Maeda; Shunji

Patent Applications and Registrations

Patent applications and USPTO patent grants for Maeda; Shunji.The latest application filed is for "ranging system, calibration method, program, and electronic apparatus".

Company Profile

2.182.182

Maeda; Shunji - Kanagawa JP
Maeda; Shunji - Tokyo JP
Maeda; Shunji - Hiroshima JP
Maeda; Shunji - Yokohama JP
Maeda; Shunji - Yokohama-shi JP
Maeda; Shunji - Kanagawa-ken JP
Maeda; Shunji - Yokoham JP
Maeda; Shunji - Hashimoto JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Ranging System, Calibration Method, Program, And Electronic Apparatus App 20220043113 - Maeda; Shunji	2022-02-10
Optical Module And Distance-measuring Device App 20220003866 - MAEDA; SHUNJI	2022-01-06
Solid State Image Sensor App 20210409621 - Sukegawa; Shunichi ; et al.	2021-12-30
Optical Distance Measurement Device And Optical Distance Measurement Method App 20210396881 - MAEDA; Shunji	2021-12-23
Signal Processing Apparatus And Signal Processing Method App 20210396860 - MAEDA; SHUNJI	2021-12-23
Distance Measurement Apparatus And Detection Method App 20210356569 - MAEDA; SHUNJI	2021-11-18
Solid state image sensor comprising stacked substrates, semiconductor device, and electronic device Grant 11,153,515 - Sukegawa , et al. October 19, 2	2021-10-19
Solid state image sensor, semiconductor device, and electronic device Grant 10,554,910 - Sukegawa , et al. Fe	2020-02-04
Solid State Image Sensor, Semiconductor Device, And Electronic Device App 20180109741 - Sukegawa; Shunichi ; et al.	2018-04-19
Solid State Image Sensor, Semiconductor Device, And Electronic Device App 20180109750 - Sukegawa; Shunichi ; et al.	2018-04-19
Health management system, fault diagnosis system, health management method, and fault diagnosis method Grant 9,933,338 - Noda , et al. April 3, 2	2018-04-03
Anomaly diagnosis method and apparatus Grant 9,779,495 - Shibuya , et al. October 3, 2	2017-10-03
Method for reviewing a defect and apparatus Grant 9,733,194 - Otani , et al. August 15, 2	2017-08-15
Facility state monitoring method and device for same Grant 9,659,250 - Shibuya , et al. May 23, 2	2017-05-23
Anomaly detection and diagnosis/prognosis method, anomaly detection and diagnosis/prognosis system, and anomaly detection and diagnosis/prognosis program Grant 9,483,049 - Maeda , et al. November 1, 2	2016-11-01
Method For Reviewing A Defect And Apparatus App 20160018340 - Otani; Yuko ; et al.	2016-01-21
Anomaly Diagnosis Method and Apparatus App 20150363925 - SHIBUYA; Hisae ; et al.	2015-12-17
Facility Status Monitoring Method And Facility Status Monitoring Device App 20150213706 - Bai; Jie ; et al.	2015-07-30
Health Management System, Fault Diagnosis System, Health Management Method, And Fault Diagnosis Method App 20150160098 - NODA; Toujirou ; et al.	2015-06-11
Facility State Monitoring Method and Device for Same App 20140279795 - Shibuya; Hisae ; et al.	2014-09-18
Method and apparatus for inspecting patterns formed on a substrate Grant 8,824,774 - Sakai , et al. September 2, 2	2014-09-02
Defect inspection method and device thereof Grant 8,811,712 - Maeda , et al. August 19, 2	2014-08-19
Anomaly Detection/Diagnostic Method and Anomaly Detection/Diagnostic System App 20140195184 - Maeda; Shunji ; et al.	2014-07-10
Defect inspection method and apparatus Grant 8,755,041 - Urano , et al. June 17, 2	2014-06-17
Method for inspecting pattern defect and device for realizing the same Grant 8,748,795 - Urano , et al. June 10, 2	2014-06-10
Dark-field defect inspecting method, dark-field defect inspecting apparatus, aberration analyzing method, and aberration analyzing apparatus Grant 8,681,328 - Taniguchi , et al. March 25, 2	2014-03-25
Method and device for monitoring the state of a facility Grant 8,682,824 - Shibuya , et al. March 25, 2	2014-03-25
Defect classification method and apparatus, and defect inspection apparatus Grant 8,660,340 - Shibuya , et al. February 25, 2	2014-02-25
Inspecting method and inspecting apparatus for substrate surface Grant 8,654,350 - Hamamatsu , et al. February 18, 2	2014-02-18
Method And Apparatus For Monitoring Equipment Conditions App 20140039834 - SHIBUYA; Hisae ; et al.	2014-02-06
Apparatus of inspecting defect in semiconductor and method of the same Grant 8,643,834 - Hamamatsu , et al. February 4, 2	2014-02-04
Method and apparatus for inspecting pattern defects Grant 8,639,019 - Sakai , et al. January 28, 2	2014-01-28
Defect inspection device and defect inspection method Grant 8,634,069 - Nakano , et al. January 21, 2	2014-01-21
Error detection method and its system for early detection of errors in a planar or facilities Grant 8,630,962 - Maeda , et al. January 14, 2	2014-01-14
