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N-metal film deposition with initiation layer Grant 9,269,584 - Ganguli , et al. February 23, 2 | 2016-02-23 |
NMOS metal gate materials, manufacturing methods, and equipment using CVD and ALD processes with metal based precursors Grant 9,048,183 - Ganguli , et al. June 2, 2 | 2015-06-02 |
Methods for manufacturing metal gates Grant 8,987,080 - Lu , et al. March 24, 2 | 2015-03-24 |
Methods of making a high-density nonvolatile memory Grant 8,951,861 - Herner , et al. February 10, 2 | 2015-02-10 |
N-metal film deposition with initiation layer Grant 8,895,443 - Ganguli , et al. November 25, 2 | 2014-11-25 |
In situ vapor phase surface activation of SiO.sub.2 Grant 8,778,816 - Sato , et al. July 15, 2 | 2014-07-15 |
Nmos Metal Gate Materials, Manufacturing Methods, And Equipment Using Cvd And Ald Processes With Metal Based Precursors App 20140120712 - GANGULI; Seshadri ;   et al. | 2014-05-01 |
NMOS metal gate materials, manufacturing methods, and equipment using CVD and ALD processes with metal based precursors Grant 8,642,468 - Ganguli , et al. February 4, 2 | 2014-02-04 |
Method And Apparatus For Low Temperature ALD Deposition App 20140023794 - Mahajani; Maitreyee ;   et al. | 2014-01-23 |
Methods for manufacturing high dielectric constant films Grant 8,633,114 - Sato , et al. January 21, 2 | 2014-01-21 |
Methods for manufacturing high dielectric constant films Grant 8,633,119 - Sato , et al. January 21, 2 | 2014-01-21 |
Doping aluminum in tantalum silicide Grant 8,592,305 - Lu , et al. November 26, 2 | 2013-11-26 |
Methods For Manufacturing Metal Gates App 20130295759 - Lu; Xinliang ;   et al. | 2013-11-07 |
High-density Nonvolatile Memory And Methods Of Making The Same App 20130164921 - Herner; Scott Brad ;   et al. | 2013-06-27 |
Doping aluminum in tantalum silicide App 20130122697 - Lu; Xinliang ;   et al. | 2013-05-16 |
High-density nonvolatile memory and methods of making the same Grant 8,383,478 - Herner , et al. February 26, 2 | 2013-02-26 |
Pretreatment processes within a batch ALD reactor Grant 8,361,910 - Mahajani January 29, 2 | 2013-01-29 |
N-Metal Film Deposition With Initiation Layer App 20120322262 - Ganguli; Seshadri ;   et al. | 2012-12-20 |
N-Metal Film Deposition With Initiation Layer App 20120322250 - Ganguli; Seshadri ;   et al. | 2012-12-20 |
Methods For Manufacturing High Dielectric Constant Films App 20120289063 - Sato; Tatsuya E. ;   et al. | 2012-11-15 |
Methods for Manufacturing High Dielectric Constant Films App 20120289052 - SATO; TATSUYA E. ;   et al. | 2012-11-15 |
Dry Chemical Cleaning For Semiconductor Processing App 20120220116 - Noori; Atif ;   et al. | 2012-08-30 |
In Situ Vapor Phase Surface Activation Of SiO2 App 20120202357 - Sato; Tatsuya E. ;   et al. | 2012-08-09 |
Plasma, Uv And Ion/neutral Assisted Ald Or Cvd In A Batch Tool App 20120192792 - MAHAJANI; MAITREYEE ;   et al. | 2012-08-02 |
Atomic Layer Deposition Film With Tunable Refractive Index And Absorption Coefficient And Methods Of Making App 20120108079 - Mahajani; Maitreyee | 2012-05-03 |
High-density Nonvolatile Memory And Methods Of Making The Same App 20110287615 - Herner; S. Brad ;   et al. | 2011-11-24 |
Nmos Metal Gate Materials, Manufacturing Methods, And Equipment Using Cvd And Ald Processes With Metal Based Precursors App 20110263115 - Ganguli; Seshadri ;   et al. | 2011-10-27 |
Pretreatment Processes Within A Batch Ald Reactor App 20110263137 - MAHAJANI; MAITREYEE | 2011-10-27 |
Atomic layer deposition processes for non-volatile memory devices Grant 8,043,907 - Ma , et al. October 25, 2 | 2011-10-25 |
High-density nonvolatile memory Grant 8,004,033 - Herner , et al. August 23, 2 | 2011-08-23 |
