Maku; Shingo
Patent Applications and Registrations
Patent applications and USPTO patent grants for Maku; Shingo.The latest application filed is for "method and control system for treating a hafnium-based dielectric processing system".
- Maku; Shingo - Kai JP
- Maku; Shingo - Tokyo JP
- Maku; Shingo - Kai-shi JP
| Patent | Date |
|---|---|
| Method and control system for treating a hafnium-based dielectric processing system Grant 7,509,962 - O'Meara , et al. March 31, 2 | 2009-03-31 |
| CVD method and device for forming silicon-containing insulation film Grant 7,125,812 - Kumagai , et al. October 24, 2 | 2006-10-24 |
| Method of CVD for forming silicon nitride film on substrate Grant 7,094,708 - Kato , et al. August 22, 2 | 2006-08-22 |
| Method and control system for treating a hafnium-based dielectric processing system App 20060162861 - O'Meara; David L. ; et al. | 2006-07-27 |
| Method of cvd for forming silicon nitride film on substrate App 20050255712 - Kato, Hitoshi ; et al. | 2005-11-17 |
| Cvd method and device for forming silicon-containing insulation film App 20050095770 - Kumagai, Takeshi ; et al. | 2005-05-05 |
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