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Patent applications and USPTO patent grants for Makita; Takehiko.The latest application filed is for "coplanar waveguide having amorphous silicon layer between substrate and insulated layer and a manufacturing method thereof".
Patent | Date |
---|---|
Coplanar waveguide having trenches covered by a passivation film and fabrication method thereof Grant 8,143,974 - Makita March 27, 2 | 2012-03-27 |
Coplanar waveguide having amorphous silicon layer between substrate and insulated layer and a manufacturing method thereof App 20110042672 - Makita; Takehiko | 2011-02-24 |
Coplanar waveguide and fabrication method thereof App 20100079222 - Makita; Takehiko | 2010-04-01 |
Surface treatment method for a compound semiconductor layer and method of fabrication of a semiconductor device App 20040192043 - Makita, Takehiko ;   et al. | 2004-09-30 |
Methods of fabricating layered structure and semiconductor device Grant 6,696,306 - Makita February 24, 2 | 2004-02-24 |
Methods of fabricating layered structure and semiconductor device App 20030203604 - Makita, Takehiko | 2003-10-30 |
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