Makino; Fuminori
Patent Applications and Registrations
Patent applications and USPTO patent grants for Makino; Fuminori.The latest application filed is for "xy stage device, semiconductor inspection apparatus, and semiconductor exposure apparatus".
- Makino; Fuminori - Yokosuka N/A JP
- Makino; Fuminori - Yokosuka-shi JP
- Makino; Fuminori - Yokohama JP
- Makino, Fuminori - Yokohama-shi JP
| Patent | Date |
|---|---|
| XY stage device, semiconductor inspection apparatus, and semiconductor exposure apparatus Grant 8,517,363 - Makino , et al. August 27, 2 | 2013-08-27 |
| Stage apparatus Grant 7,959,141 - Makino June 14, 2 | 2011-06-14 |
| Xy Stage Device, Semiconductor Inspection Apparatus, And Semiconductor Exposure Apparatus App 20100250004 - Makino; Fuminori ; et al. | 2010-09-30 |
| Stage apparatus App 20100155560 - Makino; Fuminori | 2010-06-24 |
| Stage apparatus App 20100158645 - Makino; Fuminori | 2010-06-24 |
| Gas pressure actuator capable of stably driving and controlling its slider, and method for controlling the gas pressure actuator Grant 6,789,457 - Sakaki , et al. September 14, 2 | 2004-09-14 |
| Gas pressure actuator capable of stably driving and controlling its slider, and method for controlling the gas pressure actuator App 20040050244 - Sakaki, Kazutoshi ; et al. | 2004-03-18 |
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