Magome; Nobutaka

Patent Applications and Registrations

Patent applications and USPTO patent grants for Magome; Nobutaka.The latest application filed is for "fluid synthesis system".

Company Profile

3.56.51

Magome; Nobutaka - Belmont CA
Magome; Nobutaka - Kumagaya JP
MAGOME; Nobutaka - Kumagaya-shi JP
Magome; Nobutaka - Kamagaya-Shi JP
Magome, Nobutaka - Saitama JP
Magome; Nobutaka - Kawasaki JP
Magome; Nobutaka - Tokyo JP
Magome; Nobutaka - Saitama-ken JP
Magome; Nobutaka - Kanagawa-ken JP
Magome, Nobutaka - Kawasaki-shi JP
Magome; Nobutaka - Oosato-gun JP
Magome; Nobutaka - Kanagawa JP
Magome; Nobutaka - Yokohama JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Fluid synthesis system Grant 11,401,450 - Nagata , et al. August 2, 2	2022-08-02
Fluid Synthesis System App 20190338174 - Nagata; Takashi ; et al.	2019-11-07
Mark, method for forming same, and exposure apparatus Grant 10,461,039 - Shiba , et al. Oc	2019-10-29
Mark, Method For Forming Same, And Exposure Apparatus App 20190164900 - SHIBA; Yuji ; et al.	2019-05-30
Exposure Apparatus, Method For Producing Device, And Method For Controlling Exposure Apparatus App 20190121246 - MAGOME; Nobutaka ; et al.	2019-04-25
Mark, method for forming same, and exposure apparatus Grant 10,236,259 - Shiba , et al.	2019-03-19
Exposure apparatus, method for producing device, and method for controlling exposure apparatus Grant 10,185,232 - Magome , et al. Ja	2019-01-22
Mark, Method For Forming Same, And Exposure Apparatus App 20180197820 - SHIBA; Yuji ; et al.	2018-07-12
Mark, method for forming same, and exposure apparatus Grant 9,941,217 - Shiba , et al. April 10, 2	2018-04-10
Exposure Apparatus, Method For Producing Device, And Method For Controlling Exposure Apparatus App 20170363972 - MAGOME; Nobutaka ; et al.	2017-12-21
Exposure method, substrate stage, exposure apparatus, and device manufacturing method Grant 9,846,371 - Owa , et al. December 19, 2	2017-12-19
Exposure Method, Substrate Stage, Exposure Apparatus, And Device Manufacturing Method App 20170329234 - OWA; Soichi ; et al.	2017-11-16
Exposure apparatus, method for producing device, and method for controlling exposure apparatus Grant 9,760,026 - Magome , et al. September 12, 2	2017-09-12
Exposure Apparatus, Method For Producing Device, And Method For Controlling Exposure Apparatus App 20170038694 - MAGOME; Nobutaka ; et al.	2017-02-09
Exposure apparatus, method for producing device, and method for controlling exposure apparatus Grant 9,494,871 - Magome , et al. November 15, 2	2016-11-15
Exposure method, substrate stage, exposure apparatus, and device manufacturing method Grant 9,268,237 - Owa , et al. February 23, 2	2016-02-23
Exposure Method, Substrate Stage, Exposure Apparatus, And Device Manufacturing Method App 20150301457 - OWA; Soichi ; et al.	2015-10-22
Mark, Method For Forming Same, And Exposure Apparatus App 20150200165 - SHIBA; Yuji ; et al.	2015-07-16
Exposure method, substrate stage, exposure apparatus, and device manufacturing method Grant 9,019,467 - Owa , et al. April 28, 2	2015-04-28
Exposure Apparatus, Method For Producing Device, And Method For Controlling Exposure Apparatus App 20140233002 - MAGOME; Nobutaka ; et al.	2014-08-21
Exposure apparatus, method for producing device, and method for controlling exposure apparatus Grant 8,749,757 - Magome , et al. June 10, 2	2014-06-10
Exposure Method, Substrate Stage, Exposure Apparatus, And Device Manufacturing Method App 20130141703 - OWA; Soichi ; et al.	2013-06-06
Exposure Method, Substrate Stage, Exposure Apparatus, And Device Manufacturing Method App 20130141701 - OWA; Soichi ; et al.	2013-06-06
Exposure Apparatus, Method For Producing Device, And Method For Controlling Exposure Apparatus App 20130135597 - MAGOME; Nobutaka ; et al.	2013-05-30
Exposure apparatus, method for producing device, and method for controlling exposure apparatus Grant 8,451,424 - Magome , et al. May 28, 2	2013-05-28
Exposure method, substrate stage, exposure apparatus, and device manufacturing method Grant 8,384,880 - Owa , et al. February 26, 2	2013-02-26
Exposure method, substrate stage, exposure apparatus, and device manufacturing method Grant 8,208,117 - Owa , et al. June 26, 2	2012-06-26
Exposure apparatus and device manufacturing method App 20110279794 - Hirukawa; Shigeru ; et al.	2011-11-17
Exposure method, substrate stage, exposure apparatus, and device manufacturing method Grant 8,040,491 - Owa , et al. October 18, 2	2011-10-18
