| Patent | Date |
|---|
Light Irradiation System, Control Apparatus, Light Irradiation Control Method, And Operating Microscope Apparatus
App 20190029090 - Ikehara; Yuzuru ; et al. | 2019-01-24 |
Image Processing System, Image Processing Apparatus, Projecting Apparatus, And Projection Method
App 20180288404 - IKEHARA; Yuzuru ; et al. | 2018-10-04 |
Exposure Apparatus, Exposure Method And Device Manufacturing Method
App 20170299966 - NAGASAKA; Hiroyuki ; et al. | 2017-10-19 |
Scanning Projection Apparatus, Projection Method, Surgery Support System, And Scanning Apparatus
App 20170079741 - MAKINOUCHI; Susumu | 2017-03-23 |
Imaging System And Imaging Method
App 20160139039 - IKEHARA; Yuzuru ; et al. | 2016-05-19 |
Exposure apparatus, exposure method, and device fabrication method
Grant 8,797,506 - Imai , et al. August 5, 2 | 2014-08-05 |
Encoder apparatus using liquid to suppress detection failure
Grant 8,796,613 - Makinouchi August 5, 2 | 2014-08-05 |
Movable body apparatus, exposure apparatus and pattern formation apparatus, and device manufacturing method
Grant 8,760,622 - Makinouchi June 24, 2 | 2014-06-24 |
Encoder that optically detects positional information of a moving body from different optical paths lengths
Grant 8,710,425 - Makinouchi , et al. April 29, 2 | 2014-04-29 |
Encoder that detects positional information of a moving body generating interference fringes that move in opposite directions
Grant 8,710,426 - Makinouchi , et al. April 29, 2 | 2014-04-29 |
Encoder Apparatus Using Liquid To Suppress Detection Failure
App 20130087696 - MAKINOUCHI; Susumu | 2013-04-11 |
Encoder apparatus using liquid to suppress detection failure
Grant 8,395,110 - Makinouchi March 12, 2 | 2013-03-12 |
Movable-body apparatus, exposure apparatus, exposure method, and device manufacturing method
Grant 8,390,780 - Makinouchi , et al. March 5, 2 | 2013-03-05 |
Exposure Apparatus, Exposure Method, And Device Fabrication Method
App 20120320350 - IMAI; Motokatsu ; et al. | 2012-12-20 |
Encoder
App 20120292539 - MAKINOUCHI; Susumu ; et al. | 2012-11-22 |
Exposure apparatus, exposure method, and device fabrication method
Grant 8,272,544 - Imai , et al. September 25, 2 | 2012-09-25 |
Encoder that optically detects positional information of a movable body by changing a path length through periodic oscillation of an optical element
Grant 8,222,594 - Makinouchi , et al. July 17, 2 | 2012-07-17 |
Position measuring system and position measuring method, Movable body apparatus, movable body drive method, exposure apparatus and exposure method, pattern forming apparatus, and device manufacturing method
Grant 8,208,128 - Makinouchi June 26, 2 | 2012-06-26 |
Immersion exposure apparatus and device manufacturing method with no liquid recovery during exposure
Grant 8,064,037 - Nagasaka , et al. November 22, 2 | 2011-11-22 |
Encoder
App 20110272565 - MAKINOUCHI; Susumu ; et al. | 2011-11-10 |
Encoder
App 20110192964 - MAKINOUCHI; Susumu ; et al. | 2011-08-11 |
Exposure apparatus, exposure method, and device fabrication method
App 20110189613 - Imai; Motokatsu ; et al. | 2011-08-04 |
Exposure apparatus, exposure method, and device fabrication method
Grant 7,932,996 - Imai , et al. April 26, 2 | 2011-04-26 |
Encoder
App 20100176282 - MAKINOUCHI; Susumu ; et al. | 2010-07-15 |
Encoder Apparatus
App 20100171030 - MAKINOUCHI; Susumu | 2010-07-08 |