Pretreatment processes within a batch ALD reactor Grant 7,972,978 - Mahajani July 5, 2 | 2011-07-05 |
Chamber components with increased pyrometry visibility Grant 7,921,803 - Yudovsky , et al. April 12, 2 | 2011-04-12 |
Method for forming doped polysilicon via connecting polysilicon layers Grant 7,915,163 - Konevecki , et al. March 29, 2 | 2011-03-29 |
Method for forming doped polysilicon via connecting polysilicon layers Grant 7,915,164 - Konevecki , et al. March 29, 2 | 2011-03-29 |
Low temperature ALD SiO.sub.2 Grant 7,897,208 - Mahajani , et al. March 1, 2 | 2011-03-01 |
Method For Forming Doped Polysilicon Via Connecting Polysilicon Layers App 20110021019 - Konevecki; Michael W. ;   et al. | 2011-01-27 |
Plasma, UV and ion/neutral assisted ALD or CVD in a batch tool Grant 7,798,096 - Mahajani , et al. September 21, 2 | 2010-09-21 |
LOW TEMPERATURE ALD Si02 App 20100227061 - Mahajani; Maitreyee ;   et al. | 2010-09-09 |
Method of depositing catalyst assisted silicates of high-k materials Grant 7,776,395 - Mahajani August 17, 2 | 2010-08-17 |
Low temperature ALD SiO.sub.2 Grant 7,749,574 - Mahajani , et al. July 6, 2 | 2010-07-06 |
Atomic Layer Deposition Processes for Non-Volatile Memory Devices App 20100102376 - Ma; Yi ;   et al. | 2010-04-29 |
Atomic layer deposition processes for non-volatile memory devices Grant 7,659,158 - Ma , et al. February 9, 2 | 2010-02-09 |
High-density Nonvolatile Memory And Methods Of Making The Same App 20090261343 - Herner; S. Brad ;   et al. | 2009-10-22 |
Method For Forming Doped Polysilicon Via Connecting Polysilicon Layers App 20090258462 - Konevecki; Michael W. ;   et al. | 2009-10-15 |
Atomic Layer Deposition Processes For Non-volatile Memory Devices App 20090242957 - Ma; Yi ;   et al. | 2009-10-01 |
Method for monitoring and calibrating temperature in semiconductor processing chambers Grant 7,572,052 - Ravi , et al. August 11, 2 | 2009-08-11 |
Doped polysilicon via connecting polysilicon layers Grant 7,566,974 - Konevecki , et al. July 28, 2 | 2009-07-28 |
High-density nonvolatile memory Grant 7,557,405 - Herner , et al. July 7, 2 | 2009-07-07 |
Chamber Components With Increased Pyrometry Visibility App 20090078198 - YUDOVSKY; JOSEPH ;   et al. | 2009-03-26 |
Memory array incorporating mirrored NAND strings and non-shared global bit lines within a block Grant 7,508,714 - Fasoli , et al. March 24, 2 | 2009-03-24 |
Dual-gate device and method Grant 7,495,337 - Walker , et al. February 24, 2 | 2009-02-24 |
Method And Apparatus For Batch Processing In A Vertical Reactor App 20090017637 - Huang; Yi-Chiau ;   et al. | 2009-01-15 |
Novel Method For Monitoring And Calibrating Temperature In Semiconductor Processing Chambers App 20090016406 - Ravi; Jallepally ;   et al. | 2009-01-15 |
Dual-gate device and method Grant 7,462,521 - Walker , et al. December 9, 2 | 2008-12-09 |
Pretreatment Processes Within A Batch Ald Reactor App 20080261413 - Mahajani; Maitreyee | 2008-10-23 |
Pretreatment processes within a batch ALD reactor Grant 7,402,534 - Mahajani July 22, 2 | 2008-07-22 |
LOW TEMPERATURE ALD SiO2 App 20080113097 - Mahajani; Maitreyee ;   et al. | 2008-05-15 |
Method Of Depositing Catalyst Assisted Silicates Of High-k Materials App 20080113096 - MAHAJANI; MAITREYEE | 2008-05-15 |
Plasma, Uv And Ion/neutral Assisted Ald Or Cvd In A Batch Tool App 20070259110 - Mahajani; Maitreyee ;   et al. | 2007-11-08 |
Method And Apparatus For Photo-excitation Of Chemicals For Atomic Layer Deposition Of Dielectric Film App 20070259111 - Singh; Kaushal K. ;   et al. | 2007-11-08 |
Synchronization of precursor pulsing and wafer rotation App 20070252299 - Mahajani; Maitreyee ;   et al. | 2007-11-01 |