Exposure apparatus and method for producing device Grant 8,034,539 - Magome , et al. October 11, 2	2011-10-11
Exposure apparatus and device manufacturing method Grant 7,911,582 - Hirukawa , et al. March 22, 2	2011-03-22
Exposure apparatus and device manufacturing method App 20110051106 - Hirukawa; Shigeru ; et al.	2011-03-03
Exposure apparatus, exposure method, and method for producing device Grant 7,515,246 - Nagasaka , et al. April 7, 2	2009-04-07
Exposure apparatus, exposure method, and method for producing device App 20090079950 - Nagasaka; Hiroyuki ; et al.	2009-03-26
Exposure apparatus, method for producing device, and method for controlling exposure apparatus Grant 7,505,115 - Magome , et al. March 17, 2	2009-03-17
Exposure method, substrate stage, exposure apparatus, and device manufacturing method Grant 7,483,119 - Owa , et al. January 27, 2	2009-01-27
Exposure apparatus and device manufacturing method App 20090015807 - Hirukawa; Shigeru ; et al.	2009-01-15
Exposure method, substrate stage, exposure apparatus, and device manufacturing method App 20090015816 - Owa; Soichi ; et al.	2009-01-15
Exposure method, substrate stage, exposure apparatus, and device manufacturing method App 20090015808 - Owa; Soichi ; et al.	2009-01-15
Exposure apparatus, exposure method, and method for producing device App 20090002655 - Nagasaka; Hiroyuki ; et al.	2009-01-01
Exposure apparatus, exposure method, and method for producing device Grant 7,466,392 - Nagasaka , et al. December 16, 2	2008-12-16
Exposure apparatus and method for producing device Grant 7,460,207 - Mizutani , et al. December 2, 2	2008-12-02
Exposure apparatus and method for producing device Grant 7,436,487 - Mizutani , et al. October 14, 2	2008-10-14
Exposure apparatus and device manufacturing method App 20080151203 - Hirukawa; Shigeru ; et al.	2008-06-26
Exposure apparatus and method for producing device Grant 7,379,158 - Mizutani , et al. May 27, 2	2008-05-27
Exposure method, substrate stage, exposure apparatus, and device manufacturing method App 20080117394 - Owa; Soichi ; et al.	2008-05-22
Exposure apparatus and device manufacturing method App 20070263196 - Hirukawa; Shigeru ; et al.	2007-11-15
Exposure apparatus, exposure method, and method for producing device App 20070258063 - Nagasaka; Hiroyuki ; et al.	2007-11-08
Exposure Apparatus, Exposure Method and Device Manufacturing Method, and Surface Shape Detection Unit App 20070247640 - Magome; Nobutaka ; et al.	2007-10-25
Exposure apparatus and method for producing device App 20070171391 - Magome; Nobutaka ; et al.	2007-07-26
Exposure apparatus and device manufacturing method App 20070115447 - Hirukawa; Shigeru ; et al.	2007-05-24
Exposure apparatus, exposure method, and method for producing device App 20070035710 - Nagasaka; Hiroyuki ; et al.	2007-02-15
Exposure apparatus, exposure method, and method for producing device App 20060274294 - Nagasaka; Hiroyuki ; et al.	2006-12-07
Exposure method, substrate stage, exposure apparatus, and device manufacturing method App 20060227312 - Owa; Soichi ; et al.	2006-10-12
Exposure apparatus and method for producing device App 20060154183 - Magome; Nobutaka	2006-07-13
Exposure apparatus, method for producing device, and method for controlling exposure apparatus App 20060146305 - Magome; Nobutaka ; et al.	2006-07-06
Exposure method, substrate stage, exposure apparatus, and device manufacturing method App 20060139614 - Owa; Soichi ; et al.	2006-06-29
Exposure apparatus, method for producing device, and method for controlling exposure apparatus App 20060132737 - Magome; Nobutaka ; et al.	2006-06-22
Exposure apparatus, exposure method, and method for producing device App 20060132736 - Nagasaka; Hiroyuki ; et al.	2006-06-22
Exposure apparatus and method for producing device App 20060126044 - Mizutani; Hideo ; et al.	2006-06-15
Exposure apparatus and method for producing device App 20060126043 - Mizutani; Hideo ; et al.	2006-06-15
Exposure apparatus, exposure method, and method for producing device App 20060098178 - Nagasaka; Hiroyuki ; et al.	2006-05-11
Real-time through lens image measurement system and method App 20050286050 - Yuan, Bausan ; et al.	2005-12-29
Exposure apparatus and method for producing device App 20050264774 - Mizutani, Hideo ; et al.	2005-12-01
Exposure apparatus and device manufacturing method App 20050259234 - Hirukawa, Shigeru ; et al.	2005-11-24
Exposure apparatus, exposure method, and method for producing device App 20050237504 - Nagasaka, Hiroyuki ; et al.	2005-10-27
