Major; Andras G.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Major; Andras G..The latest application filed is for "particle beam system for azimuthal deflection of individual particle beams and method for azimuth correction in a particle beam system".

Company Profile

0.18.19

Major; Andras G. - Oberkochen DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Particle Beam System For Azimuthal Deflection Of Individual Particle Beams And Method For Azimuth Correction In A Particle Beam System App 20220102104 - Fritz; Hans ; et al.	2022-03-31
Method and arrangement for determining the heating condition of a mirror in an optical system Grant 10,161,808 - Vogt , et al. Dec	2018-12-25
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20180246415 - Xalter; Stefan ; et al.	2018-08-30
Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method Grant 9,946,161 - Saenger , et al. April 17, 2	2018-04-17
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus Grant 9,897,925 - Xalter , et al. February 20, 2	2018-02-20
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20160266502 - Xalter; Stefan ; et al.	2016-09-15
Device for guiding electromagnetic radiation into a projection exposure apparatus Grant 9,310,701 - Major April 12, 2	2016-04-12
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus Grant 9,239,229 - Xalter , et al. January 19, 2	2016-01-19
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20150300807 - Xalter; Stefan ; et al.	2015-10-22
Microlithographic projection exposure apparatus Grant 9,052,606 - Major , et al. June 9, 2	2015-06-09
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus Grant 9,019,475 - Xalter , et al. April 28, 2	2015-04-28
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus Grant 9,013,684 - Xalter , et al. April 21, 2	2015-04-21
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus Grant 9,001,309 - Xalter , et al. April 7, 2	2015-04-07
Microlithographic projection exposure apparatus Grant 8,854,604 - Deguenther , et al. October 7, 2	2014-10-07
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20140233006 - Xalter; Stefan ; et al.	2014-08-21
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20140226141 - Xalter; Stefan ; et al.	2014-08-14
Illumination system of a microlithographic projection exposure apparatus Grant 8,773,639 - Deguenther , et al. July 8, 2	2014-07-08
Method and arrangement for determining the heating condition of a mirror in an optical system App 20130230073 - Vogt; Peter ; et al.	2013-09-05
Optical System For A Microlithographic Projection Exposure Apparatus And Microlithographic Exposure Method App 20130077077 - Saenger; Ingo ; et al.	2013-03-28
Microlithographic Projection Exposure Apparatus App 20130077074 - Major; Andras G. ; et al.	2013-03-28
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus Grant 8,339,577 - Xalter , et al. December 25, 2	2012-12-25
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20120293784 - Xalter; Stefan ; et al.	2012-11-22
Device For Guiding Electromagnetic Radiation Into A Projection Exposure Apparatus App 20120212720 - Major; Andras G.	2012-08-23
Optical Assembly For Projection Lithography App 20120127440 - Major; Andras G.	2012-05-24
Illumination system for illuminating a mask in a microlithographic projection exposure apparatus Grant 8,164,046 - Major April 24, 2	2012-04-24
Microlithographic Projection Exposure Apparatus App 20120002185 - Deguenther; Markus ; et al.	2012-01-05
Illumination System For Illuminating A Mask In A Microlithographic Projection Exposure Apparatus App 20110012010 - Major; Andras G.	2011-01-20
Illumination System Of A Microlothographic Projection Exposure Apparatus App 20100277708 - Fiolka; Damian ; et al.	2010-11-04
Illumination system of a microlithographic projection exposure apparatus Grant 7,782,443 - Fiolka , et al. August 24, 2	2010-08-24
Illumination System Of A Microlothographic Projection Exposure Apparatus App 20100157268 - Fiolka; Damian ; et al.	2010-06-24
Illumination System Of A Microlithographic Projection Exposure Apparatus App 20100103400 - Deguenther; Markus ; et al.	2010-04-29
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20100039629 - Xalter; Stefan ; et al.	2010-02-18

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