Macht; Lukasz Jerzy

Patent Applications and Registrations

Patent applications and USPTO patent grants for Macht; Lukasz Jerzy.The latest application filed is for "method of determining a value of a parameter of interest of a patterning process, device manufacturing method".

Company Profile

1.15.14

Macht; Lukasz Jerzy - Veldhoven NL
Macht; Lukasz Jerzy - Eindhoven NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method of determining a value of a parameter of interest of a patterning process, device manufacturing method Grant 11,181,828 - Warnaar , et al. November 23, 2	2021-11-23
Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method Grant 11,022,892 - Warnaar , et al. June 1, 2	2021-06-01
Method Of Determining A Value Of A Parameter Of Interest Of A Patterning Process, Device Manufacturing Method App 20200133140 - WARNAAR; Patrick ; et al.	2020-04-30
Method of Measuring a Structure, Inspection Apparatus, Lithographic System and Device Manufacturing Method App 20200064744 - WARNAAR; Patrick ; et al.	2020-02-27
Method of Measuring a Structure, Inspection Apparatus, Lithographic System and Device Manufacturing Method App 20200050114 - Bozkurt; Murat ; et al.	2020-02-13
Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method Grant 10,481,506 - Bozkurt , et al. Nov	2019-11-19
Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method Grant 10,466,594 - Warnaar , et al. No	2019-11-05
Method of Measuring a Structure, Inspection Apparatus, Lithographic System and Device Manufacturing Method App 20180321599 - BOZKURT; Murat ; et al.	2018-11-08
Method of Measuring a Structure, Inspection Apparatus, Lithographic System and Device Manufacturing Method App 20170248852 - WARNAAR; Patrick ; et al.	2017-08-31
Lithographic apparatus Grant 9,696,638 - Van Der Pasch , et al. July 4, 2	2017-07-04
Level sensor, a method for determining a height map of a substrate using a selected resolution, and a lithographic apparatus Grant 9,488,465 - Khuat Duy , et al. November 8, 2	2016-11-08
Lithographic Apparatus App 20160109812 - VAN DER PASCH; Engelbertus Antonius Fransiscus ; et al.	2016-04-21
Lithographic apparatus Grant 9,229,340 - Van Der Pasch , et al. January 5, 2	2016-01-05
Level sensor arrangement for lithographic apparatus and device manufacturing method Grant 8,842,293 - Den Boef , et al. September 23, 2	2014-09-23
Level sensor, lithographic apparatus, and substrate surface positioning method Grant 8,675,210 - Den Boef , et al. March 18, 2	2014-03-18
Lithographic Apparatus App 20140022527 - VAN DER PASCH; Engelbertus Antonius Fransiscus ; et al.	2014-01-23
Lithographic apparatus Grant 8,570,492 - Van Der Pasch , et al. October 29, 2	2013-10-29
Lithographic apparatus and device manufacturing method involving a level sensor having multiple projection units and detection units Grant 8,488,107 - Den Boef , et al. July 16, 2	2013-07-16
Level Sensor, a Method for Determining a Height Map of a Substrate, and a Lithographic Apparatus App 20130128247 - KHUAT DUY; Laurent ; et al.	2013-05-23
Level Sensor, Lithographic Apparatus, And Substrate Surface Positioning Method App 20130077079 - DEN BOEF; Arie Jeffrey ; et al.	2013-03-28
Lithographic Apparatus App 20120242969 - VAN DER PASCH; Engelbertus Antonius Fransiscus ; et al.	2012-09-27
Lithographic Apparatus And Device Manufacturing Method App 20120013879 - Den Boef; Arie Jeffrey ; et al.	2012-01-19
Level Sensor Arrangement For Lithographic Apparatus And Device Manufacturing Method App 20100233600 - DEN BOEF; Arie Jeffrey ; et al.	2010-09-16

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