Memory Array Incorporating Memory Cells Arranged In Nand Strings App 20070217263 - Fasoli; Luca G. ;   et al. | 2007-09-20 |
Dual-gate Device And Method App 20070126033 - Walker; Andrew J. ;   et al. | 2007-06-07 |
Memory array incorporating memory cells arranged in NAND strings Grant 7,221,588 - Fasoli , et al. May 22, 2 | 2007-05-22 |
Batch Processing Chamber With Diffuser Plate And Injector Assembly App 20070084408 - Yudovsky; Joseph ;   et al. | 2007-04-19 |
Reaction chamber with opposing pockets for gas injection and exhaust App 20070084406 - Yudovsky; Joseph ;   et al. | 2007-04-19 |
Pretreatment processes within a batch ALD reactor App 20070049053 - Mahajani; Maitreyee | 2007-03-01 |
Method for making high-density nonvolatile memory App 20060189077 - Herner; S. Brad ;   et al. | 2006-08-24 |
Dual-gate device and method App 20060115939 - Walker; Andrew J. ;   et al. | 2006-06-01 |
Method for making high density nonvolatile memory Grant 7,026,212 - Herner , et al. April 11, 2 | 2006-04-11 |
Doped polysilicon via connecting polysilicon layers App 20060071074 - Konevecki; Michael W. ;   et al. | 2006-04-06 |
Storage layer optimization of a nonvolatile memory device Grant 7,012,299 - Mahajani , et al. March 14, 2 | 2006-03-14 |
Method for making high density nonvolatile memory Grant 7,009,275 - Herner , et al. March 7, 2 | 2006-03-07 |
High-density three-dimensional memory Grant 6,995,422 - Herner , et al. February 7, 2 | 2006-02-07 |
Method for making high density nonvolatile memory Grant 6,984,561 - Herner , et al. January 10, 2 | 2006-01-10 |
Formation of thin channels for TFT devices to ensure low variability of threshold voltages Grant 6,960,794 - Walker , et al. November 1, 2 | 2005-11-01 |
High-density three-dimensional memory cell Grant 6,952,030 - Herner , et al. October 4, 2 | 2005-10-04 |
Memory array incorporating memory cells arranged in NAND strings App 20050122779 - Fasoli, Luca G. ;   et al. | 2005-06-09 |
Storage layer optimization of a nonvolatile memory device App 20050062098 - Mahajani, Maitreyee ;   et al. | 2005-03-24 |
Thin film transistor with metal oxide layer and method of making same Grant 6,858,899 - Mahajani , et al. February 22, 2 | 2005-02-22 |
Method for making high density nonvolatile memory App 20050012120 - Herner, S. Brad ;   et al. | 2005-01-20 |
Method for making high density nonvolatile memory App 20050012119 - Herner, S. Brad ;   et al. | 2005-01-20 |
Method for making high density nonvolatile memory App 20050012154 - Herner, S. Brad ;   et al. | 2005-01-20 |
Method for making high density nonvolatile memory App 20050014322 - Herner, S. Brad ;   et al. | 2005-01-20 |
Method for making high density nonvolatile memory App 20050014334 - Herner, S. Brad ;   et al. | 2005-01-20 |
Formation of thin channels for TFT devices to ensure low variability of threshold voltages App 20040124415 - Walker, Andrew J. ;   et al. | 2004-07-01 |
Thin film transistor with metal oxide layer and method of making same App 20040069990 - Mahajani, Maitreyee ;   et al. | 2004-04-15 |
Gate dielectric structures for integrated circuits and methods for making and using such gate dielectric structures App 20030155582 - Mahajani, Maitreyee ;   et al. | 2003-08-21 |
Substrate support member for a processing chamber Grant 6,464,795 - Sherstinsky , et al. October 15, 2 | 2002-10-15 |
Apparatus and method for aligning and controlling edge deposition on a substrate Grant 6,328,808 - Tsai , et al. December 11, 2 | 2001-12-11 |
Method for forming a gap filling refractory metal layer having reduced stress Grant 6,271,129 - Ghanayem , et al. August 7, 2 | 2001-08-07 |