loadpatents
Patent applications and USPTO patent grants for MacNeil; John.The latest application filed is for "apparatus for electrochemically processing semiconductor substrates".
Patent | Date |
---|---|
Apparatus and method for processing a substrate Grant 11,236,433 - Ayres , et al. February 1, 2 | 2022-02-01 |
Apparatus For Electrochemically Processing Semiconductor Substrates App 20210317592 - MACNEIL; JOHN ;   et al. | 2021-10-14 |
Apparatus for electrochemically processing semiconductor substrates Grant 11,066,754 - Macneil , et al. July 20, 2 | 2021-07-20 |
Apparatus and Method for Processing a Substrate App 20200325588 - Ayres; Martin ;   et al. | 2020-10-15 |
Method Of Producing A Structure App 20190382908 - Macneil; John | 2019-12-19 |
Electrochemical deposition chamber Grant 10,385,471 - Macneil A | 2019-08-20 |
Apparatus For Electrochemically Processing Semiconductor Substrates App 20180211856 - MACNEIL; JOHN ;   et al. | 2018-07-26 |
Electrochemical Deposition Chamber App 20180171503 - MACNEIL; John | 2018-06-21 |
Electro chemical deposition apparatus Grant 9,945,043 - Macneil April 17, 2 | 2018-04-17 |
Electrochemical deposition chamber Grant 9,903,039 - MacNeil February 27, 2 | 2018-02-27 |
Ion beam source Grant 8,968,535 - MacNeil , et al. March 3, 2 | 2015-03-03 |
Electrochemical Deposition Chamber App 20140284216 - MACNEIL; John | 2014-09-25 |
Positive displacement pumping chamber Grant 8,728,337 - Brancher , et al. May 20, 2 | 2014-05-20 |
Electro Chemical Deposition Apparatus App 20130313124 - Macneil; John | 2013-11-28 |
Positive Displacement Pumping Chamber App 20130186857 - BRANCHER; CARL DAVID M. ;   et al. | 2013-07-25 |
Gas Delivery Device App 20110268891 - MacNeil; John ;   et al. | 2011-11-03 |
Ion Beam Source App 20110139605 - MACNEIL; John ;   et al. | 2011-06-16 |
Method of forming amorphous TiN by thermal chemical vapor deposition (CVD) Grant 7,732,307 - Burgess , et al. June 8, 2 | 2010-06-08 |
Method Of Manufacturing A Semiconductor Device App 20090104774 - Furukawa; Yukiko ;   et al. | 2009-04-23 |
Positive Displacement Pumping Chamber App 20080245770 - Brancher; Carl David M. ;   et al. | 2008-10-09 |
Method of forming a substantially closed void Grant 7,351,669 - MacNeil April 1, 2 | 2008-04-01 |
Method and apparatus for forming a film on a substrate Grant 7,309,662 - Giles , et al. December 18, 2 | 2007-12-18 |
Methods and apparatus for forming precursors Grant 7,279,201 - Macneil October 9, 2 | 2007-10-09 |
Forming low k dielectric layers Grant 7,205,246 - MacNeil , et al. April 17, 2 | 2007-04-17 |
Amorphus TiN App 20050275101 - Burgess, Stephen Robert ;   et al. | 2005-12-15 |
Dielectric layer for a semiconductor device and method of producing the same Grant 6,846,757 - MacNeil January 25, 2 | 2005-01-25 |
Methods and apparatus for forming precursors App 20040149220 - Macneil, John | 2004-08-05 |
Method of filling a via or recess in a semiconductor substrate App 20040115923 - Macneil, John | 2004-06-17 |
Methods and apparatus for forming a film on a substrate App 20040056356 - MacNeil, John ;   et al. | 2004-03-25 |
Dielectric layer for a semiconductor device and method of producing the same App 20040053459 - MacNeil, John | 2004-03-18 |
Delivery of liquid precursors to semiconductor processing reactors App 20040040505 - MacNeil, John | 2004-03-04 |
Dielectric layer for a semiconductor device and method of producing the same Grant 6,653,247 - MacNeil November 25, 2 | 2003-11-25 |
Delivery of liquid precursors to semiconductor processing reactors Grant 6,640,840 - MacNeil November 4, 2 | 2003-11-04 |
Methods and apparatus for forming a film on a substrate Grant 6,627,535 - MacNeil , et al. September 30, 2 | 2003-09-30 |
Method of filling trenches App 20030157781 - Macneil, John ;   et al. | 2003-08-21 |
Forming low k dielectric layers App 20030124870 - Macneil, John ;   et al. | 2003-07-03 |
Dielectric layer for a semiconductor device and method of producing the same App 20020055275 - MacNeil, John | 2002-05-09 |
Methods and apparatus for forming a film on s substrate App 20010030369 - MacNeil, John ;   et al. | 2001-10-18 |
SEC | 0001253309 | MACNEIL JOHN |
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