Positional information detecting device
Grant 7,723,671 - Makinouchi , et al. May 25, 2 | 2010-05-25 |
Movable Body Apparatus, Exposure Apparatus And Pattern Formation Apparatus, And Device Manufacturing Method
App 20090273767 - MAKINOUCHI; Susumu | 2009-11-05 |
Encoder
App 20090267781 - MAKINOUCHI; Susumu ; et al. | 2009-10-29 |
Position Measuring System And Position Measuring Method, Movable Body Apparatus, Movable Body Drive Method, Exposure Apparatus And Exposure Method, Pattern Forming Apparatus, And Device Maufacturing Method
App 20090262321 - MAKINOUCHI; Susumu | 2009-10-22 |
Encoder that optically detects positional information of a scale
Grant 7,601,947 - Makinouchi , et al. October 13, 2 | 2009-10-13 |
Movable-body Apparatus, Exposure Apparatus, Exposure Method, And Device Manufacturing Method
App 20090135388 - MAKINOUCHI; Susumu ; et al. | 2009-05-28 |
Encoder
App 20080258050 - MAKINOUCHI; Susumu ; et al. | 2008-10-23 |
Encoder
App 20080185506 - Makinouchi; Susumu ; et al. | 2008-08-07 |
Encoder
App 20070267571 - Makinouchi; Susumu ; et al. | 2007-11-22 |
Anti-Gravity Device for Supporting Weight and Reducing Transmissibility
App 20070236854 - Lee; Martin E. ; et al. | 2007-10-11 |
Active damper with counter mass to compensate for structural vibrations of a lithographic system
App 20070097340 - Yuan; Bausan ; et al. | 2007-05-03 |
Exposure apparatus, exposure method, and device fabrication method
App 20070002299 - Imai; Motokatsu ; et al. | 2007-01-04 |
Exposure apparatus, exposure method and device manufacturing method
App 20060139593 - Nagasaka; Hiroyuki ; et al. | 2006-06-29 |
Feedforward control with reduced learning time for lithographic system to improve throughput and accuracy
App 20050231706 - Yang, Pai-Hsueh ; et al. | 2005-10-20 |
Control system and method for improving tracking accuracy of a stage through processing of information from previous operations
App 20040128918 - Yang, Pai-Hsueh ; et al. | 2004-07-08 |
Scanning exposure apparatus and method with run-up distance control
Grant 6,646,715 - Makinouchi November 11, 2 | 2003-11-11 |
Scanning exposure apparatus and method
Grant 6,633,363 - Makinouchi October 14, 2 | 2003-10-14 |
Exposure apparatus
Grant 6,490,025 - Makinouchi , et al. December 3, 2 | 2002-12-03 |
Stage control with reduced synchronization error and settling time
Grant 6,260,282 - Yuan , et al. July 17, 2 | 2001-07-17 |
Scanning type exposure apparatus
Grant 6,259,511 - Makinouchi , et al. July 10, 2 | 2001-07-10 |
Projection exposure apparatus and method in which mask stage is moved to provide alignment with a moving wafer stage
Grant 5,978,071 - Miyajima , et al. November 2, 1 | 1999-11-02 |
Exposure apparatus
Grant 5,907,392 - Makinouchi May 25, 1 | 1999-05-25 |
Scanning exposure apparatus and method
Grant 5,877,845 - Makinouchi March 2, 1 | 1999-03-02 |
Projection exposure apparatus and projection exposure method
Grant 5,742,376 - Makinouchi April 21, 1 | 1998-04-21 |
Scanning type exposure apparatus
Grant 5,699,145 - Makinouchi , et al. December 16, 1 | 1997-12-16 |
Projection exposure apparatus
Grant 5,483,311 - Sakakibara , et al. January 9, 1 | 1996-01-09 |
Stage device
Grant 5,446,519 - Makinouchi August 29, 1 | 1995-08-29 |
Projection optical apparatus
Grant 4,801,977 - Ishizaka , et al. January 31, 1 | 1989-01-31 |
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