Magnusson; Sven Gunnar Krister

Patent Applications and Registrations

Patent applications and USPTO patent grants for Magnusson; Sven Gunnar Krister.The latest application filed is for "method of measuring focus of a lithographic projection apparatus".

Company Profile

0.9.6

Magnusson; Sven Gunnar Krister - Warmbad-Villach N/A AT
Magnusson; Sven Gunnar Krister - Veldhoven N/A NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Calibration method and inspection apparatus Grant 8,908,148 - Geraets , et al. December 9, 2	2014-12-09
Method of measuring properties of dynamic positioning errors in a lithographic apparatus, data processing apparatus, and computer program product Grant 8,554,510 - Staals , et al. October 8, 2	2013-10-08
Method of measuring focus of a lithographic projection apparatus Grant 8,436,998 - Hofmans , et al. May 7, 2	2013-05-07
Method Of Measuring Focus Of A Lithographic Projection Apparatus App 20130003031 - Hofmans; Gerardus Carolus Johannus ; et al.	2013-01-03
Method of measuring focus of a lithographic projection apparatus Grant 8,289,516 - Hofmans , et al. October 16, 2	2012-10-16
Method of measuring a lithographic projection apparatus Grant 8,208,122 - Staals , et al. June 26, 2	2012-06-26
Lithographic apparatus with adjusted exposure slit shape enabling reduction of focus errors due to substrate topology and device manufacturing method Grant 8,174,678 - Magnusson , et al. May 8, 2	2012-05-08
Calibration Method and Inspection Apparatus App 20120013875 - GERAETS; Hubertus Antonius ; et al.	2012-01-19
Method Of Measuring Properties Of Dynamic Positioning Errors In A Lithographic Apparatus, Data Processing Apparatus, And Computer Program Product App 20110153265 - STAALS; Frank ; et al.	2011-06-23
Method Of Measuring A Lithographic Projection Apparatus App 20090268182 - STAALS; Frank ; et al.	2009-10-29
Lithographic Apparatus With Adjusted Exposure Slit Shape Enabling Reduction Of Focus Errors Due To Substrate Topology And Device Manufacturing Method App 20090153821 - Magnusson; Sven Gunnar Krister ; et al.	2009-06-18
Method Of Measuring Focus Of A Lithographic Projection Apparatus App 20090135389 - HOFMANS; Gerardus Carolus Johannus ; et al.	2009-05-28

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