Maciej; Todd K.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Maciej; Todd K..The latest application filed is for "reduced footprint tool for automated processing of microelectronic substrates".
- Maciej; Todd K. - Little Falls MN
- Maciej; Todd K. - Carver MN
| Patent | Date |
|---|---|
| Reduced footprint tool for automated processing of microelectronic substrates Grant 7,134,827 - Larson , et al. November 14, 2 | 2006-11-14 |
| Reduced footprint tool for automated processing of microelectronic substrates Grant 6,979,165 - Larson , et al. December 27, 2 | 2005-12-27 |
| Reduced footprint tool for automated processing of microelectronic substrates App 20050063799 - Larson, Robert E. ; et al. | 2005-03-24 |
| Edge gripping device for handling a set of semiconductor wafers in an immersion processing system Grant 6,845,779 - Herbst , et al. January 25, 2 | 2005-01-25 |
| Semiconductor wafer cleaning systems and methods App 20030098047 - Herbst, Tim W. ; et al. | 2003-05-29 |
| Reduced footprint tool for automated processing of microelectronic substrates App 20030091410 - Larson, Robert E. ; et al. | 2003-05-15 |
| Vacuum compatible water vapor and rinse process module Grant 5,820,692 - Baecker , et al. October 13, 1 | 1998-10-13 |
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