loadpatents
Patent applications and USPTO patent grants for Maki; Keigo.The latest application filed is for "electrostatic chuck device".
Patent | Date |
---|---|
Electrostatic chuck device having focus ring Grant 11,024,528 - Moriya , et al. June 1, 2 | 2021-06-01 |
Electrostatic Chuck Device App 20180308737 - MORIYA; Yoshiaki ;   et al. | 2018-10-25 |
Electrostatic chuck device Grant 8,284,538 - Himori , et al. October 9, 2 | 2012-10-09 |
Electrostatic chuck device Grant 8,264,813 - Inazumachi , et al. September 11, 2 | 2012-09-11 |
Method for manufacturing semiconductor device Grant 8,168,452 - Maki , et al. May 1, 2 | 2012-05-01 |
Method For Manufacturing Semiconductor Device App 20110136270 - MAKI; Keigo ;   et al. | 2011-06-09 |
Susceptor device Grant 7,678,197 - Maki March 16, 2 | 2010-03-16 |
Electrostatic Chuck Device App 20100002354 - Inazumachi; Hiroshi ;   et al. | 2010-01-07 |
Electrostatic chuck Grant 7,619,870 - Himori , et al. November 17, 2 | 2009-11-17 |
Electrode Structure Body And Method Of Forming The Same, Electronic Component, And Mounting Substrate App 20080316721 - MAKI; Keigo | 2008-12-25 |
Electrostatic Chuck Device App 20080062610 - HIMORI; Shinji ;   et al. | 2008-03-13 |
Electrostatic Chuck Device App 20080062611 - HIMORI; Shinji ;   et al. | 2008-03-13 |
Electrostatic Chuck App 20080037195 - HIMORI; Shinji ;   et al. | 2008-02-14 |
Susceptor device App 20050098120 - Maki, Keigo | 2005-05-12 |
Susceptor with built-in electrode and manufacturing method therefor Grant 6,689,984 - Maki February 10, 2 | 2004-02-10 |
Susceptor with built-in electrode and manufacturing method therefor App 20030089687 - Maki, Keigo | 2003-05-15 |
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