Mahalingam; Anbu Selvam
Patent Applications and Registrations
Patent applications and USPTO patent grants for Mahalingam; Anbu Selvam.The latest application filed is for "unique bi-layer etch stop to protect conductive structures during a metal hard mask removal process and methods of using same".
- Mahalingam; Anbu Selvam - Malta NY
- Mahalingam; Anbu Selvam - Kulim Pedana MY
| Patent | Date |
|---|---|
| Unique Bi-layer Etch Stop To Protect Conductive Structures During A Metal Hard Mask Removal Process And Methods Of Using Same App 20160372413 - Mahalingam; Anbu Selvam ; et al. | 2016-12-22 |
| Process for making an alignment structure in the fabrication of a semiconductor device App 20110284990 - Mahalingam; Anbu Selvam ; et al. | 2011-11-24 |
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