Visual inspection method and apparatus and image analysis system Grant 8,620,061 - Shibuya , et al. December 31, 2	2013-12-31
Defect Inspection Method And Apparatus App 20130343632 - URANO; Yuta ; et al.	2013-12-26
Method And Apparatus For Inspecting Patterns Formed On A Substrate App 20130307963 - SAKAI; Kaoru ; et al.	2013-11-21
Fault inspection method Grant 8,582,864 - Maeda , et al. November 12, 2	2013-11-12
Defect Inspection Method And Defect Inspection Device App 20130294677 - Urano; Takahiro ; et al.	2013-11-07
Anomaly Sensing and Diagnosis Method, Anomaly Sensing and Diagnosis System, Anomaly Sensing and Diagnosis Program and Enterprise Asset Management and Infrastructure Asset Management System App 20130282336 - Maeda; Shunji ; et al.	2013-10-24
Method and equipment for detecting pattern defect Grant 8,553,214 - Shishido , et al. October 8, 2	2013-10-08
Defect Inspection Method, Defect Inspection Apparatus, Program Product And Output Unit App 20130202188 - URANO; Takahiro ; et al.	2013-08-08
Defect Classification Method And Apparatus, And Defect Inspection Apparatus App 20130202189 - Shibuya; Hisae ; et al.	2013-08-08
Malfunction Detection Method and System Thereof App 20130173218 - Maeda; Shunji ; et al.	2013-07-04
Method and apparatus for inspecting patterns formed on a substrate Grant 8,467,594 - Sakai , et al. June 18, 2	2013-06-18
Method and apparatus for detecting defects Grant 8,462,330 - Nakano , et al. June 11, 2	2013-06-11
Defect classification method and apparatus, and defect inspection apparatus Grant 8,437,534 - Shibuya , et al. May 7, 2	2013-05-07
Inspecting Method and Inspecting Apparatus For Substrate Surface App 20130107247 - Hamamatsu; Akira ; et al.	2013-05-02
Defect inspection method and apparatus Grant 8,427,634 - Urano , et al. April 23, 2	2013-04-23
Pattern defect inspection method and its apparatus Grant 8,410,460 - Yoshida , et al. April 2, 2	2013-04-02
Method For Anomaly Detection/diagnosis, System For Anomaly Detection/diagnosis, And Program For Anomaly Detection/diagnosis App 20130073260 - Maeda; Shunji ; et al.	2013-03-21
Apparatus Of Inspecting Defect In Semiconductor And Method Of The Same App 20130038862 - HAMAMATSU; Akira ; et al.	2013-02-14
Defect inspection apparatus and its method Grant 8,355,123 - Hamamatsu , et al. January 15, 2	2013-01-15
Method And Apparatus For Pattern Inspection App 20130002849 - SAKAI; Kaoru ; et al.	2013-01-03
Method And Apparatus For Inspecting Pattern Defects App 20130004057 - SAKAI; Kaoru ; et al.	2013-01-03
Defect inspection method and apparatus therefor Grant 8,340,395 - Sakai , et al. December 25, 2	2012-12-25
Anomaly Detection Method And Anomaly Detection System App 20120316835 - Maeda; Shunji ; et al.	2012-12-13
Defect Inspection Method And Device Thereof App 20120294507 - Sakai; Kaoru ; et al.	2012-11-22
Method And Device For Monitoring The State Of A Facility App 20120290879 - Shibuya; Hisae ; et al.	2012-11-15
Failure Diagnosis System, Failure Diagnosis Device And Failure Diagnosis Program App 20120290497 - Magara; Hiroyuki ; et al.	2012-11-15
Inspecting method and inspecting apparatus for substrate surface Grant 8,310,665 - Hamamatsu , et al. November 13, 2	2012-11-13
Apparatus of inspecting defect in semiconductor and method of the same Grant 8,310,666 - Hamamatsu , et al. November 13, 2	2012-11-13
Equipment Status Monitoring Method, Monitoring System, And Monitoring Program App 20120271587 - Shibuya; Hisae ; et al.	2012-10-25
Defect inspection system and method of the same Grant 8,274,652 - Urano , et al. September 25, 2	2012-09-25
Method and apparatus for inspecting pattern defects Grant 8,275,190 - Sakai , et al. September 25, 2	2012-09-25
Method and apparatus for pattern inspection Grant 8,270,700 - Sakai , et al. September 18, 2	2012-09-18
Method and apparatus for inspecting a pattern formed on a substrate Grant 8,253,934 - Yoshida , et al. August 28, 2	2012-08-28
Fault Inspection Method App 20120207382 - Maeda; Shunji ; et al.	2012-08-16
Method And Apparatus For Detecting Defects App 20120194809 - Nakano; Hiroyuki ; et al.	2012-08-02
Apparatus for inspecting defects Grant 8,228,494 - Shibata , et al. July 24, 2	2012-07-24
Apparatus and method for inspecting defects Grant 8,218,138 - Nakano , et al. July 10, 2	2012-07-10
Inspecting Method and Inspecting Apparatus for Substrate Surface App 20120162665 - Hamamatsu; Akira ; et al.	2012-06-28
Anomaly Detection and Diagnosis/Prognosis Method, Anomaly Detection and Diagnosis/Prognosis System, and Anomaly Detection and Diagnosis/Prognosis Program App 20120166142 - Maeda; Shunji ; et al.	2012-06-28
