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Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method Grant 11,022,892 - Warnaar , et al. June 1, 2 | 2021-06-01 |
Method Of Determining A Value Of A Parameter Of Interest Of A Patterning Process, Device Manufacturing Method App 20200133140 - WARNAAR; Patrick ;   et al. | 2020-04-30 |
Method of Measuring a Structure, Inspection Apparatus, Lithographic System and Device Manufacturing Method App 20200064744 - WARNAAR; Patrick ;   et al. | 2020-02-27 |
Method of Measuring a Structure, Inspection Apparatus, Lithographic System and Device Manufacturing Method App 20200050114 - Bozkurt; Murat ;   et al. | 2020-02-13 |
Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method Grant 10,481,506 - Bozkurt , et al. Nov | 2019-11-19 |
Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method Grant 10,466,594 - Warnaar , et al. No | 2019-11-05 |
Method of Measuring a Structure, Inspection Apparatus, Lithographic System and Device Manufacturing Method App 20180321599 - BOZKURT; Murat ;   et al. | 2018-11-08 |
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Lithographic apparatus Grant 9,696,638 - Van Der Pasch , et al. July 4, 2 | 2017-07-04 |
Level sensor, a method for determining a height map of a substrate using a selected resolution, and a lithographic apparatus Grant 9,488,465 - Khuat Duy , et al. November 8, 2 | 2016-11-08 |
Lithographic Apparatus App 20160109812 - VAN DER PASCH; Engelbertus Antonius Fransiscus ;   et al. | 2016-04-21 |
Lithographic apparatus Grant 9,229,340 - Van Der Pasch , et al. January 5, 2 | 2016-01-05 |
Level sensor arrangement for lithographic apparatus and device manufacturing method Grant 8,842,293 - Den Boef , et al. September 23, 2 | 2014-09-23 |
Level sensor, lithographic apparatus, and substrate surface positioning method Grant 8,675,210 - Den Boef , et al. March 18, 2 | 2014-03-18 |
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Lithographic apparatus Grant 8,570,492 - Van Der Pasch , et al. October 29, 2 | 2013-10-29 |
Lithographic apparatus and device manufacturing method involving a level sensor having multiple projection units and detection units Grant 8,488,107 - Den Boef , et al. July 16, 2 | 2013-07-16 |
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Lithographic Apparatus And Device Manufacturing Method App 20120013879 - Den Boef; Arie Jeffrey ;   et al. | 2012-01-19 |
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