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Methods for selective integration of airgaps and devices made by such methods Grant 7,319,274 - Beyer , et al. January 15, 2 | 2008-01-15 |
Design method for essentially digital systems and components thereof and essentially digital systems made in accordance with the method Grant 7,124,377 - Catthoor , et al. October 17, 2 | 2006-10-17 |
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Fluorinated hard mask for micropatterning of polymers Grant 7,042,091 - Baklanov , et al. May 9, 2 | 2006-05-09 |
Methods for selective integration of airgaps and devices made by such methods Grant 7,037,851 - Gueneau de Mussy , et al. May 2, 2 | 2006-05-02 |
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Method of fabricating a semiconductor device App 20050048782 - Vanhaelemeersch, Serge ;   et al. | 2005-03-03 |
Method for bottomless deposition of barrier layers in integrated circuit metallization schemes Grant 6,852,635 - Satta , et al. February 8, 2 | 2005-02-08 |
Anisotropic etching of organic-containing insulating layers Grant 6,844,266 - Maex , et al. January 18, 2 | 2005-01-18 |
Method and apparatus for defect detection App 20040246472 - Holsteyns, Frank ;   et al. | 2004-12-09 |
Method of fabricating a semiconductor device Grant 6,821,884 - Vanhaelemeersch , et al. November 23, 2 | 2004-11-23 |
Method for bottomless deposition of barrier layers in integrated circuit metallization schemes App 20040121616 - Satta, Alessandra ;   et al. | 2004-06-24 |
Method of fabrication and device for electromagnetic-shielding structures in a damascene-based interconnect scheme Grant 6,720,245 - Stucchi , et al. April 13, 2 | 2004-04-13 |
Method for bottomless deposition of barrier layers in integrated circuit metallization schemes Grant 6,664,192 - Satta , et al. December 16, 2 | 2003-12-16 |
Method and apparatus for characterization of porous films Grant 6,662,631 - Baklanov , et al. December 16, 2 | 2003-12-16 |
Metallization structure on a fluorine-containing dielectric and a method for fabrication thereof Grant 6,635,964 - Maex , et al. October 21, 2 | 2003-10-21 |
Method to produce a porous oxygen-silicon layer App 20030181066 - Baklanov, Mikhail ;   et al. | 2003-09-25 |
Anisotropic etching of organic-containing insulating layers App 20030162407 - Maex, Karen ;   et al. | 2003-08-28 |
Method to produce a porous oxygen-silicon layer Grant 6,593,251 - Baklanov , et al. July 15, 2 | 2003-07-15 |
Method and apparatus for characterization of porous films App 20030094032 - Baklanov, Mikhail Rodionovich ;   et al. | 2003-05-22 |
Method for improving the quality of a metal layer deposited from a plating bath Grant 6,495,453 - Brongersma , et al. December 17, 2 | 2002-12-17 |
Method of fabricating a semiconductor device App 20020173142 - Vanhaelemeersch, Serge ;   et al. | 2002-11-21 |
Method for bottomless deposition of barrier layers in integrated circuit metallization schemes App 20020155722 - Satta, Alessandra ;   et al. | 2002-10-24 |
Method of forming polycrystalline CoSi2 salicide and products obtained thereof App 20020151170 - Maex, Karen ;   et al. | 2002-10-17 |
Apparatus and method for determining porosity Grant 6,435,008 - Baklanov , et al. August 20, 2 | 2002-08-20 |
Method of fabrication and device for electromagnetic-shielding structures in a damascene-based interconnect scheme App 20020102835 - Stucchi, Michele ;   et al. | 2002-08-01 |
Anisotropic etching of organic-containing insulating layers App 20020076935 - Maex, Karen ;   et al. | 2002-06-20 |
Metallization structure on a fluorine-containing dielectric and a method for fabrication thereof App 20020066957 - Maex, Karen ;   et al. | 2002-06-06 |
Method for bottomless deposition of barrier layers in integrated circuit metallization schemes Grant 6,391,785 - Satta , et al. May 21, 2 | 2002-05-21 |
Method Of Forming Polycrystalline Cosi2 Salicide And Products Obtained Thereof App 20020045344 - WANG, QUINGFENG ;   et al. | 2002-04-18 |
Method to produce a porous oxygen-silicon layer App 20020022378 - Baklanov, Mikhail ;   et al. | 2002-02-21 |
Apparatus and method for determining porosity App 20010054306 - Baklanov, Mikhail Rodionovich ;   et al. | 2001-12-27 |
Fluorinated hard mask for micropattering of polymers App 20010026956 - Baklanov, Mikhail Rodionovich ;   et al. | 2001-10-04 |
Fluorinated hard mask for micropatterning of polymers Grant 6,245,489 - Baklanov , et al. June 12, 2 | 2001-06-12 |