Visual Inspection Method And Apparatus And Image Analysis System App 20120155741 - Shibuya; Hisae ; et al.	2012-06-21
Defect Inspection Apparatus And Its Method App 20120133927 - HAMAMATSU; Akira ; et al.	2012-05-31
Defect Inspection Method And Apparatus App 20120128230 - Maeda; Shunji ; et al.	2012-05-24
Defect inspection apparatus and its method Grant 8,149,396 - Hamamatsu , et al. April 3, 2	2012-04-03
Pattern Inspection Method And Its Apparatus App 20120076396 - SAKAI; Kaoru ; et al.	2012-03-29
Inspecting method and inspecting apparatus for substrate surface Grant 8,144,337 - Hamamatsu , et al. March 27, 2	2012-03-27
Visual inspection method and apparatus and image analysis system Grant 8,139,841 - Shibuya , et al. March 20, 2	2012-03-20
Anomaly Detection Method and Anomaly Detection System App 20120041575 - Maeda; Shunji ; et al.	2012-02-16
Method and apparatus for detecting defects Grant 8,107,065 - Nakano , et al. January 31, 2	2012-01-31
Defect inspection method and apparatus Grant 8,107,717 - Maeda , et al. January 31, 2	2012-01-31
Fault inspection method Grant 8,103,087 - Maeda , et al. January 24, 2	2012-01-24
Method And Apparatus For Inspecting Patterns Formed On A Substrate App 20120002860 - SAKAI; Kaoru ; et al.	2012-01-05
Pattern inspection method and its apparatus Grant 8,090,187 - Sakai , et al. January 3, 2	2012-01-03
Defect Inspecting Apparatus And Defect Inspecting Method App 20110311126 - Sakai; Kaoru ; et al.	2011-12-22
Method And Apparatus For Inspecting Pattern Defects App 20110304725 - SAKAI; Kaoru ; et al.	2011-12-15
Apparatus For Inspecting Defects App 20110292390 - Shibata; Yukihiro ; et al.	2011-12-01
Dark-field Defect Inspecting Method, Dark-field Defect Inspecting Apparatus, Aberration Analyzing Method, And Aberration Analyzing Apparatus App 20110286001 - Taniguchi; Atsushi ; et al.	2011-11-24
Defect Inspection Method And Device Thereof App 20110274342 - Maeda; Shunji ; et al.	2011-11-10
Apparatus for detecting defects using multiple coordinate systems Grant 8,045,149 - Yoshida , et al. October 25, 2	2011-10-25
Apparatus and Method for Inspecting Defects App 20110255074 - Nakano; Hiroyuki ; et al.	2011-10-20
Apparatus Of Inspecting Defect In Semiconductor And Method Of The Same App 20110228262 - Hamamatsu; Akira ; et al.	2011-09-22
Defect Inspection Apparatus and Its Method App 20110205534 - Hamamatsu; Akira ; et al.	2011-08-25
Apparatus for inspecting defects Grant 8,004,666 - Shibata , et al. August 23, 2	2011-08-23
Method and apparatus for inspecting pattern defects Grant 8,005,292 - Sakai , et al. August 23, 2	2011-08-23
Error Detection Method And System App 20110191076 - Maeda; Shunji ; et al.	2011-08-04
Defect Check Method And Device Thereof App 20110182496 - Sakai; Kaoru ; et al.	2011-07-28
Method for determining the morphology of an occupant in an automotive seat with capacitive sensors Grant 7,987,033 - Launay , et al. July 26, 2	2011-07-26
Defect Inspection Method And Apparatus App 20110170765 - MAEDA; Shunji ; et al.	2011-07-14
Apparatus and method for inspecting defects Grant 7,973,920 - Nakano , et al. July 5, 2	2011-07-05
Defect Inspection Device And Defect Inspection Method App 20110149275 - Nakano; Hiroyuki ; et al.	2011-06-23
Method using capacitive sensors for morphology discrimination of a passenger seating in an automotive seat Grant 7,962,311 - Launay , et al. June 14, 2	2011-06-14
Method and apparatus for inspecting integrated circuit pattern Grant 7,952,074 - Shinada , et al. May 31, 2	2011-05-31
Apparatus of inspecting defect in semiconductor and method of the same Grant 7,952,699 - Hamamatsu , et al. May 31, 2	2011-05-31
Pattern inspection method and its apparatus Grant 7,949,178 - Sakai , et al. May 24, 2	2011-05-24
Defect inspection apparatus and its method Grant 7,940,385 - Hamamatsu , et al. May 10, 2	2011-05-10
Defect inspection method and apparatus Grant 7,916,929 - Maeda , et al. March 29, 2	2011-03-29
Apparatus And Method For Inspecting Defects App 20110063603 - Nakano; Hiroyuki ; et al.	2011-03-17
Method And Its Apparatus For Detecting Defects App 20110057649 - YOSHIDA; Minoru ; et al.	2011-03-10
Method and apparatus for inspecting pattern defects Grant 7,903,249 - Yoshida , et al. March 8, 2	2011-03-08
Method for improving the localisation of a target in regard of a sensor Grant 7,895,014 - Launay , et al. February 22, 2	2011-02-22
Inspection method and its apparatus, inspection system Grant 7,869,966 - Okabe , et al. January 11, 2	2011-01-11
Method And Equipment For Detecting Pattern Defect App 20110001972 - Shishido; Hiroaki ; et al.	2011-01-06
Method And Apparatus For Inspecting Pattern Defects App 20100328446 - SAKAI; Kaoru ; et al.	2010-12-30
