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Blanking aperture array device for multi-beams, and fabrication method of blanking aperture array device for multi-beams
Grant 9,530,610 - Chiba , et al. December 27, 2 | 2016-12-27 |
Blanking Aperture Array Device For Multi-beams, And Fabrication Method Of Blanking Aperture Array Device For Multi-beams
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Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method
Grant 8,634,121 - Shimokawa , et al. January 21, 2 | 2014-01-21 |
Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method
Grant 8,582,189 - Shimokawa , et al. November 12, 2 | 2013-11-12 |
Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method
Grant 8,462,410 - Shimokawa , et al. June 11, 2 | 2013-06-11 |
Mirror Device, Mirror Array, Optical Switch, Mirror Device Manufacturing Method, And Mirror Substrate Manufacturing Method
App 20120162736 - UCHIYAMA; Shingo ; et al. | 2012-06-28 |
Mirror Device, Mirror Array, Optical Switch, Mirror Device Manufacturing Method, And Mirror Substrate Manufacturing Method
App 20120162737 - Uchiyama; Shingo ; et al. | 2012-06-28 |
Mirror Device, Mirror Array, Optical Switch, Mirror Device Manufacturing Method, And Mirror Substrate Manufacturing Method
App 20120162735 - Uchiyama; Shingo ; et al. | 2012-06-28 |
Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method
Grant 8,149,489 - Shimokawa , et al. April 3, 2 | 2012-04-03 |
Biometric image collation apparatus and collation method therefor
Grant 7,673,145 - Hatano , et al. March 2, 2 | 2010-03-02 |
Surface shape recognizing sensor device
Grant 7,606,399 - Morimura , et al. October 20, 2 | 2009-10-20 |
Organism recognition system
Grant 7,548,636 - Shimamura , et al. June 16, 2 | 2009-06-16 |
Surface shape recognition sensor device
Grant 7,508,963 - Shimamura , et al. March 24, 2 | 2009-03-24 |
Method of manufacturing a semiconductor device having MEMS
Grant 7,482,196 - Urano , et al. January 27, 2 | 2009-01-27 |
Parallel processing device and parallel processing method
Grant 7,480,785 - Shimamura , et al. January 20, 2 | 2009-01-20 |
Master-slave flip-flop, trigger flip-flop and counter
Grant 7,440,534 - Morimura , et al. October 21, 2 | 2008-10-21 |
Surface shape recognition sensor device
App 20080187192 - Shimamura; Toshishige ; et al. | 2008-08-07 |
Method of fabricating a surface shape recognition sensor
Grant 7,381,663 - Sato , et al. June 3, 2 | 2008-06-03 |
Mirror Device, Mirror Array, Optical Switch, Mirror Device Manufacturing Method, and Mirror Substrate Manufacturing Method
App 20080100899 - Shimokawa; Fusao ; et al. | 2008-05-01 |
Surface shape recognition sensor
Grant 7,366,332 - Shimamura , et al. April 29, 2 | 2008-04-29 |
Method of manufacturing recognition sensor
Grant 7,360,293 - Sato , et al. April 22, 2 | 2008-04-22 |
Surface Shape Recognizing Sensor Device
App 20080056543 - Morimura; Hiroki ; et al. | 2008-03-06 |
Master-Slave Flip-Flop, Trigger Flip-Flop and Counter
App 20080012619 - Morimura; Hiroki ; et al. | 2008-01-17 |
Surface shape recognition sensor and method of fabricating the same
App 20070134837 - Sato; Norio ; et al. | 2007-06-14 |
Semiconductor device having MEMS
Grant 7,208,809 - Urano , et al. April 24, 2 | 2007-04-24 |
Surface shape recognition sensor
Grant 7,205,621 - Sato , et al. April 17, 2 | 2007-04-17 |
Micromachine and manufacturing method
Grant 7,189,625 - Ishii , et al. March 13, 2 | 2007-03-13 |
Image collation method and apparatus and recording medium storing image collation program
App 20070047777 - Adachi; Takuya ; et al. | 2007-03-01 |
Surface shape recognition sensor and method of manufacturing the same
Grant 7,123,026 - Sato , et al. October 17, 2 | 2006-10-17 |
Surface shape recognition sensor device
Grant 7,062,075 - Morimura , et al. June 13, 2 | 2006-06-13 |
Thin film forming apparatus and thin film forming method
App 20060113021 - Ueyama; Tsutomu ; et al. | 2006-06-01 |
Semiconductor device having MEMS
App 20060115920 - Urano; Masami ; et al. | 2006-06-01 |
Method of manufacturing surface shape recognition sensor
Grant 7,045,379 - Tanabe , et al. May 16, 2 | 2006-05-16 |
Image collation method and apparatus and recording medium storing image collation program
Grant 7,031,501 - Adachi , et al. April 18, 2 | 2006-04-18 |
Waveform shaping circuit
Grant 7,019,563 - Morimura , et al. March 28, 2 | 2006-03-28 |
Thin film forming apparatus and thin film forming method
Grant 7,017,637 - Ueyama , et al. March 28, 2 | 2006-03-28 |
Surface shape recoginition sensor and method of producing the same
