Mahan; Bradley M.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Mahan; Bradley M..The latest application filed is for "detection of foreign material on a substrate chuck".
- Mahan; Bradley M. - Burlington VT
| Patent | Date |
|---|---|
| Detection of foreign material on a substrate chuck Grant 9,671,323 - Carlson , et al. June 6, 2 | 2017-06-06 |
| Substrate edge clamping force tester Grant 9,581,532 - Bandy , et al. February 28, 2 | 2017-02-28 |
| Detection Of Foreign Material On A Substrate Chuck App 20160327462 - Carlson; Robert G. ; et al. | 2016-11-10 |
| Substrate Edge Clamping Force Tester App 20160161381 - Bandy; John J. ; et al. | 2016-06-09 |
| Method and apparatus for calibrating sensors that detect wafer protrusion from a wafer cassette Grant 9,348,057 - Bandy , et al. May 24, 2 | 2016-05-24 |
| Method And Apparatus For Calibrating Sensors That Detect Wafer Protrusion From A Wafer Cassette App 20160025893 - Bandy; John J. ; et al. | 2016-01-28 |
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