Method and apparatus for reviewing defects Grant 7,851,753 - Uto , et al. December 14, 2	2010-12-14
Method and apparatus for inspecting a defect of a pattern Grant 7,848,563 - Sakai , et al. December 7, 2	2010-12-07
Method and its apparatus for detecting defects Grant 7,834,992 - Yoshida , et al. November 16, 2	2010-11-16
Apparatus and method for optical inspection Grant 7,826,047 - Shibata , et al. November 2, 2	2010-11-02
Method And Apparatus For Detecting Defects App 20100271628 - NAKANO; Hiroyuki ; et al.	2010-10-28
Apparatus Of Inspecting Defect In Semiconductor And Method Of The Same App 20100268482 - HAMAMATSU; Akira ; et al.	2010-10-21
Apparatus And Method For Inspecting Defects App 20100265496 - Nakano; Hiroyuki ; et al.	2010-10-21
Method and equipment for detecting pattern defect Grant 7,791,725 - Shishido , et al. September 7, 2	2010-09-07
Method and apparatus for inspecting pattern defects Grant 7,792,352 - Sakai , et al. September 7, 2	2010-09-07
Apparatus For Inspecting Defects App 20100208249 - Shibata; Yukihiro ; et al.	2010-08-19
Apparatus and method for inspecting defects Grant 7,768,635 - Nakano , et al. August 3, 2	2010-08-03
Defect Inspection Method And Apparatus App 20100182602 - URANO; Yuta ; et al.	2010-07-22
Pattern Inspection Method And Its Apparatus App 20100172570 - SAKAI; Kaoru ; et al.	2010-07-08
Apparatus of inspecting defect in semiconductor and method of the same Grant 7,751,036 - Hamamatsu , et al. July 6, 2	2010-07-06
Method and apparatus for detecting defects Grant 7,751,037 - Nakano , et al. July 6, 2	2010-07-06
Apparatus for inspecting defects Grant 7,714,997 - Shibata , et al. May 11, 2	2010-05-11
Pattern inspection method and its apparatus Grant 7,711,178 - Sakai , et al. May 4, 2	2010-05-04
Method And Apparatus For Inspecting A Pattern Formed On A Substrate App 20100104173 - Yoshida; Minoru ; et al.	2010-04-29
Method and apparatus for pattern inspection App 20100053319 - Sakai; Kaoru ; et al.	2010-03-04
Defect inspection method and apparatus Grant 7,664,608 - Urano , et al. February 16, 2	2010-02-16
Method and apparatus for inspecting a pattern formed on a substrate Grant 7,646,477 - Yoshida , et al. January 12, 2	2010-01-12
Defect Inspection Method and Apparatus App 20100004875 - Urano; Yuta ; et al.	2010-01-07
Defect Inspection Method and Apparatus Therefor App 20090290783 - SAKAI; Kaoru ; et al.	2009-11-26
Inspecting Method and Inspecting Apparatus for Substrate Surface App 20090290168 - HAMAMATSU; Akira ; et al.	2009-11-26
Method and apparatus for pattern inspection Grant 7,620,232 - Sakai , et al. November 17, 2	2009-11-17
Method and its apparatus for inspecting defects Grant 7,599,545 - Shibata , et al. October 6, 2	2009-10-06
Pattern Inspection Method And Its Apparatus App 20090226076 - Sakai; Kaoru ; et al.	2009-09-10
Method And Apparatus For Detecting Defects App 20090213366 - Nakano; Hiroyuki ; et al.	2009-08-27
Defect Inspection Method And Apparatus App 20090214102 - Maeda; Shunji ; et al.	2009-08-27
Pattern Inspection Method And Its Apparatus App 20090169093 - Sakai; Kaoru ; et al.	2009-07-02
Method And Apparatus For Inspecting Pattern Defects App 20090153840 - Yoshida; Minoru ; et al.	2009-06-18
Apparatus Of Inspecting Defect In Semiconductor And Method Of The Same App 20090153848 - Hamamatsu; Akira ; et al.	2009-06-18
Method and Apparatus for Observing and Inspecting Defects App 20090141264 - Shibata; Yukihiro ; et al.	2009-06-04
Apparatus And Method For Inspecting Defects App 20090122303 - Nakano; Hiroyuki ; et al.	2009-05-14
Method and apparatus for detecting defects Grant 7,528,942 - Nakano , et al. May 5, 2	2009-05-05
Method For Inspecting Pattern Defect And Device For Realizing The Same App 20090091750 - URANO; Yuta ; et al.	2009-04-09
Method for determining the morphology of an occupant in an automotive seat with capacitive sensors App 20090088929 - Launay; Claude ; et al.	2009-04-02
Defect inspection method and apparatus Grant 7,512,259 - Maeda , et al. March 31, 2	2009-03-31
Method of inspecting defects Grant 7,508,973 - Okabe , et al. March 24, 2	2009-03-24
Method And Equipment For Detecting Pattern Defect App 20090073443 - Shishido; Hiroaki ; et al.	2009-03-19
Defect Inspection Method And Defect Inspection Apparatus App 20090059216 - Shibata; Yukihiro ; et al.	2009-03-05
Method and apparatus for observing and inspecting defects Grant 7,499,162 - Shibata , et al. March 3, 2	2009-03-03
Method and apparatus for inspecting pattern defects Grant 7,489,395 - Yoshida , et al. February 10, 2	2009-02-10
Defect inspection apparatus and its method App 20090027664 - Hamamatsu; Akira ; et al.	2009-01-29