Exposure apparatus and method for producing device App 20050225735 - Magome, Nobutaka ; et al.	2005-10-13
Alignment method and apparatus therefor Grant 6,876,946 - Yasuda , et al. April 5, 2	2005-04-05
Projection exposure apparatus having compact substrate stage Grant 6,798,516 - Magome September 28, 2	2004-09-28
Photomask producing method and apparatus and device manufacturing method Grant 6,677,088 - Magome , et al. January 13, 2	2004-01-13
Method and apparatus for inspecting optical device Grant 6,650,421 - Magome November 18, 2	2003-11-18
Alignment method and apparatus therefor App 20030158701 - Yasuda, Masahiko ; et al.	2003-08-21
Exposure method and exposure apparatus App 20030138742 - Irie, Nobuyuki ; et al.	2003-07-24
Adjusting method for position detecting apparatus Grant 6,538,740 - Shiraishi , et al. March 25, 2	2003-03-25
Photomask producing method and apparatus and device manufacturing method App 20020187406 - Magome, Nobutaka ; et al.	2002-12-12
Exposure Apparatus, Apparatus For Manufacturing Devices, And Method Of Manufacturing Exposure Apparatuses App 20020145711 - MAGOME, NOBUTAKA ; et al.	2002-10-10
Mark for position detection and mark detecting method and apparatus Grant 6,356,343 - Shiraishi , et al. March 12, 2	2002-03-12
Exposure method and exposure apparatus App 20010055733 - Irie, Nobuyuki ; et al.	2001-12-27
Alignment method and apparatus therefor App 20010049589 - Yasuda, Masahiko ; et al.	2001-12-06
Method and apparatus for inspecting optical device App 20010026367 - Magome, Nobutaka	2001-10-04
Photo mask and exposure method using same Grant 6,284,416 - Shiraishi , et al. September 4, 2	2001-09-04
Alignment method and apparatus therefor Grant 6,278,957 - Yasuda , et al. August 21, 2	2001-08-21
Scanning exposure method and circuit element producing method employing the same App 20010001056 - Magome, Nobutaka	2001-05-10
Projection exposure apparatus having a filter arranged in its projection optical system and method for protecting circuit patterns Grant 6,118,516 - Irie , et al. September 12, 2	2000-09-12
Projection exposure apparatus and method involving variation and correction of light intensity distributions, detection and control of imaging characteristics, and control of exposure Grant 6,078,380 - Taniguchi , et al. June 20, 2	2000-06-20
Mark for position detection, and mark detecting method and apparatus Grant 5,966,201 - Shiraishi , et al. October 12, 1	1999-10-12
Alignment method Grant 5,805,866 - Magome , et al. September 8, 1	1998-09-08
Exposure apparatus for reproducing a mask pattern onto a photo-sensitive surface of a substrate using holographic techniques Grant 5,774,240 - Goto , et al. June 30, 1	1998-06-30
Projection exposure apparatus Grant 5,734,478 - Magome , et al. March 31, 1	1998-03-31
Alignment apparatus Grant 5,689,339 - Ota , et al. November 18, 1	1997-11-18
Method and apparatus for inspecting a phase-shifted mask Grant 5,576,829 - Shiraishi , et al. November 19, 1	1996-11-19
Positioning method and apparatus Grant 5,521,036 - Iwamoto , et al. May 28, 1	1996-05-28
Exposure method and apparatus using holographic techniques Grant 5,504,596 - Goto , et al. April 2, 1	1996-04-02
Position detecting apparatus Grant 5,489,986 - Magome , et al. February 6, 1	1996-02-06
Projection exposure apparatus Grant 5,483,311 - Sakakibara , et al. January 9, 1	1996-01-09
Distortion inspecting method for projection optical system Grant 5,402,224 - Hirukawa , et al. March 28, 1	1995-03-28
Substrate aligning device using interference light generated by two beams irradiating diffraction grating Grant 5,347,356 - Ota , et al. September 13, 1	1994-09-13
Adjustable beam and interference fringe position Grant 5,171,999 - Komatsu , et al. December 15, 1	1992-12-15
Diffraction-type displacement detector for alignment of mask and wafer Grant 5,160,849 - Ota , et al. November 3, 1	1992-11-03
Position detection apparatus Grant RE34,010 - Magome , et al. July 28, 1	1992-07-28
Substrate alignment apparatus using diffracted and reflected radiation beams Grant 5,118,953 - Ota , et al. June 2, 1	1992-06-02
Position detection apparatus with adjustable beam and interference fringe positions Grant 5,070,250 - Komatsu , et al. December 3, 1	1991-12-03
Alignment device Grant 5,004,348 - Magome April 2, 1	1991-04-02
Projection exposure apparatus Grant 4,739,373 - Nishi , et al. April 19, 1	1988-04-19
Position detection apparatus Grant 4,710,026 - Magome , et al. December 1, 1	1987-12-01

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