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Insulated pipe and method for preparing the same Grant 08616246 - | 2013-12-31 |
Insulated pipe and method for preparing the same Grant 8,616,246 - Dinon , et al. December 31, 2 | 2013-12-31 |
Integration of ALD tantalum nitride for copper metallization Grant 8,324,095 - Chung , et al. December 4, 2 | 2012-12-04 |
Small scanned magentron Grant 7,807,030 - Hong , et al. October 5, 2 | 2010-10-05 |
Atomic layer deposition of tantalum-containing materials using the tantalum precursor TAIMATA Grant 7,691,742 - Marcadal , et al. April 6, 2 | 2010-04-06 |
Integration Of Ald Tantalum Nitride For Copper Metallization App 20100075494 - Chung; Hua ;   et al. | 2010-03-25 |
Atomic layer deposition of barrier materials Grant 7,595,263 - Chung , et al. September 29, 2 | 2009-09-29 |
Insulated Pipe And Method For Preparing The Same App 20090205737 - Dinon; John L. ;   et al. | 2009-08-20 |
Atomic Layer Deposition Of Tantalum-containing Materials Using The Tantalum Precursor Taimata App 20090202710 - Marcadal; Christophe ;   et al. | 2009-08-13 |
Atomic layer deposition of tantalum-containing materials using the tantalum precursor TAIMATA Grant 7,524,762 - Marcadal , et al. April 28, 2 | 2009-04-28 |
Atomic Layer Deposition Of Tantalum-containing Materials Using The Tantalum Precursor Taimata App 20080032041 - Marcadal; Christophe ;   et al. | 2008-02-07 |
Ruthenium layer formation for copper film deposition Grant 7,264,846 - Chang , et al. September 4, 2 | 2007-09-04 |
Atomic Layer Deposition Of Barrier Materials App 20070190780 - CHUNG; HUA ;   et al. | 2007-08-16 |
Atomic layer deposition of tantalum-containing materials using the tantalum precursor TAIMATA Grant 7,241,686 - Marcadal , et al. July 10, 2 | 2007-07-10 |
Small Scanned Magentron App 20070102284 - HONG; Ilyoung Richard ;   et al. | 2007-05-10 |
Atomic layer deposition of tantalum based barrier materials Grant 7,211,508 - Chung , et al. May 1, 2 | 2007-05-01 |
Magnetron executing planetary motion adjacent a sputtering target Grant 7,169,271 - Hong , et al. January 30, 2 | 2007-01-30 |
Insulated pipe and method for preparing same App 20060272727 - Dinon; John L. ;   et al. | 2006-12-07 |
Ruthenium layer formation for copper film deposition App 20060153973 - Chang; Mei ;   et al. | 2006-07-13 |
Integration of ALD tantalum nitride for copper metallization App 20060148253 - Chung; Hua ;   et al. | 2006-07-06 |
Integration of ALD tantalum nitride for copper metallization Grant 7,049,226 - Chung , et al. May 23, 2 | 2006-05-23 |
Atomic layer deposition of tantalum-containing materials using the tantalum precursor taimata App 20060019495 - Marcadal; Christophe ;   et al. | 2006-01-26 |
Integration of ALD tantalum nitride for copper metallization App 20050106865 - Chung, Hua ;   et al. | 2005-05-19 |
Atomic layer deposition of barrier materials App 20050009325 - Chung, Hua ;   et al. | 2005-01-13 |
Small planetary magnetron Grant 6,841,050 - Hong , et al. January 11, 2 | 2005-01-11 |
Magnetron executing planetary motion adjacent a sputtering target App 20040222087 - Hong, Ilyoung Richard ;   et al. | 2004-11-11 |
Ruthenium layer formation for copper film deposition App 20040105934 - Chang, Mei ;   et al. | 2004-06-03 |
Small planetary magnetron App 20030217913 - Hong, Ilyoung Richard ;   et al. | 2003-11-27 |
Method and apparatus for sputter deposition App 20030216035 - Rengarajan, Suraj ;   et al. | 2003-11-20 |
Self-ionized and inductively-coupled plasma for sputtering and resputtering App 20030116427 - Ding, Peijun ;   et al. | 2003-06-26 |
Alternate steps of IMP and sputtering process to improve sidewall coverage App 20020084181 - Gopalraja, Praburam ;   et al. | 2002-07-04 |
Alternate steps of IMP and sputtering process to improve sidewall coverage Grant 6,350,353 - Gopalraja , et al. February 26, 2 | 2002-02-26 |
Alternate Steps Of Imp And Sputtering Process To Improve Sidewall Coverage App 20010003607 - GOPALRAJA, PRABURAM ;   et al. | 2001-06-14 |