Apparatus of inspecting defect in semiconductor and method of the same Grant 7,474,394 - Hamamatsu , et al. January 6, 2	2009-01-06
Pattern inspection method and its apparatus App 20090003682 - Sakai; Kaoru ; et al.	2009-01-01
Visual Inspection Method and Apparatus and Image Analysis System App 20080317329 - Shibuya; Hisae ; et al.	2008-12-25
Method for inspecting pattern defect and device for realizing the same Grant 7,465,935 - Urano , et al. December 16, 2	2008-12-16
Method And Apparatus For Inspecting Integrated Circuit Pattern App 20080302964 - Shinada; Hiroyuki ; et al.	2008-12-11
Method and apparatus for detecting defects of a sample using a dark field signal and a bright field signal Grant 7,463,350 - Nishiyama , et al. December 9, 2	2008-12-09
Defect Inspection System And Method Of The Same App 20080297783 - URANO; Yuta ; et al.	2008-12-04
Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects of patterns of an object to be inspected Grant 7,460,220 - Maeda , et al. December 2, 2	2008-12-02
Pattern inspection method and pattern inspection apparatus App 20080292176 - Sakai; Kaoru ; et al.	2008-11-27
Method and equipment for detecting pattern defect Grant 7,456,963 - Shishido , et al. November 25, 2	2008-11-25
Method and apparatus for detecting defects Grant 7,440,092 - Shibata , et al. October 21, 2	2008-10-21
Pattern inspection method and its apparatus Grant 7,433,508 - Sakai , et al. October 7, 2	2008-10-07
Method And Apparatus For Inspecting Pattern Defects App 20080232674 - Sakai; Kaoru ; et al.	2008-09-25
Method And Apparatus For Detecting Defects App 20080225286 - SHIBATA; Yukihiro ; et al.	2008-09-18
Method and apparatus for inspecting integrated circuit pattern Grant 7,417,444 - Shinada , et al. August 26, 2	2008-08-26
Method and apparatus for detecting defects in a specimen utilizing information concerning the specimen Grant 7,400,393 - Shibata , et al. July 15, 2	2008-07-15
Apparatus For Inspecting Defects App 20080144023 - Shibata; Yukihiro ; et al.	2008-06-19
Apparatus And Method For Inspecting Defects App 20080144024 - Nakano; Hiroyuki ; et al.	2008-06-19
Method and apparatus for inspecting pattern defects Grant 7,388,979 - Sakai , et al. June 17, 2	2008-06-17
Method and apparatus for inspecting defects and a system for inspecting defects Grant 7,372,561 - Shibata , et al. May 13, 2	2008-05-13
Defect Inspection Method And Apparatus App 20080101685 - MAEDA; Shunji ; et al.	2008-05-01
Method and apparatus for inspecting pattern defects Grant 7,359,044 - Nishiyama , et al. April 15, 2	2008-04-15
Defect Classification Method And Apparatus, And Defect Inspection Apparatus App 20080075352 - SHIBUYA; HISAE ; et al.	2008-03-27
Image alignment method, comparative inspection method, and comparative inspection device for comparative inspections Grant 7,333,677 - Sakai , et al. February 19, 2	2008-02-19
Apparatus and method for inspecting defects Grant 7,333,192 - Nakano , et al. February 19, 2	2008-02-19
Method and apparatus for inspecting defects Grant 7,330,248 - Sakai , et al. February 12, 2	2008-02-12
Method for improving the localisation of a target in regard of a sensor App 20080033691 - Launay; Claude ; et al.	2008-02-07
Pattern Inspection Method And Its Apparatus App 20080031511 - Sakai; Kaoru ; et al.	2008-02-07
Method using capacitive sensors for morphology discrimination of a passenger seating in an automotive seat App 20080021650 - Launay; Claude ; et al.	2008-01-24
Defect Inspection Method and Apparatus App 20080015802 - Urano; Yuta ; et al.	2008-01-17
Ultraviolet laser-generating device and defect inspection apparatus and method therefor Grant 7,305,015 - Uto , et al. December 4, 2	2007-12-04
Systems for managing production information Grant 7,299,147 - Shibata , et al. November 20, 2	2007-11-20
Method and its apparatus for inspecting a pattern Grant 7,295,305 - Yoshida , et al. November 13, 2	2007-11-13
Method and Its Apparatus for Detecting Defects App 20070236689 - Yoshida; Minoru ; et al.	2007-10-11
Defect inspection method and apparatus Grant 7,274,813 - Maeda , et al. September 25, 2	2007-09-25
Method and apparatus for inspecting defects Grant 7,271,892 - Shibata , et al. September 18, 2	2007-09-18
Apparatus and method for measuring alignment accuracy, as well as method and system for manufacturing semiconductor device Grant 7,271,908 - Noguchi , et al. September 18, 2	2007-09-18
Pattern defect inspection method and its apparatus App 20070195316 - Yoshida; Minoru ; et al.	2007-08-23
Apparatus and method for inspecting defects App 20070177136 - Nakano; Hiroyuki ; et al.	2007-08-02
Fault inspection method App 20070177787 - Maeda; Shunji ; et al.	2007-08-02
