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Resist composition and method of forming resist pattern
Grant 11,448,963 - Arai , et al. September 20, 2 | 2022-09-20 |
Resist Composition And Method Of Forming Resist Pattern
App 20220171286 - INARI; Takatoshi ; et al. | 2022-06-02 |
Resist composition, method of forming resist pattern, polymeric compound, and compound
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Resist Composition And Method Of Forming Resist Pattern
App 20210200088 - YATSUNAMI; Toshiaki ; et al. | 2021-07-01 |
Organically Modified Metal Oxide Nanoparticles, Organically Modified Metal Oxide Nanoparticles-containing Solution, Organically Modified Metal Oxide Nanoparticles-containing Resist Composition, And Resist Pattern Forming Method
App 20210191261 - SUE; Kiwamu ; et al. | 2021-06-24 |
Method Of Producing Block Copolymer Capable Of Creating Specific Structure Pattern
App 20200262960 - HAYAKAWA; Teruaki ; et al. | 2020-08-20 |
Resist composition, method of forming resist pattern, compound, and acid generator
Grant 10,649,330 - Arai , et al. | 2020-05-12 |
Resist Composition, Method Of Forming Resist Pattern, Polymeric Compound, And Compound
App 20190384175 - ARAI; Masatoshi ; et al. | 2019-12-19 |
Resist Composition And Method Of Forming Resist Pattern
App 20190384174 - ARAI; Masatoshi ; et al. | 2019-12-19 |
Resist Composition And Method Of Forming Resist Pattern
App 20190361342 - MAEHASHI; Takaya ; et al. | 2019-11-28 |
Method of preparing polymer compound
Grant 10,414,918 - Komuro , et al. Sept | 2019-09-17 |
Resist composition, method for forming resist pattern, and polymer compound
Grant 10,295,905 - Komuro , et al. | 2019-05-21 |
Resin composition for forming a phase-separated structure, and method of producing structure containing phase-separated structure
Grant 10,179,866 - Kawaue , et al. Ja | 2019-01-15 |
Resist Composition, Method Of Forming Resist Pattern, Compound, And Acid Generator
App 20180149973 - ARAI; Masatoshi ; et al. | 2018-05-31 |
Resin Composition For Forming Phase-separated Structure And Method For Producing Structure Including Phase-separated Structure
App 20180072564 - MIYAGI; Ken ; et al. | 2018-03-15 |
Resin composition for forming a phase-separated structure, and method of producing structure containing phase-separated structure
Grant 9,914,847 - Kawaue , et al. March 13, 2 | 2018-03-13 |
Resist Composition, Method For Forming Resist Pattern, And Polymer Compound
App 20180024433 - KOMURO; Yoshitaka ; et al. | 2018-01-25 |
Method Of Preparing Polymer Compound
App 20180022916 - KOMURO; Yoshitaka ; et al. | 2018-01-25 |
Resin Composition For Forming A Phase-separated Structure, And Method Of Producing Structure Containing Phase-separated Structure
App 20170362460 - KAWAUE; Akiya ; et al. | 2017-12-21 |
Resin composition for forming a phase-separated structure, and method of producing structure containing phase-separated structure
Grant 9,828,519 - Kawaue , et al. November 28, 2 | 2017-11-28 |
Brush composition, and method of producing structure containing phase-separated structure
Grant 9,776,208 - Yahagi , et al. October 3, 2 | 2017-10-03 |
Resin Composition For Forming A Phase-separated Structure, And Method Of Producing Structure Containing Phase-separated Structure
App 20170240766 - KAWAUE; Akiya ; et al. | 2017-08-24 |
Resin Composition For Forming A Phase-separated Structure, And Method Of Producing Structure Containing Phase-separated Structure
App 20170240767 - KAWAUE; Akiya ; et al. | 2017-08-24 |
Method of producing structure containing phase-separated structure and method of forming top coat film
Grant 9,644,110 - Seshimo , et al. May 9, 2 | 2017-05-09 |
Undercoat agent and method of producing structure containing phase-separated structure
Grant 9,567,477 - Seshimo , et al. February 14, 2 | 2017-02-14 |
Resist composition and method of forming resist pattern
Grant 9,557,647 - Komuro , et al. January 31, 2 | 2017-01-31 |
Method of producing structure containing phase-separated structure, method of forming pattern and method of forming fine pattern
Grant 9,442,371 - Seshimo , et al. September 13, 2 | 2016-09-13 |
Brush Composition, And Method Of Producing Structure Containing Phase-separated Structure
App 20160194751 - YAHAGI; Masahito ; et al. | 2016-07-07 |
Method of producing structure containing phase-separated structure, method of forming pattern and method of forming fine pattern
Grant 9,206,307 - Matsumiya , et al. December 8, 2 | 2015-12-08 |
Method of producing structure containing phase-separation structure, method of forming pattern, and method of forming fine pattern
Grant 9,188,869 - Seshimo , et al. November 17, 2 | 2015-11-17 |
Method Of Producing Structure Containing Phase-separated Structure And Method Of Forming Top Coat Film
App 20150291832 - Seshimo; Takehiro ; et al. | 2015-10-15 |
Method Of Producing Structure Containing Phase-separated Structure, Method Of Forming Pattern And Method Of Forming Fine Pattern
App 20150205207 - Seshimo; Takehiro ; et al. | 2015-07-23 |
Method Of Producing Structure Containing Phase-separated Structure, Method Of Forming Pattern And Method Of Forming Fine Pattern
App 20150034593 - Matsumiya; Tasuku ; et al. | 2015-02-05 |
Method Of Producing Structure Containing Phase-separation Structure, Method Of Forming Pattern, And Method Of Forming Fine Pattern
App 20150034595 - Seshimo; Takehiro ; et al. | 2015-02-05 |
Undercoat Agent And Method Of Producing Structure Containing Phase-separated Structure
App 20150030773 - Seshimo; Takehiro ; et al. | 2015-01-29 |
Resist Composition And Method Of Forming Resist Pattern
App 20140322652 - Komuro; Yoshitaka ; et al. | 2014-10-30 |
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