Patent | Date |
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Method for converting hydroxyl group of alcohol Grant 11,407,703 - Shimizu , et al. August 9, 2 | 2022-08-09 |
Method for producing 3-methylcycloalkenone compound Grant 11,377,411 - Maeda July 5, 2 | 2022-07-05 |
Detection apparatus, exposure apparatus, and article manufacturing method Grant 11,333,986 - Ota , et al. May 17, 2 | 2022-05-17 |
Method For Producing 3-methylcycloalkenone Compound App 20220033336 - MAEDA; Hironori | 2022-02-03 |
Position detection apparatus, exposure apparatus, and article manufacturing method Grant 11,231,573 - Fujishima , et al. January 25, 2 | 2022-01-25 |
Measurement apparatus, exposure apparatus, and method of manufacturing article Grant 11,169,452 - Maeda , et al. November 9, 2 | 2021-11-09 |
Detection Apparatus, Exposure Apparatus, And Article Manufacturing Method App 20210286275 - Ota; Kazuki ;   et al. | 2021-09-16 |
Method For Converting Hydroxyl Group Of Alcohol App 20210047254 - SHIMIZU; Hideo ;   et al. | 2021-02-18 |
Position Detection Apparatus, Exposure Apparatus, And Article Manufacturing Method App 20200319447 - Fujishima; Hironobu ;   et al. | 2020-10-08 |
Measurement Apparatus, Exposure Apparatus, And Method Of Manufacturing Article App 20200249589 - Kind Code | 2020-08-06 |
Measurement apparatus, exposure apparatus, and method of manufacturing article Grant 10,656,541 - Maeda | 2020-05-19 |
Measurement Apparatus, Exposure Apparatus, And Method Of Manufacturing Article App 20190346774 - Maeda; Hironori | 2019-11-14 |
Lithography apparatus, and method of manufacturing article Grant 9,939,741 - Maeda April 10, 2 | 2018-04-10 |
Detection apparatus, measurement apparatus, lithography apparatus, and method of manufacturing article Grant 9,869,936 - Maeda January 16, 2 | 2018-01-16 |
Implementing edit and update functionality within a development environment used to compile test plans for automated semiconductor device testing Grant 9,785,542 - Elston , et al. October 10, 2 | 2017-10-10 |
Imprint lithography apparatus and device manufacturing method therefor Grant 9,718,234 - Maeda , et al. August 1, 2 | 2017-08-01 |
Imprint apparatus, imprint method, and device manufacturing method Grant 9,645,514 - Maeda , et al. May 9, 2 | 2017-05-09 |
Position detector, position detection method, exposure apparatus, and method of manufacturing device Grant 9,639,000 - Maeda May 2, 2 | 2017-05-02 |
Imprint apparatus and article manufacturing method Grant 9,535,321 - Maeda January 3, 2 | 2017-01-03 |
Exposure apparatus with detection apparatus for detection of upper and lower surface marks, and device manufacturing method Grant 9,523,927 - Maeda December 20, 2 | 2016-12-20 |
Detection Apparatus, Measurement Apparatus, Lithography Apparatus, And Method Of Manufacturing Article App 20160320710 - Maeda; Hironori | 2016-11-03 |
Detection device, exposure apparatus, and device manufacturing method using same Grant 9,400,436 - Maeda July 26, 2 | 2016-07-26 |
Detection apparatus, exposure apparatus, device fabrication method and filter to reduce a difference between detected intensity values of lights having different wavelength ranges Grant 9,291,921 - Maeda March 22, 2 | 2016-03-22 |
Position detection apparatus, imprint apparatus, and position detection method Grant 9,283,720 - Minoda , et al. March 15, 2 | 2016-03-15 |
Using shared pins in a concurrent test execution environment Grant 9,274,911 - Elston , et al. March 1, 2 | 2016-03-01 |
Imprint Apparatus, Imprint Method, And Device Manufacturing Method App 20160033884 - Maeda; Hironori ;   et al. | 2016-02-04 |
Imprint apparatus, imprint method, and device manufacturing method Grant 9,188,855 - Maeda , et al. November 17, 2 | 2015-11-17 |
Method for manufacturing optically active menthol Grant 9,061,959 - Maeda , et al. June 23, 2 | 2015-06-23 |
Lithography Apparatus, And Method Of Manufacturing Article App 20150158238 - MAEDA; Hironori | 2015-06-11 |
Catalyst for asymmetric hydrogenation and method for manufacturing optically active carbonyl compound using the same Grant 9,000,192 - Yamada , et al. April 7, 2 | 2015-04-07 |
Detector, imprint apparatus, and article manufacturing method Grant 08922786 - | 2014-12-30 |
Detector, imprint apparatus, and article manufacturing method Grant 8,922,786 - Iwai , et al. December 30, 2 | 2014-12-30 |
Position Detection Apparatus, Imprint Apparatus, And Position Detection Method App 20140346694 - Minoda; Ken ;   et al. | 2014-11-27 |
Position Detector, Position Detection Method, Exposure Apparatus, And Method Of Manufacturing Device App 20140320839 - Maeda; Hironori | 2014-10-30 |