Defect inspection method and apparatus therefor Grant 7,251,024 - Maeda , et al. July 31, 2	2007-07-31
Image Alignment Method, Comparative Inspection Method, and Comparative Inspection Device for Comparative Inspections App 20070133863 - Sakai; Kaoru ; et al.	2007-06-14
Method and system for inspecting electronic circuit pattern Grant 7,231,079 - Okuda , et al. June 12, 2	2007-06-12
Apparatus and method for optical inspection App 20070121106 - Shibata; Yukihiro ; et al.	2007-05-31
Method and apparatus for picking up 2D image of an object to be sensed Grant 7,221,486 - Makihira , et al. May 22, 2	2007-05-22
Systems for managing production information App 20070109534 - Shibata; Yukihiro ; et al.	2007-05-17
Method and apparatus for inspecting pattern defects Grant 7,218,389 - Uto , et al. May 15, 2	2007-05-15
Pattern defect inspection method and its apparatus Grant 7,205,549 - Yoshida , et al. April 17, 2	2007-04-17
Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects of patterns of an object to be inspected App 20070070336 - Maeda; Shunji ; et al.	2007-03-29
Method and apparatus for detecting defects App 20070064225 - Shibata; Yukihiro ; et al.	2007-03-22
Method and apparatus for detecting defects App 20070058164 - Shibata; Yukihiro ; et al.	2007-03-15
Method and apparatus for reviewing defects App 20070057184 - Uto; Sachio ; et al.	2007-03-15
Method and equipment for detecting pattern defect App 20070052955 - Shishido; Hiroaki ; et al.	2007-03-08
Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects of patterns of an object to be inspected Grant 7,180,584 - Maeda , et al. February 20, 2	2007-02-20
Image alignment method, comparative inspection method, and comparative inspection device for comparative inspections App 20070036422 - Sakai; Kaoru ; et al.	2007-02-15
Method for inspecting defects and an apparatus of the same Grant 7,173,693 - Shibata , et al. February 6, 2	2007-02-06
Apparatus of inspecting defect in semiconductor and method of the same App 20070019185 - Hamamatsu; Akira ; et al.	2007-01-25
Method and apparatus for inspecting defects Grant 7,161,671 - Shibata , et al. January 9, 2	2007-01-09
Method and apparatus for inspecting pattern defects App 20070002318 - Yoshida; Minoru ; et al.	2007-01-04
Method and apparatus for inspecting pattern defects App 20060290930 - Nishiyama; Hidetoshi ; et al.	2006-12-28
Method and apparatus for detecting defects App 20060290923 - Nakano; Hiroyuki ; et al.	2006-12-28
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Method and apparatus for observing and inspecting defects App 20060238760 - Shibata; Yukihiro ; et al.	2006-10-26
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Image alignment method, comparative inspection method, and comparative inspection device for comparative inspections Grant 7,020,350 - Sakai , et al. March 28, 2	2006-03-28
Method and apparatus for inspecting integrated circuit pattern App 20060043982 - Shinada; Hiroyuki ; et al.	2006-03-02
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Method and apparatus for inspecting pattern defects App 20060012780 - Nishiyama; Hidetoshi ; et al.	2006-01-19
Method and apparatus for pattern inspection App 20060002604 - Sakai; Kaoru ; et al.	2006-01-05
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Method and equipment for detecting pattern defect App 20050253081 - Shishido, Hiroaki ; et al.	2005-11-17
Image alignment method, comparative inspection method, and comparative inspection device for comparative inspections App 20050220333 - Sakai, Kaoru ; et al.	2005-10-06
Method and apparatus for inspecting a pattern formed on a substrate App 20050206888 - Yoshida, Minoru ; et al.	2005-09-22
Apparatus and method for measuring alignment accuracy, as well as method and system for manufacturing semiconductor device App 20050206898 - Noguchi, Minori ; et al.	2005-09-22
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Method and apparatus for detecting pattern defects Grant 6,943,876 - Yoshida , et al. September 13, 2	2005-09-13
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Method for inspecting defects and an apparatus of the same App 20050128472 - Shibata, Yukihiro ; et al.	2005-06-16
Method and apparatus for inspecting a pattern formed on a substrate Grant 6,900,888 - Yoshida , et al. May 31, 2	2005-05-31
Method and apparatus for inspecting defects of patterns App 20050110988 - Nishiyama, Hidetoshi ; et al.	2005-05-26
Apparatus and method for measuring alignment accuracy, as well as method and system for manufacturing semiconductor device Grant 6,897,956 - Noguchi , et al. May 24, 2	2005-05-24
