loadpatents
Patent applications and USPTO patent grants for Maida; Shigeru.The latest application filed is for "titania-doped quartz glass and making method".
Patent | Date |
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Titania-doped quartz glass and making method Grant 10,114,280 - Maida , et al. October 30, 2 | 2018-10-30 |
Titania-doped quartz glass and making method Grant 9,746,773 - Maida , et al. August 29, 2 | 2017-08-29 |
Titania-doped quartz glass and making method Grant 9,612,525 - Maida , et al. April 4, 2 | 2017-04-04 |
Titania-doped Quartz Glass And Making Method App 20170038672 - Maida; Shigeru ;   et al. | 2017-02-09 |
Titania-doped Quartz Glass And Making Method App 20160306271 - Maida; Shigeru ;   et al. | 2016-10-20 |
Titania-doped quartz glass and making method Grant 9,346,700 - Maida , et al. May 24, 2 | 2016-05-24 |
Titania doped quartz glass and making method Grant 9,296,636 - Maida , et al. March 29, 2 | 2016-03-29 |
EUV lithography member, making method, and titania-doped quartz glass Grant 9,278,881 - Maida , et al. March 8, 2 | 2016-03-08 |
Method of producing synthetic quartz glass for excimer laser Grant 9,067,814 - Maida , et al. June 30, 2 | 2015-06-30 |
Nanoimprint mold-forming synthetic quartz glass and making method Grant 9,056,785 - Maida , et al. June 16, 2 | 2015-06-16 |
Titania-doped quartz glass and making method Grant 8,820,122 - Maida , et al. September 2, 2 | 2014-09-02 |
Euv Lithography Member, Making Method, And Titania-doped Quartz Glass App 20140206524 - Maida; Shigeru ;   et al. | 2014-07-24 |
Nanoimprint Mold-forming Synthetic Quartz Glass And Making Method App 20140018229 - Maida; Shigeru ;   et al. | 2014-01-16 |
Titania and sulfur co-doped quartz glass member and making method Grant 8,629,071 - Maida , et al. January 14, 2 | 2014-01-14 |
Titania-doped Quartz Glass And Making Method App 20130283858 - Maida; Shigeru ;   et al. | 2013-10-31 |
Titania and sulfur co-doped quartz glass member and making method Grant 8,539,797 - Maida , et al. September 24, 2 | 2013-09-24 |
Titania And Sulfur Co-doped Quartz Glass Member And Making Method App 20130149637 - MAIDA; Shigeru ;   et al. | 2013-06-13 |
Titania-doped Quartz Glass And Making Method App 20130045439 - Maida; Shigeru ;   et al. | 2013-02-21 |
Titania-doped quartz glass member and making method Grant 8,377,612 - Maida , et al. February 19, 2 | 2013-02-19 |
Titania-doped Quartz Glass And Making Method App 20120258389 - Maida; Shigeru ;   et al. | 2012-10-11 |
Titania-doped Quartz Glass Member And Making Method App 20120104336 - MAIDA; Shigeru ;   et al. | 2012-05-03 |
Titania-doped Quartz Glass And Making Method App 20120058419 - Maida; Shigeru ;   et al. | 2012-03-08 |
Titania-doped quartz glass member and making method Grant 8,105,734 - Maida , et al. January 31, 2 | 2012-01-31 |
Titania-doped Quartz Glass And Making Method App 20110159413 - Maida; Shigeru ;   et al. | 2011-06-30 |
Titania And Sulfur Co-doped Quartz Glass Member And Making Method App 20110117480 - Maida; Shigeru ;   et al. | 2011-05-19 |
Titania-doped quartz glass for nanoimprint molds Grant 7,935,648 - Maida , et al. May 3, 2 | 2011-05-03 |
Titania-doped quartz glass for nanoimprint molds Grant 7,923,394 - Maida , et al. April 12, 2 | 2011-04-12 |
Titania-doped quartz glass and making method, EUV lithographic member and photomask substrate Grant 7,849,711 - Maida , et al. December 14, 2 | 2010-12-14 |
Method Of Producing Synthetic Quartz Glass For Excimer Laser App 20100180634 - Maida; Shigeru ;   et al. | 2010-07-22 |
Titania-doped Quartz Glass Member And Making Method App 20100003609 - Maida; Shigeru ;   et al. | 2010-01-07 |
Titania-doped Quartz Glass And Making Method, Euv Lithographic Member And Photomask Substrate App 20090288448 - MAIDA; Shigeru ;   et al. | 2009-11-26 |
Titania-doped quartz glass and making method, EUV lithographic member and photomask substrate Grant 7,585,598 - Maida , et al. September 8, 2 | 2009-09-08 |
Titania-doped Quartz Glass For Nanoimprint Molds App 20080305940 - MAIDA; Shigeru ;   et al. | 2008-12-11 |
Titania-doped Quartz Glass For Nanoimprint Molds App 20080305941 - MAIDA; Shigeru ;   et al. | 2008-12-11 |
Titania-doped quartz glass and making method, EUV lithographic member and photomask substrate App 20070134566 - Maida; Shigeru ;   et al. | 2007-06-14 |
Method of producing synthetic quartz glass Grant 7,159,418 - Matsuo , et al. January 9, 2 | 2007-01-09 |
Method of producing fluorine-containing synthetic quartz glass Grant 6,990,836 - Maida , et al. January 31, 2 | 2006-01-31 |
Synthetic qurtz glass and method of production App 20020038557 - Matsuo, Koji ;   et al. | 2002-04-04 |
Fluorine-containing synthetic quartz glass and method of production App 20010017042 - Maida, Shigeru ;   et al. | 2001-08-30 |
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