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Patent applications and USPTO patent grants for Maezono; Tomiyasu.The latest application filed is for "substrate processing apparatus and operation method of substrate processing apparatus".
Patent | Date |
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Substrate processing apparatus and operation method of substrate processing apparatus Grant 11,043,399 - Maezono , et al. June 22, 2 | 2021-06-22 |
Substrate Processing Apparatus And Operation Method Of Substrate Processing Apparatus App 20200211867 - Maezono; Tomiyasu ;   et al. | 2020-07-02 |
Substrate processing apparatus and liquid mixing method Grant 10,067,514 - Kiyohara , et al. September 4, 2 | 2018-09-04 |
Substrate liquid processing apparatus and method, and computer-readable recording medium with substrate liquid processing program recorded therein Grant 9,862,007 - Saiki , et al. January 9, 2 | 2018-01-09 |
Substrate Liquid Processing Apparatus And Method, And Computer-readable Recording Medium With Substrate Liquid Processing Program Recorded Therein App 20150273538 - Saiki; Daisuke ;   et al. | 2015-10-01 |
Substrate Processing Apparatus And Liquid Mixing Method App 20150146498 - Kiyohara; Yasuo ;   et al. | 2015-05-28 |
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