Defect inspection method and apparatus therefor App 20050083519 - Maeda, Shunji ; et al.	2005-04-21
Method and apparatus for inspecting defects Grant 6,879,392 - Sakai , et al. April 12, 2	2005-04-12
Method and its apparatus for inspecting a pattern App 20050062963 - Yoshida, Minoru ; et al.	2005-03-24
Method and its apparatus for inspecting defects App 20050052642 - Shibata, Yukihiro ; et al.	2005-03-10
Method and equipment for detecting pattern defect App 20050045830 - Shishido, Hiroaki ; et al.	2005-03-03
Inspection method and its apparatus, inspection system App 20050033538 - Okabe, Takafumi ; et al.	2005-02-10
Method for inspecting defects and an apparatus for the same Grant 6,850,320 - Shibata , et al. February 1, 2	2005-02-01
Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data Grant 6,841,403 - Tanaka , et al. January 11, 2	2005-01-11
Pattern defect inspection method and its apparatus App 20040262529 - Yoshida, Minoru ; et al.	2004-12-30
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Ultraviolet laser-generating device and defect inspection apparatus and method therefor App 20040240493 - Uto, Sachio ; et al.	2004-12-02
Pattern inspection method and its apparatus App 20040240723 - Sakai, Kaoru ; et al.	2004-12-02
Method of inspecting defects App 20040228515 - Okabe, Takafumi ; et al.	2004-11-18
Defect inspection method and apparatus therefor Grant 6,819,416 - Maeda , et al. November 16, 2	2004-11-16
Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same Grant 6,806,970 - Hirose , et al. October 19, 2	2004-10-19
Method and equipment for detecting pattern defect Grant 6,800,859 - Shishido , et al. October 5, 2	2004-10-05
Inspection method and its apparatus, inspection system Grant 6,799,130 - Okabe , et al. September 28, 2	2004-09-28
Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data Grant 6,797,526 - Tanaka , et al. September 28, 2	2004-09-28
Method and apparatus for observing and inspecting defects App 20040150821 - Shibata, Yukihiro ; et al.	2004-08-05
Method and apparatus for inspecting defects App 20040145734 - Shibata, Yukihiro ; et al.	2004-07-29
Ultraviolet laser-generating device and defect inspection apparatus and method therefor Grant 6,765,201 - Uto , et al. July 20, 2	2004-07-20
Method and apparatus for inspecting defects Grant 6,762,831 - Shibata , et al. July 13, 2	2004-07-13
Method and apparatus for inspecting a pattern formed on a substrate App 20040124363 - Yoshida, Minoru ; et al.	2004-07-01
Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same Grant 6,753,972 - Hirose , et al. June 22, 2	2004-06-22
Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects of patterns of an object to be inspected App 20040075837 - Maeda, Shunji ; et al.	2004-04-22
Thin film thickness measuring method and apparatus, and mehtod and apparatus for manufacturing a thin film device using the same App 20040070773 - Hirose, Takenori ; et al.	2004-04-15
Method and apparatus for inspecting defects of a specimen Grant 6,721,047 - Shimoda , et al. April 13, 2	2004-04-13
Method and apparatus for observing and inspecting defects Grant 6,690,469 - Shibata , et al. February 10, 2	2004-02-10
Defect inspection method and apparatus therefor Grant 6,674,890 - Maeda , et al. January 6, 2	2004-01-06
Method and apparatus for detecting pattern defects App 20030227617 - Yoshida, Minoru ; et al.	2003-12-11
Apparatus and method for inspecting defects Grant 6,654,112 - Noguchi , et al. November 25, 2	2003-11-25
Method and apparatus for inspecting pattern defects App 20030210391 - Uto, Sachio ; et al.	2003-11-13
Pattern inspection method and its apparatus App 20030179921 - Sakai, Kaoru ; et al.	2003-09-25
Method and apparatus for inspecting defects in a patterned specimen Grant 6,621,571 - Maeda , et al. September 16, 2	2003-09-16
Method and apparatus for inspecting integrated circuit pattern App 20030169060 - Shinada, Hiroyuki ; et al.	2003-09-11
Apparatus and method for measuring alignment accuracy, as well as method and system for manufacturing semiconductor device App 20030160960 - Noguchi, Minori ; et al.	2003-08-28
Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data App 20030138978 - Tanaka, Maki ; et al.	2003-07-24
Visual inspection method and apparatus therefor Grant 6,587,581 - Matsuyama , et al. July 1, 2	2003-07-01
Defect inspection method and apparatus therefor App 20030095251 - Maeda, Shunji ; et al.	2003-05-22
Method and apparatus for inspecting defects App 20030081201 - Shibata, Yukihiro ; et al.	2003-05-01
Defect inspection method and apparatus therefor Grant 6,556,290 - Maeda , et al. April 29, 2	2003-04-29
Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data App 20030054573 - Tanaka, Maki ; et al.	2003-03-20
