MALAKHOVSKY; Ilya

Patent Applications and Registrations

Patent applications and USPTO patent grants for MALAKHOVSKY; Ilya.The latest application filed is for "apparatus for assembly of a reticle assembly".

Company Profile

5.4.4

MALAKHOVSKY; Ilya - Eindhoven NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Apparatus For Assembly Of A Reticle Assembly App 20220155675 - MALAKHOVSKY; Ilya ; et al.	2022-05-19
Metrology apparatus Grant 11,300,889 - Van Dijk , et al. April 12, 2	2022-04-12
Methods of determining stress in a substrate, control system for controlling a lithographic process, lithographic apparatus and computer program product Grant 11,300,888 - Van Haren , et al. April 12, 2	2022-04-12
Methods and apparatus for use in a device manufacturing method Grant 11,226,567 - Van Haren , et al. January 18, 2	2022-01-18
Methods Of Determining Stress In A Substrate, Control System For Controlling A Lithographic Process, Lithographic Apparatus And App 20200050117 - VAN HAREN; Richard Johannes Franciscus ; et al.	2020-02-13
Methods Of Determining A Mechanical Property Of A Layer Applied To A Substrate, Control System For A Lithographic Apparatus And Lithographic Apparatus App 20190041758 - VAN DIJK; Leon Paul ; et al.	2019-02-07
Substrate table and lithographic apparatus Grant 10,192,772 - Achanta , et al. Ja	2019-01-29
Substrate Table And Lithographic Apparatus App 20180308740 - ACHANTA; Satish ; et al.	2018-10-25

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