Patent | Date |
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Method and device for adjusting a beam property in a gas cluster ion beam system Grant 7,696,495 - Mack , et al. April 13, 2 | 2010-04-13 |
Method And Device For Adjusting A Beam Property In A Gas Cluster Ion Beam System App 20090084977 - Mack; Michael E. ;   et al. | 2009-04-02 |
System for and method of gas cluster ion beam processing Grant 7,377,228 - Mack May 27, 2 | 2008-05-27 |
Ionizer and method for gas-cluster ion-beam formation Grant 7,173,252 - Mack February 6, 2 | 2007-02-06 |
Method and apparatus for improved processing with a gas-cluster ion beam Grant 7,060,989 - Swenson , et al. June 13, 2 | 2006-06-13 |
Method and apparatus for improved beam stability in high current gas-cluster ion beam processing system Grant 7,060,988 - Mack , et al. June 13, 2 | 2006-06-13 |
Ionizer and method for gas-cluster ion-beam formation App 20060097185 - Mack; Michael E. | 2006-05-11 |
Method and apparatus for improved processing with a gas-cluster ion beam App 20050205802 - Swenson, David R. ;   et al. | 2005-09-22 |
Method and apparatus for improved beam stability in high current gas-cluster ion beam processing system App 20050205801 - Mack, Michael E. ;   et al. | 2005-09-22 |
Gas cluster ion beam size diagnostics and workpiece processing Grant 6,831,272 - Mack , et al. December 14, 2 | 2004-12-14 |
System for and method of gas cluster ion beam processing App 20040113093 - Mack, Michael E. | 2004-06-17 |
Charging control and dosimetry system for gas cluster ion beam Grant 6,646,277 - Mack , et al. November 11, 2 | 2003-11-11 |
Charging control and dosimetry system for gas cluster ion beam App 20020130275 - Mack, Michael E. ;   et al. | 2002-09-19 |
Gas cluster ion beam size diagnostics and workpiece processing App 20020070361 - Mack, Michael E. ;   et al. | 2002-06-13 |
Method and apparatus for monitoring charge neutralization operation Grant 5,959,305 - Mack , et al. September 28, 1 | 1999-09-28 |
Zero deflection magnetically-suppressed Faraday for ion implanters Grant 5,757,018 - Mack , et al. May 26, 1 | 1998-05-26 |
Fluid flow control method and apparatus for minimizing particle contamination Grant 5,240,046 - Mack August 31, 1 | 1993-08-31 |
Laser ceilometer signal processing means Grant 4,289,397 - Itzkan , et al. September 15, 1 | 1981-09-15 |
Stabilized repetitively pulsed flashlamps Grant 4,074,208 - Mack , et al. February 14, 1 | 1978-02-14 |
Ultrafast Multiple Flashlamp Grant 3,725,733 - Mack , et al. April 3, 1 | 1973-04-03 |
Superradiant Traveling-wave Dye Laser Grant 3,675,151 - Mack July 4, 1 | 1972-07-04 |
Nonlinear Image Contrast Amplifier System Grant 3,610,732 - Mack , et al. October 5, 1 | 1971-10-05 |