Method and apparatus for inspecting pattern defects App 20030048439 - Yoshida, Minoru ; et al.	2003-03-13
Inspection method and its apparatus, inspection system App 20030050761 - Okabe, Takafumi ; et al.	2003-03-13
Method and apparatus for picking up 2D image of an object to be sensed App 20030030853 - Makihira, Hiroshi ; et al.	2003-02-13
Method and apparatus for inspecting defects App 20030025904 - Sakai, Kaoru ; et al.	2003-02-06
Defect detection method and its apparatus App 20030021462 - Sakai, Kaoru ; et al.	2003-01-30
Method and apparatus for picking up 2D image of an object to be sensed Grant 6,507,417 - Makihira , et al. January 14, 2	2003-01-14
Apparatus and method for inspecting defects App 20020154297 - Noguchi, Minori ; et al.	2002-10-24
Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects of patterns on an object to be inspected App 20020154303 - Maeda, Shunji ; et al.	2002-10-24
Method and apparatus for processing inspection data Grant 6,456,951 - Maeda , et al. September 24, 2	2002-09-24
Method and system for inspecting electronic circuit pattern App 20020113234 - Okuda, Hirohito ; et al.	2002-08-22
Method and apparatus for detecting defects App 20020089664 - Shibata, Yukihiro ; et al.	2002-07-11
Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects of patterns on an object to be inspected Grant 6,404,498 - Maeda , et al. June 11, 2	2002-06-11
Method of inspecting a pattern on a substrate Grant 6,376,854 - Shishido , et al. April 23, 2	2002-04-23
Method and apparatus for inspecting defects of a specimen App 20020036769 - Shimoda, Atsushi ; et al.	2002-03-28
Defect inspection method and apparatus therefor App 20020030807 - Maeda, Shunji ; et al.	2002-03-14
Method for inspecting defects and an apparatus of the same App 20020027653 - Shibata, Yukihiro ; et al.	2002-03-07
Method and apparatus for inspecting integrated circuit pattern App 20020027440 - Shinada, Hiroyuki ; et al.	2002-03-07
Image alignment method, comparative inspection method, and comparative inspection device for comparative inspections App 20010053245 - Sakai, Kaoru ; et al.	2001-12-20
Method of inspecting pattern and apparatus thereof App 20010030300 - Shishido, Chie ; et al.	2001-10-18
Ultraviolet laser-generating device and defect inspection apparatus and method therefor App 20010025924 - Uto, Sachio ; et al.	2001-10-04
Timing error detection circuit, demodulation circuit and methods thereof App 20010017902 - Yamagata, Taku ; et al.	2001-08-30
Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects of patterns of an object to be inspected Grant 6,263,099 - Maeda , et al. July 17, 2	2001-07-17
Method of inspecting pattern and apparatus thereof with a differential brightness image detection Grant 6,236,057 - Shishido , et al. May 22, 2	2001-05-22
Method and apparatus for inspecting integrated circuit pattern Grant 6,172,363 - Shinada , et al. January 9, 2	2001-01-09
Defect inspection method and apparatus therefor Grant 6,169,282 - Maeda , et al. January 2, 2	2001-01-02
Receiving apparatus for performing digital broadcast channel selection and demodulation Grant 6,128,352 - Maeda October 3, 2	2000-10-03
Automatic focus detection method, automatic focus detection apparatus, and inspection apparatus Grant 6,091,075 - Shibata , et al. July 18, 2	2000-07-18
Method of inspecting pattern and apparatus thereof Grant 6,087,673 - Shishido , et al. July 11, 2	2000-07-11
Manufacturing method of semiconductor substrative and method and apparatus for inspecting defects of patterns on an object to be inspected Grant 5,774,222 - Maeda , et al. June 30, 1	1998-06-30
Pattern checking method and checking apparatus Grant 5,649,022 - Maeda , et al. July 15, 1	1997-07-15
Method and apparatus for pattern detection Grant 5,430,548 - Hiroi , et al. July 4, 1	1995-07-04
Portable automatic blood glucose analyzer Grant D351,469 - Okamoto , et al. October 11, 1	1994-10-11
Method of inspecting thin film transistor liquid crystal substrate and apparatus therefor Grant 5,309,108 - Maeda , et al. May 3, 1	1994-05-03
Chipping detection system and method Grant 5,157,735 - Maeda , et al. October 20, 1	1992-10-20
Method and apparatus for detecting patterns Grant 5,153,444 - Maeda , et al. October 6, 1	1992-10-06
Defect detection system and method for pattern to be inspected utilizing multiple-focus image signals Grant 5,038,048 - Maeda , et al. August 6, 1	1991-08-06
Method of and apparatus for checking geometry of multi-layer patterns for IC structures Grant 4,791,586 - Maeda , et al. December 13, 1	1988-12-13
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