnects Grant 6,153,935 - Edelstein , et al. November 28, 2 | 2000-11-28 |