Maki; Keigo
Patent Applications and Registrations
Patent applications and USPTO patent grants for Maki; Keigo.The latest application filed is for "electrostatic chuck device".
- Maki; Keigo - Tokyo JP
- Maki; Keigo - Ichikawa JP
- Maki; Keigo - Chiyoda-ku JP
- Maki; Keigo - Nagano JP
- Maki; Keigo - Narashino JP
- Maki; Keigo - Ichikawa-shi JP
- Maki, Keigo - Narashino-shi JP
| Patent | Date |
|---|---|
| Electrostatic chuck device having focus ring Grant 11,024,528 - Moriya , et al. June 1, 2 | 2021-06-01 |
| Electrostatic Chuck Device App 20180308737 - MORIYA; Yoshiaki ; et al. | 2018-10-25 |
| Electrostatic chuck device Grant 8,284,538 - Himori , et al. October 9, 2 | 2012-10-09 |
| Electrostatic chuck device Grant 8,264,813 - Inazumachi , et al. September 11, 2 | 2012-09-11 |
| Method for manufacturing semiconductor device Grant 8,168,452 - Maki , et al. May 1, 2 | 2012-05-01 |
| Method For Manufacturing Semiconductor Device App 20110136270 - MAKI; Keigo ; et al. | 2011-06-09 |
| Susceptor device Grant 7,678,197 - Maki March 16, 2 | 2010-03-16 |
| Electrostatic Chuck Device App 20100002354 - Inazumachi; Hiroshi ; et al. | 2010-01-07 |
| Electrostatic chuck Grant 7,619,870 - Himori , et al. November 17, 2 | 2009-11-17 |
| Electrode Structure Body And Method Of Forming The Same, Electronic Component, And Mounting Substrate App 20080316721 - MAKI; Keigo | 2008-12-25 |
| Electrostatic Chuck Device App 20080062610 - HIMORI; Shinji ; et al. | 2008-03-13 |
| Electrostatic Chuck Device App 20080062611 - HIMORI; Shinji ; et al. | 2008-03-13 |
| Electrostatic Chuck App 20080037195 - HIMORI; Shinji ; et al. | 2008-02-14 |
| Susceptor device App 20050098120 - Maki, Keigo | 2005-05-12 |
| Susceptor with built-in electrode and manufacturing method therefor Grant 6,689,984 - Maki February 10, 2 | 2004-02-10 |
| Susceptor with built-in electrode and manufacturing method therefor App 20030089687 - Maki, Keigo | 2003-05-15 |
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