App 20060057756 - Sato; Norio ; et al. | 2006-03-16 |
Organism recognition system
App 20060034493 - Shimamura; Toshishige ; et al. | 2006-02-16 |
Micromachine and manufacturing method
App 20060027839 - Ishii; Hiromu ; et al. | 2006-02-09 |
Parallel processing device and parallel processing method
App 20050259502 - Shimamura, Toshishige ; et al. | 2005-11-24 |
Surface shape recognition sensor
App 20050259850 - Shimamura, Toshishige ; et al. | 2005-11-24 |
Waveform shaping circuit
App 20050258877 - Morimura, Hiroki ; et al. | 2005-11-24 |
Biological image correlation device and correlation method thereof
App 20050226467 - Hatano, Takahiro ; et al. | 2005-10-13 |
Surface shape recognition sensor and method of manufacturing the same
App 20050214960 - Sato, Norio ; et al. | 2005-09-29 |
Surface shape recognition apparatus and method
Grant 6,917,694 - Machida , et al. July 12, 2 | 2005-07-12 |
Optical switch device
Grant 6,912,336 - Ishii , et al. June 28, 2 | 2005-06-28 |
Surface shape recognition sensor and method of manufacturing the same
Grant 6,844,744 - Ishii , et al. January 18, 2 | 2005-01-18 |
Micromachine manufacturing method
Grant 6,743,653 - Tanabe , et al. June 1, 2 | 2004-06-01 |
Parallel-processing apparatus and method
Grant 6,735,684 - Shigematsu , et al. May 11, 2 | 2004-05-11 |
Surface shape recognition sensor and method of manufacturing the same
Grant 6,727,561 - Sato , et al. April 27, 2 | 2004-04-27 |
Micromachine manufacturing method
App 20040072386 - Tanabe, Yasuyuki ; et al. | 2004-04-15 |
Semiconductor device having MEMS
App 20040063325 - Urano, Masami ; et al. | 2004-04-01 |
Surface shape recognition apparatus
Grant 6,714,666 - Morimura , et al. March 30, 2 | 2004-03-30 |
Fingerprint recognition apparatus and data processing method
Grant 6,671,392 - Shigematsu , et al. December 30, 2 | 2003-12-30 |
Micromachine and manufacturing method therefor
App 20030227035 - Ishii, Hiromu ; et al. | 2003-12-11 |
Method of manufacturing surface shape recognition sensor
App 20030203543 - Tanabe, Yasuyuki ; et al. | 2003-10-30 |
Surface shape recognition sensor and method of manufacturing the same
App 20030173982 - Ishii, Hiromu ; et al. | 2003-09-18 |
Optical switch device
App 20030174934 - Ishii, Hiromu ; et al. | 2003-09-18 |
Surface shape recognition sensor and method of manufacturing the same
App 20030094663 - Sato, Norio ; et al. | 2003-05-22 |
Small shape recognizing capacitive sensor device
Grant 6,556,935 - Morimura , et al. April 29, 2 | 2003-04-29 |
Thin film forming apparatus and thin film forming method
App 20030056725 - Ueyama, Tsutomu ; et al. | 2003-03-27 |
Surface shape recognition sensor device
App 20020181748 - Morimura, Hiroki ; et al. | 2002-12-05 |
Surface shape recognition sensor and method of manufacturing the same
App 20020121909 - Sato, Norio ; et al. | 2002-09-05 |
Small capacitance change detection device
Grant 6,438,257 - Morimura , et al. August 20, 2 | 2002-08-20 |
Surface shape recognition sensor and method of manufacturing the same
App 20020109137 - Sato, Norio ; et al. | 2002-08-15 |
Authentication token and authentication system
App 20020095588 - Shigematsu, Satoshi ; et al. | 2002-07-18 |
Small shape recognizing capacitive sensor device
App 20020017136 - Morimura, Hiroki ; et al. | 2002-02-14 |
Substrate flattening method and film-coated substrate made thereby
Grant 6,340,641 - Muraguchi , et al. January 22, 2 | 2002-01-22 |
Image collation method and apparatus and recording medium storing image collation program
App 20020006233 - Adachi, Takuya ; et al. | 2002-01-17 |
Pattern forming method
App 20010027019 - Ishii, Hiromu ; et al. | 2001-10-04 |
Method of fabricating a surface shape recognition sensor
Grant 6,248,655 - Machida , et al. June 19, 2 | 2001-06-19 |
Surface shape recognition sensor and method of fabricating the same
Grant 6,060,756 - Machida , et al. May 9, 2 | 2000-05-09 |
Capacitor and method of manufacturing the same
Grant 5,674,771 - Machida , et al. October 7, 1 | 1997-10-07 |
Method of fabricating semiconductor device with water protective film
Grant 5,512,513 - Machida , et al. April 30, 1 | 1996-04-30 |
Semiconductor device and method of fabricating the same
Grant 5,376,590 - Machida , et al. December 27, 1 | 1994-12-27 |
Method of connecting wirings through connection hole
Grant 5,320,979 - Hashimoto , et al. June 14, 1 | 1994-06-14 |
Thin film forming apparatus and method
Grant 4,732,761 - Machida , et al. March 22, 1 | 1988-03-22 |
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