Madrigal; Kevin

Patent Applications and Registrations

Patent applications and USPTO patent grants for Madrigal; Kevin.The latest application filed is for "internally heated porous filter for defect reduction with liquid or solid precursors".

Company Profile

1.8.7

Madrigal; Kevin - Santa Cruz CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Configurable liquid precursor vaporizer Grant 10,107,490 - Smith , et al. October 23, 2	2018-10-23
Internally heated porous filter for defect reduction with liquid or solid precursors Grant 9,863,041 - Smith , et al. January 9, 2	2018-01-09
Dual-plenum showerhead with interleaved plenum sub-volumes Grant 9,728,380 - Mohn , et al. August 8, 2	2017-08-08
System and apparatus for flowable deposition in semiconductor fabrication Grant 9,719,169 - Mohn , et al. August 1, 2	2017-08-01
Internally Heated Porous Filter For Defect Reduction With Liquid Or Solid Precursors App 20160102398 - Smith; Colin F. ; et al.	2016-04-14
Apparatus and method for improving wafer uniformity Grant 9,284,644 - Madrigal , et al. March 15, 2	2016-03-15
Variable Showerhead Flow By Varying Internal Baffle Conductance App 20160020074 - Mohn; Jonathan D. ; et al.	2016-01-21
Configurable Liquid Precursor Vaporizer App 20150377481 - Smith; Colin F. ; et al.	2015-12-31
Variable showerhead flow by varying internal baffle conductance Grant 9,121,097 - Mohn , et al. September 1, 2	2015-09-01
Apparatus And Method For Improving Wafer Uniformity App 20150240361 - Madrigal; Kevin ; et al.	2015-08-27
Variable Showerhead Flow By Varying Internal Baffle Conductance App 20140061324 - Mohn; Jonathan D. ; et al.	2014-03-06
System And Apparatus For Flowable Deposition In Semiconductor Fabrication App 20120161405 - Mohn; Jonathan D. ; et al.	2012-06-28

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