Implementing Edit And Update Functionality Within A Development Environment Used To Compile Test Plans For Automated Semiconductor Device Testing App 20140310693 - ELSTON; Mark ;   et al. | 2014-10-16 |
Position detection apparatus, imprint apparatus, and position detection method Grant 8,842,294 - Minoda , et al. September 23, 2 | 2014-09-23 |
Position detector, position detection method, exposure apparatus, and method of manufacturing device to align wafer by adjusting optical member Grant 8,810,772 - Maeda August 19, 2 | 2014-08-19 |
Detection Device, Exposure Apparatus, And Device Manufacturing Method Using Same App 20140111788 - Maeda; Hironori | 2014-04-24 |
Catalyst for asymmetric hydrogenation and method for manufacturing optically active carbonyl compound using the same Grant 8,674,144 - Yamada , et al. March 18, 2 | 2014-03-18 |
Measuring Method, And Exposure Method And Apparatus App 20130321811 - Maeda; Hironori ;   et al. | 2013-12-05 |
Treatment table system Grant 8,550,711 - Maeda , et al. October 8, 2 | 2013-10-08 |
Detection Apparatus, Exposure Apparatus, And Method Of Manufacturing Device App 20130230798 - Maeda; Hironori | 2013-09-05 |
Catalyst For Asymmetric Hydrogenation And Method For Manufacturing Optically Active Carbonyl Compound Using The Same App 20130217895 - Yamada; Shinya ;   et al. | 2013-08-22 |
Imprint Lithography Apparatus And Device Manufacturing Method Therefor App 20130161868 - Maeda; Hironori ;   et al. | 2013-06-27 |
Detector, Imprint Apparatus, And Article Manufacturing Method App 20130100459 - Iwai; Toshiki ;   et al. | 2013-04-25 |
Method of preserving biomaterial Grant 8,394,320 - Sasaguri , et al. March 12, 2 | 2013-03-12 |
Aberration measurement method, exposure apparatus, and device manufacturing method Grant 8,345,220 - Maeda January 1, 2 | 2013-01-01 |
Aberration measurement method, exposure apparatus, and device manufacturing method Grant 8,345,221 - Maeda January 1, 2 | 2013-01-01 |
Position Detection Apparatus, Imprint Apparatus, And Position Detection Method App 20120328725 - Minoda; Ken ;   et al. | 2012-12-27 |
Detection Apparatus, Exposure Apparatus, Device Fabrication Method And Filter App 20120307226 - MAEDA; Hironori | 2012-12-06 |
Imprint Apparatus, Imprint Method, And Device Manufacturing Method App 20120292801 - Maeda; Hironori ;   et al. | 2012-11-22 |
Aberration Measurement Method, Exposure Apparatus, And Device Manufacturing Method App 20120206701 - Maeda; Hironori | 2012-08-16 |
Catalyst for asymmetric hydrogenation Grant 8,217,204 - Maeda , et al. July 10, 2 | 2012-07-10 |
Catalyst For Asymmetric Hydrogenation And Method For Manufacturing Optically Active Carbonyl Compound Using The Same App 20120136176 - YAMADA; Shinya ;   et al. | 2012-05-31 |
Test method and program product used therefor Grant 8,185,339 - Maeda May 22, 2 | 2012-05-22 |
Adjustment method for position detection apparatus, exposure apparatus, and device fabrication method Grant 8,049,891 - Maeda November 1, 2 | 2011-11-01 |
Imprint Apparatus And Article Manufacturing Method App 20110198769 - MAEDA; Hironori | 2011-08-18 |
Treatment Table System App 20110121197 - Maeda; Hironori ;   et al. | 2011-05-26 |
Condensation Reaction By Metal Catalyst App 20110098479 - MASHIMA; KAZUSHI ;   et al. | 2011-04-28 |
Condensation reaction by metal catalyst Grant 7,888,513 - Mashima , et al. February 15, 2 | 2011-02-15 |
Catalyst For Asymmetric Hydrogenation App 20100324338 - MAEDA; Hironori ;   et al. | 2010-12-23 |
Method Of Preserving Biomaterial App 20100209291 - Sasaguri; Shiro ;   et al. | 2010-08-19 |
Test Method And Program Product Used Therefor App 20100131224 - Maeda; Hironori | 2010-05-27 |
Exposure Method, Exposure Apparatus, And Method Of Manufacturing Device App 20090231569 - Maeda; Hironori | 2009-09-17 |
Exposure apparatus and device fabrication method Grant 7,580,116 - Maeda August 25, 2 | 2009-08-25 |
Condensation Reaction by Metal Catalyst App 20090198070 - Mashima; Kazushi ;   et al. | 2009-08-06 |
Position Detector, Position Detection Method, Exposure Apparatus, And Method Of Manufacturing Device App 20090115985 - Maeda; Hironori | 2009-05-07 |
Exposure Apparatus And Device Fabrication Method App 20090015813 - Maeda; Hironori | 2009-01-15 |
Adjustment Method For Position Detection Apparatus, Exposure Apparatus, And Device Fabrication Method App 20090015836 - Maeda; Hironori | 2009-01-15 |
Aberration Measurement Method, Exposure Apparatus, And Device Manufacturing Method App 20080239271 - Maeda; Hironori | 2008-10-02 |
Program development suport device, program execution device, compile method and debug method App 20060074625 - Maeda; Hironori | 2006-04-06 |
Semiconductor test program debugging apparatus Grant 6,725,449 - Maeda , et al. April 20, 2 | 2004-04-20 |